DE69710290D1 - Material für der Herstellung von dünner Schichten und dünne Schichten Herstellungsprozess - Google Patents

Material für der Herstellung von dünner Schichten und dünne Schichten Herstellungsprozess

Info

Publication number
DE69710290D1
DE69710290D1 DE69710290T DE69710290T DE69710290D1 DE 69710290 D1 DE69710290 D1 DE 69710290D1 DE 69710290 T DE69710290 T DE 69710290T DE 69710290 T DE69710290 T DE 69710290T DE 69710290 D1 DE69710290 D1 DE 69710290D1
Authority
DE
Germany
Prior art keywords
thin layers
production
manufacturing process
thin
layers manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710290T
Other languages
English (en)
Other versions
DE69710290T2 (de
Inventor
Yoshikazu Miyazawa
Tomonori Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69710290D1 publication Critical patent/DE69710290D1/de
Publication of DE69710290T2 publication Critical patent/DE69710290T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
DE69710290T 1996-11-14 1997-11-11 Material für der Herstellung von dünner Schichten und dünne Schichten Herstellungsprozess Expired - Lifetime DE69710290T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30257596 1996-11-14

Publications (2)

Publication Number Publication Date
DE69710290D1 true DE69710290D1 (de) 2002-03-21
DE69710290T2 DE69710290T2 (de) 2002-08-14

Family

ID=17910636

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710290T Expired - Lifetime DE69710290T2 (de) 1996-11-14 1997-11-11 Material für der Herstellung von dünner Schichten und dünne Schichten Herstellungsprozess

Country Status (6)

Country Link
US (1) US6119626A (de)
EP (1) EP0842711B1 (de)
KR (1) KR100297474B1 (de)
DE (1) DE69710290T2 (de)
HK (1) HK1010850A1 (de)
TW (1) TW499492B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19825100A1 (de) * 1998-06-05 1999-12-16 Merck Patent Gmbh Mittel zur Herstellung von wasserabweisenden Beschichtungen auf optischen Substraten
US6833159B1 (en) 2000-05-02 2004-12-21 Vision-Ease Lens, Inc. Method for applying hydrophobic anti-reflection coatings to lenses and lens blanks
US6929822B2 (en) 2001-04-27 2005-08-16 Hoya Corporation Method for manufacturing optical member having water-repellent thin film
EP1288331A1 (de) * 2001-09-03 2003-03-05 Hoya Corporation Tiegel zur Abscheidung aus der Gasphase mit Öffnungen an beiden Seiten
US6881445B1 (en) 2001-10-29 2005-04-19 Innovation Chemical Technologies, Ltd. Forming thin films on substrates using a porous carrier
US6991826B2 (en) * 2004-04-20 2006-01-31 3M Innovative Properties Company Antisoiling coatings for antireflective substrates
US20060099342A1 (en) * 2004-10-28 2006-05-11 Denton Vacuum Deposition of coatings
DE202005008165U1 (de) * 2005-05-20 2005-10-06 Leybold Optics Gmbh Vorrichtung zum beidseitigen Beschichten von Substraten
DE502005004666D1 (de) * 2005-10-28 2008-08-21 Novaled Ag Abscheiden einer Schicht aus dotiertem organischen Material auf einem Substrat
US8286561B2 (en) 2008-06-27 2012-10-16 Ssw Holding Company, Inc. Spill containing refrigerator shelf assembly
US11786036B2 (en) 2008-06-27 2023-10-17 Ssw Advanced Technologies, Llc Spill containing refrigerator shelf assembly
US9315415B2 (en) * 2008-09-05 2016-04-19 Shincron Co., Ltd. Method for depositing film and oil-repellent substrate
JP4688230B2 (ja) * 2008-10-09 2011-05-25 株式会社シンクロン 成膜方法
AU2009302806B9 (en) 2008-10-07 2015-10-01 Ross Technology Corporation Highly durable superhydrophobic, oleophobic and anti-icing coatings and methods and compositions for their preparation
US9074778B2 (en) 2009-11-04 2015-07-07 Ssw Holding Company, Inc. Cooking appliance surfaces having spill containment pattern
MX2012010669A (es) 2010-03-15 2013-02-07 Ross Technology Corp Destacadores y metodos para producir supreficies hidrofobas.
BR112013021231A2 (pt) 2011-02-21 2019-09-24 Ross Tech Corporation revestimentos super-hidrofóbicos e oleofóbicos com sistemas ligantes de baixo voc
TWI415961B (zh) * 2011-04-21 2013-11-21 Creating Nano Technologies Inc 抗汙薄膜之常壓蒸鍍方法
DE102011085428A1 (de) 2011-10-28 2013-05-02 Schott Ag Einlegeboden
US9957609B2 (en) 2011-11-30 2018-05-01 Corning Incorporated Process for making of glass articles with optical and easy-to-clean coatings
US10077207B2 (en) 2011-11-30 2018-09-18 Corning Incorporated Optical coating method, apparatus and product
JP6157496B2 (ja) 2011-11-30 2017-07-05 コーニング インコーポレイテッド 光学コーティング方法、機器、および製品
EP2791255B1 (de) 2011-12-15 2017-11-01 Ross Technology Corporation Zusammensetzung und beschichtung für superhydrophobe leistung
MX2015000119A (es) 2012-06-25 2015-04-14 Ross Technology Corp Recubrimientos elastoméricos con propiedades hidrofóbicas y/u oleofóbicas.
MX2016010539A (es) 2014-02-12 2016-11-30 Vision Ease Lp Recubrimiento de facil limpieza.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669256A (en) * 1979-10-31 1981-06-10 Toray Silicone Co Manufacture of gypsum hardened body
JPS6040254A (ja) * 1983-08-16 1985-03-02 旭硝子株式会社 撥水撥油性多層膜
JPS61130902A (ja) * 1984-11-30 1986-06-18 Asahi Glass Co Ltd 汚れのとれやすい反射防止膜付プラスチツクレンズ
JPS63200832A (ja) * 1987-02-16 1988-08-19 Sumitomo Electric Ind Ltd 有機薄膜形成方法及び装置
JPH07119842B2 (ja) * 1987-05-28 1995-12-20 セイコーエプソン株式会社 無機コート膜を有する光学物品及びその製造方法
US4975122A (en) * 1989-08-10 1990-12-04 Siltech Inc. Water resistant cemetitious materials
US5204314A (en) * 1990-07-06 1993-04-20 Advanced Technology Materials, Inc. Method for delivering an involatile reagent in vapor form to a CVD reactor
JP2858440B2 (ja) * 1990-07-09 1999-02-17 株式会社東京製品開発研究所 真空中で気化し得る有機系被膜形成物質を含浸固化させた多孔性セラミックス材料およびそれを用いた有機物質系蒸着被膜の形成方法
DE4119562A1 (de) * 1991-06-13 1992-12-17 Wacker Chemie Gmbh Verfahren zur wasserabweisenden impraegnierung von mauerwerk
JP3728462B2 (ja) * 1993-03-29 2005-12-21 キャノンオプトロン株式会社 表面処理方法及びそれに用いられる蒸着材料
US5685903A (en) * 1994-06-03 1997-11-11 National Gypsum Company Cementitious gypsum-containing compositions and materials made therefrom
DE19514639A1 (de) * 1995-04-20 1996-10-24 Wacker Chemie Gmbh Verfahren zur wasserabweisenden Imprägnierung von Gips
GB9605706D0 (en) * 1996-03-19 1996-05-22 Dow Corning Method for hydrophobing gypsum

Also Published As

Publication number Publication date
DE69710290T2 (de) 2002-08-14
EP0842711B1 (de) 2002-02-06
US6119626A (en) 2000-09-19
KR19980042381A (ko) 1998-08-17
KR100297474B1 (ko) 2001-09-03
HK1010850A1 (en) 1999-07-02
TW499492B (en) 2002-08-21
EP0842711A1 (de) 1998-05-20

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