DE69309008D1 - Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene - Google Patents

Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene

Info

Publication number
DE69309008D1
DE69309008D1 DE69309008T DE69309008T DE69309008D1 DE 69309008 D1 DE69309008 D1 DE 69309008D1 DE 69309008 T DE69309008 T DE 69309008T DE 69309008 T DE69309008 T DE 69309008T DE 69309008 D1 DE69309008 D1 DE 69309008D1
Authority
DE
Germany
Prior art keywords
accelerations
directions
plane
capacitive sensor
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309008T
Other languages
English (en)
Other versions
DE69309008T2 (de
Inventor
Michel Dufour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69309008D1 publication Critical patent/DE69309008D1/de
Publication of DE69309008T2 publication Critical patent/DE69309008T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Feeding Of Articles To Conveyors (AREA)
DE69309008T 1992-12-08 1993-12-06 Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene Expired - Fee Related DE69309008T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9214758A FR2700014B1 (fr) 1992-12-08 1992-12-08 Capteur capacitif sensible aux accélérations orientées dans toutes les directions d'un plan.

Publications (2)

Publication Number Publication Date
DE69309008D1 true DE69309008D1 (de) 1997-04-24
DE69309008T2 DE69309008T2 (de) 1997-09-25

Family

ID=9436333

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309008T Expired - Fee Related DE69309008T2 (de) 1992-12-08 1993-12-06 Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene

Country Status (5)

Country Link
US (1) US5528937A (de)
EP (1) EP0601923B1 (de)
JP (1) JPH06213923A (de)
DE (1) DE69309008T2 (de)
FR (1) FR2700014B1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
JPH0949856A (ja) * 1995-05-31 1997-02-18 Wako:Kk 加速度センサ
JP3079961B2 (ja) * 1995-07-11 2000-08-21 株式会社村田製作所 衝撃センサ
US6199430B1 (en) 1997-06-17 2001-03-13 Denso Corporation Acceleration sensor with ring-shaped movable electrode
US6128954A (en) * 1998-12-18 2000-10-10 Delco Electronics Corporation Spring for a resonance ring of an angular rate sensor
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
US6373265B1 (en) * 1999-02-02 2002-04-16 Nitta Corporation Electrostatic capacitive touch sensor
DE19938206A1 (de) * 1999-08-12 2001-02-15 Bosch Gmbh Robert Mikromechanischer Drehbeschleunigungssensor
DE20100714U1 (de) * 2001-01-16 2001-03-22 Peiseler Gmbh Vorrichtung zur Messung der Schließgeschwindigkeit
US6904805B2 (en) * 2003-06-03 2005-06-14 Cherry Corporation Accelerometer
EP1519197B1 (de) * 2003-09-26 2007-11-14 STMicroelectronics S.r.l. Planarer Inertialsensor, insbesondere für tragbare Vorrichtungen mit Standby-Funktion
JP4272115B2 (ja) * 2004-06-03 2009-06-03 Ｏｋｉセミコンダクタ株式会社 加速度センサ及びその製造方法
US7218193B2 (en) * 2004-08-16 2007-05-15 Lucent Technologies Inc. MEMS-based inertial switch
US7228739B2 (en) * 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
EP2023152A4 (de) 2006-04-28 2011-11-02 Panasonic Elec Works Co Ltd Kapazitiver sensor
JP4600344B2 (ja) * 2006-04-28 2010-12-15 パナソニック電工株式会社 静電容量式センサ
CN101893451B (zh) * 2009-05-22 2013-08-21 鸿富锦精密工业（深圳）有限公司 电容式传感器及陀螺仪
JP5083635B2 (ja) * 2009-11-12 2012-11-28 三菱電機株式会社 加速度センサ
DE102012206719A1 (de) * 2012-04-24 2013-10-24 Robert Bosch Gmbh Mikromechanisches Sensorelement und Sensoreinrichtung mit einem derartigen Sensorelement
WO2016089107A1 (ko) * 2014-12-02 2016-06-09 스피어다인 주식회사 센서
EP3908803A4 (de) * 2019-01-08 2022-07-20 Panasonic Intellectual Property Management Co., Ltd. Messvorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
GB8728442D0 (en) * 1987-12-04 1988-01-13 Russell M K Triaxial accelerometers
US4901570A (en) * 1988-11-21 1990-02-20 General Motors Corporation Resonant-bridge two axis microaccelerometer
FR2667157B1 (fr) * 1990-09-25 1994-06-10 Sextant Avionique Micro-accelerometre a resonateurs et procede de fabrication.
US5209117A (en) * 1990-10-22 1993-05-11 Motorola, Inc. Tapered cantilever beam for sensors
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support

Also Published As

Publication number Publication date
DE69309008T2 (de) 1997-09-25
EP0601923A1 (de) 1994-06-15
FR2700014A1 (fr) 1994-07-01
FR2700014B1 (fr) 1995-04-28
US5528937A (en) 1996-06-25
JPH06213923A (ja) 1994-08-05
EP0601923B1 (de) 1997-03-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee