DE69416563D1 - Vorrichtung zur Bestimmung von physikalischen Eigenschaften eines Mikrogebiets - Google Patents
Vorrichtung zur Bestimmung von physikalischen Eigenschaften eines MikrogebietsInfo
- Publication number
- DE69416563D1 DE69416563D1 DE69416563T DE69416563T DE69416563D1 DE 69416563 D1 DE69416563 D1 DE 69416563D1 DE 69416563 T DE69416563 T DE 69416563T DE 69416563 T DE69416563 T DE 69416563T DE 69416563 D1 DE69416563 D1 DE 69416563D1
- Authority
- DE
- Germany
- Prior art keywords
- micro
- area
- physical properties
- determining physical
- determining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/30—Scanning potential microscopy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/08—MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/14—STP [Scanning Tunnelling Potentiometry]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
- G01R33/44—Arrangements or instruments for measuring magnetic variables involving magnetic resonance using nuclear magnetic resonance [NMR]
- G01R33/48—NMR imaging systems
- G01R33/54—Signal processing systems, e.g. using pulse sequences ; Generation or control of pulse sequences; Operator console
- G01R33/56—Image enhancement or correction, e.g. subtraction or averaging techniques, e.g. improvement of signal-to-noise ratio and resolution
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
- Y10S977/838—Magnetic property of nanomaterial
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/863—Atomic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/865—Magnetic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/96—Of magnetic property
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Signal Processing (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24823193 | 1993-10-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69416563D1 true DE69416563D1 (de) | 1999-03-25 |
DE69416563T2 DE69416563T2 (de) | 1999-09-23 |
Family
ID=17175121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69416563T Expired - Fee Related DE69416563T2 (de) | 1993-10-04 | 1994-10-03 | Vorrichtung zur Bestimmung von physikalischen Eigenschaften eines Mikrogebiets |
Country Status (4)
Country | Link |
---|---|
US (1) | US5585722A (de) |
EP (1) | EP0648999B1 (de) |
KR (1) | KR950012094A (de) |
DE (1) | DE69416563T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5804709A (en) * | 1995-02-07 | 1998-09-08 | International Business Machines Corporation | Cantilever deflection sensor and use thereof |
EP0726444B1 (de) * | 1995-02-10 | 2001-10-31 | Bruker Analytik Gmbh | Magnetisches Resonanzverfahren und Vorrichtung zum Wahrnehmen der Atomarstruktur einer Probe längs deren Oberfläche |
DE19504855A1 (de) * | 1995-02-15 | 1996-08-22 | Basf Ag | Verfahren zur chemisch differenzierenden Abbildung mittels Rasterkraftmikroskopie |
JPH09229945A (ja) * | 1996-02-23 | 1997-09-05 | Canon Inc | マイクロ構造体を支持するエアブリッジ型構造体の製造方法とその雌型基板、並びに、エアブリッジ型構造体とそれを用いたマイクロ構造体およびトンネル電流または微小力検出用のプローブ |
AU3390697A (en) * | 1996-06-11 | 1998-01-07 | California Institute Of Technology | Force-detected nuclear magnetic resonance |
US7550963B1 (en) * | 1996-09-20 | 2009-06-23 | The Regents Of The University Of California | Analytical scanning evanescent microwave microscope and control stage |
US6166540A (en) | 1997-06-30 | 2000-12-26 | Wollin Ventures, Inc. | Method of resistivity well logging utilizing nuclear magnetic resonance |
JP4327263B2 (ja) | 1998-01-30 | 2009-09-09 | ナヴォテック・ゲーエムベーハー | 多プローブ形試験用ヘッド |
US6147507A (en) * | 1998-08-10 | 2000-11-14 | Advanced Micro Devices, Inc. | System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer |
JP2000304790A (ja) | 1999-04-23 | 2000-11-02 | Hitachi Ltd | 電磁波発生源探査装置、その方法およびその解析方法 |
US6683451B1 (en) | 1999-09-30 | 2004-01-27 | Wayne State University | Magnetic resonance force microscope for the study of biological systems |
DE10207725B4 (de) * | 2002-02-20 | 2006-02-16 | Bruker Biospin Gmbh | Resonatoranordnung für Elektronenspinresonanz (ESR)-Messungen und Verfahren zum Messen von Elektronenspinresonanz (ESR)-Signalen |
AU2003224940A1 (en) * | 2002-04-12 | 2003-10-27 | California Institute Of Technology | System and method of magnetic resonance imaging |
KR20060127918A (ko) * | 2004-01-26 | 2006-12-13 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 온-칩 자기공명 측정 장치, 방법 및 이 장치의 사용 방법 |
US7109706B2 (en) * | 2004-08-31 | 2006-09-19 | Intematix Corporation | Integrated EWP-STM spin resonance microscope |
US7170288B2 (en) * | 2004-12-22 | 2007-01-30 | Fullerton Larry W | Parametric nuclear quadrupole resonance spectroscopy system and method |
JP2007232596A (ja) * | 2006-03-01 | 2007-09-13 | Jeol Ltd | 磁気共鳴力顕微鏡 |
US20100033181A1 (en) * | 2008-08-07 | 2010-02-11 | Villanova University | Levitating MEMS Resonator for Magnetic Resonance Force Microscopy |
US8952699B2 (en) | 2011-01-04 | 2015-02-10 | Pnqr Llc | Nuclear quadrupole resonance system and method for interfacing with a subject material |
DE102011083066B4 (de) * | 2011-09-20 | 2015-05-07 | Siemens Aktiengesellschaft | Vorrichtung zur Leistungsmessung und Magnetresonanzeinrichtung |
US8549661B2 (en) * | 2012-01-30 | 2013-10-01 | The United States Of America As Represented By The Secretary Of The Army | Apparatus for performing magnetic resonance force microscopy on large area samples |
US9625366B2 (en) * | 2013-11-11 | 2017-04-18 | 3R Valo, société en commandite | Microwave resonator sensor and associated methods of sensing |
US10585154B1 (en) * | 2018-01-29 | 2020-03-10 | Quantum Valley Investment Fund LP | Nuclear magnetic resonance diffraction |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4733182A (en) * | 1986-03-25 | 1988-03-22 | The United States Of America As Represented By The United States Department Of Energy | Josephson junction Q-spoiler |
US4851762A (en) * | 1988-08-31 | 1989-07-25 | The John Hopkins University | Novel technique using magnetic field dependent phase detection for detection of superconductivity |
US4941753A (en) * | 1989-04-07 | 1990-07-17 | International Business Machines Corp. | Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control |
DE58909700D1 (de) * | 1989-12-01 | 1996-08-14 | Siemens Ag | Verfahren zum Betrieb eines Kernspintomographiegeräts mit einem Resonanzkreis zur Erzeugung von Gradientenfeldern |
US5166615A (en) * | 1991-02-11 | 1992-11-24 | The Board Of Regents Of The University Of Washington | System for detecting nuclear magnetic resonance signals from small samples |
US5319977A (en) * | 1991-06-20 | 1994-06-14 | The Board Of Trustees Of The Leland Stanford Junior University | Near field acoustic ultrasonic microscope system and method |
JPH0540100A (ja) * | 1991-08-06 | 1993-02-19 | Hitachi Ltd | 表面検査装置及び表面検査方法 |
EP0551814B1 (de) * | 1992-01-10 | 1997-04-02 | Hitachi, Ltd. | Verfahren und Vorrichtung zum Beobachten einer Fläche |
US5266896A (en) * | 1992-06-09 | 1993-11-30 | International Business Machines Corporation | Mechanical detection and imaging of magnetic resonance by magnetic moment modulation |
US5412322A (en) * | 1993-06-24 | 1995-05-02 | Wollin Ventures, Inc. | Apparatus and method for spatially ordered phase encoding and for determining complex permittivity in magnetic resonance by using superimposed time-varying electric fields |
US5410910A (en) * | 1993-12-22 | 1995-05-02 | University Of Virginia Patent Foundation | Cryogenic atomic force microscope |
-
1994
- 1994-09-30 KR KR1019940025036A patent/KR950012094A/ko not_active Application Discontinuation
- 1994-10-03 EP EP94307222A patent/EP0648999B1/de not_active Expired - Lifetime
- 1994-10-03 DE DE69416563T patent/DE69416563T2/de not_active Expired - Fee Related
- 1994-10-04 US US08/317,737 patent/US5585722A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69416563T2 (de) | 1999-09-23 |
EP0648999A1 (de) | 1995-04-19 |
EP0648999B1 (de) | 1999-02-17 |
KR950012094A (ko) | 1995-05-16 |
US5585722A (en) | 1996-12-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8339 | Ceased/non-payment of the annual fee |