DE69814246D1 - Verfahren zur Erzeugung von Mikrostrukturen - Google Patents

Verfahren zur Erzeugung von Mikrostrukturen

Info

Publication number
DE69814246D1
DE69814246D1 DE69814246T DE69814246T DE69814246D1 DE 69814246 D1 DE69814246 D1 DE 69814246D1 DE 69814246 T DE69814246 T DE 69814246T DE 69814246 T DE69814246 T DE 69814246T DE 69814246 D1 DE69814246 D1 DE 69814246D1
Authority
DE
Germany
Prior art keywords
creating microstructures
microstructures
creating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69814246T
Other languages
English (en)
Other versions
DE69814246T2 (de
Inventor
Stanley Lenthall
Martin Marples
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GKN Sheepbridge Stokes Ltd
Original Assignee
GKN Sheepbridge Stokes Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GKN Sheepbridge Stokes Ltd filed Critical GKN Sheepbridge Stokes Ltd
Application granted granted Critical
Publication of DE69814246D1 publication Critical patent/DE69814246D1/de
Publication of DE69814246T2 publication Critical patent/DE69814246T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Cylinder Crankcases Of Internal Combustion Engines (AREA)
DE69814246T 1997-07-03 1998-06-26 Verfahren zur Erzeugung von Mikrostrukturen Expired - Fee Related DE69814246T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9714043A GB2326952B (en) 1997-07-03 1997-07-03 Method of providing microscopic features
GB9714043 1997-07-03

Publications (2)

Publication Number Publication Date
DE69814246D1 true DE69814246D1 (de) 2003-06-12
DE69814246T2 DE69814246T2 (de) 2004-04-08

Family

ID=10815313

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69814246T Expired - Fee Related DE69814246T2 (de) 1997-07-03 1998-06-26 Verfahren zur Erzeugung von Mikrostrukturen

Country Status (5)

Country Link
US (1) US6309806B1 (de)
EP (1) EP0889366B1 (de)
JP (1) JPH1171687A (de)
DE (1) DE69814246T2 (de)
GB (1) GB2326952B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956425A1 (de) * 1999-11-24 2001-05-31 Mahle Gmbh Kolben für Verbrennungsmotoren
DE10302107A1 (de) * 2003-01-21 2004-07-29 Fuchs Technology Ag Zylinderoberfläche
DE10339606B4 (de) * 2003-08-28 2007-07-19 Joachim Kieselbach Vorrichtung zum Belichten der Innenwand einer Zylinderhülse zur Erzeugung von Rillenstrukturen auf zylindrischen Gleitflächen
US7833389B1 (en) 2005-01-21 2010-11-16 Microcontinuum, Inc. Replication tools and related fabrication methods and apparatus
US7674103B2 (en) 2005-01-21 2010-03-09 Microcontinuum, Inc. Replication tools and related fabrication methods and apparatus
US9307648B2 (en) 2004-01-21 2016-04-05 Microcontinuum, Inc. Roll-to-roll patterning of transparent and metallic layers
GB2410313B (en) * 2004-01-22 2007-08-08 Ford Global Tech Llc An engine and a method of making same
US20150136826A1 (en) * 2012-05-29 2015-05-21 Hilti Aktiengesellschaft Combustion driven fastener setting device
KR101507107B1 (ko) * 2012-07-17 2015-04-01 (주)화백엔지니어링 곡면의 내주면 상에 미세 형상의 오일 포켓을 형성하는 장치 및 방법
US9387567B2 (en) * 2012-09-13 2016-07-12 Electro-Motive Diesel, Inc. Cylinder liner having three-tiered surface finish
US9589797B2 (en) 2013-05-17 2017-03-07 Microcontinuum, Inc. Tools and methods for producing nanoantenna electronic devices
JP2015021185A (ja) * 2013-07-16 2015-02-02 和百エンジニアリング株式会社 曲面状の内周面上に微細形状の凹部を形成する装置及びその方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2968555A (en) 1958-01-13 1961-01-17 Gen Motors Corp Treatment of metal surfaces
US3645178A (en) * 1969-03-27 1972-02-29 Ibm Apparatus for exposing photoresist in cylinders
US3889696A (en) * 1974-04-29 1975-06-17 Allied Chem Etching machine
US4049413A (en) 1976-06-21 1977-09-20 Bell Telephone Laboratories, Incorporated Method for making optical fibers with variations in core diameter
JPS6047846A (ja) * 1983-08-26 1985-03-15 Mazda Motor Corp エンジンのシリンダの製造方法
DE3601319A1 (de) * 1985-01-18 1986-07-24 Mazda Motor Corp., Hiroshima Verfahren zum ausbilden einer abriebfesten gleitflaeche
IL80241A (en) 1986-10-07 1991-03-10 Scitex Corp Ltd Internal drum plotter
NL8802928A (nl) * 1988-11-28 1990-06-18 Stork Screens Bv Werkwijze en inrichting voor het vormen van een weerstandspatroon op een cylindrisch voorwerp alsmede een onder toepassing van een dergelijk weerstandspatroon verkregen geetste metalen cylinder.
JP3239188B2 (ja) * 1992-02-28 2001-12-17 コニカ株式会社 光ビーム走査装置
US5395718A (en) * 1992-11-18 1995-03-07 The Boeing Company Conformal photolithographic method and mask for manufacturing parts with patterned curved surfaces
DE4316012C2 (de) * 1993-05-13 1998-09-24 Gehring Gmbh & Co Maschf Verfahren zur Feinbearbeitung von Werkstück-Oberflächen
JPH0821297A (ja) * 1994-06-30 1996-01-23 Yamaha Motor Co Ltd 内燃機関の摺接部構造
GB9516771D0 (en) * 1995-08-16 1995-10-18 Crosfield Electronics Ltd Output scanner

Also Published As

Publication number Publication date
GB9714043D0 (en) 1997-09-10
GB2326952A (en) 1999-01-06
EP0889366A1 (de) 1999-01-07
DE69814246T2 (de) 2004-04-08
GB2326952B (en) 2002-06-12
US6309806B1 (en) 2001-10-30
JPH1171687A (ja) 1999-03-16
EP0889366B1 (de) 2003-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: HARWARDT NEUMANN MUELLER & PARTNER PATENTANWAELTE, 5

8339 Ceased/non-payment of the annual fee