DE69320520T2 - Verfahren zur Herstellung eines Heteroübergangsbipolartransistors - Google Patents
Verfahren zur Herstellung eines HeteroübergangsbipolartransistorsInfo
- Publication number
- DE69320520T2 DE69320520T2 DE69320520T DE69320520T DE69320520T2 DE 69320520 T2 DE69320520 T2 DE 69320520T2 DE 69320520 T DE69320520 T DE 69320520T DE 69320520 T DE69320520 T DE 69320520T DE 69320520 T2 DE69320520 T2 DE 69320520T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- bipolar transistor
- heterojunction bipolar
- heterojunction
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66242—Heterojunction transistors [HBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/732—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/737—Hetero-junction transistors
- H01L29/7371—Vertical transistors
- H01L29/7378—Vertical transistors comprising lattice mismatched active layers, e.g. SiGe strained layer transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4121283A JP2971246B2 (ja) | 1992-04-15 | 1992-04-15 | ヘテロバイポーラトランジスタの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69320520D1 DE69320520D1 (de) | 1998-10-01 |
DE69320520T2 true DE69320520T2 (de) | 1999-02-11 |
Family
ID=14807426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69320520T Expired - Fee Related DE69320520T2 (de) | 1992-04-15 | 1993-04-15 | Verfahren zur Herstellung eines Heteroübergangsbipolartransistors |
Country Status (5)
Country | Link |
---|---|
US (2) | US5365090A (de) |
EP (1) | EP0566112B1 (de) |
JP (1) | JP2971246B2 (de) |
KR (1) | KR0132769B1 (de) |
DE (1) | DE69320520T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7285470B2 (en) | 2003-04-10 | 2007-10-23 | Infineon Technologies Ag | Method for the production of a bipolar semiconductor component, especially a bipolar transistor, and corresponding bipolar semiconductor component |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3156436B2 (ja) * | 1993-04-05 | 2001-04-16 | 日本電気株式会社 | ヘテロ接合バイポーラトランジスタ |
DE69409780T2 (de) * | 1993-12-20 | 1998-11-12 | Nec Corp | Verfahren zur Herstellung opto-elektrischer Halbleiterbauelemente |
US5646073A (en) * | 1995-01-18 | 1997-07-08 | Lsi Logic Corporation | Process for selective deposition of polysilicon over single crystal silicon substrate and resulting product |
US5620907A (en) * | 1995-04-10 | 1997-04-15 | Lucent Technologies Inc. | Method for making a heterojunction bipolar transistor |
US5834800A (en) * | 1995-04-10 | 1998-11-10 | Lucent Technologies Inc. | Heterojunction bipolar transistor having mono crystalline SiGe intrinsic base and polycrystalline SiGe and Si extrinsic base regions |
KR100275544B1 (ko) * | 1995-12-20 | 2001-01-15 | 이계철 | 선택적 컬렉터 박막 성장을 이용한 초자기정렬 바이폴러 트랜지스터의 제조방법 |
KR970054343A (ko) * | 1995-12-20 | 1997-07-31 | 이준 | 규소/규소게르마늄 쌍극자 트랜지스터 제조방법 |
DE19609933A1 (de) * | 1996-03-14 | 1997-09-18 | Daimler Benz Ag | Verfahren zur Herstellung eines Heterobipolartransistors |
JP2877108B2 (ja) * | 1996-12-04 | 1999-03-31 | 日本電気株式会社 | 半導体装置およびその製造方法 |
US5773350A (en) * | 1997-01-28 | 1998-06-30 | National Semiconductor Corporation | Method for forming a self-aligned bipolar junction transistor with silicide extrinsic base contacts and selective epitaxial grown intrinsic base |
JP3137044B2 (ja) * | 1997-08-20 | 2001-02-19 | 日本電気株式会社 | 半導体装置及びその製造方法 |
JPH11126781A (ja) | 1997-10-24 | 1999-05-11 | Nec Corp | 半導体装置及びその製造方法 |
JP2000012552A (ja) | 1998-06-17 | 2000-01-14 | Toshiba Corp | 半導体装置の製造方法及び半導体装置 |
US6368930B1 (en) | 1998-10-02 | 2002-04-09 | Ziptronix | Self aligned symmetric process and device |
FR2800197B1 (fr) * | 1999-10-25 | 2003-02-07 | St Microelectronics Sa | Procede de definition de deux zones autoalignees a la surface superieure d'un substrat |
US6251738B1 (en) * | 2000-01-10 | 2001-06-26 | International Business Machines Corporation | Process for forming a silicon-germanium base of heterojunction bipolar transistor |
US6573539B2 (en) * | 2000-01-10 | 2003-06-03 | International Business Machines Corporation | Heterojunction bipolar transistor with silicon-germanium base |
US6346453B1 (en) * | 2000-01-27 | 2002-02-12 | Sige Microsystems Inc. | Method of producing a SI-GE base heterojunction bipolar device |
US6674102B2 (en) * | 2001-01-25 | 2004-01-06 | International Business Machines Corporation | Sti pull-down to control SiGe facet growth |
US7214593B2 (en) * | 2001-02-01 | 2007-05-08 | International Business Machines Corporation | Passivation for improved bipolar yield |
US6534802B1 (en) * | 2001-05-07 | 2003-03-18 | Newport Fab, Llc | Method for reducing base to collector capacitance and related structure |
EP1280189A1 (de) * | 2001-07-16 | 2003-01-29 | Alcatel | Selektiv-epitaktisches Wachstumverfahren und dadurch hergestellter Bipolartransistor |
US6774455B2 (en) * | 2001-10-01 | 2004-08-10 | Texas Instruments Incorporated | Semiconductor device with a collector contact in a depressed well-region |
US6656809B2 (en) * | 2002-01-15 | 2003-12-02 | International Business Machines Corporation | Method to fabricate SiGe HBTs with controlled current gain and improved breakdown voltage characteristics |
US6936519B2 (en) * | 2002-08-19 | 2005-08-30 | Chartered Semiconductor Manufacturing, Ltd. | Double polysilicon bipolar transistor and method of manufacture therefor |
US7011590B2 (en) * | 2003-07-08 | 2006-03-14 | Shimano, Inc. | Shift assist apparatus for a bicycle transmission |
US6987055B2 (en) * | 2004-01-09 | 2006-01-17 | Micron Technology, Inc. | Methods for deposition of semiconductor material |
ATE495547T1 (de) * | 2005-01-18 | 2011-01-15 | Nxp Bv | Bipolartransistor und herstellungsverfahren dafür |
US7932156B2 (en) * | 2005-08-03 | 2011-04-26 | Nxp B.V. | Bipolar transistor having a second, base-comprising region consisting of a first layer, a second, constrictive, layer, and a third layer |
US7772060B2 (en) * | 2006-06-21 | 2010-08-10 | Texas Instruments Deutschland Gmbh | Integrated SiGe NMOS and PMOS transistors |
KR101244898B1 (ko) * | 2006-06-28 | 2013-03-19 | 삼성디스플레이 주식회사 | 유기 박막 트랜지스터 기판 및 그 제조 방법 |
US7598539B2 (en) * | 2007-06-01 | 2009-10-06 | Infineon Technologies Ag | Heterojunction bipolar transistor and method for making same |
US8975146B2 (en) * | 2013-05-01 | 2015-03-10 | International Business Machines Corporation | Trench isolation structures and methods for bipolar junction transistors |
US9324884B1 (en) * | 2015-02-12 | 2016-04-26 | Cindy X. Qiu | Metal oxynitride diode devices |
DE102016207536B4 (de) * | 2016-05-02 | 2020-03-19 | Infineon Technologies Dresden Gmbh | Verfahren zum Herstellen eines Bipolartransistors |
US10916642B2 (en) * | 2019-04-18 | 2021-02-09 | Globalfoundries U.S. Inc. | Heterojunction bipolar transistor with emitter base junction oxide interface |
TWI755694B (zh) * | 2020-03-12 | 2022-02-21 | 力晶積成電子製造股份有限公司 | 半導體元件及其製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL266513A (de) * | 1960-07-01 | |||
JPS6010776A (ja) * | 1983-06-30 | 1985-01-19 | Fujitsu Ltd | バイポーラトランジスタの製造方法 |
EP0177246B1 (de) * | 1984-09-29 | 1988-08-17 | Kabushiki Kaisha Toshiba | Heteroübergangbipolartransistor und Verfahren zu seiner Herstellung |
JPS61147571A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | ヘテロ接合バイポ−ラトランジスタの製造方法 |
JPS61198776A (ja) * | 1985-02-28 | 1986-09-03 | Fujitsu Ltd | ヘテロ接合バイポ−ラトランジスタおよびその製造方法 |
GB8708926D0 (en) * | 1987-04-14 | 1987-05-20 | British Telecomm | Bipolar transistor |
JPS63291468A (ja) * | 1987-05-25 | 1988-11-29 | Toshiba Corp | ヘテロ接合バイポ−ラトランジスタ |
JPS6489365A (en) * | 1987-09-29 | 1989-04-03 | Nec Corp | Semiconductor device |
NL8800157A (nl) * | 1988-01-25 | 1989-08-16 | Philips Nv | Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
JPH0244772A (ja) * | 1988-08-05 | 1990-02-14 | Hitachi Ltd | 半導体装置及びその製造方法 |
US4935797A (en) * | 1988-10-31 | 1990-06-19 | International Business Machines Corporation | Heterojunction bipolar transistors |
US5198689A (en) * | 1988-11-30 | 1993-03-30 | Fujitsu Limited | Heterojunction bipolar transistor |
US5140400A (en) * | 1989-03-29 | 1992-08-18 | Canon Kabushiki Kaisha | Semiconductor device and photoelectric converting apparatus using the same |
EP0430279A3 (en) * | 1989-12-01 | 1991-07-03 | Hewlett-Packard Company | Si/sige heterojunction bipolar transistor utilizing advanced epitaxial deposition techniques and method of manufacture |
EP0550962A3 (en) * | 1992-01-08 | 1993-09-29 | American Telephone And Telegraph Company | Heterojunction bipolar transistor |
-
1992
- 1992-04-15 JP JP4121283A patent/JP2971246B2/ja not_active Expired - Fee Related
-
1993
- 1993-04-14 KR KR1019930006199A patent/KR0132769B1/ko not_active IP Right Cessation
- 1993-04-14 US US08/045,707 patent/US5365090A/en not_active Expired - Lifetime
- 1993-04-15 DE DE69320520T patent/DE69320520T2/de not_active Expired - Fee Related
- 1993-04-15 EP EP93106125A patent/EP0566112B1/de not_active Expired - Lifetime
-
1994
- 1994-07-25 US US08/280,199 patent/US5399511A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7285470B2 (en) | 2003-04-10 | 2007-10-23 | Infineon Technologies Ag | Method for the production of a bipolar semiconductor component, especially a bipolar transistor, and corresponding bipolar semiconductor component |
Also Published As
Publication number | Publication date |
---|---|
KR930022584A (ko) | 1993-11-24 |
JPH05291286A (ja) | 1993-11-05 |
EP0566112A2 (de) | 1993-10-20 |
JP2971246B2 (ja) | 1999-11-02 |
US5399511A (en) | 1995-03-21 |
US5365090A (en) | 1994-11-15 |
EP0566112B1 (de) | 1998-08-26 |
KR0132769B1 (ko) | 1998-04-16 |
EP0566112A3 (en) | 1994-09-07 |
DE69320520D1 (de) | 1998-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |