DE69311957D1 - Entladungsreaktor - Google Patents

Entladungsreaktor

Info

Publication number
DE69311957D1
DE69311957D1 DE69311957T DE69311957T DE69311957D1 DE 69311957 D1 DE69311957 D1 DE 69311957D1 DE 69311957 T DE69311957 T DE 69311957T DE 69311957 T DE69311957 T DE 69311957T DE 69311957 D1 DE69311957 D1 DE 69311957D1
Authority
DE
Germany
Prior art keywords
discharge reactor
reactor
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311957T
Other languages
English (en)
Other versions
DE69311957T2 (de
Inventor
Ichiro Kamiya
Ryoichi Shinjo
Takeshi Murakami
Yukiko Nishioka
Minoru Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69311957D1 publication Critical patent/DE69311957D1/de
Publication of DE69311957T2 publication Critical patent/DE69311957T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/30—Dielectrics used in the electrical dischargers
    • C01B2201/34—Composition of the dielectrics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/907—Corona or glow discharge means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE69311957T 1992-04-23 1993-04-22 Entladungsreaktor Expired - Fee Related DE69311957T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13016892 1992-04-23
JP13017192 1992-04-23

Publications (2)

Publication Number Publication Date
DE69311957D1 true DE69311957D1 (de) 1997-08-14
DE69311957T2 DE69311957T2 (de) 1998-02-05

Family

ID=26465361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311957T Expired - Fee Related DE69311957T2 (de) 1992-04-23 1993-04-22 Entladungsreaktor

Country Status (4)

Country Link
US (1) US5549874A (de)
EP (1) EP0567114B1 (de)
KR (1) KR100290134B1 (de)
DE (1) DE69311957T2 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2983153B2 (ja) * 1994-04-28 1999-11-29 三菱電機株式会社 オゾン発生装置
JPH0859210A (ja) * 1994-08-24 1996-03-05 Ebara Corp オゾン発生装置
KR100411615B1 (ko) * 1995-04-17 2004-04-21 가부시키 가이샤 에바라 세이사꾸쇼 오존발생장치
RU2102312C1 (ru) * 1996-04-08 1998-01-20 Александр Леонидович Захаров Генератор озона
DE19635231A1 (de) * 1996-08-30 1998-03-05 Siemens Ag Vorrichtung zur plasmachemischen Zersetzung und/oder Vernichtung von Schadstoffen
DE29702056U1 (de) * 1997-01-30 1998-06-04 Mann, Rido, Dr., 64331 Weiterstadt Vorrichtung zur Anregung von Luft und Gasen
US5956562A (en) * 1997-07-03 1999-09-21 Industrial Technology Research Institute Electrode plate for use in ozone generators with staggered air vents
US7695690B2 (en) 1998-11-05 2010-04-13 Tessera, Inc. Air treatment apparatus having multiple downstream electrodes
US6176977B1 (en) 1998-11-05 2001-01-23 Sharper Image Corporation Electro-kinetic air transporter-conditioner
US20030206837A1 (en) 1998-11-05 2003-11-06 Taylor Charles E. Electro-kinetic air transporter and conditioner device with enhanced maintenance features and enhanced anti-microorganism capability
US20050210902A1 (en) 2004-02-18 2005-09-29 Sharper Image Corporation Electro-kinetic air transporter and/or conditioner devices with features for cleaning emitter electrodes
US6610257B2 (en) * 1999-01-11 2003-08-26 Ronald A. Vane Low RF power electrode for plasma generation of oxygen radicals from air
US6146599A (en) 1999-02-24 2000-11-14 Seagate Technology Llc Dielectric barrier discharge system and method for decomposing hazardous compounds in fluids
US6451252B1 (en) * 2000-01-20 2002-09-17 Regents Of The University Of Minnesota Odor removal system and method having ozone and non-thermal plasma treatment
JP2001314749A (ja) * 2000-05-12 2001-11-13 Honda Motor Co Ltd プラズマリアクタにおける異常判定方法
JP4095758B2 (ja) 2000-06-29 2008-06-04 株式会社荏原製作所 オゾン発生装置
TW467770B (en) * 2000-10-24 2001-12-11 Huei-Tang Liou Gold plating method for quartz or high alumina tube of high heat resistance and high voltage resistance, and gold-plated quartz and high alumina tube for the application of ozone generator
US7011790B2 (en) * 2001-05-07 2006-03-14 Regents Of The University Of Minnesota Non-thermal disinfection of biological fluids using non-thermal plasma
US6562386B2 (en) 2001-05-07 2003-05-13 Regents Of The University Of Minnesota Method and apparatus for non-thermal pasteurization
US6911225B2 (en) * 2001-05-07 2005-06-28 Regents Of The University Of Minnesota Method and apparatus for non-thermal pasteurization of living-mammal-instillable liquids
US8475723B2 (en) * 2003-07-28 2013-07-02 Iono2X Engineering, L.L.C. Dielectric barrier discharge cell with hermetically sealed electrodes and automatic washing of electrodes during operation of the cell
US7906080B1 (en) 2003-09-05 2011-03-15 Sharper Image Acquisition Llc Air treatment apparatus having a liquid holder and a bipolar ionization device
US7724492B2 (en) 2003-09-05 2010-05-25 Tessera, Inc. Emitter electrode having a strip shape
US7767169B2 (en) 2003-12-11 2010-08-03 Sharper Image Acquisition Llc Electro-kinetic air transporter-conditioner system and method to oxidize volatile organic compounds
US20060016333A1 (en) 2004-07-23 2006-01-26 Sharper Image Corporation Air conditioner device with removable driver electrodes
SI1910246T1 (sl) * 2005-08-02 2012-03-30 Radion Mogilevsky Postopek izdelave gostih blokov
US7833322B2 (en) 2006-02-28 2010-11-16 Sharper Image Acquisition Llc Air treatment apparatus having a voltage control device responsive to current sensing
US20080017794A1 (en) * 2006-07-18 2008-01-24 Zyvex Corporation Coaxial ring ion trap
US7931811B2 (en) * 2006-10-27 2011-04-26 Regents Of The University Of Minnesota Dielectric barrier reactor having concentrated electric field
CN102421700B (zh) * 2009-05-28 2014-02-26 多田电机株式会社 臭氧发生装置
US8349125B2 (en) * 2009-07-24 2013-01-08 Xei Scientific, Inc. Cleaning device for transmission electron microscopes
CN102530880A (zh) * 2012-02-17 2012-07-04 陈建中 密闭式耐用防潮腐臭氧片
US9067788B1 (en) 2012-11-01 2015-06-30 Rick B. Spielman Apparatus for highly efficient cold-plasma ozone production
US10384939B2 (en) * 2014-10-29 2019-08-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone generation apparatus
EP3213598B1 (de) * 2014-10-31 2023-07-05 Watlow Electric Manufacturing Company Thermische dynamische reaktionsmesssysteme für heizgeräte
DE102020124138A1 (de) 2020-09-16 2022-03-17 Tdk Electronics Ag Vorrichtung und Verfahren zur Erzeugung einer dielektrischen Barriereentladung
US11866326B2 (en) 2021-02-05 2024-01-09 Rick B. Spielman Apparatus for highly efficient cold-plasma ozone production

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215202A (ja) * 1985-03-20 1986-09-25 Senichi Masuda オゾナイザ
CN86106909A (zh) * 1985-10-15 1987-04-22 佐恩蒂克处理***有限公司 臭氧净化***与装置
JPS6325203A (ja) * 1986-07-18 1988-02-02 Nippon Ozon Kk オゾン発生装置
JPS63242903A (ja) * 1987-03-31 1988-10-07 Ebara Res Co Ltd オゾン発生装置
CH675178A5 (de) * 1987-10-23 1990-08-31 Bbc Brown Boveri & Cie
JP2587860B2 (ja) * 1988-05-27 1997-03-05 クロリンエンジニアズ株式会社 オゾン発生方法
JPH02172802A (ja) * 1988-12-26 1990-07-04 Hitachi Ltd オゾン発生装置
US4970056A (en) * 1989-01-18 1990-11-13 Fusion Systems Corporation Ozone generator with improved dielectric and method of manufacture
JPH07102317B2 (ja) * 1989-03-17 1995-11-08 株式会社荏原総合研究所 放電反応装置の電極
EP0390692A3 (de) * 1989-03-29 1991-10-02 Terumo Kabushiki Kaisha Verfahren und Vorrichtung zur Herstellung einer Dünnschicht und Sensor
GB8922602D0 (en) * 1989-10-06 1989-11-22 British Aerospace A surface discharge plasma cathode electron beam generating assembly
US5346578A (en) * 1992-11-04 1994-09-13 Novellus Systems, Inc. Induction plasma source

Also Published As

Publication number Publication date
EP0567114A2 (de) 1993-10-27
DE69311957T2 (de) 1998-02-05
KR940006177A (ko) 1994-03-23
EP0567114A3 (en) 1994-09-28
EP0567114B1 (de) 1997-07-09
US5549874A (en) 1996-08-27
KR100290134B1 (ko) 2001-09-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee