DE69812434D1 - Pcvd-vorrichtung und verfahren zur herstellung einer optischen faser, eines vorform-stabes und eines mantelrohres und die damit hergestellte optische faser - Google Patents
Pcvd-vorrichtung und verfahren zur herstellung einer optischen faser, eines vorform-stabes und eines mantelrohres und die damit hergestellte optische faserInfo
- Publication number
- DE69812434D1 DE69812434D1 DE69812434T DE69812434T DE69812434D1 DE 69812434 D1 DE69812434 D1 DE 69812434D1 DE 69812434 T DE69812434 T DE 69812434T DE 69812434 T DE69812434 T DE 69812434T DE 69812434 D1 DE69812434 D1 DE 69812434D1
- Authority
- DE
- Germany
- Prior art keywords
- optical fiber
- axis
- producing
- sheath tube
- cylindrical wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97204152 | 1997-12-31 | ||
PCT/EP1998/007798 WO1999035304A1 (en) | 1997-12-31 | 1998-12-02 | Pcvd apparatus and a method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69812434D1 true DE69812434D1 (de) | 2003-04-24 |
DE69812434T2 DE69812434T2 (de) | 2004-01-15 |
Family
ID=8229151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69812434T Expired - Lifetime DE69812434T2 (de) | 1997-12-31 | 1998-12-02 | Pcvd-vorrichtung und verfahren zur herstellung einer optischen faser, eines vorform-stabes und eines mantelrohres und die damit hergestellte optische faser |
Country Status (9)
Country | Link |
---|---|
US (2) | US6260510B1 (de) |
EP (1) | EP1060288B1 (de) |
JP (1) | JP4326146B2 (de) |
CN (1) | CN1117176C (de) |
AT (1) | ATE234947T1 (de) |
AU (1) | AU1563699A (de) |
BR (1) | BR9814578A (de) |
DE (1) | DE69812434T2 (de) |
WO (1) | WO1999035304A1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6715441B2 (en) * | 1997-12-31 | 2004-04-06 | Plasma Optical Fibre B.V. | PCVD apparatus and a method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith |
JP4610126B2 (ja) | 2001-06-14 | 2011-01-12 | 株式会社神戸製鋼所 | プラズマcvd装置 |
NL1019371C2 (nl) * | 2001-11-15 | 2003-05-16 | Draka Fibre Technology Bv | Werkwijze voor het bereiden van zeer zuiver siliciumchloride en/of germaniumchloride. |
AU2002354375A1 (en) | 2001-12-04 | 2003-06-17 | Draka Fibre Technology B.V. | Device for applying an electromagnetic microwave to a plasma container |
NL1020358C2 (nl) * | 2002-04-10 | 2003-10-13 | Draka Fibre Technology Bv | Werkwijze en inrichting ter vervaardiging van optische voorvormen, alsmede de daarmee verkregen optische vezels. |
NL1022140C2 (nl) * | 2002-12-11 | 2004-06-15 | Draka Fibre Technology Bv | Werkwijze voor de depositie van een of meer glaslagen met laag hydroxylgehalte op het inwendige van een substraatbuis. |
NL1024015C2 (nl) * | 2003-07-28 | 2005-02-01 | Draka Fibre Technology Bv | Multimode optische vezel voorzien van een brekingsindexprofiel, optisch communicatiesysteem onder toepassing daarvan en werkwijze ter vervaardiging van een dergelijke vezel. |
NL1024480C2 (nl) * | 2003-10-08 | 2005-04-11 | Draka Fibre Technology Bv | Werkwijze ter vervaardiging van een voorvorm voor optische vezels, alsmede werkwijze ter vervaardiging van optische vezels. |
NL1025155C2 (nl) * | 2003-12-30 | 2005-07-04 | Draka Fibre Technology Bv | Inrichting voor het uitvoeren van PCVD, alsmede werkwijze voor het vervaardigen van een voorvorm. |
CN1333489C (zh) * | 2005-03-23 | 2007-08-22 | 长飞光纤光缆有限公司 | 等离子体谐振腔可调谐波导装置 |
NL1032015C2 (nl) * | 2006-06-16 | 2008-01-08 | Draka Comteq Bv | Inrichting voor het uitvoeren van een plasma chemische dampdepositie (PCVD) en werkwijze ter vervaardiging van een optische vezel. |
NL1032867C2 (nl) | 2006-11-14 | 2008-05-15 | Draka Comteq Bv | Inrichting en een werkwijze voor het uitvoeren van een depositieproces van het type PCVD. |
NL1033783C2 (nl) * | 2007-05-01 | 2008-11-06 | Draka Comteq Bv | Inrichting voor het uitvoeren van een plasma chemische dampdepositie alsmede werkwijze ter vervaardiging van een optische voorvorm. |
CN101182113B (zh) * | 2007-11-20 | 2011-02-09 | 长飞光纤光缆有限公司 | 大直径光纤芯棒的pcvd制作方法 |
NL2004874C2 (nl) | 2010-06-11 | 2011-12-19 | Draka Comteq Bv | Werkwijze voor het vervaardigen van een primaire voorvorm. |
CN102263000B (zh) * | 2011-06-24 | 2013-05-15 | 长飞光纤光缆有限公司 | 一种等离子体微波谐振腔 |
JP5828232B2 (ja) * | 2011-06-29 | 2015-12-02 | 住友電気工業株式会社 | ガラス母材用加熱炉 |
NL2007809C2 (en) * | 2011-11-17 | 2013-05-21 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
NL2007831C2 (en) | 2011-11-21 | 2013-05-23 | Draka Comteq Bv | Apparatus and method for carrying out a pcvd deposition process. |
NL2007968C2 (en) * | 2011-12-14 | 2013-06-17 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
US9002162B2 (en) | 2013-03-15 | 2015-04-07 | Ofs Fitel, Llc | Large core multimode optical fibers |
NL2010724C2 (en) | 2013-04-26 | 2014-10-29 | Draka Comteq Bv | A pcvd method for manufacturing a primary preform for optical fibers. |
NL2011077C2 (en) | 2013-07-01 | 2015-01-05 | Draka Comteq Bv | A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process. |
NL2011075C2 (en) * | 2013-07-01 | 2015-01-05 | Draka Comteq Bv | Pcvd process with removal of substrate tube. |
NL2012857B1 (en) | 2014-05-22 | 2016-03-07 | Draka Comteq Bv | Apparatus and method for carrying out a plasma deposition process. |
NL2014519B1 (en) | 2015-03-25 | 2017-01-25 | Draka Comteq Bv | A rotary feed-through for mounting a rotating substrate tube in a lathe, a CVD lathe and a corresponding method using the CVD lathe. |
NL2017575B1 (en) | 2016-10-04 | 2018-04-13 | Draka Comteq Bv | A method and an apparatus for performing a plasma chemical vapour deposition process and a method |
CN106094065B (zh) * | 2016-06-07 | 2018-07-10 | 长飞光纤光缆股份有限公司 | 一种梯度折射率石英玻璃透镜的制备方法 |
CN111056740B (zh) * | 2020-01-13 | 2023-09-12 | 成都翱翔拓创光电科技合伙企业(有限合伙) | 一种pcvd法制备有源光纤预制棒的装置和方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4292063A (en) * | 1980-05-05 | 1981-09-29 | Northern Telecom Limited | Manufacture of an optical fiber preform with micro-wave plasma activated deposition in a tube |
DE3204846A1 (de) * | 1982-02-11 | 1983-08-18 | Schott Glaswerke, 6500 Mainz | Plasmaverfahren zur innenbeschichtung von glasrohren |
GB8330821D0 (en) * | 1983-11-18 | 1983-12-29 | Gen Electric Co Plc | Manufacture of optical fibre preforms |
DE3632684A1 (de) * | 1986-09-26 | 1988-03-31 | Philips Patentverwaltung | Verfahren und vorrichtung zum innenbeschichten von rohren |
DE4203369C2 (de) * | 1992-02-06 | 1994-08-11 | Ceramoptec Gmbh | Verfahren und Vorrichtung zur Herstellung von Vorformen für Lichtwellenleiter |
US5597624A (en) * | 1995-04-24 | 1997-01-28 | Ceram Optic Industries, Inc. | Method and apparatus for coating dielectrics |
-
1998
- 1998-12-02 EP EP98959903A patent/EP1060288B1/de not_active Expired - Lifetime
- 1998-12-02 AU AU15636/99A patent/AU1563699A/en not_active Abandoned
- 1998-12-02 BR BR9814578-9A patent/BR9814578A/pt not_active IP Right Cessation
- 1998-12-02 DE DE69812434T patent/DE69812434T2/de not_active Expired - Lifetime
- 1998-12-02 AT AT98959903T patent/ATE234947T1/de not_active IP Right Cessation
- 1998-12-02 CN CN98813827A patent/CN1117176C/zh not_active Expired - Lifetime
- 1998-12-02 JP JP2000527684A patent/JP4326146B2/ja not_active Expired - Lifetime
- 1998-12-02 WO PCT/EP1998/007798 patent/WO1999035304A1/en active IP Right Grant
- 1998-12-23 US US09/221,227 patent/US6260510B1/en not_active Expired - Lifetime
-
2001
- 2001-03-14 US US09/813,347 patent/US6372305B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6260510B1 (en) | 2001-07-17 |
JP4326146B2 (ja) | 2009-09-02 |
JP2002500280A (ja) | 2002-01-08 |
EP1060288A1 (de) | 2000-12-20 |
US6372305B2 (en) | 2002-04-16 |
CN1285008A (zh) | 2001-02-21 |
WO1999035304A1 (en) | 1999-07-15 |
DE69812434T2 (de) | 2004-01-15 |
BR9814578A (pt) | 2000-10-10 |
CN1117176C (zh) | 2003-08-06 |
US20020002949A1 (en) | 2002-01-10 |
EP1060288B1 (de) | 2003-03-19 |
ATE234947T1 (de) | 2003-04-15 |
AU1563699A (en) | 1999-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |