DE69620093T2 - Photoempfindliche Harzzusammensetzung und damit laminierter photoempfindlicher Harzfilm - Google Patents

Photoempfindliche Harzzusammensetzung und damit laminierter photoempfindlicher Harzfilm

Info

Publication number
DE69620093T2
DE69620093T2 DE1996620093 DE69620093T DE69620093T2 DE 69620093 T2 DE69620093 T2 DE 69620093T2 DE 1996620093 DE1996620093 DE 1996620093 DE 69620093 T DE69620093 T DE 69620093T DE 69620093 T2 DE69620093 T2 DE 69620093T2
Authority
DE
Germany
Prior art keywords
photosensitive resin
laminated
resin composition
resin film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1996620093
Other languages
English (en)
Other versions
DE69620093D1 (de
Inventor
Hiroyuki Obiya
Ryuma Mizusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30392195A external-priority patent/JP3498876B2/ja
Priority claimed from JP33621795A external-priority patent/JP3468959B2/ja
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of DE69620093D1 publication Critical patent/DE69620093D1/de
Application granted granted Critical
Publication of DE69620093T2 publication Critical patent/DE69620093T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/093—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antistatic means, e.g. for charge depletion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/112—Cellulosic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31565—Next to polyester [polyethylene terephthalate, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31573—Next to addition polymer of ethylenically unsaturated monomer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31573—Next to addition polymer of ethylenically unsaturated monomer
    • Y10T428/31576—Ester monomer type [polyvinylacetate, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31573—Next to addition polymer of ethylenically unsaturated monomer
    • Y10T428/31587—Hydrocarbon polymer [polyethylene, polybutadiene, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31591—Next to cellulosic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31598—Next to silicon-containing [silicone, cement, etc.] layer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
DE1996620093 1995-10-27 1996-10-28 Photoempfindliche Harzzusammensetzung und damit laminierter photoempfindlicher Harzfilm Expired - Fee Related DE69620093T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30392195A JP3498876B2 (ja) 1995-10-27 1995-10-27 感光性樹脂組成物及びそれを用いた感光性樹脂積層フィルム
JP33621795A JP3468959B2 (ja) 1995-11-30 1995-11-30 感光性樹脂組成物及びそれを用いた感光性樹脂積層フィルム

Publications (2)

Publication Number Publication Date
DE69620093D1 DE69620093D1 (de) 2002-05-02
DE69620093T2 true DE69620093T2 (de) 2002-11-07

Family

ID=26563689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996620093 Expired - Fee Related DE69620093T2 (de) 1995-10-27 1996-10-28 Photoempfindliche Harzzusammensetzung und damit laminierter photoempfindlicher Harzfilm

Country Status (4)

Country Link
US (2) US5776995A (de)
EP (1) EP0770923B1 (de)
DE (1) DE69620093T2 (de)
TW (1) TW475098B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000066391A (ja) * 1998-08-17 2000-03-03 Tokyo Ohka Kogyo Co Ltd サンドブラスト用感光性組成物及びそれを用いた感光性フィルム
US6177357B1 (en) * 1999-04-30 2001-01-23 3M Innovative Properties Company Method for making flexible circuits
KR100493961B1 (ko) * 1999-08-17 2005-06-10 주식회사 엘지화학 감광성 수지 조성물
JP2002120152A (ja) * 2000-07-31 2002-04-23 Fuji Photo Film Co Ltd 半導体チップ、半導体ウェハ、半導体デバイスおよびその製造方法
AU2001284499A1 (en) * 2000-09-11 2002-03-26 Showa Denko K K Photosensitive composition, cured article thereof, and printed circuit board using the same
JP2002148802A (ja) * 2000-11-07 2002-05-22 Tokyo Ohka Kogyo Co Ltd サンドブラスト用感光性組成物及びそれを用いた感光性フィルム
CN100378895C (zh) * 2001-02-28 2008-04-02 友达光电股份有限公司 等离子显示器的不对称阻隔壁结构的制作方法
KR100521999B1 (ko) * 2002-09-03 2005-10-18 주식회사 코오롱 샌드블래스트 레지스트용 감광성수지 조성물
JP3972021B2 (ja) * 2003-05-28 2007-09-05 東京応化工業株式会社 プラズマディスプレイ前面板製造用未焼成積層体およびプラズマディスプレイ前面板の製造方法
JP4360242B2 (ja) * 2004-03-24 2009-11-11 Ｊｓｒ株式会社 ネガ型感放射線性樹脂組成物
JP4509638B2 (ja) 2004-04-26 2010-07-21 東京応化工業株式会社 感光性樹脂組成物およびこれを用いた感光性ドライフィルム
DE102004025684A1 (de) * 2004-04-29 2005-11-17 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zum Ausbilden einer Kontaktstruktur zur elektrischen Kontaktierung eines optoelektronischen Halbleiterchips
WO2019124307A1 (ja) * 2017-12-20 2019-06-27 住友電気工業株式会社 プリント配線板の製造方法及び積層体

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2000874B (en) * 1977-07-12 1982-02-17 Asahi Chemical Ind Process for producing image and photosensitive element therefor and method of producing printed circuit board
DE2822190A1 (de) * 1978-05-20 1979-11-22 Hoechst Ag Photopolymerisierbares gemisch
JPS55103554A (en) 1979-02-02 1980-08-07 Sumitomo Chem Co Ltd Photosensitive resin composition for sand blast resist
US4430416A (en) * 1980-06-27 1984-02-07 Asahi Kasei Kogyo Kabushiki Kaisha Transfer element for sandblast carving
US4587186A (en) * 1982-05-13 1986-05-06 Asahi Kasei Kogyo Kabushiki Kaisha Mask element for selective sandblasting and a method
DE3236560A1 (de) * 1982-10-02 1984-04-05 Hoechst Ag, 6230 Frankfurt Lichtempfindliches schichtuebertragungsmaterial und verfahren zur herstellung einer photoresistschablone
JPS608100A (ja) * 1983-06-28 1985-01-16 旭化成株式会社 吹き付け食刻方法
US4849321A (en) * 1985-06-20 1989-07-18 M&T Chemicals Inc. UV curable compositions for making improved solder mask coatings
CA1312040C (en) * 1985-12-19 1992-12-29 Joseph Victor Koleske Conformal coatings cured with actinic radiation
US5102774A (en) * 1986-12-08 1992-04-07 Armstrong World Industries, Inc. Photoimagable coating compositions which are developable in aqueous alkaline solutions and can be used for solder mask compositions
US4855077A (en) * 1988-04-20 1989-08-08 Takiron Co., Ltd. Sticking agent of ionic-conductive polymer
JP2562954B2 (ja) 1988-09-06 1996-12-11 アイセロ化学 株式会社 彫食刻マスク用感光性積層フイルム
US5356754A (en) * 1992-09-25 1994-10-18 Mitsubishi Rayon Co., Ltd. Crosslinking curable resin composition
JPH06161098A (ja) * 1992-11-20 1994-06-07 Tokyo Ohka Kogyo Co Ltd サンドブラスト用感光性樹脂組成物及びこれを用いた感光性フィルム
JP3167812B2 (ja) * 1992-11-20 2001-05-21 東京応化工業株式会社 サンドブラスト用感光性樹脂組成物及びこれを用いた積層フィルム
US5405731A (en) * 1992-12-22 1995-04-11 E. I. Du Pont De Nemours And Company Aqueous processable, multilayer, photoimageable permanent coatings for printed circuits
EP0674225A1 (de) * 1994-03-16 1995-09-27 Hitachi Chemical Company, Ltd. Fotoempfindliche Harzzusammensetzung und fotoempfindlicher Film
JP3638660B2 (ja) * 1995-05-01 2005-04-13 松下電器産業株式会社 感光性樹脂組成物、それを用いたサンドブラスト用感光性ドライフィルム及びそれを用いた食刻方法

Also Published As

Publication number Publication date
TW475098B (en) 2002-02-01
EP0770923A1 (de) 1997-05-02
EP0770923B1 (de) 2002-03-27
DE69620093D1 (de) 2002-05-02
US5776995A (en) 1998-07-07
US5919569A (en) 1999-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee