DE69906867D1 - Plamaverfahren zur Herstellung von Oberflächenschichten - Google Patents
Plamaverfahren zur Herstellung von OberflächenschichtenInfo
- Publication number
- DE69906867D1 DE69906867D1 DE69906867T DE69906867T DE69906867D1 DE 69906867 D1 DE69906867 D1 DE 69906867D1 DE 69906867 T DE69906867 T DE 69906867T DE 69906867 T DE69906867 T DE 69906867T DE 69906867 D1 DE69906867 D1 DE 69906867D1
- Authority
- DE
- Germany
- Prior art keywords
- plama
- production
- voltage
- surface layers
- amplitude
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE9800387A BE1011927A3 (nl) | 1998-05-20 | 1998-05-20 | Plasmamethode voor de afzetting van deklagen. |
BE9800387 | 1998-05-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69906867D1 true DE69906867D1 (de) | 2003-05-22 |
DE69906867T2 DE69906867T2 (de) | 2004-04-01 |
Family
ID=3891260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69906867T Expired - Lifetime DE69906867T2 (de) | 1998-05-20 | 1999-05-12 | Plamaverfahren zur Herstellung von Oberflächenschichten |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0962550B1 (de) |
AT (1) | ATE237702T1 (de) |
BE (1) | BE1011927A3 (de) |
DE (1) | DE69906867T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010044027A1 (en) * | 1999-12-30 | 2001-11-22 | Anderson Jerrel Charles | Diamond-like carbon coating on glass for added hardness and abrasion resistance |
DE10018143C5 (de) † | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
JP4755262B2 (ja) * | 2009-01-28 | 2011-08-24 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン膜の製造方法 |
GB2476004B (en) * | 2011-02-23 | 2011-12-28 | Portal Medical Ltd | Medicament Dispenser Device |
WO2013083637A1 (en) | 2011-12-05 | 2013-06-13 | Solvay Sa | Use of atmospheric plasma for the surface of inorganic particles and inorganic particles comprising an organic fluorine-containing surface modification |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587207A (en) * | 1994-11-14 | 1996-12-24 | Gorokhovsky; Vladimir I. | Arc assisted CVD coating and sintering method |
DE19513614C1 (de) * | 1995-04-10 | 1996-10-02 | Fraunhofer Ges Forschung | Verfahren zur Abscheidung von Kohlenstoffschichten, Kohlenstoffschichten auf Substraten und deren Verwendung |
-
1998
- 1998-05-20 BE BE9800387A patent/BE1011927A3/nl not_active IP Right Cessation
-
1999
- 1999-05-12 DE DE69906867T patent/DE69906867T2/de not_active Expired - Lifetime
- 1999-05-12 EP EP99870102A patent/EP0962550B1/de not_active Expired - Lifetime
- 1999-05-12 AT AT99870102T patent/ATE237702T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0962550A1 (de) | 1999-12-08 |
BE1011927A3 (nl) | 2000-03-07 |
DE69906867T2 (de) | 2004-04-01 |
ATE237702T1 (de) | 2003-05-15 |
EP0962550B1 (de) | 2003-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition |