DE69842229D1 - Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet - Google Patents
Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendetInfo
- Publication number
- DE69842229D1 DE69842229D1 DE69842229T DE69842229T DE69842229D1 DE 69842229 D1 DE69842229 D1 DE 69842229D1 DE 69842229 T DE69842229 T DE 69842229T DE 69842229 T DE69842229 T DE 69842229T DE 69842229 D1 DE69842229 D1 DE 69842229D1
- Authority
- DE
- Germany
- Prior art keywords
- sputtering
- sputter
- constant current
- power supply
- current circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004544 sputter deposition Methods 0.000 abstract 7
- 239000011261 inert gas Substances 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3444—Associated circuits
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Disintegrating Or Milling (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3624797 | 1997-02-20 | ||
PCT/JP1998/000692 WO1998037256A1 (fr) | 1997-02-20 | 1998-02-19 | Dispositif d'alimentation electrique pour pulverisation cathodique et dispositif de pulverisation l'utilisant |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69842229D1 true DE69842229D1 (de) | 2011-06-01 |
Family
ID=12464456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69842229T Expired - Lifetime DE69842229D1 (de) | 1997-02-20 | 1998-02-19 | Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet |
Country Status (8)
Country | Link |
---|---|
US (1) | US6113760A (de) |
EP (1) | EP0989202B1 (de) |
KR (1) | KR100302000B1 (de) |
CN (1) | CN1223698C (de) |
AT (1) | ATE506463T1 (de) |
DE (1) | DE69842229D1 (de) |
TW (1) | TW389966B (de) |
WO (1) | WO1998037256A1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10015244C2 (de) * | 2000-03-28 | 2002-09-19 | Fraunhofer Ges Forschung | Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen |
JP4272522B2 (ja) * | 2001-09-28 | 2009-06-03 | 芝浦メカトロニクス株式会社 | スパッタリング用電源装置 |
CN101048253B (zh) * | 2004-10-27 | 2010-07-14 | 三菱电机株式会社 | 放电加工用电源装置和小孔放电加工装置 |
US7445695B2 (en) * | 2006-04-28 | 2008-11-04 | Advanced Energy Industries Inc. | Method and system for conditioning a vapor deposition target |
EP2075823B1 (de) * | 2007-12-24 | 2012-02-29 | Huettinger Electronic Sp. z o. o | Stromänderungsbegrenzungsvorrichtung |
JP5500794B2 (ja) * | 2008-06-30 | 2014-05-21 | 株式会社アルバック | 電源装置 |
EP2320711B1 (de) | 2009-11-09 | 2020-09-16 | Toshiba Lighting & Technology Corporation | LED-Lichtvorrichtung und Beleuchtungsvorrichtung |
JP5363281B2 (ja) * | 2009-11-25 | 2013-12-11 | 株式会社アルバック | 電源装置 |
JP5633789B2 (ja) * | 2010-05-14 | 2014-12-03 | 東芝ライテック株式会社 | 直流電源装置およびled照明装置 |
WO2012023276A1 (ja) * | 2010-08-18 | 2012-02-23 | 株式会社アルバック | 直流電源装置 |
JP2012049273A (ja) | 2010-08-26 | 2012-03-08 | Toshiba Lighting & Technology Corp | 直流電源装置およびledランプシステム |
US20130141070A1 (en) * | 2011-12-01 | 2013-06-06 | Intersil Americas LLC | Control system and method for shared inductor regulator |
JP5679241B1 (ja) | 2013-09-27 | 2015-03-04 | 株式会社京三製作所 | 電圧形直流電源装置および電圧形直流電源装置の制御方法 |
DE102014106377A1 (de) * | 2014-05-07 | 2015-11-12 | Von Ardenne Gmbh | Magnetron-Anordnung |
CN105463386B (zh) * | 2014-09-30 | 2018-10-12 | 芝浦机械电子装置株式会社 | 成膜装置及成膜基板制造方法 |
JP6411975B2 (ja) * | 2014-09-30 | 2018-10-24 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜基板製造方法 |
CN114122109A (zh) * | 2021-11-24 | 2022-03-01 | 扬州国宇电子有限公司 | 一种沟槽二极管势垒层制备方法 |
CN114277341B (zh) * | 2021-12-24 | 2023-09-08 | 北京北方华创微电子装备有限公司 | 电源组件、电源控制方法和溅射设备 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4103324A (en) * | 1976-12-22 | 1978-07-25 | Airco, Inc. | Saturable reactor-type power supply |
US4201645A (en) * | 1978-06-26 | 1980-05-06 | Robert J. Ferran | Closed-loop sputtering system and method of operating same |
US4276591A (en) * | 1979-05-29 | 1981-06-30 | The Perkin-Elmer Corporation | Programmable power regulating power supply |
JPS5916970A (ja) * | 1982-07-15 | 1984-01-28 | Citizen Watch Co Ltd | イオンプレ−テイングにおける蒸発材の蒸発量検知及び制御方法 |
JPH02194831A (ja) * | 1989-01-23 | 1990-08-01 | Ishikawajima Harima Heavy Ind Co Ltd | 直流放電用電源 |
JPH05311418A (ja) * | 1992-05-12 | 1993-11-22 | Shibaura Eng Works Co Ltd | アーク放電防止回路 |
JP3191135B2 (ja) * | 1994-02-23 | 2001-07-23 | 日本電子工業株式会社 | 直流グロー放電処理装置におけるアーク遮断方法及び装置 |
US5651865A (en) * | 1994-06-17 | 1997-07-29 | Eni | Preferential sputtering of insulators from conductive targets |
US5584974A (en) * | 1995-10-20 | 1996-12-17 | Eni | Arc control and switching element protection for pulsed dc cathode sputtering power supply |
US5682067A (en) * | 1996-06-21 | 1997-10-28 | Sierra Applied Sciences, Inc. | Circuit for reversing polarity on electrodes |
JP2835322B2 (ja) * | 1997-02-20 | 1998-12-14 | 芝浦メカトロニクス株式会社 | スパッタリング用電源装置および該装置を用いたスパッタリング装置 |
-
1998
- 1998-02-19 EP EP98904390A patent/EP0989202B1/de not_active Expired - Lifetime
- 1998-02-19 AT AT98904390T patent/ATE506463T1/de not_active IP Right Cessation
- 1998-02-19 CN CNB988027186A patent/CN1223698C/zh not_active Expired - Lifetime
- 1998-02-19 WO PCT/JP1998/000692 patent/WO1998037256A1/ja active IP Right Grant
- 1998-02-19 DE DE69842229T patent/DE69842229D1/de not_active Expired - Lifetime
- 1998-02-19 US US09/355,450 patent/US6113760A/en not_active Expired - Lifetime
- 1998-02-20 TW TW087102431A patent/TW389966B/zh not_active IP Right Cessation
-
1999
- 1999-08-17 KR KR1019997007436A patent/KR100302000B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20000071146A (ko) | 2000-11-25 |
TW389966B (en) | 2000-05-11 |
CN1223698C (zh) | 2005-10-19 |
US6113760A (en) | 2000-09-05 |
EP0989202A1 (de) | 2000-03-29 |
EP0989202B1 (de) | 2011-04-20 |
WO1998037256A1 (fr) | 1998-08-27 |
KR100302000B1 (ko) | 2001-09-22 |
EP0989202A4 (de) | 2006-02-15 |
CN1248298A (zh) | 2000-03-22 |
ATE506463T1 (de) | 2011-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69842229D1 (de) | Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet | |
EP1309230A3 (de) | Hochspannungsgerät für eine Entladungslampe | |
FI910575A0 (fi) | Laite ja menetelmä hitsausjakson säätämiseksi | |
MX9709365A (es) | Dispositivo de liberacion por electrotransporte con circuito de elevacion de voltaje. | |
EP1013792A4 (de) | Stromversorgungseinheit für sputtervorrichtung | |
TW360938B (en) | Apparatus and method for actively controlling the DC potential of a cathode pedestal | |
EP2345500A3 (de) | Schweissstromversorgungssystem für einen Kurzschluss-Lichtbogen und Verfahren zur Steuerung des Schweissstromversorgungssystems | |
EP1261121A3 (de) | Energieverteilung mit digitaler Stromsteuerung | |
TW235383B (de) | ||
EP1253596A3 (de) | Spannungregelungsverfahren im Abschaltmodus und Apparat dazu | |
EP0762809A3 (de) | Vorrichtung mit Entladungslampe | |
DE69821182D1 (de) | Leistungsversorgungssteuersystem | |
FR2792781B1 (fr) | Procede et dispositif d'alimentation electrique dans un appareil mobile | |
JPS56104585A (en) | Automatic luminance adjusting device of picture tube | |
ES2107963A1 (es) | Circuito de elevado ahorro de energia de un aparato de pantalla. | |
HK1066051A1 (en) | Firewarks device | |
IL162916A0 (en) | A process for operating a discharge lamp | |
GB2345393A (en) | Method of and apparatus for generating an electrical signal | |
JPS5717381A (en) | Arc welding method | |
EP0993089A3 (de) | Lasersteuerungsgerät, Bilderzeugungsgerät und Kopiergerät | |
JPS5719184A (en) | Pulse arc welding device | |
JPS5719171A (en) | Pulse arc welding device | |
JPS55102907A (en) | Acoustic amplifier | |
JPS5619306A (en) | Controller for electric rolling stock | |
SU1757133A1 (ru) | Источник питани установки тлеющего разр да |