DE69837247D1 - Mikroelektromechanische Komponente, beispielsweise Mikrosensor oder Mikroaktuator, der auf ein Hybridschaltungssubstrat übertragbar ist - Google Patents

Mikroelektromechanische Komponente, beispielsweise Mikrosensor oder Mikroaktuator, der auf ein Hybridschaltungssubstrat übertragbar ist

Info

Publication number
DE69837247D1
DE69837247D1 DE69837247T DE69837247T DE69837247D1 DE 69837247 D1 DE69837247 D1 DE 69837247D1 DE 69837247 T DE69837247 T DE 69837247T DE 69837247 T DE69837247 T DE 69837247T DE 69837247 D1 DE69837247 D1 DE 69837247D1
Authority
DE
Germany
Prior art keywords
micro
chip
coating
microactuator
microsensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69837247T
Other languages
English (en)
Other versions
DE69837247T2 (de
Inventor
Thierry Legay
Dominique Gilet
Campenhout Yves Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sorin CRM SAS
Original Assignee
Ela Medical SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ela Medical SAS filed Critical Ela Medical SAS
Application granted granted Critical
Publication of DE69837247D1 publication Critical patent/DE69837247D1/de
Publication of DE69837247T2 publication Critical patent/DE69837247T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3442Leadless components having edge contacts, e.g. leadless chip capacitors, chip carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0657Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09145Edge details
    • H05K2201/09154Bevelled, chamferred or tapered edge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10727Leadless chip carrier [LCC], e.g. chip-modules for cards
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Pressure Sensors (AREA)
DE69837247T 1997-11-21 1998-11-20 Mikroelektromechanische Komponente, beispielsweise Mikrosensor oder Mikroaktuator, der auf ein Hybridschaltungssubstrat übertragbar ist Expired - Lifetime DE69837247T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9714608 1997-11-21
FR9714608A FR2771551B1 (fr) 1997-11-21 1997-11-21 Composant microelectromecanique, tel que microcapteur ou microactionneur, reportable sur un substrat de circuit hybride

Publications (2)

Publication Number Publication Date
DE69837247D1 true DE69837247D1 (de) 2007-04-19
DE69837247T2 DE69837247T2 (de) 2007-10-31

Family

ID=9513624

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837247T Expired - Lifetime DE69837247T2 (de) 1997-11-21 1998-11-20 Mikroelektromechanische Komponente, beispielsweise Mikrosensor oder Mikroaktuator, der auf ein Hybridschaltungssubstrat übertragbar ist

Country Status (6)

Country Link
US (1) US6236111B1 (de)
EP (1) EP0921566B1 (de)
JP (1) JP4330190B2 (de)
AT (1) ATE356435T1 (de)
DE (1) DE69837247T2 (de)
FR (1) FR2771551B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6558422B1 (en) * 1999-03-26 2003-05-06 University Of Washington Structures having coated indentations
US6501663B1 (en) * 2000-02-28 2002-12-31 Hewlett Packard Company Three-dimensional interconnect system
US7340181B1 (en) * 2002-05-13 2008-03-04 National Semiconductor Corporation Electrical die contact structure and fabrication method
FR2843742B1 (fr) 2002-08-26 2005-10-14 Commissariat Energie Atomique Microstructure a surface fonctionnalisee par depot localise d'une couche mince et procede de fabrication associe
US20080187722A1 (en) * 2007-02-07 2008-08-07 Waldman Jaime I Method for designing a leadless chip carrier
WO2009099438A1 (en) * 2008-02-05 2009-08-13 Morgan Advanced Ceramics, Inc. Encapsulation coating to reduce particle shedding

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622574A (en) * 1985-07-29 1986-11-11 The Perkin-Elmer Corporation Semiconductor chip with recessed bond pads
JPH02103967A (ja) * 1988-10-13 1990-04-17 Mitsubishi Electric Corp 光センサ用パッケージ
JPH04258176A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp 半導体圧力センサ
FR2691836B1 (fr) * 1992-05-27 1997-04-30 Ela Medical Sa Procede de fabrication d'un dispositif a semi-conducteurs comportant au moins une puce et dispositif correspondant.
US5339216A (en) * 1993-03-02 1994-08-16 National Semiconductor Corporation Device and method for reducing thermal cycling in a semiconductor package
IL108359A (en) * 1994-01-17 2001-04-30 Shellcase Ltd Method and device for creating integrated circular devices
US5633785A (en) * 1994-12-30 1997-05-27 University Of Southern California Integrated circuit component package with integral passive component
JP3193852B2 (ja) * 1995-10-18 2001-07-30 株式会社東海理化電機製作所 センサチップ保護用キャップの固定構造
IT1281054B1 (it) * 1995-12-05 1998-02-11 Sorin Biomedica Cardio Spa Dispositivo stimolatore cardiaco con frequenza di stimolazione variabile
US5825091A (en) * 1997-03-25 1998-10-20 Motorola, Inc. Sensor assembly mounted to a leadframe with adhesive deposits at separate locations
US6086705A (en) * 1998-09-14 2000-07-11 Industrial Technology Research Institute Bonding of micro elements

Also Published As

Publication number Publication date
FR2771551A1 (fr) 1999-05-28
DE69837247T2 (de) 2007-10-31
FR2771551B1 (fr) 2000-01-28
EP0921566A1 (de) 1999-06-09
JP4330190B2 (ja) 2009-09-16
JPH11312777A (ja) 1999-11-09
ATE356435T1 (de) 2007-03-15
US6236111B1 (en) 2001-05-22
EP0921566B1 (de) 2007-03-07

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