DE69842229D1 - Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet - Google Patents

Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet

Info

Publication number
DE69842229D1
DE69842229D1 DE69842229T DE69842229T DE69842229D1 DE 69842229 D1 DE69842229 D1 DE 69842229D1 DE 69842229 T DE69842229 T DE 69842229T DE 69842229 T DE69842229 T DE 69842229T DE 69842229 D1 DE69842229 D1 DE 69842229D1
Authority
DE
Germany
Prior art keywords
sputtering
sputter
constant current
power supply
current circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69842229T
Other languages
English (en)
Inventor
Noboru Kuriyama
Yutaka Yatsu
Nobuaki Utsunomiya
Yuji Yasumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Application granted granted Critical
Publication of DE69842229D1 publication Critical patent/DE69842229D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Disintegrating Or Milling (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
DE69842229T 1997-02-20 1998-02-19 Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet Expired - Lifetime DE69842229D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3624797 1997-02-20
PCT/JP1998/000692 WO1998037256A1 (fr) 1997-02-20 1998-02-19 Dispositif d'alimentation electrique pour pulverisation cathodique et dispositif de pulverisation l'utilisant

Publications (1)

Publication Number Publication Date
DE69842229D1 true DE69842229D1 (de) 2011-06-01

Family

ID=12464456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69842229T Expired - Lifetime DE69842229D1 (de) 1997-02-20 1998-02-19 Stromversorgungsvorrichtung zum sputtern und sputtervorrichtung, die diese verwendet

Country Status (8)

Country Link
US (1) US6113760A (de)
EP (1) EP0989202B1 (de)
KR (1) KR100302000B1 (de)
CN (1) CN1223698C (de)
AT (1) ATE506463T1 (de)
DE (1) DE69842229D1 (de)
TW (1) TW389966B (de)
WO (1) WO1998037256A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10015244C2 (de) * 2000-03-28 2002-09-19 Fraunhofer Ges Forschung Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen
JP4272522B2 (ja) * 2001-09-28 2009-06-03 芝浦メカトロニクス株式会社 スパッタリング用電源装置
CN101048253B (zh) * 2004-10-27 2010-07-14 三菱电机株式会社 放电加工用电源装置和小孔放电加工装置
US7445695B2 (en) * 2006-04-28 2008-11-04 Advanced Energy Industries Inc. Method and system for conditioning a vapor deposition target
EP2075823B1 (de) * 2007-12-24 2012-02-29 Huettinger Electronic Sp. z o. o Stromänderungsbegrenzungsvorrichtung
JP5500794B2 (ja) * 2008-06-30 2014-05-21 株式会社アルバック 電源装置
EP2320711B1 (de) 2009-11-09 2020-09-16 Toshiba Lighting & Technology Corporation LED-Lichtvorrichtung und Beleuchtungsvorrichtung
JP5363281B2 (ja) * 2009-11-25 2013-12-11 株式会社アルバック 電源装置
JP5633789B2 (ja) * 2010-05-14 2014-12-03 東芝ライテック株式会社 直流電源装置およびｌｅｄ照明装置
WO2012023276A1 (ja) * 2010-08-18 2012-02-23 株式会社アルバック 直流電源装置
JP2012049273A (ja) 2010-08-26 2012-03-08 Toshiba Lighting & Technology Corp 直流電源装置およびｌｅｄランプシステム
US20130141070A1 (en) * 2011-12-01 2013-06-06 Intersil Americas LLC Control system and method for shared inductor regulator
JP5679241B1 (ja) 2013-09-27 2015-03-04 株式会社京三製作所 電圧形直流電源装置および電圧形直流電源装置の制御方法
DE102014106377A1 (de) * 2014-05-07 2015-11-12 Von Ardenne Gmbh Magnetron-Anordnung
CN105463386B (zh) * 2014-09-30 2018-10-12 芝浦机械电子装置株式会社 成膜装置及成膜基板制造方法
JP6411975B2 (ja) * 2014-09-30 2018-10-24 芝浦メカトロニクス株式会社 成膜装置及び成膜基板製造方法
CN114122109A (zh) * 2021-11-24 2022-03-01 扬州国宇电子有限公司 一种沟槽二极管势垒层制备方法
CN114277341B (zh) * 2021-12-24 2023-09-08 北京北方华创微电子装备有限公司 电源组件、电源控制方法和溅射设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4103324A (en) * 1976-12-22 1978-07-25 Airco, Inc. Saturable reactor-type power supply
US4201645A (en) * 1978-06-26 1980-05-06 Robert J. Ferran Closed-loop sputtering system and method of operating same
US4276591A (en) * 1979-05-29 1981-06-30 The Perkin-Elmer Corporation Programmable power regulating power supply
JPS5916970A (ja) * 1982-07-15 1984-01-28 Citizen Watch Co Ltd イオンプレ−テイングにおける蒸発材の蒸発量検知及び制御方法
JPH02194831A (ja) * 1989-01-23 1990-08-01 Ishikawajima Harima Heavy Ind Co Ltd 直流放電用電源
JPH05311418A (ja) * 1992-05-12 1993-11-22 Shibaura Eng Works Co Ltd アーク放電防止回路
JP3191135B2 (ja) * 1994-02-23 2001-07-23 日本電子工業株式会社 直流グロー放電処理装置におけるアーク遮断方法及び装置
US5651865A (en) * 1994-06-17 1997-07-29 Eni Preferential sputtering of insulators from conductive targets
US5584974A (en) * 1995-10-20 1996-12-17 Eni Arc control and switching element protection for pulsed dc cathode sputtering power supply
US5682067A (en) * 1996-06-21 1997-10-28 Sierra Applied Sciences, Inc. Circuit for reversing polarity on electrodes
JP2835322B2 (ja) * 1997-02-20 1998-12-14 芝浦メカトロニクス株式会社 スパッタリング用電源装置および該装置を用いたスパッタリング装置

Also Published As

Publication number Publication date
KR20000071146A (ko) 2000-11-25
TW389966B (en) 2000-05-11
CN1223698C (zh) 2005-10-19
US6113760A (en) 2000-09-05
EP0989202A1 (de) 2000-03-29
EP0989202B1 (de) 2011-04-20
WO1998037256A1 (fr) 1998-08-27
KR100302000B1 (ko) 2001-09-22
EP0989202A4 (de) 2006-02-15
CN1248298A (zh) 2000-03-22
ATE506463T1 (de) 2011-05-15

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