DE69814815D1 - Membranventil - Google Patents
MembranventilInfo
- Publication number
- DE69814815D1 DE69814815D1 DE69814815T DE69814815T DE69814815D1 DE 69814815 D1 DE69814815 D1 DE 69814815D1 DE 69814815 T DE69814815 T DE 69814815T DE 69814815 T DE69814815 T DE 69814815T DE 69814815 D1 DE69814815 D1 DE 69814815D1
- Authority
- DE
- Germany
- Prior art keywords
- reed valve
- reed
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6198—Non-valving motion of the valve or valve seat
- Y10T137/6253—Rotary motion of a reciprocating valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6851—With casing, support, protector or static constructional installations
- Y10T137/6966—Static constructional installations
- Y10T137/6991—Ground supporting enclosure
- Y10T137/6995—Valve and meter wells
- Y10T137/6999—With means to center well on valve
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Lift Valve (AREA)
- Valve Housings (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US3769897P | 1997-02-03 | 1997-02-03 | |
US37698P | 1997-02-03 | ||
US7299598P | 1998-01-29 | 1998-01-29 | |
US72995P | 1998-01-29 | ||
PCT/US1998/001743 WO1998034056A2 (en) | 1997-02-03 | 1998-01-30 | Diaphragm valve |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69814815D1 true DE69814815D1 (de) | 2003-06-26 |
DE69814815T2 DE69814815T2 (de) | 2004-04-08 |
Family
ID=26714394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1998614815 Expired - Fee Related DE69814815T2 (de) | 1997-02-03 | 1998-01-30 | Membranventil |
Country Status (8)
Country | Link |
---|---|
US (2) | US6092550A (de) |
EP (1) | EP0941435B1 (de) |
JP (2) | JP2002513457A (de) |
KR (1) | KR100514761B1 (de) |
CN (2) | CN1107831C (de) |
DE (1) | DE69814815T2 (de) |
IL (1) | IL130567A (de) |
WO (1) | WO1998034056A2 (de) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2438993C (en) * | 2001-02-20 | 2009-11-03 | Nl Technologies, Ltd. | Circumferential sealing diaphragm valve |
JP4700234B2 (ja) * | 2001-07-31 | 2011-06-15 | 株式会社フジキン | ダイヤフラム弁 |
DE10139815A1 (de) * | 2001-08-14 | 2003-03-13 | Friatec Sed Ventilsysteme Gmbh | Membranventil |
US20050224744A1 (en) * | 2002-02-20 | 2005-10-13 | Nl Technologies, Ltd. | Circumferential sealing diaphragm valve |
ITSV20020032A1 (it) * | 2002-07-09 | 2004-01-09 | Alberto Lodolo | Valvola a membrana ed otturatore per detta valvola |
JP4310532B2 (ja) * | 2002-11-27 | 2009-08-12 | Smc株式会社 | 流量調整弁 |
TW572164U (en) * | 2002-12-06 | 2004-01-11 | Ind Tech Res Inst | Diaphragm valve |
CA2462342C (en) * | 2003-03-28 | 2010-10-12 | Pn Ii, Inc. | Universal rake-ridge cap |
WO2004092622A2 (en) * | 2003-04-14 | 2004-10-28 | Swagelok Company | Diaphragm valve seat |
US6941963B2 (en) * | 2003-06-26 | 2005-09-13 | Planar Systems, Inc. | High-speed diaphragm valve for atomic layer deposition |
US7021330B2 (en) * | 2003-06-26 | 2006-04-04 | Planar Systems, Inc. | Diaphragm valve with reliability enhancements for atomic layer deposition |
US6907897B2 (en) * | 2003-06-26 | 2005-06-21 | Planar Systems, Inc. | Diaphragm valve for high-temperature precursor supply in atomic layer deposition |
KR20060097012A (ko) * | 2003-10-03 | 2006-09-13 | 스와겔로크 컴패니 | 유량 제어 장치의 모니터링용 다이어프램 |
US20050109973A1 (en) * | 2003-11-21 | 2005-05-26 | Glime William H. | Valve diaphragm |
JP2005188672A (ja) * | 2003-12-26 | 2005-07-14 | Neriki:Kk | バルブ装置 |
CN1906436A (zh) * | 2004-01-29 | 2007-01-31 | 旭有机材工业株式会社 | 阀 |
US6997440B2 (en) * | 2004-03-29 | 2006-02-14 | Tescom Corporation | Packless valve apparatus |
TWM276133U (en) * | 2004-12-07 | 2005-09-21 | Metal Ind Res & Dev Ct | Pushing block applied in the valve |
JP2009501878A (ja) * | 2005-07-13 | 2009-01-22 | スウエイジロク・カンパニー | 作動の方法および設備 |
EP1922505A2 (de) * | 2005-08-09 | 2008-05-21 | Swagelok Company | Durchflussvorrichtungen |
ATE423288T1 (de) * | 2005-12-13 | 2009-03-15 | Pergola S R L | Membranventil für komprimiertes oder verflüssigtes gas |
US7686280B2 (en) * | 2005-12-28 | 2010-03-30 | Circor Instrumentation Technologies, Inc. | Removable valve seat member for diaphragm valve |
JP4879285B2 (ja) * | 2006-03-15 | 2012-02-22 | ノルグレン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | 反発性ダイヤフラムを備える弁 |
US7971599B2 (en) * | 2006-06-20 | 2011-07-05 | Ckd Corporation | Air-operated valve |
US8172197B2 (en) * | 2006-07-06 | 2012-05-08 | Mks Instruments, Inc. | Fast-acting pneumatic diaphragm valve |
ATE511067T1 (de) * | 2007-11-13 | 2011-06-15 | Danfoss As | Expansionsventil |
WO2010045946A1 (en) * | 2008-10-21 | 2010-04-29 | Danfoss A/S | A servo valve |
JP5613420B2 (ja) * | 2010-02-05 | 2014-10-22 | 株式会社フジキン | 流体制御器 |
WO2011109502A1 (en) * | 2010-03-04 | 2011-09-09 | Bio-Rad Laboratories, Inc. | Diaphragm valve |
US8960216B2 (en) | 2011-03-21 | 2015-02-24 | Tescom Corporation | Diaphragm control valve having a universal diaphragm mounting location |
JP5779559B2 (ja) * | 2012-08-31 | 2015-09-16 | 株式会社フジキン | ダイヤフラム弁 |
JP6335926B2 (ja) | 2013-02-01 | 2018-05-30 | スウエイジロク・カンパニー | 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁 |
EP2971888A4 (de) * | 2013-03-11 | 2016-12-07 | Pentair Residential Filtration Llc | Mechanischer druckschalter |
CN104062057B (zh) * | 2013-03-20 | 2019-06-11 | 费希尔久安输配设备(成都)有限公司 | 一种膜片紧固装置及包含所述膜片紧固装置的感应装置 |
JP6111862B2 (ja) * | 2013-05-24 | 2017-04-12 | 日立金属株式会社 | 流量制御弁及びそれを用いたマスフローコントローラ |
JP6218470B2 (ja) * | 2013-07-18 | 2017-10-25 | 株式会社フジキン | ダイヤフラム弁 |
JP6232224B2 (ja) * | 2013-07-26 | 2017-11-15 | 株式会社フジキン | ダイヤフラム弁 |
KR102119064B1 (ko) * | 2013-08-26 | 2020-06-05 | 파커-한니핀 코포레이션 | 고 사이클 및 속도 밸브 |
EP3074672A4 (de) | 2013-11-28 | 2017-07-05 | Ham-Let (Israel-Canada) Ltd. | Ventilvorrichtung zur steuerung und regelung eines fluiddurchgangs |
JP6564593B2 (ja) * | 2015-03-25 | 2019-08-21 | 株式会社フジキン | ダイヤフラム弁 |
JP6654020B2 (ja) * | 2015-11-13 | 2020-02-26 | 株式会社フジキン | ダイヤフラムバルブおよびその製造方法 |
US10352470B2 (en) * | 2015-11-17 | 2019-07-16 | Ge Aviation Systems Llc | Control valve and air starting system |
CN105382458B (zh) * | 2015-11-24 | 2017-07-11 | 山西江淮重工有限责任公司 | 膜片与蒸汽球阀阀座组焊工装及其组焊工艺 |
US10584796B2 (en) * | 2016-08-02 | 2020-03-10 | GE AViation systems, ILC | Seal, assembly, and retention method |
KR102341512B1 (ko) * | 2016-08-25 | 2021-12-21 | 가부시키가이샤 깃츠 에스시티 | 다이아프램 밸브와 반도체 제조 장치용 유량 제어 기기 |
CN110730869B (zh) * | 2017-07-04 | 2021-08-06 | 株式会社富士金 | 致动器、阀、流体供给***、以及半导体制造装置 |
US10774938B2 (en) | 2017-11-09 | 2020-09-15 | Swagelok Company | Diaphragm valve with metal seat |
JP7045839B2 (ja) * | 2017-12-08 | 2022-04-01 | 株式会社キッツエスシーティー | 流体制御バルブ |
US20190323625A1 (en) | 2018-04-23 | 2019-10-24 | Rain Bird Corporation | Valve With Reinforcement Ports And Manually Removable Scrubber |
JP2018132194A (ja) * | 2018-05-01 | 2018-08-23 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体制御装置および半導体制御方法 |
US20230078223A1 (en) * | 2021-08-04 | 2023-03-16 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Tensioning assembly for a process valve |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US954172A (en) * | 1908-05-23 | 1910-04-05 | American Gasaccumulator Company | Valve. |
GB199672A (en) * | 1922-12-11 | 1923-06-28 | Robert Arnold Blakeborough | New or improved method of or means for securing seating rings to valves or valve bodies |
US2209956A (en) | 1938-03-04 | 1940-08-06 | Squibb & Sons Inc | Dispensing apparatus |
GB875446A (en) * | 1956-11-12 | 1961-08-23 | Baltzar Carl Von Platen | Improvements in or relating to cocks |
US2959392A (en) * | 1957-11-08 | 1960-11-08 | Platen Baltzar Carl Von | Fluid-tight valve seat |
GB1015412A (en) * | 1962-03-24 | 1965-12-31 | Seetru Ltd | Improvements in and relating to resilient sealing rings for fluid valves |
FR1358512A (fr) * | 1963-03-04 | 1964-04-17 | Electrochimie Soc | Clapet haute pression |
US3430539A (en) * | 1967-11-02 | 1969-03-04 | Scovill Manufacturing Co | Pneumatic tool |
JPS6025956B2 (ja) * | 1980-12-10 | 1985-06-21 | 松下電器産業株式会社 | 超音波送受波器 |
US4421295A (en) * | 1981-08-13 | 1983-12-20 | American Standard, Inc. | Valve diaphragm |
US4606374A (en) | 1983-04-05 | 1986-08-19 | Nupro Company | Valve |
US4684106A (en) * | 1983-04-05 | 1987-08-04 | Nupro Company | Valve |
US4644847A (en) * | 1983-05-16 | 1987-02-24 | Fluitron, Inc. | Reduction of failure incidence of metallic diaphragms for compressors |
CA1276133C (en) * | 1985-03-29 | 1990-11-13 | Ryozo Ariizumi | Pneumatically operated valve |
US4671490A (en) * | 1986-05-16 | 1987-06-09 | Nupro Co. | Diaphragm valve |
US4750709A (en) | 1986-05-16 | 1988-06-14 | Nupro Company | Diaphragm valve |
US4732363A (en) | 1986-05-16 | 1988-03-22 | Nupro Company | Diaphragm valve |
JPS63115970A (ja) * | 1986-10-31 | 1988-05-20 | Motoyama Seisakusho:Kk | ダイヤフラム弁 |
JPS643387A (en) * | 1987-06-24 | 1989-01-09 | Nippon Diavalve | Tandem piston device for valve |
US4776562A (en) * | 1987-07-28 | 1988-10-11 | Stanley G. Flagg & Co. | Dual piston pneumatically operated valve |
US4903939A (en) * | 1988-03-14 | 1990-02-27 | Fujikura Rubber, Ltd. | Pneumatically-operated valve |
US4840347A (en) * | 1988-03-14 | 1989-06-20 | Fujikura Rubber, Ltd. | Pneumatically-operated valve |
JPH0730847B2 (ja) * | 1988-06-13 | 1995-04-10 | 株式会社フジキン | 流体遮断開放器 |
JPH0251671A (ja) * | 1988-08-12 | 1990-02-21 | Motoyama Seisakusho:Kk | メタルダイヤフラム弁 |
US4905575A (en) * | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
JPH0627552B2 (ja) * | 1989-04-11 | 1994-04-13 | 日本弁管工業株式会社 | ダイヤフラム弁 |
US5112027A (en) * | 1989-06-21 | 1992-05-12 | Benkan Corporation | Metal diaphragm valve |
US5007328A (en) * | 1989-07-24 | 1991-04-16 | Otteman John H | Linear actuator |
US4934652A (en) * | 1989-12-11 | 1990-06-19 | Otis Engineering Corporation | Dual stage valve actuator |
US5131627A (en) * | 1990-10-17 | 1992-07-21 | Nupro Company | Diaphragm valve |
JP3006913B2 (ja) * | 1991-05-09 | 2000-02-07 | 清原 まさ子 | 流体制御器 |
JPH086828B2 (ja) * | 1991-08-09 | 1996-01-29 | 株式会社ベンカン | メタルダイヤフラム弁 |
US5295662A (en) * | 1991-08-26 | 1994-03-22 | Masako Kiyohara | Fluid flow-controller with improved diaphragm |
JPH0643429U (ja) * | 1992-11-12 | 1994-06-10 | 株式会社ベンカン | 閉弁ロック機構付ダイヤフラム弁 |
JP3280119B2 (ja) * | 1993-06-02 | 2002-04-30 | 清原 まさ子 | ダイヤフラム弁 |
US5326078A (en) * | 1993-07-08 | 1994-07-05 | Benkan Corporation | Metal diaphragm valve |
US5413311A (en) * | 1994-03-01 | 1995-05-09 | Tescom Corporation | Gas valve |
JP3291152B2 (ja) * | 1995-02-15 | 2002-06-10 | 株式会社フジキン | ダイヤフラム弁 |
US5725007A (en) * | 1995-07-07 | 1998-03-10 | Stubbs; William L. | Valve mechanism and method for making same |
-
1998
- 1998-01-30 US US09/015,751 patent/US6092550A/en not_active Expired - Fee Related
- 1998-01-30 DE DE1998614815 patent/DE69814815T2/de not_active Expired - Fee Related
- 1998-01-30 CN CN98802286A patent/CN1107831C/zh not_active Expired - Fee Related
- 1998-01-30 WO PCT/US1998/001743 patent/WO1998034056A2/en active IP Right Grant
- 1998-01-30 KR KR10-1999-7006851A patent/KR100514761B1/ko not_active IP Right Cessation
- 1998-01-30 JP JP53307098A patent/JP2002513457A/ja not_active Ceased
- 1998-01-30 EP EP98906044A patent/EP0941435B1/de not_active Expired - Lifetime
- 1998-01-30 IL IL13056798A patent/IL130567A/en not_active IP Right Cessation
-
2000
- 2000-02-22 US US09/511,422 patent/US6189861B1/en not_active Expired - Lifetime
-
2002
- 2002-07-10 CN CN02126158A patent/CN1447050A/zh active Pending
-
2008
- 2008-08-12 JP JP2008207885A patent/JP2008304067A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR100514761B1 (ko) | 2005-09-15 |
KR20000070604A (ko) | 2000-11-25 |
CN1246915A (zh) | 2000-03-08 |
CN1447050A (zh) | 2003-10-08 |
CN1107831C (zh) | 2003-05-07 |
JP2002513457A (ja) | 2002-05-08 |
IL130567A (en) | 2002-04-21 |
US6092550A (en) | 2000-07-25 |
EP0941435A2 (de) | 1999-09-15 |
US6189861B1 (en) | 2001-02-20 |
JP2008304067A (ja) | 2008-12-18 |
IL130567A0 (en) | 2000-06-01 |
EP0941435B1 (de) | 2003-05-21 |
WO1998034056A2 (en) | 1998-08-06 |
DE69814815T2 (de) | 2004-04-08 |
WO1998034056A3 (en) | 1998-11-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |