DE69739038D1 - Poliervorrichtung mit Verriegelungsfunktion - Google Patents
Poliervorrichtung mit VerriegelungsfunktionInfo
- Publication number
- DE69739038D1 DE69739038D1 DE69739038T DE69739038T DE69739038D1 DE 69739038 D1 DE69739038 D1 DE 69739038D1 DE 69739038 T DE69739038 T DE 69739038T DE 69739038 T DE69739038 T DE 69739038T DE 69739038 D1 DE69739038 D1 DE 69739038D1
- Authority
- DE
- Germany
- Prior art keywords
- polishing device
- locking function
- locking
- function
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
- G05B19/4063—Monitoring general control system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37434—Measuring vibration of machine or workpiece or tool
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45199—Polish
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50113—Short stroke, retract tool, safe distance from workpiece surface, hover height
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50205—On tool breakage stop machine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50276—Detect wear or defect tool, breakage and change tool
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16114696 | 1996-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69739038D1 true DE69739038D1 (de) | 2008-11-20 |
Family
ID=15729474
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69715726T Expired - Lifetime DE69715726T2 (de) | 1996-05-30 | 1997-05-28 | Poliervorrichtung mit Verriegelungsfunktion |
DE69739038T Expired - Lifetime DE69739038D1 (de) | 1996-05-30 | 1997-05-28 | Poliervorrichtung mit Verriegelungsfunktion |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69715726T Expired - Lifetime DE69715726T2 (de) | 1996-05-30 | 1997-05-28 | Poliervorrichtung mit Verriegelungsfunktion |
Country Status (4)
Country | Link |
---|---|
US (1) | US5904608A (de) |
EP (3) | EP0810064B1 (de) |
KR (1) | KR100429299B1 (de) |
DE (2) | DE69715726T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3705670B2 (ja) | 1997-02-19 | 2005-10-12 | 株式会社荏原製作所 | ポリッシング装置及び方法 |
JP3761673B2 (ja) | 1997-06-17 | 2006-03-29 | 株式会社荏原製作所 | ポリッシング装置 |
US6191038B1 (en) * | 1997-09-02 | 2001-02-20 | Matsushita Electronics Corporation | Apparatus and method for chemical/mechanical polishing |
JP3292835B2 (ja) * | 1998-05-06 | 2002-06-17 | 信越半導体株式会社 | 薄板ワークの平面研削方法およびその研削装置 |
JP2956694B1 (ja) * | 1998-05-19 | 1999-10-04 | 日本電気株式会社 | 研磨装置及び研磨方法 |
US6000998A (en) * | 1998-05-29 | 1999-12-14 | Seh America, Inc. | System for calibrating wafer edge-grinder |
JP2000015549A (ja) * | 1998-06-30 | 2000-01-18 | Nidek Co Ltd | 眼鏡レンズ加工装置 |
US6783428B1 (en) * | 1999-01-18 | 2004-08-31 | Nsk Ltd. | Method for forming grooves on workpiece and for dressing a grindstone used in the groove formation |
US6361410B1 (en) * | 1999-01-18 | 2002-03-26 | Nsk Ltd. | Grinding apparatus for forming grooves on a workpiece and a method for dressing a grindstone used in the apparatus |
US6306008B1 (en) * | 1999-08-31 | 2001-10-23 | Micron Technology, Inc. | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
US6257953B1 (en) * | 2000-09-25 | 2001-07-10 | Center For Tribology, Inc. | Method and apparatus for controlled polishing |
US6896583B2 (en) | 2001-02-06 | 2005-05-24 | Agere Systems, Inc. | Method and apparatus for conditioning a polishing pad |
US7101799B2 (en) * | 2001-06-19 | 2006-09-05 | Applied Materials, Inc. | Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
JP4102081B2 (ja) * | 2002-02-28 | 2008-06-18 | 株式会社荏原製作所 | 研磨装置及び研磨面の異物検出方法 |
US6931330B1 (en) * | 2003-06-30 | 2005-08-16 | Lam Research Corporation | Methods for monitoring and controlling chemical mechanical planarization |
DE10345381B4 (de) * | 2003-09-30 | 2013-04-11 | Advanced Micro Devices, Inc. | Verfahren und System zum Steuern des chemisch-mechanischen Polierens unter Anwendung eines Sensorsignals eines Kissenkonditionierers |
DE10361636B4 (de) * | 2003-12-30 | 2009-12-10 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern des chemisch-mechanischen Polierens mittels eines seismischen Signals eines seismischen Sensors |
US20060019417A1 (en) * | 2004-07-26 | 2006-01-26 | Atsushi Shigeta | Substrate processing method and substrate processing apparatus |
US20060025046A1 (en) * | 2004-07-28 | 2006-02-02 | 3M Innovative Properties Company | Abrasive article splicing system and methods |
US20060025048A1 (en) * | 2004-07-28 | 2006-02-02 | 3M Innovative Properties Company | Abrasive article detection system and method |
US7090560B2 (en) * | 2004-07-28 | 2006-08-15 | 3M Innovative Properties Company | System and method for detecting abrasive article orientation |
US20060025047A1 (en) * | 2004-07-28 | 2006-02-02 | 3M Innovative Properties Company | Grading system and method for abrasive article |
KR100541821B1 (ko) * | 2004-09-09 | 2006-01-11 | 삼성전자주식회사 | 폴리싱장치의 패드컨디셔너 오동작 감지장치 및 그 방법 |
US7040954B1 (en) | 2004-09-28 | 2006-05-09 | Lam Research Corporation | Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing |
JP2007152499A (ja) * | 2005-12-06 | 2007-06-21 | Fujikoshi Mach Corp | ワーク研磨方法 |
JP5191312B2 (ja) * | 2008-08-25 | 2013-05-08 | 東京エレクトロン株式会社 | プローブの研磨方法、プローブ研磨用プログラム及びプローブ装置 |
JP5454513B2 (ja) * | 2011-05-27 | 2014-03-26 | 信越半導体株式会社 | 研磨ヘッドの高さ方向の位置の調整方法及びワークの研磨方法 |
US9421668B2 (en) * | 2012-06-07 | 2016-08-23 | Ehwa Diamond Industrial Co., Ltd. | CMP apparatus |
US9902038B2 (en) | 2015-02-05 | 2018-02-27 | Toshiba Memory Corporation | Polishing apparatus, polishing method, and semiconductor manufacturing method |
US11565365B2 (en) * | 2017-11-13 | 2023-01-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method for monitoring chemical mechanical polishing |
JP7098311B2 (ja) * | 2017-12-05 | 2022-07-11 | 株式会社荏原製作所 | 研磨装置、及び研磨方法 |
CN108803500A (zh) * | 2018-06-08 | 2018-11-13 | 大连理工大学 | 一种环抛机的多电机运动控制***及其控制方法 |
US20200230781A1 (en) * | 2019-01-23 | 2020-07-23 | Applied Materials, Inc. | Polishing pads formed using an additive manufacturing process and methods related thereto |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3829750A (en) * | 1971-02-12 | 1974-08-13 | Bendix Corp | Self-adaptive process control |
US3813828A (en) * | 1973-01-05 | 1974-06-04 | Westinghouse Electric Corp | Method for controlling finished thickness of planetary-lapped parts |
US4193226A (en) * | 1977-09-21 | 1980-03-18 | Kayex Corporation | Polishing apparatus |
JPS63212465A (ja) * | 1987-02-25 | 1988-09-05 | Hoya Corp | 研摩方法 |
US5234867A (en) * | 1992-05-27 | 1993-08-10 | Micron Technology, Inc. | Method for planarizing semiconductor wafers with a non-circular polishing pad |
US5070655A (en) * | 1990-11-30 | 1991-12-10 | Aggarwal Trilok R | Machining process monitor |
US5069002A (en) * | 1991-04-17 | 1991-12-03 | Micron Technology, Inc. | Apparatus for endpoint detection during mechanical planarization of semiconductor wafers |
US5308438A (en) * | 1992-01-30 | 1994-05-03 | International Business Machines Corporation | Endpoint detection apparatus and method for chemical/mechanical polishing |
US5222329A (en) * | 1992-03-26 | 1993-06-29 | Micron Technology, Inc. | Acoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materials |
JPH05277929A (ja) * | 1992-04-01 | 1993-10-26 | Mitsubishi Materials Corp | ポリッシング装置の上軸機構 |
KR940022734A (ko) * | 1993-03-15 | 1994-10-21 | 사또 후미오 | 연마 방법 및 연마 장치 |
JP3120921B2 (ja) * | 1993-03-24 | 2000-12-25 | 株式会社村田製作所 | ラップ盤の異常検出装置 |
JP3285663B2 (ja) * | 1993-05-11 | 2002-05-27 | ファナック株式会社 | 工具破損検出装置 |
JP3119054B2 (ja) * | 1993-10-20 | 2000-12-18 | 株式会社村田製作所 | 浮遊砥粒式研磨装置 |
JPH07112365A (ja) * | 1993-10-20 | 1995-05-02 | Murata Mfg Co Ltd | 浮遊砥粒式研磨装置 |
US5653623A (en) * | 1993-12-14 | 1997-08-05 | Ebara Corporation | Polishing apparatus with improved exhaust |
US5456627A (en) * | 1993-12-20 | 1995-10-10 | Westech Systems, Inc. | Conditioner for a polishing pad and method therefor |
US5486131A (en) * | 1994-01-04 | 1996-01-23 | Speedfam Corporation | Device for conditioning polishing pads |
US5664987A (en) * | 1994-01-31 | 1997-09-09 | National Semiconductor Corporation | Methods and apparatus for control of polishing pad conditioning for wafer planarization |
US5439551A (en) * | 1994-03-02 | 1995-08-08 | Micron Technology, Inc. | Chemical-mechanical polishing techniques and methods of end point detection in chemical-mechanical polishing processes |
-
1997
- 1997-05-28 EP EP97108597A patent/EP0810064B1/de not_active Expired - Lifetime
- 1997-05-28 DE DE69715726T patent/DE69715726T2/de not_active Expired - Lifetime
- 1997-05-28 EP EP20020004882 patent/EP1213094A3/de not_active Withdrawn
- 1997-05-28 EP EP06013931A patent/EP1704962B1/de not_active Expired - Lifetime
- 1997-05-28 DE DE69739038T patent/DE69739038D1/de not_active Expired - Lifetime
- 1997-05-29 KR KR1019970021476A patent/KR100429299B1/ko active IP Right Grant
- 1997-05-30 US US08/865,993 patent/US5904608A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR970077291A (ko) | 1997-12-12 |
DE69715726D1 (de) | 2002-10-31 |
EP1704962A2 (de) | 2006-09-27 |
KR100429299B1 (ko) | 2004-08-09 |
EP0810064B1 (de) | 2002-09-25 |
DE69715726T2 (de) | 2003-08-14 |
EP1704962A3 (de) | 2007-08-01 |
EP0810064A3 (de) | 1998-12-23 |
EP1704962B1 (de) | 2008-10-08 |
EP1213094A2 (de) | 2002-06-12 |
EP1213094A9 (de) | 2002-08-07 |
US5904608A (en) | 1999-05-18 |
EP1213094A3 (de) | 2003-01-08 |
EP0810064A2 (de) | 1997-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |