DE69409575T2 - Membranventil - Google Patents

Membranventil

Info

Publication number: DE69409575T2
Authority: DE; Germany
Prior art keywords: diaphragm valve; diaphragm; valve
Prior art date: 1993-06-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69409575T

Other languages

English (en)

Other versions

DE69409575D1 (de

Inventor

Shigeru Itoi

Michio Yamaji

Tetsuya Kojima

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

KYOHARA MASAKO

Original Assignee

KYOHARA MASAKO

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-06-02

Filing date

1994-06-02

Publication date

1998-12-24

1994-06-02 Application filed by KYOHARA MASAKO filed Critical KYOHARA MASAKO

1998-05-20 Publication of DE69409575D1 publication Critical patent/DE69409575D1/de

1998-12-24 Application granted granted Critical

1998-12-24 Publication of DE69409575T2 publication Critical patent/DE69409575T2/de

2014-06-03 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Lift Valve (AREA)
Details Of Valves (AREA)

DE69409575T 1993-06-02 1994-06-02 Membranventil Expired - Fee Related DE69409575T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP13193993A JP3280119B2 (ja)	1993-06-02	1993-06-02	ダイヤフラム弁

Publications (2)

Publication Number	Publication Date
DE69409575D1 DE69409575D1 (de)	1998-05-20
DE69409575T2 true DE69409575T2 (de)	1998-12-24

Family

ID=15069746

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69409575T Expired - Fee Related DE69409575T2 (de)	1993-06-02	1994-06-02	Membranventil

Country Status (8)

Country	Link
US (1)	US5485984A (de)
EP (1)	EP0627583B1 (de)
JP (1)	JP3280119B2 (de)
KR (1)	KR0153229B1 (de)
CA (1)	CA2124781C (de)
DE (1)	DE69409575T2 (de)
SG (1)	SG45185A1 (de)
TW (1)	TW298282U (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5851004A (en) *	1996-10-16	1998-12-22	Parker-Hannifin Corporation	High pressure actuated metal seated diaphragm valve
US5730423A (en) *	1996-10-16	1998-03-24	Parker-Hannifin Corporation	All metal diaphragm valve
US6092550A (en) *	1997-02-03	2000-07-25	Swagelok Marketing Co.	Diaphragm valve seat arrangement
FR2759760B1 (fr)	1997-02-17	1999-05-21	Asm France Sa	Vanne a membrane
FR2762891B1 (fr) *	1997-05-02	1999-07-30	Transfluid Sa	Vanne a membrane
JP3586075B2 (ja) *	1997-08-15	2004-11-10	忠弘大見	圧力式流量制御装置
US5909747A (en) *	1998-04-03	1999-06-08	American Meter Company	Radial flow diaphragm valve
JP3522535B2 (ja) *	1998-05-29	2004-04-26	忠弘大見	圧力式流量制御装置を備えたガス供給設備
JP4700234B2 (ja)	2001-07-31	2011-06-15	株式会社フジキン	ダイヤフラム弁
US6431229B1 (en) *	2001-08-24	2002-08-13	Air Products And Chemicals, Inc.	Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
US20030042459A1 (en) *	2001-08-29	2003-03-06	Gregoire Roger J.	Unitary diaphragm and seat assembly
TW572164U (en) *	2002-12-06	2004-01-11	Ind Tech Res Inst	Diaphragm valve
CA2462342C (en) *	2003-03-28	2010-10-12	Pn Ii, Inc.	Universal rake-ridge cap
WO2004092622A2 (en) *	2003-04-14	2004-10-28	Swagelok Company	Diaphragm valve seat
JP4211516B2 (ja) *	2003-07-28	2009-01-21	セイコーエプソン株式会社	流路弁及び同流路弁を備えた液体噴射装置
US6988513B2 (en) *	2003-10-27	2006-01-24	Delaney Machinerie Inc.	Proportional valve
JP2005188672A (ja) *	2003-12-26	2005-07-14	Neriki:Kk	バルブ装置
US6997440B2 (en) *	2004-03-29	2006-02-14	Tescom Corporation	Packless valve apparatus
US7686280B2 (en) *	2005-12-28	2010-03-30	Circor Instrumentation Technologies, Inc.	Removable valve seat member for diaphragm valve
ES2810152T3 (es) *	2007-03-24	2021-03-08	Afa Polytek Bv	Sistema de compresión previa para un dispositivo de dispensación de líquido y método de montaje de tal sistema de compresión previa
US8414535B2 (en) *	2007-04-12	2013-04-09	Sterling Investments Lc	Miniature pump device and method
JP5140400B2 (ja) *	2007-12-04	2013-02-06	株式会社ハムレット・モトヤマ・ジャパン	弁構造
US8696336B2 (en) *	2008-10-22	2014-04-15	Sterling Investments, Lc	Miniature pump device with an anti-free flow valve
JP2010144765A (ja) *	2008-12-16	2010-07-01	Hamlet Motoyama Japan:Kk	ダイヤフラム弁
US8844901B2 (en) *	2009-03-27	2014-09-30	Horiba Stec, Co., Ltd.	Flow control valve
US8245727B2 (en)	2009-06-26	2012-08-21	Pamela Mooney, legal representative	Flow control valve and method of use
JP5153898B2 (ja) *	2010-04-28	2013-02-27	セントラル硝子株式会社	ハロゲンガス又はハロゲン化合物ガスの充填容器用バルブ
WO2012178132A1 (en)	2011-06-24	2012-12-27	Equilibar, Llc	Back pressure regulator with floating seal support
JP5802532B2 (ja)	2011-12-05	2015-10-28	株式会社フジキン	ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) *	2011-12-06	2013-06-17	Fujikin Inc	ダイヤフラム弁
WO2014120997A1 (en) *	2013-02-01	2014-08-07	Swagelok Company	Diaphragm valve with welded diaphragm seat carrier
WO2015006483A1 (en) *	2013-07-09	2015-01-15	Deka Products Limited Partnership	Valve apparatus and system
JP6564593B2 (ja) *	2015-03-25	2019-08-21	株式会社フジキン	ダイヤフラム弁
US10641407B2 (en) *	2016-02-29	2020-05-05	Fujikin Incorporated	Flow rate control device
KR101708756B1 (ko)	2016-09-21	2017-02-21	태광후지킨 주식회사	잠금형 다이어프램 밸브
US10774938B2 (en) *	2017-11-09	2020-09-15	Swagelok Company	Diaphragm valve with metal seat
US11402029B2 (en) *	2018-04-06	2022-08-02	Fujikin Incorporated	Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
WO2020021911A1 (ja) *	2018-07-24	2020-01-30	株式会社フジキン	バルブ装置、流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
JP7237370B2 (ja)	2018-07-31	2023-03-13	株式会社フジキン	バルブ装置
CN112930454A (zh) *	2018-10-26	2021-06-08	株式会社富士金	阀装置和气体供给***
CN109326759B (zh) *	2018-10-30	2022-03-18	广州小鹏汽车科技有限公司	压力调节装置及电池***
JP2020165476A (ja) *	2019-03-29	2020-10-08	株式会社フジキン	ダイヤフラムバルブ
JPWO2021192753A1 (de) *	2020-03-26	2021-09-30
KR102311898B1 (ko)	2020-05-12	2021-10-13	주식회사 아스플로	잠금 기능을 갖는 밸브 및 잠금 기능을 갖는 밸브의 작동방법
KR102673585B1 (ko) *	2022-12-28	2024-06-12	주식회사 현대케피코	교체 가능한 밸브시트가 적용된 수소공급 밸브
KR102673586B1 (ko) *	2022-12-28	2024-06-12	주식회사 현대케피코	수소공급 밸브 및 조립방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB320778A (en) *	1928-10-26	1929-10-24	Philip Keith Saunders	Improvements in and means for operating diaphragm valves
US2856148A (en) *	1952-02-08	1958-10-14	Vickers Electrical Co Ltd	Valve assembly
GB1462176A (en) *	1973-07-27	1977-01-19	Fordham Pressings Ltd	Valves
DE3444865A1 (de) *	1984-12-08	1986-06-12	Regel + Meßtechnik GmbH Regler- und Anlagenbau für Gas-Druckregelung, 3500 Kassel	Druckmittelbetaetigtes membranventil
JPS63115970A (ja) *	1986-10-31	1988-05-20	Motoyama Seisakusho:Kk	ダイヤフラム弁
US4741510A (en) *	1987-09-04	1988-05-03	Baumann Hans D	Flow control valve
US4846215A (en) *	1988-06-07	1989-07-11	Marathon Oil Company	Back pressure regulator
JPH03115970A (ja) *	1989-09-29	1991-05-16	Ngk Insulators Ltd	ボールの自動超音波探傷検査装置
JPH03153974A (ja) *	1989-11-08	1991-07-01	Moon Star Co	バルブシール部にシールリングを嵌合する方法
JPH086828B2 (ja) *	1991-08-09	1996-01-29	株式会社ベンカン	メタルダイヤフラム弁
JP2927582B2 (ja) *	1991-08-26	1999-07-28	清原まさ子	制御器
US5295662A (en) *	1991-08-26	1994-03-22	Masako Kiyohara	Fluid flow-controller with improved diaphragm
US5215286A (en) *	1992-05-26	1993-06-01	Nupro Company	High pressure diaphragm valve

1993
- 1993-06-02 JP JP13193993A patent/JP3280119B2/ja not_active Expired - Fee Related
1994
- 1994-05-25 KR KR1019940011352A patent/KR0153229B1/ko not_active IP Right Cessation
- 1994-05-27 US US08/250,609 patent/US5485984A/en not_active Expired - Lifetime
- 1994-05-31 CA CA002124781A patent/CA2124781C/en not_active Expired - Fee Related
- 1994-06-02 SG SG1996001075A patent/SG45185A1/en unknown
- 1994-06-02 DE DE69409575T patent/DE69409575T2/de not_active Expired - Fee Related
- 1994-06-02 EP EP94303959A patent/EP0627583B1/de not_active Expired - Lifetime
- 1994-07-26 TW TW085204746U patent/TW298282U/zh unknown

Also Published As

Publication number	Publication date
KR0153229B1 (ko)	1999-02-18
DE69409575D1 (de)	1998-05-20
SG45185A1 (en)	1998-01-16
JPH06341560A (ja)	1994-12-13
KR950001154A (ko)	1995-01-03
EP0627583B1 (de)	1998-04-15
CA2124781C (en)	1998-12-22
TW298282U (en)	1997-02-11
CA2124781A1 (en)	1994-12-03
EP0627583A2 (de)	1994-12-07
EP0627583A3 (de)	1995-03-22
US5485984A (en)	1996-01-23
JP3280119B2 (ja)	2002-04-30

Legal Events

Date	Code	Title	Description
1999-05-12	8364	No opposition during term of opposition
2010-04-22	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE69409575D1 (de)	1998-05-20	Membranventil
DE69517380D1 (de)	2000-07-13	Membranventil
DE69613638D1 (de)	2001-08-09	Membranventil
DE69431761D1 (de)	2003-01-02	Multifunktions-rueckschlagventil
DE69502805T2 (de)	1999-01-14	Membranventil
DE69413100T2 (de)	1999-02-04	Hochdruckmembranventil
DK1170184T3 (da)	2013-03-18	Ventilkonnektor
DE59401608D1 (de)	1997-02-27	Ventilblock
DE69614285D1 (de)	2001-09-13	Membranventil
DE59600027D1 (de)	1997-10-23	Ventilanordnung
DE59607401D1 (de)	2001-09-06	Ventilanordnung
BR9601163A (pt)	1998-01-06	Válvula
ITMI940438A0 (it)	1994-03-10	Valvola combinata
DE59404227D1 (de)	1997-11-06	Ventilanordnung
DE59405288D1 (de)	1998-04-02	Ventilanordnung
DE59400983D1 (de)	1996-12-12	Ventilblockaggregat
ATA109790A (de)	1991-10-15	Membranventil
DE59406388D1 (de)	1998-08-13	Ventilanordnung
BR9601068A (pt)	1998-01-06	Válvula
BR9300293A (pt)	1994-08-16	Válvula de pressão aperfeiçoada
DE59405336D1 (de)	1998-04-09	Ventilanordnung
DE59408022D1 (de)	1999-05-06	Ventilanordnung
DE69410383D1 (de)	1998-06-25	Ventilanordnung
FI980835A0 (fi)	1998-04-14	Venttiili
DE59401078D1 (de)	1997-01-02	Ventilanordnung