DE69714915D1 - Verfahren zur Messung der Dicke und Brechungsindices der Schichtbauteile einer laminierten Struktur und Messgerät zu dessen Durchführung - Google Patents

Verfahren zur Messung der Dicke und Brechungsindices der Schichtbauteile einer laminierten Struktur und Messgerät zu dessen Durchführung

Info

Publication number
DE69714915D1
DE69714915D1 DE69714915T DE69714915T DE69714915D1 DE 69714915 D1 DE69714915 D1 DE 69714915D1 DE 69714915 T DE69714915 T DE 69714915T DE 69714915 T DE69714915 T DE 69714915T DE 69714915 D1 DE69714915 D1 DE 69714915D1
Authority
DE
Germany
Prior art keywords
measuring
carrying
thickness
refractive index
laminated structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69714915T
Other languages
English (en)
Other versions
DE69714915T2 (de
Inventor
Yamaguchi Ichirou
Fukano Takashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Application granted granted Critical
Publication of DE69714915D1 publication Critical patent/DE69714915D1/de
Publication of DE69714915T2 publication Critical patent/DE69714915T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69714915T 1996-06-17 1997-06-16 Verfahren zur Messung der Dicke und Brechungsindices der Schichtbauteile einer laminierten Struktur und Messgerät zu dessen Durchführung Expired - Fee Related DE69714915T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15582896A JP3459327B2 (ja) 1996-06-17 1996-06-17 積層構造体の層厚および屈折率の測定方法およびその測定装置

Publications (2)

Publication Number Publication Date
DE69714915D1 true DE69714915D1 (de) 2002-10-02
DE69714915T2 DE69714915T2 (de) 2003-04-24

Family

ID=15614389

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714915T Expired - Fee Related DE69714915T2 (de) 1996-06-17 1997-06-16 Verfahren zur Messung der Dicke und Brechungsindices der Schichtbauteile einer laminierten Struktur und Messgerät zu dessen Durchführung

Country Status (4)

Country Link
US (1) US5943134A (de)
EP (1) EP0814318B1 (de)
JP (1) JP3459327B2 (de)
DE (1) DE69714915T2 (de)

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JP5042791B2 (ja) * 2007-11-30 2012-10-03 オリンパス株式会社 膜厚測定装置
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JP5274862B2 (ja) * 2008-03-10 2013-08-28 東京エレクトロン株式会社 温度測定装置及び温度測定方法
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JP5397817B2 (ja) 2010-02-05 2014-01-22 国立大学法人名古屋大学 干渉測定装置および測定方法
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JP5500354B2 (ja) * 2010-03-30 2014-05-21 株式会社ニコン 膜構造測定方法及び表面形状測定装置
JP4912504B1 (ja) * 2010-09-16 2012-04-11 キヤノン株式会社 屈折率の計測方法および計測装置
CN102147240B (zh) * 2010-12-24 2012-08-22 北京理工大学 差动共焦干涉元件多参数测量方法与装置
KR20120081419A (ko) * 2011-01-11 2012-07-19 삼성전기주식회사 다층 박막 특성 측정 장치 및 방법
CN102175426B (zh) * 2011-02-15 2013-05-22 北京理工大学 共焦干涉定焦及曲率半径测量方法
US8687204B2 (en) * 2011-03-24 2014-04-01 Canon Kabushiki Kaisha Method and apparatus for measuring refractive index based on a ratio between a number of second fringes divided by a difference of the number of second fringes minus a number of first fringes
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TWI583916B (zh) * 2015-10-08 2017-05-21 財團法人工業技術研究院 雷射共焦量測方法及應用此方法之雷射共焦量測裝置
JP6796780B2 (ja) * 2016-09-21 2020-12-09 株式会社東京精密 白色干渉装置及び白色干渉装置の計測方法
CN106546178B (zh) * 2016-10-27 2018-12-28 华中科技大学 共焦白光偏振干涉的多层透明介质厚度测量装置和方法
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CN112762820A (zh) * 2020-12-11 2021-05-07 深圳市菲森科技有限公司 一种共聚焦三维测量***的标定装置及标定方法
CN113175887B (zh) * 2021-05-17 2023-03-24 苏州中科行智智能科技有限公司 一种测量薄膜厚度与折射率的装置及方法
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Also Published As

Publication number Publication date
EP0814318A2 (de) 1997-12-29
EP0814318A3 (de) 1999-11-10
JPH102855A (ja) 1998-01-06
EP0814318B1 (de) 2002-08-28
JP3459327B2 (ja) 2003-10-20
DE69714915T2 (de) 2003-04-24
US5943134A (en) 1999-08-24

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