DE69426058D1 - Vorrichtung zur optischen Beleuchtung - Google Patents

Vorrichtung zur optischen Beleuchtung

Info

Publication number
DE69426058D1
DE69426058D1 DE69426058T DE69426058T DE69426058D1 DE 69426058 D1 DE69426058 D1 DE 69426058D1 DE 69426058 T DE69426058 T DE 69426058T DE 69426058 T DE69426058 T DE 69426058T DE 69426058 D1 DE69426058 D1 DE 69426058D1
Authority
DE
Germany
Prior art keywords
lighting device
optical lighting
optical
lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69426058T
Other languages
English (en)
Other versions
DE69426058T2 (de
Inventor
Masayuki Nishiwaki
Hiroshi Sugitani
Tsuyoshi Orikasa
Akira Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69426058D1 publication Critical patent/DE69426058D1/de
Application granted granted Critical
Publication of DE69426058T2 publication Critical patent/DE69426058T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laser Beam Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69426058T 1993-12-22 1994-12-21 Vorrichtung zur optischen Beleuchtung Expired - Lifetime DE69426058T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32515693 1993-12-22

Publications (2)

Publication Number Publication Date
DE69426058D1 true DE69426058D1 (de) 2000-11-09
DE69426058T2 DE69426058T2 (de) 2001-05-10

Family

ID=18173653

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69426058T Expired - Lifetime DE69426058T2 (de) 1993-12-22 1994-12-21 Vorrichtung zur optischen Beleuchtung

Country Status (3)

Country Link
US (1) US5828496A (de)
EP (1) EP0660158B1 (de)
DE (1) DE69426058T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3082652B2 (ja) * 1994-12-27 2000-08-28 キヤノン株式会社 照明装置及びそれを用いたデバイスの製造方法
JP3239661B2 (ja) * 1994-12-27 2001-12-17 キヤノン株式会社 ノズルプレートの製造方法及び照明光学系
US5986744A (en) * 1995-02-17 1999-11-16 Nikon Corporation Projection optical system, illumination apparatus, and exposure apparatus
JP3689490B2 (ja) * 1996-06-07 2005-08-31 キヤノン株式会社 ノズル部材の製造方法及びそれを用いた加工装置
JPH1041225A (ja) * 1996-07-24 1998-02-13 Canon Inc 照明装置及びそれを用いた投影露光装置
JPH10166167A (ja) * 1996-12-03 1998-06-23 Komatsu Ltd レーザマーキング方法及び装置
JP3094933B2 (ja) * 1997-01-17 2000-10-03 キヤノン株式会社 光加工機及びそれを用いたオリフィスプレートの製造方法
GB2329036A (en) * 1997-09-05 1999-03-10 Sharp Kk Optical system for redistributing optical extent and illumination source
DE69826950T2 (de) * 1997-09-05 2006-02-23 Sharp K.K. Dunkelfeld-Projektionsanzeigegerät
JP5110830B2 (ja) 2006-08-31 2012-12-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2015512786A (ja) * 2012-02-10 2015-04-30 リモ パテントフェルヴァルトゥング ゲーエムベーハー ウント コー．カーゲーＬＩＭＯ Ｐａｔｅｎｔｖｅｒｗａｌｔｕｎｇ ＧｍｂＨ ＆ Ｃｏ．ＫＧ 加工対象物の表面を加工するための、または加工対象物の外側面または内側面上のコーティングを後処理するための装置
CN109732201B (zh) * 2019-01-18 2020-05-19 吉林大学 利用三棱台棱镜进行近4π立体角飞秒激光直写加工的方法及其应用

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1523033A (en) * 1976-03-03 1978-08-31 Crosfield Electronics Ltd Image reproducing systems
US5091744A (en) * 1984-02-13 1992-02-25 Canon Kabushiki Kaisha Illumination optical system
JPS60232552A (ja) * 1984-05-02 1985-11-19 Canon Inc 照明光学系
US4851882A (en) * 1985-12-06 1989-07-25 Canon Kabushiki Kaisha Illumination optical system
US4733944A (en) * 1986-01-24 1988-03-29 Xmr, Inc. Optical beam integration system
JP2657957B2 (ja) * 1990-04-27 1997-09-30 キヤノン株式会社 投影装置及び光照射方法
EP0967524A3 (de) * 1990-11-15 2000-01-05 Nikon Corporation Verfahren und Vorrichtung zur Projektionsbelichtung

Also Published As

Publication number Publication date
EP0660158B1 (de) 2000-10-04
DE69426058T2 (de) 2001-05-10
EP0660158A2 (de) 1995-06-28
EP0660158A3 (de) 1995-11-02
US5828496A (en) 1998-10-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition