DE69607551T2 - Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren - Google Patents

Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren

Info

Publication number
DE69607551T2
DE69607551T2 DE1996607551 DE69607551T DE69607551T2 DE 69607551 T2 DE69607551 T2 DE 69607551T2 DE 1996607551 DE1996607551 DE 1996607551 DE 69607551 T DE69607551 T DE 69607551T DE 69607551 T2 DE69607551 T2 DE 69607551T2
Authority
DE
Germany
Prior art keywords
piezoelectric
thin film
manufacturing process
film element
electrostrictive thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1996607551
Other languages
English (en)
Other versions
DE69607551D1 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69607551D1 publication Critical patent/DE69607551D1/de
Publication of DE69607551T2 publication Critical patent/DE69607551T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C04B35/488—Composites
    • C04B35/4885—Composites with aluminium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62625—Wet mixtures
    • C04B35/6264—Mixing media, e.g. organic solvents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6025—Tape casting, e.g. with a doctor blade
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE1996607551 1995-09-27 1996-09-26 Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren Expired - Lifetime DE69607551T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24930295A JP3320596B2 (ja) 1995-09-27 1995-09-27 圧電／電歪膜型素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69607551D1 DE69607551D1 (de) 2000-05-11
DE69607551T2 true DE69607551T2 (de) 2000-11-02

Family

ID=17190966

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996607551 Expired - Lifetime DE69607551T2 (de) 1995-09-27 1996-09-26 Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5853514A (de)
EP (1) EP0766325B1 (de)
JP (1) JP3320596B2 (de)
DE (1) DE69607551T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149165A1 (de) * 2001-10-04 2003-04-30 Bircher Ag Beringen Verfahren zur Herstellung eines Sensorelementes, insbesondere Schaltelementes
DE102016201718A1 (de) * 2016-02-04 2017-08-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe mit polygonförmigem Piezo-Membranwandler

Families Citing this family (26)

* Cited by examiner, † Cited by third party
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WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
US6004644A (en) * 1994-07-26 1999-12-21 Ngk Insulators, Ltd. Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
JP3419219B2 (ja) * 1996-09-24 2003-06-23 株式会社村田製作所 圧電磁器組成物及びそれを用いた圧電装置
US6247371B1 (en) * 1997-04-04 2001-06-19 Ngk Insulators, Ltd. Three-axis sensor
EP0987218B1 (de) * 1998-01-19 2004-05-06 Seiko Epson Corporation Verfahren zur herstellung von dünnfilmen aus oxidischer keramik
EP1724750B1 (de) * 1999-01-29 2008-08-27 Seiko Epson Corporation Piezoelektrischer Transducer und Anzeigevorrichtung mit elektrophoretischer Tinte, die den piezoelektrischen Transducer benutzt
US20050035688A1 (en) * 2002-01-11 2005-02-17 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JPWO2003061023A1 (ja) * 2002-01-11 2005-05-19 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6888292B2 (en) * 2002-02-08 2005-05-03 Ngk Insulators, Ltd. Multi-layered type piezoelectric device and process for production thereof
US7009328B2 (en) * 2003-06-20 2006-03-07 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method
JP2006049806A (ja) * 2004-03-18 2006-02-16 Nec Tokin Corp 積層圧電セラミックス構造体及びその製造方法
US7424827B2 (en) * 2004-04-27 2008-09-16 Ngk Insulators, Ltd. Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof
JP4280198B2 (ja) * 2004-04-30 2009-06-17 株式会社東芝 薄膜圧電共振器
US7332851B2 (en) 2004-09-29 2008-02-19 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film type device and method of manufacturing the same
US20090096326A1 (en) * 2005-08-31 2009-04-16 Nec Corporation Piezoelectric actuator, acoustic component, and electronic device
US7605686B2 (en) * 2006-11-16 2009-10-20 Motorola, Inc. Alerting system for a communication device
US7888844B2 (en) * 2009-06-30 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Temperature control of micromachined transducers
JP5413131B2 (ja) * 2009-11-03 2014-02-12 セイコーエプソン株式会社 センサーアレイ及び圧力センサーの製造方法
DE102010022911B4 (de) 2010-06-07 2017-01-19 Continental Automotive Gmbh Verfahren zum Herstellen eines Piezoaktors und Piezoaktor
US20120025337A1 (en) * 2010-07-28 2012-02-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Mems transducer device having stress mitigation structure and method of fabricating the same
EP2617076B1 (de) * 2010-09-15 2014-12-10 Ricoh Company, Limited Elektromechanischer energieumwandler und herstellungsverfahren dafür
JP5754145B2 (ja) * 2011-01-25 2015-07-29 セイコーエプソン株式会社 超音波センサーおよび電子機器
WO2012111279A1 (ja) * 2011-02-18 2012-08-23 パナソニック株式会社 圧電素子
DE102012105287B4 (de) * 2012-06-18 2020-07-02 Tdk Electronics Ag Verfahren zur Herstellung eines elektrischen Bauelements und Elektrisches Bauelement
CH713460A2 (de) * 2017-02-15 2018-08-15 Digi Sens Ag Schwingsaitensensor und Schwingsaite für einen Schwingsaitensensor.
US11858850B2 (en) * 2020-07-14 2024-01-02 Leatec Fine Ceramics Co., Ltd. High-strength zirconia-alumina composite ceramic substrate applied to semiconductor device and manufacturing method thereof

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JPS591232B2 (ja) * 1979-09-28 1984-01-11 住友アルミニウム製錬株式会社 ジルコニア焼結体の製造方法
US4360598A (en) * 1980-03-26 1982-11-23 Ngk Insulators, Ltd. Zirconia ceramics and a method of producing the same
GB2161647A (en) * 1984-07-10 1986-01-15 Gen Electric Co Plc Piezoelectric devices
JPS62213399A (ja) * 1986-03-12 1987-09-19 Omron Tateisi Electronics Co 圧電磁器
JP2842448B2 (ja) * 1989-07-11 1999-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ
SG83626A1 (en) * 1989-07-11 2001-10-16 Seiko Epson Corp Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
US5089455A (en) * 1989-08-11 1992-02-18 Corning Incorporated Thin flexible sintered structures
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
JP2693291B2 (ja) * 1990-07-26 1997-12-24 日本碍子株式会社 圧電／電歪アクチュエータ
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
EP0636593B1 (de) * 1993-07-27 1998-09-30 Ngk Insulators, Ltd. Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3128681B2 (ja) 1994-07-08 2001-01-29 新日本製鐵株式会社 可動モールド式連続鋳造機のモールド用コーティング剤
US5634999A (en) * 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149165A1 (de) * 2001-10-04 2003-04-30 Bircher Ag Beringen Verfahren zur Herstellung eines Sensorelementes, insbesondere Schaltelementes
DE102016201718A1 (de) * 2016-02-04 2017-08-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe mit polygonförmigem Piezo-Membranwandler
US11131299B2 (en) 2016-02-04 2021-09-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Pump comprising a polygon-shaped piezo diaphragm transducer
DE102016201718B4 (de) 2016-02-04 2022-02-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe mit polygonförmigem Piezo-Membranwandler

Also Published As

Publication number Publication date
US6217979B1 (en) 2001-04-17
EP0766325B1 (de) 2000-04-05
US5853514A (en) 1998-12-29
EP0766325A1 (de) 1997-04-02
JP3320596B2 (ja) 2002-09-03
JPH0992896A (ja) 1997-04-04
DE69607551D1 (de) 2000-05-11

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