DE69518964T2 - Verschiebungsmesseinrichtung - Google Patents
VerschiebungsmesseinrichtungInfo
- Publication number
- DE69518964T2 DE69518964T2 DE69518964T DE69518964T DE69518964T2 DE 69518964 T2 DE69518964 T2 DE 69518964T2 DE 69518964 T DE69518964 T DE 69518964T DE 69518964 T DE69518964 T DE 69518964T DE 69518964 T2 DE69518964 T2 DE 69518964T2
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- displacement measuring
- displacement
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24404—Interpolation using high frequency signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/001—Calibrating encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2448—Correction of gain, threshold, offset or phase control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2449—Error correction using hard-stored calibration data
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25549694A JP3367226B2 (ja) | 1994-10-20 | 1994-10-20 | 変位量検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69518964D1 DE69518964D1 (de) | 2000-11-02 |
DE69518964T2 true DE69518964T2 (de) | 2001-02-01 |
Family
ID=17279565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69518964T Expired - Lifetime DE69518964T2 (de) | 1994-10-20 | 1995-10-20 | Verschiebungsmesseinrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5943639A (de) |
EP (1) | EP0708311B1 (de) |
JP (1) | JP3367226B2 (de) |
DE (1) | DE69518964T2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10163528A1 (de) * | 2001-12-21 | 2003-07-10 | Siemens Ag | Verfahren zur Fehlerkompensation von sin/cos-Lagemesssystemen nach Offset-, Amplituden- und Phasenfehler |
DE10303495B4 (de) | 2003-01-30 | 2018-12-27 | Robert Bosch Gmbh | Verfahren zur Offset-Bestimmung von Winkelsensorsignalen |
WO2021151417A1 (de) * | 2020-01-29 | 2021-08-05 | Schaeffler Technologies AG & Co. KG | Kupplungsaktor, erfassungssystem und verfahren zur erfassung einer winkelposition eines drehbauteils |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6188341B1 (en) | 1996-11-11 | 2001-02-13 | Fanuc Ltd. | Encoder interpolation circuit which corrects an interpolation angle between a received sine-wave encoder signal and a cosine-wave encoder signal |
JP3026949B2 (ja) * | 1997-05-12 | 2000-03-27 | ファナック株式会社 | エンコーダのオフセット補正回路 |
JP4239042B2 (ja) * | 1998-06-19 | 2009-03-18 | 株式会社安川電機 | 2次元アブソリュート位置センサおよびロボット |
US6973399B1 (en) | 1999-03-30 | 2005-12-06 | Dr. Johannes Heidenhain Gmbh | Method and circuit for correcting periodic signals of an incremental position measuring system |
DE10066149B4 (de) * | 1999-03-30 | 2005-02-17 | Dr. Johannes Heidenhain Gmbh | Verfahren und Schaltungsanordnung zur Korrektur von periodischen Signalen eines inkrementalen Positionsmesssystems |
JP4660719B2 (ja) * | 2001-04-19 | 2011-03-30 | マッスル株式会社 | 位置検出方法および位置検出装置 |
JP4748559B2 (ja) * | 2001-09-14 | 2011-08-17 | 株式会社森精機製作所 | アブソリュートエンコーダ |
JP4748557B2 (ja) * | 2001-09-14 | 2011-08-17 | 株式会社森精機製作所 | アブソリュートエンコーダ |
JP4748558B2 (ja) * | 2001-09-14 | 2011-08-17 | 株式会社森精機製作所 | アブソリュートエンコーダ |
DE10154153A1 (de) | 2001-11-03 | 2003-05-15 | Bosch Gmbh Robert | Achsenschnittverfahren und N-Punkte-Methode zum Offsetabgleich von Winkelsensoren |
DE10157112A1 (de) * | 2001-11-21 | 2003-06-05 | Heidenhain Gmbh Dr Johannes | Kontrollvorrichtung einer Positionsmesseinrichtung |
WO2003058820A2 (de) * | 2002-01-11 | 2003-07-17 | Dr. Johannes Heidenhain Gmbh | Verfahren zur interpolation mindestens zweier positionsabhängiger, periodischer, zueinander phasenverschobener analogsignale |
US6879405B2 (en) | 2002-11-18 | 2005-04-12 | Sony Precision Technology, Inc. | Displacement pickup |
DE10301848B4 (de) | 2003-01-09 | 2014-10-09 | Anton Rodi | Messeinrichtung zur Erfassung von Größen, insbesondere von Winkeln oder Wegstrecken |
US6940275B2 (en) * | 2003-12-15 | 2005-09-06 | Texas Instruments Incorporated | Magnetic position sensor apparatus and method |
US7023201B2 (en) * | 2003-12-15 | 2006-04-04 | Texas Instruments Incorporated | Magnetic position sensor apparatus and method |
JP2005227073A (ja) * | 2004-02-12 | 2005-08-25 | Ebara Densan Ltd | 欠相検知装置およびポンプシステム |
JP2006017615A (ja) * | 2004-07-02 | 2006-01-19 | Ricoh Co Ltd | マーク検出装置、回転体駆動装置及び画像形成装置 |
JP4768248B2 (ja) * | 2004-10-13 | 2011-09-07 | 株式会社ミツトヨ | エンコーダ出力信号補正装置及び方法 |
WO2008052117A2 (en) * | 2006-10-25 | 2008-05-02 | Georgia Tech Research Corporation | Analog signal processor in a multi-gigabit receiver system |
JP5149820B2 (ja) * | 2009-01-19 | 2013-02-20 | キヤノン株式会社 | コントローラおよび加工装置 |
US9791487B2 (en) * | 2012-03-29 | 2017-10-17 | Egalax_Empia Technology Inc. | Method and device for measuring signals |
US9733317B2 (en) | 2014-03-10 | 2017-08-15 | Dmg Mori Seiki Co., Ltd. | Position detecting device |
DE102014015747B4 (de) * | 2014-10-24 | 2024-01-25 | Infineon Technologies Ag | Sensorsystem und Warneinheit zum Sensieren und Verifizieren von Daten in Bezug auf eine Bewegung eines Objekts |
DE102015209016B4 (de) * | 2015-05-18 | 2021-12-30 | Robert Bosch Gmbh | Vorrichtung zur Bestimmung einer Winkelposition eines Motors |
CN108204830B (zh) * | 2017-11-28 | 2019-08-06 | 珠海格力电器股份有限公司 | 相位偏差的补偿方法和装置 |
US20220187105A1 (en) * | 2020-12-11 | 2022-06-16 | Dmg Mori Co., Ltd. | Automatic correction method |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2913961C2 (de) * | 1978-04-10 | 1982-07-08 | Asahi Seimitsu K.K., Tokyo | Universal-Parallellineal |
DE3024716C2 (de) * | 1980-06-30 | 1986-10-23 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Digitales Längen- oder Winkelmeßsystem |
JPS5875074A (ja) * | 1981-10-30 | 1983-05-06 | Yokogawa Hewlett Packard Ltd | 容量あるいは他のパラメ−タの測定装置 |
JPH0726858B2 (ja) * | 1988-07-08 | 1995-03-29 | ヤマハ株式会社 | エンコーダ用信号処理回路 |
JPH02251720A (ja) * | 1989-03-27 | 1990-10-09 | Fanuc Ltd | エンコーダの内挿方式 |
US5184062A (en) * | 1990-05-11 | 1993-02-02 | Nicolet Instrument Corporation | Dynamically calibrated trigger for oscilloscopes |
ATE125964T1 (de) * | 1990-12-03 | 1995-08-15 | Siemens Ag | Verfahren zum detektieren einer amplituden- und offset-abweichung zweier etwa 90 elektrisch versetzter siusförmiger signale sowie schaltung zur durchführung dieses verfahrens und verwendung dieses verfahrens für einen regler. |
EP0496095B1 (de) * | 1991-01-21 | 1994-06-01 | Siemens Aktiengesellschaft | Verfahren zum Überwachen der Ausgangssignale einer Gebereinrichtung |
JPH05122075A (ja) * | 1991-10-24 | 1993-05-18 | Sharp Corp | アナログ/デイジタル変換装置 |
US5432443A (en) * | 1992-06-23 | 1995-07-11 | Sony Magnescale Inc. | Linear position detector including a phase shifter and a sample-and-hold circuit for synchronizing a sample pulse period with the reference period of the equilibrium modulated signal |
DE4224225C2 (de) * | 1992-07-22 | 1996-03-14 | Walter Dr Mehnert | Schaltungsanordnung für einen induktiven Stellungsgeber |
JP3173531B2 (ja) * | 1992-09-18 | 2001-06-04 | ソニー株式会社 | 位置検出方法 |
JPH06167354A (ja) * | 1992-11-27 | 1994-06-14 | Sony Magnescale Inc | スケールの内挿処理装置 |
JP3208933B2 (ja) * | 1993-06-01 | 2001-09-17 | 株式会社ニコン | 位置測定装置 |
JPH07229757A (ja) * | 1994-02-18 | 1995-08-29 | Canon Inc | 信号処理装置、位置検出装置及び駆動装置 |
-
1994
- 1994-10-20 JP JP25549694A patent/JP3367226B2/ja not_active Expired - Lifetime
-
1995
- 1995-10-19 US US08/545,504 patent/US5943639A/en not_active Expired - Lifetime
- 1995-10-20 EP EP95116573A patent/EP0708311B1/de not_active Expired - Lifetime
- 1995-10-20 DE DE69518964T patent/DE69518964T2/de not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10163528A1 (de) * | 2001-12-21 | 2003-07-10 | Siemens Ag | Verfahren zur Fehlerkompensation von sin/cos-Lagemesssystemen nach Offset-, Amplituden- und Phasenfehler |
DE10163528B4 (de) * | 2001-12-21 | 2005-07-07 | Siemens Ag | Verfahren zur Fehlerkompensation von sin/cos-Lagemesssystemen nach Offset-, Amplituden- und Phasenfehler |
DE10303495B4 (de) | 2003-01-30 | 2018-12-27 | Robert Bosch Gmbh | Verfahren zur Offset-Bestimmung von Winkelsensorsignalen |
WO2021151417A1 (de) * | 2020-01-29 | 2021-08-05 | Schaeffler Technologies AG & Co. KG | Kupplungsaktor, erfassungssystem und verfahren zur erfassung einer winkelposition eines drehbauteils |
Also Published As
Publication number | Publication date |
---|---|
EP0708311A2 (de) | 1996-04-24 |
JP3367226B2 (ja) | 2003-01-14 |
JPH08122097A (ja) | 1996-05-17 |
EP0708311A3 (de) | 1996-08-07 |
EP0708311B1 (de) | 2000-09-27 |
DE69518964D1 (de) | 2000-11-02 |
US5943639A (en) | 1999-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MAGNESCALE CO., LTD., TOKYO, JP |