DE69614285T2 - Membranventil - Google Patents

Membranventil

Info

Publication number
DE69614285T2
DE69614285T2 DE69614285T DE69614285T DE69614285T2 DE 69614285 T2 DE69614285 T2 DE 69614285T2 DE 69614285 T DE69614285 T DE 69614285T DE 69614285 T DE69614285 T DE 69614285T DE 69614285 T2 DE69614285 T2 DE 69614285T2
Authority
DE
Germany
Prior art keywords
diaphragm valve
diaphragm
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69614285T
Other languages
English (en)
Other versions
DE69614285D1 (de
Inventor
Kazuhiro Yoshikawa
Tetsuya Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69614285D1 publication Critical patent/DE69614285D1/de
Application granted granted Critical
Publication of DE69614285T2 publication Critical patent/DE69614285T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
DE69614285T 1995-02-15 1996-01-04 Membranventil Expired - Fee Related DE69614285T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02713695A JP3291152B2 (ja) 1995-02-15 1995-02-15 ダイヤフラム弁

Publications (2)

Publication Number Publication Date
DE69614285D1 DE69614285D1 (de) 2001-09-13
DE69614285T2 true DE69614285T2 (de) 2002-05-02

Family

ID=12212644

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69614285T Expired - Fee Related DE69614285T2 (de) 1995-02-15 1996-01-04 Membranventil

Country Status (8)

Country Link
US (1) US5743513A (de)
EP (1) EP0727604B1 (de)
JP (1) JP3291152B2 (de)
KR (1) KR0173533B1 (de)
CA (1) CA2166843C (de)
DE (1) DE69614285T2 (de)
IL (1) IL116718A (de)
TW (1) TW317324U (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6092550A (en) 1997-02-03 2000-07-25 Swagelok Marketing Co. Diaphragm valve seat arrangement
US5881997A (en) * 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
JP3764574B2 (ja) * 1997-12-10 2006-04-12 株式会社フジキン 金属ダイヤフラム型バルブ
US6378548B1 (en) * 2000-05-31 2002-04-30 United Dominion Industries, Inc. Varying size diaphragm valve assemblies utilizing diaphragm of uniform size
US7532955B2 (en) * 2002-02-25 2009-05-12 General Electric Company Distributed protection system for power distribution systems
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
JP2005188672A (ja) * 2003-12-26 2005-07-14 Neriki:Kk バルブ装置
JP2006090386A (ja) * 2004-09-22 2006-04-06 Kitz Sct:Kk ダイヤフラムバルブ
US7686280B2 (en) * 2005-12-28 2010-03-30 Circor Instrumentation Technologies, Inc. Removable valve seat member for diaphragm valve
JP2008032113A (ja) * 2006-07-28 2008-02-14 Koda:Kk ダイヤフラム式バルブ
JP5320634B2 (ja) * 2007-04-17 2013-10-23 株式会社 幸田 ダイヤフラム式バルブ
JP4973483B2 (ja) * 2007-12-20 2012-07-11 株式会社島津製作所 バルブ及び当該バルブを備えた送液装置
JP5394710B2 (ja) * 2008-11-28 2014-01-22 株式会社ハムレット・モトヤマ・ジャパン ダイヤフラム弁
DE102009023011A1 (de) * 2009-05-28 2010-12-02 G.S. Anderson Gmbh Membranventilkörper
WO2014120997A1 (en) 2013-02-01 2014-08-07 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
DE102015202775B4 (de) 2015-02-16 2018-10-04 Festo Ag & Co. Kg Membranventil
DE202016008955U1 (de) * 2015-06-17 2021-01-15 Vistadeltek, Llc Membran mit geringer Hysterese für ein Ventil
KR102339628B1 (ko) * 2015-07-09 2021-12-14 비스타델텍, 엘엘씨 밸브의 제어 플레이트
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
WO2018226596A1 (en) * 2017-06-05 2018-12-13 Vistadeltek, Llc Control plate for a high conductance valve
JP7133945B2 (ja) * 2018-03-02 2022-09-09 株式会社堀場エステック 流体制御弁及び流体制御装置
WO2019224605A1 (en) * 2018-05-22 2019-11-28 Compart Systems Pte. Ltd. Variable control orifice valve
CN112673201A (zh) * 2018-09-25 2021-04-16 株式会社富士金 阀
JP7217501B2 (ja) * 2018-10-17 2023-02-03 アドバンス電気工業株式会社 ダイヤフラム弁
JP7254573B2 (ja) * 2019-03-19 2023-04-10 株式会社鷺宮製作所 弁装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7241059U (de) * 1973-02-15 Waldenmaier J Membranventil
US1145671A (en) * 1911-02-23 1915-07-06 John A Butcher Relief-valve.
DE1209377B (de) * 1961-03-16 1966-01-20 Danfoss Ved Ing M Clausen Ventil mit ueber eine Membran betaetigtem Verschlussstueck
US3164365A (en) * 1962-06-22 1965-01-05 Taco Inc Diaphragm sealed valve
ZA756085B (en) * 1974-12-23 1976-09-29 Dresser Ind High pressure diaphragm valves
DE2602577A1 (de) * 1976-01-23 1977-07-28 Baelz Gmbh Helmut Absperrventil
US4231549A (en) * 1978-12-11 1980-11-04 Kerotest Manufacturing Corp. Valve stem and valve disc connection for a diaphragm valve
US4671490A (en) * 1986-05-16 1987-06-09 Nupro Co. Diaphragm valve
LU86438A1 (fr) * 1986-05-23 1987-12-16 Ceodeux Sa Robinet a membrane
US4867201A (en) * 1989-03-06 1989-09-19 Harsco Corporation Parallel-motion dual-diaphragm valve
US5295662A (en) * 1991-08-26 1994-03-22 Masako Kiyohara Fluid flow-controller with improved diaphragm
JPH0680958A (ja) * 1992-08-28 1994-03-22 Mitsubishi Petrochem Co Ltd 蓄熱材組成物
JP3469331B2 (ja) * 1994-10-17 2003-11-25 株式会社フジキン 金属製ダイヤフラムの内周縁部のシール構造

Also Published As

Publication number Publication date
JPH08219304A (ja) 1996-08-30
IL116718A (en) 1999-08-17
EP0727604A1 (de) 1996-08-21
KR960031858A (ko) 1996-09-17
DE69614285D1 (de) 2001-09-13
KR0173533B1 (ko) 1999-04-01
JP3291152B2 (ja) 2002-06-10
CA2166843C (en) 1999-01-26
TW317324U (en) 1997-10-01
EP0727604B1 (de) 2001-08-08
IL116718A0 (en) 1996-05-14
US5743513A (en) 1998-04-28
CA2166843A1 (en) 1996-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee