DE69733124D1 - Vorrichtung und verfahren zur messung der flächenkontur - Google Patents

Vorrichtung und verfahren zur messung der flächenkontur

Info

Publication number
DE69733124D1
DE69733124D1 DE69733124T DE69733124T DE69733124D1 DE 69733124 D1 DE69733124 D1 DE 69733124D1 DE 69733124 T DE69733124 T DE 69733124T DE 69733124 T DE69733124 T DE 69733124T DE 69733124 D1 DE69733124 D1 DE 69733124D1
Authority
DE
Germany
Prior art keywords
measuring surface
surface contour
contour
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69733124T
Other languages
English (en)
Other versions
DE69733124T2 (de
Inventor
G Shirley
S Mermelstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Application granted granted Critical
Publication of DE69733124D1 publication Critical patent/DE69733124D1/de
Publication of DE69733124T2 publication Critical patent/DE69733124T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
DE69733124T 1996-02-12 1997-02-03 Vorrichtung und verfahren zur messung der flächenkontur Expired - Lifetime DE69733124T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/600,216 US5870191A (en) 1996-02-12 1996-02-12 Apparatus and methods for surface contour measurement
US600216 1996-02-12
PCT/US1997/001744 WO1997029341A1 (en) 1996-02-12 1997-02-03 Apparatus and methods for surface contour measurement

Publications (2)

Publication Number Publication Date
DE69733124D1 true DE69733124D1 (de) 2005-06-02
DE69733124T2 DE69733124T2 (de) 2006-03-02

Family

ID=24402754

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69738493T Expired - Lifetime DE69738493T2 (de) 1996-02-12 1997-02-03 Vorrichtung und Verfahren zum Oberflächenkonturmessen
DE69733124T Expired - Lifetime DE69733124T2 (de) 1996-02-12 1997-02-03 Vorrichtung und verfahren zur messung der flächenkontur

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69738493T Expired - Lifetime DE69738493T2 (de) 1996-02-12 1997-02-03 Vorrichtung und Verfahren zum Oberflächenkonturmessen

Country Status (4)

Country Link
US (1) US5870191A (de)
EP (2) EP1571414B1 (de)
DE (2) DE69738493T2 (de)
WO (1) WO1997029341A1 (de)

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DE19509282A1 (de) 1995-03-15 1996-11-14 Brose Fahrzeugteile Fahrzeugtür
US6229619B1 (en) 1996-02-12 2001-05-08 Massachusetts Institute Of Technology Compensation for measurement uncertainty due to atmospheric effects
US6690474B1 (en) 1996-02-12 2004-02-10 Massachusetts Institute Of Technology Apparatus and methods for surface contour measurement
US6031612A (en) * 1996-02-12 2000-02-29 Massachusetts Institute Of Technology Apparatus and methods for contour measurement using movable sources
DE19727226A1 (de) * 1997-04-10 1998-10-22 Fraunhofer Ges Forschung Meßanordnung und Verfahren zum berührungslosen Erfassen der 3-dimensionalen Raumform einer Brillenfassungsnut
US6016196A (en) * 1997-06-17 2000-01-18 Massachusetts Institute Of Technology Multiple beam pair optical imaging
US6188483B1 (en) * 1997-12-03 2001-02-13 Dr. Ettemeyer Gmbh & Co. Method and apparatus for determining deformation and elongation on curved bodies
US6400468B1 (en) * 1998-03-31 2002-06-04 International Business Machines Corporation Smoothing calibration files to improve reproduction of digitized images
US6528797B1 (en) 1999-04-16 2003-03-04 The Regents Of The University Of Michigan Method and system for determining depth distribution of radiation-emitting material located in a source medium and radiation detector system for use therein
US6304330B1 (en) 1999-10-06 2001-10-16 Metrolaser, Inc. Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
JP2003519786A (ja) * 2000-01-10 2003-06-24 マサチューセッツ インスティテュート オブ テクノロジー 表面輪郭測定のための装置および方法
US6819435B2 (en) * 2000-04-12 2004-11-16 Nano Or Technologies Inc. Spatial and spectral wavefront analysis and measurement
US6806474B2 (en) * 2000-04-14 2004-10-19 The Regents Of The University Of Michigan Method and system for detecting ionizing radiation
US6483595B1 (en) * 2000-07-22 2002-11-19 Basis Software, Inc. Three dimensional optical scanner
WO2002086420A1 (en) * 2001-04-19 2002-10-31 Dimensional Photonics, Inc. Calibration apparatus, system and method
US6937350B2 (en) * 2001-06-29 2005-08-30 Massachusetts Institute Of Technology Apparatus and methods for optically monitoring thickness
WO2003062743A1 (en) * 2002-01-24 2003-07-31 Nano-Or Technologies (Israel) Ltd. Improved spatial wavefront analysis and 3d measurement
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
US7184149B2 (en) * 2003-06-18 2007-02-27 Dimensional Photonics International, Inc. Methods and apparatus for reducing error in interferometric imaging measurements
WO2006015262A2 (en) * 2004-07-29 2006-02-09 Coherix, Inc. Method for processing multiwavelength interferometric imaging data
EP1875163B1 (de) * 2005-04-06 2014-06-11 Dimensional Photonics International, Inc. Mehrkanaliges system zur interferometrischen messung von oberflächenkonturen
WO2007025363A1 (en) * 2005-09-02 2007-03-08 Neptec Apparatus and method for tracking an object
CA2620941A1 (en) * 2005-09-02 2007-03-08 Neptec Imaging system and method
WO2009120643A2 (en) * 2008-03-22 2009-10-01 Lyle Shirley Dimensional probe and methods of use
US8265375B2 (en) * 2006-06-16 2012-09-11 Shirley Lyle G Method and apparatus for remote sensing of objects utilizing radiation speckle
US8218852B2 (en) * 2007-05-08 2012-07-10 Spirit Aerosystems, Inc. System and method for repairing composite parts
WO2009058656A1 (en) 2007-11-01 2009-05-07 Dimensional Photonics International, Inc. Intra-oral three-dimensional imaging system
US9186059B2 (en) * 2007-12-21 2015-11-17 Bausch & Lomb Incorporated Ophthalmic instrument alignment apparatus and method of using same
WO2010077900A1 (en) 2008-12-16 2010-07-08 Faro Technologies, Inc. Structured light imaging system and method
US8294971B2 (en) * 2008-12-18 2012-10-23 Bausch • Lomb Incorporated Apparatus comprising an optical path delay scanner
CN102326049B (zh) 2009-02-23 2014-10-22 立体光子国际有限公司 用于干涉测量***的高速相移的设备和方法
US8922780B2 (en) * 2009-05-14 2014-12-30 Andover Photonics, Inc. Shape measurement using microchip based fringe projection
CA2805443C (en) 2010-07-24 2016-05-17 Focused Innovation, Inc. Method and apparatus for imaging
US9157733B2 (en) 2010-09-10 2015-10-13 Dimensional Photonics International, Inc. Method of data acquisition for three-dimensional imaging
US9436868B2 (en) 2010-09-10 2016-09-06 Dimensional Photonics International, Inc. Object classification for measured three-dimensional object scenes
US20120062557A1 (en) 2010-09-10 2012-03-15 Dimensional Photonics International, Inc. Systems and methods for processing and displaying intra-oral measurement data
WO2012151173A1 (en) * 2011-05-02 2012-11-08 Faro Technologies, Inc. Three-dimensional scanner for hand-held phones
DE112012002943T5 (de) 2011-07-13 2014-04-30 Faro Technologies Inc. Vorrichtung und Verfahren unter Verwendung eines räumlichen Lichtmodulators zum Ermitteln von 3D-Koordinaten eines Objekts
CN103649678A (zh) 2011-07-14 2014-03-19 法罗技术股份有限公司 具有相位和间距调节的基于光栅的扫描仪
US9286530B2 (en) 2012-07-17 2016-03-15 Cognex Corporation Handheld apparatus for quantifying component features
US9234740B1 (en) * 2012-08-23 2016-01-12 The Boeing Company Shearographic inspection system using a laser matrix
US8905757B2 (en) 2012-12-03 2014-12-09 E. Kats Enterprises Ltd. Method and apparatus for measuring a location and orientation of a plurality of implants
US10078049B2 (en) * 2016-05-18 2018-09-18 The Boeing Company Apparatus, system, and method for non-destructive testing of an object using a laser beam directed out of a plurality of apertures
US20180080754A1 (en) * 2016-09-20 2018-03-22 Sie-Poon Chang Interferometer for measuring qualities of large size objects
CN113686241B (zh) * 2021-08-06 2022-06-14 大连理工大学 一种高温表面线激光几何测量误差分析方法

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DE2554086A1 (de) * 1975-12-02 1977-06-16 Ibm Deutschland Verfahren zur analyse und/oder zur ortsbestimmung von kanten
US4139304A (en) * 1977-02-10 1979-02-13 National Research Development Corporation Methods and apparatus for measuring variations in distance to a surface
JPS58173412A (ja) * 1982-04-05 1983-10-12 Toshiba Corp 王冠等の検出装置
US4577967A (en) * 1983-05-20 1986-03-25 Citizen Watch Co., Ltd. Surface shape measurement apparatus
JPH071164B2 (ja) * 1985-02-28 1995-01-11 ソニー株式会社 三次元形状の認識装置
DE3516538A1 (de) * 1985-05-08 1986-11-13 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und vorrichtung zur optischen spannungsmessung
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US5455670A (en) * 1993-05-27 1995-10-03 Associated Universities, Inc. Optical electronic distance measuring apparatus with movable mirror

Also Published As

Publication number Publication date
DE69733124T2 (de) 2006-03-02
WO1997029341A1 (en) 1997-08-14
EP1571414A3 (de) 2007-04-04
US5870191A (en) 1999-02-09
EP1571414A2 (de) 2005-09-07
EP0880676B1 (de) 2005-04-27
EP1571414B1 (de) 2008-01-23
DE69738493D1 (de) 2008-03-13
DE69738493T2 (de) 2009-03-05
EP0880676A1 (de) 1998-12-02

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