DE69601763T2 - Einrichtung zur Antriebsregelung - Google Patents
Einrichtung zur AntriebsregelungInfo
- Publication number
- DE69601763T2 DE69601763T2 DE69601763T DE69601763T DE69601763T2 DE 69601763 T2 DE69601763 T2 DE 69601763T2 DE 69601763 T DE69601763 T DE 69601763T DE 69601763 T DE69601763 T DE 69601763T DE 69601763 T2 DE69601763 T2 DE 69601763T2
- Authority
- DE
- Germany
- Prior art keywords
- control device
- drive control
- drive
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
- G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
- G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37275—Laser, interferometer
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41026—Change gain as function of speed
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41028—Select gain with memory, rom table
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41029—Adjust gain as function of position error and position
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41172—Adapt coefficients of compensator to bring system into phase margin
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41203—Lead-phase compensation, lag-phase compensation servo
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41216—Two lookup tables, for forward and reverse movement
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/42—Servomotor, servo controller kind till VSS
- G05B2219/42033—Kind of servo controller
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Human Computer Interaction (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Control Of Position Or Direction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24826695A JP3320276B2 (ja) | 1995-09-04 | 1995-09-04 | 精密制御装置 |
JP32787295A JP3387715B2 (ja) | 1995-11-24 | 1995-11-24 | 多相リニアモータ制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69601763D1 DE69601763D1 (de) | 1999-04-22 |
DE69601763T2 true DE69601763T2 (de) | 1999-09-09 |
Family
ID=26538682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69601763T Expired - Lifetime DE69601763T2 (de) | 1995-09-04 | 1996-09-03 | Einrichtung zur Antriebsregelung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5757149A (de) |
EP (1) | EP0762255B1 (de) |
KR (1) | KR100226599B1 (de) |
DE (1) | DE69601763T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5528118A (en) * | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US6989647B1 (en) * | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
TW318255B (de) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
JP3501559B2 (ja) * | 1995-06-27 | 2004-03-02 | キヤノン株式会社 | リニア・モータ装置 |
JP4039728B2 (ja) * | 1998-03-13 | 2008-01-30 | オリエンタルモーター株式会社 | ステッピングモータの制御装置 |
US6260282B1 (en) * | 1998-03-27 | 2001-07-17 | Nikon Corporation | Stage control with reduced synchronization error and settling time |
US6037737A (en) * | 1998-04-30 | 2000-03-14 | Trw Inc. | Simple friction-compensating control algorithm for high precision mechanisms |
JPH11354417A (ja) | 1998-06-11 | 1999-12-24 | Canon Inc | 走査型露光装置およびこれを用いたデバイス製造方法ならびにステージ制御装置 |
US6144118A (en) * | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
JP3595708B2 (ja) * | 1998-10-30 | 2004-12-02 | キヤノン株式会社 | 露光装置、デバイス製造方法および制御方法 |
US6487458B1 (en) | 1999-08-31 | 2002-11-26 | Delphi Technologies, Inc. | Adaptive closed-loop servo control |
US6573976B2 (en) | 2000-10-04 | 2003-06-03 | Canon Kabushiki Kaisha | Exposure apparatus, exposure method, and semiconductor device manufacturing method |
EP1267213B1 (de) * | 2001-06-13 | 2006-09-20 | ASML Netherlands B.V. | Lithographischer Projektionsapparat |
JP3870058B2 (ja) * | 2001-10-05 | 2007-01-17 | キヤノン株式会社 | スキャン露光装置及び方法並びにデバイスの製造方法 |
JP3963426B2 (ja) * | 2001-11-28 | 2007-08-22 | キヤノン株式会社 | ステージ装置および露光装置 |
US6922025B2 (en) * | 2002-02-21 | 2005-07-26 | Anorad Corporation | Zero ripple linear motor system |
JP2004030500A (ja) * | 2002-06-28 | 2004-01-29 | Fanuc Ltd | モータ制御装置 |
JP3907566B2 (ja) * | 2002-09-27 | 2007-04-18 | キヤノン株式会社 | 位置決め装置における測定手段を初期化する方法 |
US6949896B2 (en) * | 2002-12-03 | 2005-09-27 | Ricoh Company, Limited | Apparatus for and method of driving motor to move object at a constant velocity |
US7119511B2 (en) * | 2003-04-11 | 2006-10-10 | International Business Machines Corporation | Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor |
JP4315420B2 (ja) * | 2003-04-18 | 2009-08-19 | キヤノン株式会社 | 露光装置及び露光方法 |
NL1027851C2 (nl) * | 2004-12-22 | 2006-06-27 | Assembleon Nv | Werkwijze voor het regelen van een dynamisch systeem alsmede een dergelijke inrichting. |
US7265813B2 (en) * | 2004-12-28 | 2007-09-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20060170382A1 (en) * | 2005-01-28 | 2006-08-03 | Nikon Corporation | Linear motor force ripple identification and compensation with iterative learning control |
US7253580B2 (en) * | 2005-05-06 | 2007-08-07 | Marvell International Technology Ltd. | Method and apparatus for adaptive motor speed control |
US20070206456A1 (en) * | 2005-09-30 | 2007-09-06 | Sullivan Jeffrey S | Trajectory mapping for improved motion-system jitter while minimizing tracking error |
US7468589B2 (en) * | 2006-01-13 | 2008-12-23 | Asml Netherlands B.V. | Lithographic apparatus having a controlled motor, and motor control system and method |
WO2007097947A1 (en) * | 2006-02-16 | 2007-08-30 | Kadant Inc. | Linear traversing carriage incorporating an air gap inductive motivator |
US7453228B2 (en) * | 2006-04-07 | 2008-11-18 | Asml Netherlands B.V. | Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device |
US7818073B2 (en) * | 2006-04-20 | 2010-10-19 | Asml Netherlands B.V. | Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method |
CN100593767C (zh) * | 2006-06-30 | 2010-03-10 | 深圳市大族激光科技股份有限公司 | 电容传感器的控制方法 |
US8267388B2 (en) * | 2007-09-12 | 2012-09-18 | Xradia, Inc. | Alignment assembly |
US8452424B2 (en) * | 2008-03-05 | 2013-05-28 | National Univeristy Corporation Nagoya Institute of Technology | Moving object feed-forward control method |
NL2003331A (en) * | 2008-09-02 | 2010-03-12 | Asml Netherlands Bv | Device manufacturing method, control system, computer program and computer-readable medium. |
US8649885B2 (en) * | 2008-11-25 | 2014-02-11 | Nikon Corporation | Frequency selective iterative learning control system and method for controlling errors in stage movement |
JP5308249B2 (ja) * | 2009-06-22 | 2013-10-09 | 三菱重工業株式会社 | サーボ制御装置 |
NL2006981A (en) | 2010-07-26 | 2012-01-30 | Asml Netherlands Bv | Position control system, lithographic apparatus, and method to control a position of a movable object. |
TWI488016B (zh) * | 2012-11-16 | 2015-06-11 | 唐明中 | 可攜式遠端互動系統 |
US9871340B2 (en) * | 2015-10-16 | 2018-01-16 | Thorlabs, Inc. | Linear motor or voice coil for fast tuning of a laser cavity |
JP2022129161A (ja) * | 2021-02-24 | 2022-09-05 | キヤノン株式会社 | 制御装置、位置決め装置、リソグラフィー装置および物品製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58116735A (ja) * | 1981-12-29 | 1983-07-12 | Canon Inc | 投影焼付方法 |
JPS60168149A (ja) * | 1984-02-13 | 1985-08-31 | Canon Inc | 位置合わせ信号処理装置 |
JPS6115341A (ja) * | 1984-07-02 | 1986-01-23 | Canon Inc | ウエハプロ−バ |
US4747608A (en) * | 1984-10-30 | 1988-05-31 | Canon Kabushiki Kaisha | Wafer chuck |
US4870288A (en) * | 1986-04-01 | 1989-09-26 | Canon Kabushiki Kaisha | Alignment method |
US4714400A (en) * | 1986-04-14 | 1987-12-22 | Ibm Corporation | Plural robotic drive |
JPH01298410A (ja) * | 1988-05-27 | 1989-12-01 | Canon Inc | 位置決めテーブル装置 |
NL8902471A (nl) * | 1989-10-05 | 1991-05-01 | Philips Nv | Tweetraps positioneerinrichting. |
US5216590A (en) * | 1990-07-13 | 1993-06-01 | Seiko Seiki Kabushiki Kaisha | Contactless guided positioning table |
JP2864060B2 (ja) * | 1991-09-04 | 1999-03-03 | キヤノン株式会社 | 縮小投影型露光装置及び方法 |
US5504407A (en) * | 1992-02-21 | 1996-04-02 | Canon Kabushiki Kaisha | Stage driving system |
JP3217522B2 (ja) * | 1992-03-02 | 2001-10-09 | キヤノン株式会社 | 精密位置決め装置 |
JP3002351B2 (ja) * | 1993-02-25 | 2000-01-24 | キヤノン株式会社 | 位置合わせ方法および装置 |
DE69412719T2 (de) * | 1993-06-24 | 1999-02-18 | Canon Kk | Steuerung für einen mehrphasigen Motor |
JPH07161798A (ja) * | 1993-12-06 | 1995-06-23 | Canon Inc | 位置決めテーブル装置 |
US5609136A (en) * | 1994-06-28 | 1997-03-11 | Cummins Engine Company, Inc. | Model predictive control for HPI closed-loop fuel pressure control system |
US5557156A (en) * | 1994-12-02 | 1996-09-17 | Digital Instruments, Inc. | Scan control for scanning probe microscopes |
-
1996
- 1996-09-03 DE DE69601763T patent/DE69601763T2/de not_active Expired - Lifetime
- 1996-09-03 KR KR1019960037952A patent/KR100226599B1/ko not_active IP Right Cessation
- 1996-09-03 EP EP96306378A patent/EP0762255B1/de not_active Expired - Lifetime
- 1996-09-04 US US08/697,950 patent/US5757149A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69601763D1 (de) | 1999-04-22 |
KR970018132A (ko) | 1997-04-30 |
EP0762255A1 (de) | 1997-03-12 |
US5757149A (en) | 1998-05-26 |
KR100226599B1 (ko) | 1999-10-15 |
EP0762255B1 (de) | 1999-03-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69601763D1 (de) | Einrichtung zur Antriebsregelung | |
DE69616259T2 (de) | Gangschaltvorrichtung | |
DE69627506D1 (de) | Luftströmungssteuervorrichtung | |
NO951513L (no) | Styreanordning | |
DE59603636D1 (de) | Antriebssystem | |
DE59602156D1 (de) | Bediengerät | |
KR960003119U (ko) | 디바이스의 간격 조절장치 | |
BR9606047A (pt) | Dispositivo de acionamento | |
DE69620265D1 (de) | Prozesssteuervorrichtung | |
DE19681615T1 (de) | Gesteuertes Druckluftantriebssystem | |
DE59602646D1 (de) | Antriebsvorrichtung | |
DE19681515T1 (de) | Antriebssystem | |
DE59610044D1 (de) | Niveauregeleinrichtung | |
DE59705903D1 (de) | Einrichtung zur spannungsregelung | |
DE59601488D1 (de) | Drehzahlregeleinrichtung | |
BR9608737A (pt) | Dispositivo de acionamento | |
DE69526418T2 (de) | Antischlupfregelungsgerät | |
DE59607167D1 (de) | Niveauregeleinrichtung | |
DE59601303D1 (de) | Steuergerät | |
DE59607449D1 (de) | Niveauregeleinrichtung | |
ATA95596A (de) | Leiteinrichtung | |
DE69510880D1 (de) | Ein-Hebel-Steuervorrichtung | |
DE69618667D1 (de) | Beleuchtungssteuerungsanordnung | |
DE69617416T2 (de) | Antriebsvorrichtung | |
DE59601022D1 (de) | Antriebseinrichtung |