DE69515572T2 - Verfahren zum Herstellen eines Substrates eines Tintenstrahldruckkopfes, Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsapparat - Google Patents
Verfahren zum Herstellen eines Substrates eines Tintenstrahldruckkopfes, Tintenstrahldruckkopf und TintenstrahlaufzeichnungsapparatInfo
- Publication number
- DE69515572T2 DE69515572T2 DE69515572T DE69515572T DE69515572T2 DE 69515572 T2 DE69515572 T2 DE 69515572T2 DE 69515572 T DE69515572 T DE 69515572T DE 69515572 T DE69515572 T DE 69515572T DE 69515572 T2 DE69515572 T2 DE 69515572T2
- Authority
- DE
- Germany
- Prior art keywords
- ink jet
- print head
- jet print
- manufacturing
- recording apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20164494 | 1994-08-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69515572D1 DE69515572D1 (de) | 2000-04-20 |
DE69515572T2 true DE69515572T2 (de) | 2000-08-31 |
Family
ID=16444509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69515572T Expired - Lifetime DE69515572T2 (de) | 1994-08-26 | 1995-08-24 | Verfahren zum Herstellen eines Substrates eines Tintenstrahldruckkopfes, Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsapparat |
Country Status (3)
Country | Link |
---|---|
US (1) | US5660739A (de) |
EP (1) | EP0698494B1 (de) |
DE (1) | DE69515572T2 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09109392A (ja) * | 1995-10-13 | 1997-04-28 | Canon Inc | インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置 |
US6532027B2 (en) * | 1997-12-18 | 2003-03-11 | Canon Kabushiki Kaisha | Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus |
US6293654B1 (en) | 1998-04-22 | 2001-09-25 | Hewlett-Packard Company | Printhead apparatus |
US6799838B2 (en) * | 1998-08-31 | 2004-10-05 | Canon Kabushiki Kaisha | Liquid discharge head liquid discharge method and liquid discharge apparatus |
US6357862B1 (en) | 1998-10-08 | 2002-03-19 | Canon Kabushiki Kaisha | Substrate for ink jet recording head, ink jet recording head and method of manufacture therefor |
EP1005996A3 (de) | 1998-12-03 | 2000-12-06 | Canon Kabushiki Kaisha | Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes |
US6331049B1 (en) * | 1999-03-12 | 2001-12-18 | Hewlett-Packard Company | Printhead having varied thickness passivation layer and method of making same |
US6491377B1 (en) * | 1999-08-30 | 2002-12-10 | Hewlett-Packard Company | High print quality printhead |
JP3576888B2 (ja) | 1999-10-04 | 2004-10-13 | キヤノン株式会社 | インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置 |
US6435660B1 (en) | 1999-10-05 | 2002-08-20 | Canon Kabushiki Kaisha | Ink jet recording head substrate, ink jet recording head, ink jet recording unit, and ink jet recording apparatus |
JP2001171126A (ja) | 1999-10-05 | 2001-06-26 | Canon Inc | 発熱抵抗素子を備えたインクジェットヘッド用基板と、それを用いるインクジェットヘッド、インクジェット装置及び記録方法 |
JP3720689B2 (ja) | 2000-07-31 | 2005-11-30 | キヤノン株式会社 | インクジェットヘッド用基体、インクジェットヘッド、インクジェットヘッドの製造方法、インクジェットヘッドの使用方法およびインクジェット記録装置 |
JP2003145770A (ja) * | 2001-11-15 | 2003-05-21 | Canon Inc | 記録ヘッド用基板、記録ヘッド、記録装置、および記録ヘッドの製造方法 |
US7152957B2 (en) * | 2002-12-18 | 2006-12-26 | Canon Kabushiki Kaisha | Recording device board having a plurality of bumps for connecting an electrode pad and an electrode lead, liquid ejection head, and manufacturing method for the same |
US7163274B2 (en) * | 2003-12-29 | 2007-01-16 | Industrial Technology Research Institute | Inkjet dispensing apparatus |
JP4137027B2 (ja) * | 2004-08-16 | 2008-08-20 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4182035B2 (ja) | 2004-08-16 | 2008-11-19 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4208793B2 (ja) * | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4208794B2 (ja) * | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4646602B2 (ja) * | 2004-11-09 | 2011-03-09 | キヤノン株式会社 | インクジェット記録ヘッド用基板の製造方法 |
KR100619077B1 (ko) * | 2005-04-18 | 2006-08-31 | 삼성전자주식회사 | TiN0.3로 이루어진 열발생저항체를 구비하는잉크젯프린트헤드 |
JP2006327180A (ja) * | 2005-04-28 | 2006-12-07 | Canon Inc | インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録装置、およびインクジェット記録ヘッド用基板の製造方法 |
WO2007105801A1 (ja) * | 2006-03-10 | 2007-09-20 | Canon Kabushiki Kaisha | 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法 |
JP4963679B2 (ja) * | 2007-05-29 | 2012-06-27 | キヤノン株式会社 | 液体吐出ヘッド用基体及びその製造方法、並びに該基体を用いる液体吐出ヘッド |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1127227A (en) * | 1977-10-03 | 1982-07-06 | Ichiro Endo | Liquid jet recording process and apparatus therefor |
US4451994A (en) * | 1982-05-26 | 1984-06-05 | Fowler Donald M | Resilient midsole component for footwear |
JPH0643128B2 (ja) * | 1983-02-05 | 1994-06-08 | キヤノン株式会社 | インクジェットヘッド |
JPS59194860A (ja) * | 1983-04-19 | 1984-11-05 | Canon Inc | 液体噴射記録ヘツド |
JPH062414B2 (ja) * | 1983-04-19 | 1994-01-12 | キヤノン株式会社 | インクジェットヘッド |
JPH0624855B2 (ja) * | 1983-04-20 | 1994-04-06 | キヤノン株式会社 | 液体噴射記録ヘッド |
JPS59194867A (ja) * | 1983-04-20 | 1984-11-05 | Canon Inc | ヘッドの製造方法 |
JPS60116452A (ja) * | 1983-11-30 | 1985-06-22 | Canon Inc | インクジェットヘッド |
GB2151555B (en) * | 1983-11-30 | 1988-05-05 | Canon Kk | Liquid jet recording head |
JPS60159062A (ja) * | 1984-01-31 | 1985-08-20 | Canon Inc | 液体噴射記録ヘツド |
US4719478A (en) * | 1985-09-27 | 1988-01-12 | Canon Kabushiki Kaisha | Heat generating resistor, recording head using such resistor and drive method therefor |
JPS62103148A (ja) * | 1985-10-31 | 1987-05-13 | Canon Inc | 液体噴射記録ヘツド |
JP2654221B2 (ja) * | 1989-03-01 | 1997-09-17 | キヤノン株式会社 | インクジェット記録ヘッドおよびその製造方法 |
DE69027685T2 (de) * | 1989-03-01 | 1996-11-28 | Canon Kk | Methode zur Herstellung eines Substrats für einen Flüssigkeitsstrahl-Aufzeichnungskopf |
US5140345A (en) * | 1989-03-01 | 1992-08-18 | Canon Kabushiki Kaisha | Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method |
DE69101648T2 (de) * | 1990-01-25 | 1994-08-04 | Canon Kk | Farbstrahlaufzeichnungskopf, Substrat dafür und Vorrichtung. |
ATE140897T1 (de) * | 1990-03-27 | 1996-08-15 | Canon Kk | Mit flüssigkkeitsstrahl arbeitender aufzeichnungskopf |
JPH0590221A (ja) * | 1991-02-20 | 1993-04-09 | Canon Inc | 珪素化合物膜のエツチング方法及び該方法を利用した物品の形成方法 |
-
1995
- 1995-08-22 US US08/517,692 patent/US5660739A/en not_active Expired - Lifetime
- 1995-08-24 EP EP95113325A patent/EP0698494B1/de not_active Expired - Lifetime
- 1995-08-24 DE DE69515572T patent/DE69515572T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0698494B1 (de) | 2000-03-15 |
EP0698494A2 (de) | 1996-02-28 |
US5660739A (en) | 1997-08-26 |
DE69515572D1 (de) | 2000-04-20 |
EP0698494A3 (de) | 1997-02-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |