DE69608664D1 - Verfahren zur Herstellung eines blasenfreien Lichtwellenleiters - Google Patents
Verfahren zur Herstellung eines blasenfreien LichtwellenleitersInfo
- Publication number
- DE69608664D1 DE69608664D1 DE69608664T DE69608664T DE69608664D1 DE 69608664 D1 DE69608664 D1 DE 69608664D1 DE 69608664 T DE69608664 T DE 69608664T DE 69608664 T DE69608664 T DE 69608664T DE 69608664 D1 DE69608664 D1 DE 69608664D1
- Authority
- DE
- Germany
- Prior art keywords
- bubble
- production
- optical fiber
- free optical
- free
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Composite Materials (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7314935A JP3001406B2 (ja) | 1995-11-09 | 1995-11-09 | 光導波路の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69608664D1 true DE69608664D1 (de) | 2000-07-06 |
DE69608664T2 DE69608664T2 (de) | 2001-02-08 |
Family
ID=18059428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69608664T Expired - Lifetime DE69608664T2 (de) | 1995-11-09 | 1996-11-08 | Verfahren zur Herstellung eines Hohlraumfreien optischen Wellenleiters |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0803589B1 (de) |
JP (1) | JP3001406B2 (de) |
DE (1) | DE69608664T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2309096A (en) * | 1996-01-09 | 1997-07-16 | Northern Telecom Ltd | Optical waveguide pair with cladding on buffered substrate |
AU717947B2 (en) * | 1996-12-16 | 2000-04-06 | Corning Incorporated | Organometallics for lightwave optical circuit applications |
GB2346452A (en) * | 1999-02-05 | 2000-08-09 | Univ Glasgow | Waveguides |
JP2001290040A (ja) * | 2000-04-04 | 2001-10-19 | Furukawa Electric Co Ltd:The | 光導波路部品の製造方法と光導波路部品 |
US7087179B2 (en) | 2000-12-11 | 2006-08-08 | Applied Materials, Inc. | Optical integrated circuits (ICs) |
JP4640745B2 (ja) * | 2001-05-21 | 2011-03-02 | 株式会社Adeka | 化学気相成長用原料及びこれを用いたセラミックスの製造方法 |
US6749893B2 (en) * | 2002-01-31 | 2004-06-15 | Dalsa Semiconductor Inc. | Method of preventing cracking in optical quality silica layers |
US7080528B2 (en) | 2002-10-23 | 2006-07-25 | Applied Materials, Inc. | Method of forming a phosphorus doped optical core using a PECVD process |
US20040086643A1 (en) * | 2002-11-05 | 2004-05-06 | Asahi Denka Co., Ltd. | Precursor for chemical vapor deposition and thin film formation process using the same |
US7079740B2 (en) | 2004-03-12 | 2006-07-18 | Applied Materials, Inc. | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides |
CN101859001B (zh) * | 2010-06-08 | 2012-06-27 | 浙江大学 | 基于硼锗共掺上包层的二氧化硅光波导器件及制备方法 |
JP6331336B2 (ja) * | 2013-10-31 | 2018-05-30 | 住友ベークライト株式会社 | 光導波路、光電気混載基板および電子機器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076654A (en) * | 1990-10-29 | 1991-12-31 | At&T Bell Laboratories | Packaging of silicon optical components |
JP2984130B2 (ja) * | 1992-02-12 | 1999-11-29 | 日立電線株式会社 | プラズマcvd法による光導波路用ガラス膜および光導波路の製造方法 |
JP2900732B2 (ja) * | 1992-11-24 | 1999-06-02 | 三菱電機株式会社 | 光導波路の製造方法 |
JPH06183751A (ja) * | 1992-12-21 | 1994-07-05 | Nippon Telegr & Teleph Corp <Ntt> | 光導波膜の製造方法 |
JPH06289243A (ja) * | 1993-04-06 | 1994-10-18 | Hitachi Cable Ltd | 光導波路用ガラス膜の形成方法 |
JP2739806B2 (ja) * | 1993-06-08 | 1998-04-15 | 日本電気株式会社 | 光導波路の製造方法 |
JPH0777620A (ja) * | 1993-09-08 | 1995-03-20 | Tokai Rubber Ind Ltd | 石英系光導波路およびその製造方法 |
-
1995
- 1995-11-09 JP JP7314935A patent/JP3001406B2/ja not_active Expired - Fee Related
-
1996
- 1996-11-08 EP EP96117978A patent/EP0803589B1/de not_active Expired - Lifetime
- 1996-11-08 DE DE69608664T patent/DE69608664T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH09133827A (ja) | 1997-05-20 |
JP3001406B2 (ja) | 2000-01-24 |
EP0803589A1 (de) | 1997-10-29 |
EP0803589B1 (de) | 2000-05-31 |
DE69608664T2 (de) | 2001-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |