DE69500356D1 - Optoelektrische Gegenstände und Verfahren zu ihrer Herstellung - Google Patents

Optoelektrische Gegenstände und Verfahren zu ihrer Herstellung

Info

Publication number
DE69500356D1
DE69500356D1 DE69500356T DE69500356T DE69500356D1 DE 69500356 D1 DE69500356 D1 DE 69500356D1 DE 69500356 T DE69500356 T DE 69500356T DE 69500356 T DE69500356 T DE 69500356T DE 69500356 D1 DE69500356 D1 DE 69500356D1
Authority
DE
Germany
Prior art keywords
optoelectric
objects
manufacture
optoelectric objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69500356T
Other languages
English (en)
Other versions
DE69500356T2 (de
Inventor
Tsuguo Fukuda
Tatsuo Kawaguchi
Minoru Imaeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69500356D1 publication Critical patent/DE69500356D1/de
Application granted granted Critical
Publication of DE69500356T2 publication Critical patent/DE69500356T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/131—Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/30—Niobates; Vanadates; Tantalates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69500356T 1994-03-25 1995-03-17 Optoelektrische Gegenstände und Verfahren zu ihrer Herstellung Expired - Fee Related DE69500356T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05561394A JP3479111B2 (ja) 1994-03-25 1994-03-25 電気光学品

Publications (2)

Publication Number Publication Date
DE69500356D1 true DE69500356D1 (de) 1997-07-24
DE69500356T2 DE69500356T2 (de) 1997-11-20

Family

ID=13003628

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69500356T Expired - Fee Related DE69500356T2 (de) 1994-03-25 1995-03-17 Optoelektrische Gegenstände und Verfahren zu ihrer Herstellung

Country Status (4)

Country Link
US (2) US5643688A (de)
EP (1) EP0676490B1 (de)
JP (1) JP3479111B2 (de)
DE (1) DE69500356T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3479111B2 (ja) * 1994-03-25 2003-12-15 日本碍子株式会社 電気光学品
JPH10194900A (ja) 1996-12-27 1998-07-28 Ngk Insulators Ltd 光学単結晶膜の製造方法、光学単結晶膜および光学部品
US6518078B2 (en) * 1998-09-21 2003-02-11 California Institute Of Technology Articles useful as optical waveguides and method for manufacturing same
US6625368B1 (en) * 1999-10-15 2003-09-23 California Institute Of Technology Titanium-indiffusion waveguides and methods of fabrication
US6803028B2 (en) * 2002-04-08 2004-10-12 Corning Incorporated Method of making stoichiometric lithium niobate
US6885781B2 (en) * 2002-05-03 2005-04-26 Fujitsu Limited Thin film electro-optical deflector device and a method of fabrication of such a device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5310448A (en) * 1988-08-26 1994-05-10 Crystal Technology, Inc. Composition for growth of homogeneous lithium niobate crystals
WO1991004360A1 (en) * 1989-09-20 1991-04-04 Ibiden Co., Ltd. Thin film of lithium niobate single crystal and production thereof
JP3148896B2 (ja) * 1990-11-30 2001-03-26 イビデン株式会社 ニオブ酸リチウム単結晶薄膜
JPH05117096A (ja) * 1991-10-30 1993-05-14 Tokin Corp ニオブ酸リチウム単結晶の薄膜の育成方法
JP3479111B2 (ja) * 1994-03-25 2003-12-15 日本碍子株式会社 電気光学品

Also Published As

Publication number Publication date
JP3479111B2 (ja) 2003-12-15
DE69500356T2 (de) 1997-11-20
EP0676490A1 (de) 1995-10-11
US5985022A (en) 1999-11-16
JPH07267792A (ja) 1995-10-17
EP0676490B1 (de) 1997-06-18
US5643688A (en) 1997-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee