DE69715554T2 - Optische Einrichtung für Verschiebungsdetektion - Google Patents

Optische Einrichtung für Verschiebungsdetektion

Info

Publication number
DE69715554T2
DE69715554T2 DE69715554T DE69715554T DE69715554T2 DE 69715554 T2 DE69715554 T2 DE 69715554T2 DE 69715554 T DE69715554 T DE 69715554T DE 69715554 T DE69715554 T DE 69715554T DE 69715554 T2 DE69715554 T2 DE 69715554T2
Authority
DE
Germany
Prior art keywords
optical device
displacement detection
displacement
detection
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69715554T
Other languages
English (en)
Other versions
DE69715554D1 (de
Inventor
Toshihiro Omi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17692882&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69715554(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE69715554D1 publication Critical patent/DE69715554D1/de
Application granted granted Critical
Publication of DE69715554T2 publication Critical patent/DE69715554T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69715554T 1996-10-28 1997-10-28 Optische Einrichtung für Verschiebungsdetektion Revoked DE69715554T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8285541A JPH10132612A (ja) 1996-10-28 1996-10-28 光学式変位検出装置

Publications (2)

Publication Number Publication Date
DE69715554D1 DE69715554D1 (de) 2002-10-24
DE69715554T2 true DE69715554T2 (de) 2003-05-15

Family

ID=17692882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69715554T Revoked DE69715554T2 (de) 1996-10-28 1997-10-28 Optische Einrichtung für Verschiebungsdetektion

Country Status (5)

Country Link
US (1) US5841133A (de)
EP (1) EP0838665B1 (de)
JP (1) JPH10132612A (de)
CN (1) CN1116586C (de)
DE (1) DE69715554T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012022001A3 (de) * 2010-08-19 2012-07-05 Elesta Relays Gmbh Positionsmessvorrichtung und verfahren zur ermittlung einer absoluten position

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6166723A (en) * 1995-11-17 2000-12-26 Immersion Corporation Mouse interface device providing force feedback
US6374255B1 (en) 1996-05-21 2002-04-16 Immersion Corporation Haptic authoring
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
US6256011B1 (en) 1997-12-03 2001-07-03 Immersion Corporation Multi-function control device with force feedback
US6704683B1 (en) 1998-04-28 2004-03-09 Immersion Corporation Direct velocity estimation for encoders using nonlinear period measurement
AU3767999A (en) * 1998-04-30 1999-11-16 Immersion Corporation Encoder with improved sensing resolution
DE19855828A1 (de) 1998-12-03 2000-06-08 Heidenhain Gmbh Dr Johannes Dreidimensionales Meßmodul
US6175109B1 (en) * 1998-12-16 2001-01-16 Renco Encoders, Inc. Encoder for providing incremental and absolute position data
DE19921309A1 (de) * 1999-05-07 2000-11-09 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmeßeinrichtung
WO2000068646A1 (fr) * 1999-05-10 2000-11-16 Citizen Watch Co., Ltd. Dispositif de mesure de dimensions
US6564168B1 (en) 1999-09-14 2003-05-13 Immersion Corporation High-resolution optical encoder with phased-array photodetectors
US6279248B1 (en) 1999-09-22 2001-08-28 Central Purchasing, Inc. Digital measuring system having a multi-row encoder disk
CH706182B1 (de) * 1999-11-18 2013-09-13 Baumer Innotec Ag Winkel- oder Weg-Messvorrichtung.
US6693626B1 (en) 1999-12-07 2004-02-17 Immersion Corporation Haptic feedback using a keyboard device
DE69900267T2 (de) * 1999-12-15 2002-06-27 Tesa Brown & Sharpe Sa Positionsgeber
JP2001201308A (ja) * 2000-01-21 2001-07-27 Mitsutoyo Corp 静電容量式変位検出装置及びその製造方法
DE10029380A1 (de) * 2000-06-20 2002-01-03 Pwb Ruhlatec Ind Prod Gmbh Taktlineal oder Taktscheibe
JP2002228491A (ja) * 2001-02-05 2002-08-14 Mitsutoyo Corp 光学式エンコーダ用発光光源装置
JP4250894B2 (ja) * 2001-12-28 2009-04-08 富士ゼロックス株式会社 光学式エンコーダ及びエンコーダ用スケール
JP2003227735A (ja) * 2002-01-31 2003-08-15 Olympus Optical Co Ltd 光学式エンコーダーおよびそのセンサーヘッド
JP3743426B2 (ja) 2002-02-13 2006-02-08 オムロン株式会社 光学式エンコーダ
US6904823B2 (en) 2002-04-03 2005-06-14 Immersion Corporation Haptic shifting devices
DE10320991B4 (de) * 2002-08-03 2017-10-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE10244234A1 (de) * 2002-09-23 2004-03-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB2410995B (en) 2002-10-15 2007-05-09 Immersion Corp Products and processes for providing force sensations in a user interface
JP4350419B2 (ja) * 2003-05-16 2009-10-21 株式会社ミツトヨ 光電式エンコーダ
GB2418475B (en) 2003-06-09 2007-10-24 Immersion Corp Interactive gaming systems with haptic feedback
JP4416544B2 (ja) * 2004-03-12 2010-02-17 株式会社ミツトヨ 光学式変位測定装置
US7466416B2 (en) * 2004-04-30 2008-12-16 X-Rite, Inc. Color measurement system
JP4365292B2 (ja) * 2004-09-02 2009-11-18 株式会社カイジョー ワイヤボンディングにおけるボール圧着厚の測定方法
CN100375890C (zh) * 2005-09-09 2008-03-19 清华大学 含有可调零的gmr芯片的磁位移传感器
WO2008033493A2 (en) 2006-09-13 2008-03-20 Immersion Corporation Systems and methods for casino gaming haptics
JP5161238B2 (ja) 2007-01-11 2013-03-13 スリーエム イノベイティブ プロパティズ カンパニー ウェブ長手方向位置センサ
BRPI0811666A2 (pt) 2007-06-19 2015-02-10 3M Innovative Properties Co "sistemas e métodos para fabricação de escalas de deslocamento"
JP2010532466A (ja) 2007-06-19 2010-10-07 スリーエム イノベイティブ プロパティズ カンパニー ウェブの位置を表示するためのシステム及び方法
US9486292B2 (en) 2008-02-14 2016-11-08 Immersion Corporation Systems and methods for real-time winding analysis for knot detection
US7875844B2 (en) * 2008-09-02 2011-01-25 Delta Electronics, Inc. Absolute-type encoder and method for detecting absolute position
CN102317882B (zh) 2008-12-29 2015-04-22 3M创新有限公司 使用幅材基准的锁相的幅材位置信号
US8992104B2 (en) 2008-12-30 2015-03-31 3M Innovative Properties Company Apparatus and method for making fiducials on a substrate
US9104791B2 (en) 2009-05-28 2015-08-11 Immersion Corporation Systems and methods for editing a model of a physical system for a simulation
US8841766B2 (en) 2009-07-30 2014-09-23 Taiwan Semiconductor Manufacturing Company, Ltd. Cu pillar bump with non-metal sidewall protection structure
US9018758B2 (en) 2010-06-02 2015-04-28 Taiwan Semiconductor Manufacturing Company, Ltd. Cu pillar bump with non-metal sidewall spacer and metal top cap
CN102840841A (zh) * 2011-06-25 2012-12-26 四川大学 光栅位置调节装置
CN102706373B (zh) * 2012-05-24 2015-01-21 广东工业大学 一种单轨绝对光栅尺及其图像编码方法
CN103063239B (zh) * 2012-12-28 2016-03-23 广东工业大学 一种绝对光栅尺测试平台及其测试方法
US9866924B2 (en) 2013-03-14 2018-01-09 Immersion Corporation Systems and methods for enhanced television interaction
JP5853115B1 (ja) * 2015-05-25 2016-02-09 株式会社Ｎｔｔファシリティーズ 変位計、位置検出方法及びプログラム
US10451704B2 (en) * 2016-02-02 2019-10-22 Kenneth Perlin Tracking apparatus using light through rotating transmissive diffraction patterns, and method
JP6690998B2 (ja) * 2016-05-27 2020-04-28 株式会社ミツトヨ 発光ユニット、発光受光ユニットおよび光電式エンコーダ
JP2018066639A (ja) 2016-10-19 2018-04-26 株式会社ミツトヨ 光源装置およびこれを備えた光電式エンコーダ
US10648839B2 (en) 2017-05-22 2020-05-12 Mitutoyo Corporation Photoelectric encoder

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1405362A (en) * 1973-03-19 1975-09-10 Zeiss Jena Veb Carl Device for positioning slides
JPS60171418A (ja) * 1984-02-17 1985-09-04 Matsushita Electric Ind Co Ltd エンコ−ダ
DE3444878A1 (de) * 1984-12-08 1986-06-12 Bodenseewerk Gerätetechnik GmbH, 7770 Überlingen Abtastkopf fuer schrittgeber, insbesondere winkelschrittgeber
JPH01136021A (ja) * 1987-11-20 1989-05-29 Mitsutoyo Corp 光学式変位検出器
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
DE59209882D1 (de) * 1992-04-08 2001-01-18 Heidenhain Gmbh Dr Johannes Optoelektronisches Weg-, Winkel- oder Rotationsmessgerät
DE9305151U1 (de) * 1993-04-03 1993-06-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Längen- oder Winkelmeßeinrichtung
BE1007513A3 (nl) * 1993-09-13 1995-07-18 Philips Electronics Nv Meetinrichting voor het bepalen van de verplaatsing van een beweegbaar voorwerp.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012022001A3 (de) * 2010-08-19 2012-07-05 Elesta Relays Gmbh Positionsmessvorrichtung und verfahren zur ermittlung einer absoluten position
US8902434B2 (en) 2010-08-19 2014-12-02 Elesta Relays Gmbh Position measuring device and method for determining an absolute position
US8982361B2 (en) 2010-08-19 2015-03-17 Elesta Relays Gmbh Position measuring device

Also Published As

Publication number Publication date
JPH10132612A (ja) 1998-05-22
CN1183546A (zh) 1998-06-03
DE69715554D1 (de) 2002-10-24
EP0838665B1 (de) 2002-09-18
US5841133A (en) 1998-11-24
CN1116586C (zh) 2003-07-30
EP0838665A1 (de) 1998-04-29

Similar Documents

Publication Publication Date Title
DE69715554D1 (de) Optische Einrichtung für Verschiebungsdetektion
DE59805839D1 (de) Optische detektoreinrichtung
DE69719117T2 (de) Optische Vorrichtung
DE69528921D1 (de) Optische Sensoranordnung
DE69729584D1 (de) Multifokale optische kompositlinse
DE69607458D1 (de) Optische Speichervorrichtung
DE69724757D1 (de) Optische Polarisationsvorrichtung
DE19882819T1 (de) Optische Empfangsvorrichtung
DE69839961D1 (de) Optische querverbindungsvorrichtung
DE69625727D1 (de) Optische Abstandsmessung
DE69834602D1 (de) Optische Spurdetektionsvorrichtung
DE69738906D1 (de) Optische vorrichtung
DE69722339D1 (de) Optische Vorrichtung
DE69628899D1 (de) Gerät für optische Platte
DE69728708D1 (de) Optische Vorrichtung
DE69713740T2 (de) Optische vorrichtung
NL1010322A1 (nl) Optische uitleesinrichting.
DE69934144D1 (de) Optische messvorrichtung
DE69617613D1 (de) Gerät für optische Platte
DE69833672D1 (de) Optische abtastvorrichtung
DE69737540D1 (de) Vorrichtung für optische Platte
DE69731254D1 (de) Optische Wellenleitervorrichtung
DE19882818T1 (de) Optische Empfangsvorrichtung
DE69830990D1 (de) Optische vorrichtung
DE19781041T1 (de) Optische Vorrichtung

Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation