DE69212223D1 - Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit - Google Patents
Integriertes System zum Filtrieren und zur Abgabe einer FlüssigkeitInfo
- Publication number
- DE69212223D1 DE69212223D1 DE69212223T DE69212223T DE69212223D1 DE 69212223 D1 DE69212223 D1 DE 69212223D1 DE 69212223 T DE69212223 T DE 69212223T DE 69212223 T DE69212223 T DE 69212223T DE 69212223 D1 DE69212223 D1 DE 69212223D1
- Authority
- DE
- Germany
- Prior art keywords
- dispensing
- filtering
- liquid
- integrated system
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001914 filtration Methods 0.000 title 1
- 239000007788 liquid Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/26—Filters with built-in pumps filters provided with a pump mounted in or on the casing
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/703,148 US5262068A (en) | 1991-05-17 | 1991-05-17 | Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69212223D1 true DE69212223D1 (de) | 1996-08-22 |
DE69212223T2 DE69212223T2 (de) | 1997-01-23 |
Family
ID=24824216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69212223T Expired - Lifetime DE69212223T2 (de) | 1991-05-17 | 1992-05-18 | Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit |
Country Status (4)
Country | Link |
---|---|
US (1) | US5262068A (de) |
EP (1) | EP0513843B1 (de) |
JP (1) | JP3286687B2 (de) |
DE (1) | DE69212223T2 (de) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6190565B1 (en) * | 1993-05-17 | 2001-02-20 | David C. Bailey | Dual stage pump system with pre-stressed diaphragms and reservoir |
US5490765A (en) * | 1993-05-17 | 1996-02-13 | Cybor Corporation | Dual stage pump system with pre-stressed diaphragms and reservoir |
JPH09505863A (ja) * | 1993-09-27 | 1997-06-10 | ディヴァーシィ コーポレーション | 負荷補償定量ポンピングシステムおよび方法 |
US5569375A (en) * | 1995-02-21 | 1996-10-29 | Ridgeway; Kent | Apparatus for filtering liquids in a closed system |
KR0179284B1 (ko) * | 1996-02-23 | 1999-03-20 | 문정환 | 코우팅장비의 필터하우징내 버블제거장치 |
US5858466A (en) * | 1996-06-24 | 1999-01-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist supply system with air venting |
US6378907B1 (en) † | 1996-07-12 | 2002-04-30 | Mykrolis Corporation | Connector apparatus and system including connector apparatus |
DE69814710T2 (de) * | 1997-03-03 | 2004-03-18 | Tokyo Electron Ltd. | Beschichtungs-Vorrichtung und Verfahren |
JP4011210B2 (ja) * | 1998-10-13 | 2007-11-21 | 株式会社コガネイ | 薬液供給方法および薬液供給装置 |
US6012607A (en) * | 1998-11-03 | 2000-01-11 | United Microelectronics Corp. | Dispense system of a photoresist coating machine |
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
US8172546B2 (en) | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
US6250502B1 (en) | 1999-09-20 | 2001-06-26 | Daniel A. Cote | Precision dispensing pump and method of dispensing |
KR100754342B1 (ko) | 1999-10-18 | 2007-09-03 | 인터그레이티드 디자인즈 엘.피. | 유체 분배 방법 및 장치 |
US6325932B1 (en) * | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
US6752599B2 (en) | 2000-06-09 | 2004-06-22 | Alink M, Inc. | Apparatus for photoresist delivery |
US6475178B1 (en) * | 2000-08-10 | 2002-11-05 | Abbott Laboratories | Autopriming a micro-cassette while minimizing the formation of air bubbles in a pumping chamber |
DE60144097D1 (de) * | 2000-09-13 | 2011-04-07 | Entegris Inc | Vorrichtung zum filtern von flüssigen medien |
JP3890229B2 (ja) * | 2001-12-27 | 2007-03-07 | 株式会社コガネイ | 薬液供給装置および薬液供給装置の脱気方法 |
JP3947398B2 (ja) * | 2001-12-28 | 2007-07-18 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
US7654414B2 (en) * | 2002-02-07 | 2010-02-02 | Pall Corporation | Liquids dispensing systems and methods |
JP4511868B2 (ja) * | 2004-04-26 | 2010-07-28 | 株式会社コガネイ | 可撓性タンクとこれを用いた薬液供給装置 |
US7658598B2 (en) * | 2005-10-24 | 2010-02-09 | Proportionair, Incorporated | Method and control system for a pump |
WO2006057957A2 (en) | 2004-11-23 | 2006-06-01 | Entegris, Inc. | System and method for a variable home position dispense system |
US8197231B2 (en) | 2005-07-13 | 2012-06-12 | Purity Solutions Llc | Diaphragm pump and related methods |
US8753097B2 (en) * | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
JP5339914B2 (ja) * | 2005-11-21 | 2013-11-13 | インテグリス・インコーポレーテッド | 低減された形状要因を有するポンプのためのシステムと方法 |
KR100772844B1 (ko) * | 2005-11-30 | 2007-11-02 | 삼성전자주식회사 | 반도체 제조설비의 감광액 공급장치 |
US8025486B2 (en) | 2005-12-02 | 2011-09-27 | Entegris, Inc. | System and method for valve sequencing in a pump |
US7878765B2 (en) | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
KR20080073778A (ko) | 2005-12-02 | 2008-08-11 | 엔테그리스, 아이엔씨. | O링 없는 로우 프로파일 피팅 및 피팅 조립체 |
US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
EP1958039B9 (de) | 2005-12-02 | 2011-09-07 | Entegris, Inc. | E/a-systeme, verfahren und einrichtungen zur anschaltung einer pumpensteuerung |
JP5366555B2 (ja) | 2005-12-02 | 2013-12-11 | インテグリス・インコーポレーテッド | ポンプ内の圧力補償のためのシステムおよび方法 |
WO2007067339A2 (en) * | 2005-12-02 | 2007-06-14 | Entegris, Inc. | Fixed volume valve system |
US7850431B2 (en) | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
KR101308175B1 (ko) * | 2005-12-05 | 2013-09-26 | 엔테그리스, 아이엔씨. | 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법 |
TWI402423B (zh) | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
US7494265B2 (en) | 2006-03-01 | 2009-02-24 | Entegris, Inc. | System and method for controlled mixing of fluids via temperature |
US7684446B2 (en) | 2006-03-01 | 2010-03-23 | Entegris, Inc. | System and method for multiplexing setpoints |
JP4852399B2 (ja) * | 2006-11-22 | 2012-01-11 | 富士フイルム株式会社 | 二液合流装置 |
US8631683B2 (en) | 2007-02-06 | 2014-01-21 | Fresenius Medical Care Holdings, Inc. | Dialysis systems including non-invasive multi-function sensor systems |
US8047815B2 (en) * | 2007-07-13 | 2011-11-01 | Integrated Designs L.P. | Precision pump with multiple heads |
US8317493B2 (en) * | 2007-07-13 | 2012-11-27 | Integrated Designs L.P. | Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids |
US8889004B2 (en) | 2007-11-16 | 2014-11-18 | Fresenius Medical Care Holdings, Inc. | Dialysis systems and methods |
CA2704011C (en) * | 2007-11-16 | 2016-07-05 | Fresenius Medical Care Holdings, Inc. | Dialysis systems and methods |
CN102596283B (zh) | 2009-08-04 | 2015-08-19 | 弗雷塞尼斯医疗保健控股公司 | 透析***、部件和方法 |
JP5038378B2 (ja) | 2009-11-11 | 2012-10-03 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
US8449686B2 (en) | 2010-04-26 | 2013-05-28 | Fresenius Medical Care Holdings, Inc. | Methods for cleaning a drain line of a dialysis machine |
CH703813A1 (de) * | 2010-09-17 | 2012-03-30 | Medela Holding Ag | Membranvakuumpumpe. |
US8784668B2 (en) | 2010-10-12 | 2014-07-22 | Fresenius Medical Care Holdings, Inc. | Systems and methods for compensation of compliant behavior in regenerative dialysis systems |
US9333286B2 (en) | 2011-05-12 | 2016-05-10 | Fresenius Medical Care Holdings, Inc. | Medical tubing installation detection |
US8836519B2 (en) | 2011-05-12 | 2014-09-16 | Fresenius Medical Care Holdings, Inc. | Determining the absence or presence of fluid in a dialysis system |
US8906240B2 (en) | 2011-08-29 | 2014-12-09 | Fresenius Medical Care Holdings, Inc. | Early detection of low bicarbonate level |
US8992777B2 (en) | 2011-11-18 | 2015-03-31 | Fresenius Medical Care Holdings, Inc. | Systems and methods for providing notifications in dialysis systems |
US9165112B2 (en) | 2012-02-03 | 2015-10-20 | Fresenius Medical Care Holdings, Inc. | Systems and methods for displaying objects at a medical treatment apparatus display screen |
US9610392B2 (en) | 2012-06-08 | 2017-04-04 | Fresenius Medical Care Holdings, Inc. | Medical fluid cassettes and related systems and methods |
JP5741549B2 (ja) * | 2012-10-09 | 2015-07-01 | 東京エレクトロン株式会社 | 処理液供給方法、処理液供給装置及び記憶媒体 |
US9656197B2 (en) * | 2012-11-12 | 2017-05-23 | Pall Corporation | Systems and methods for conditioning a filter assembly |
US9719504B2 (en) | 2013-03-15 | 2017-08-01 | Integrated Designs, L.P. | Pump having an automated gas removal and fluid recovery system and method |
JP6164135B2 (ja) * | 2014-03-27 | 2017-07-19 | 株式会社豊田自動織機 | 圧縮機 |
TWI585539B (zh) * | 2014-05-15 | 2017-06-01 | 東京威力科創股份有限公司 | 用以在光阻分配系統中增進再循環及過濾的方法及設備 |
US10121685B2 (en) * | 2015-03-31 | 2018-11-06 | Tokyo Electron Limited | Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus |
JP6602553B2 (ja) | 2015-04-30 | 2019-11-06 | Ckd株式会社 | ダイアフラム、流体制御装置、及びダイアフラムの製造方法 |
DE102017010071A1 (de) * | 2016-11-02 | 2018-05-03 | Mann+Hummel Gmbh | Einheit zum Regeln oder Steuern eines Fluiddrucks |
DE102017010018A1 (de) * | 2016-11-02 | 2018-05-03 | Mann + Hummel Gmbh | Einheit zum Regeln oder Steuern eines Fluiddrucks |
DE102016013010A1 (de) * | 2016-11-02 | 2018-05-03 | Mann + Hummel Gmbh | Einheit zum Regeln oder Steuern eines Fluiddrucks |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2383193A (en) * | 1943-11-01 | 1945-08-21 | Oliver United Felters Inc | Diaphragm pump |
FR1449028A (fr) * | 1965-06-23 | 1966-08-12 | Compresseurs Bernard | Perfectionnements aux dispositifs de purge, notamment pour installations d'air comprimé |
ATE10670T1 (de) * | 1980-12-29 | 1984-12-15 | Lewa Herbert Ott Gmbh + Co. | Membranpumpe mit druckentlastet eingespannter membran. |
DE3261319D1 (en) * | 1982-02-05 | 1985-01-10 | Bran & Luebbe | Piston-driven diaphragm pump |
GB8312122D0 (en) * | 1983-05-04 | 1983-06-08 | Production Tech Ltd | Pumping corrosive fluids |
DE3414006C2 (de) * | 1984-04-13 | 1986-03-06 | Bran & Lübbe GmbH, 2000 Norderstedt | Kolbenmembranpumpe |
DE3446952A1 (de) * | 1984-12-21 | 1986-07-10 | Lewa Herbert Ott Gmbh + Co, 7250 Leonberg | Membranpumpe mit umlaufspuelung |
DE3446914A1 (de) * | 1984-12-21 | 1986-07-03 | Ott Kg Lewa | Membranpumpe mit hydaulisch angetriebener rollmembran |
US4690621A (en) * | 1986-04-15 | 1987-09-01 | Advanced Control Engineering | Filter pump head assembly |
DE3771065D1 (de) * | 1987-02-28 | 1991-08-01 | Bran & Luebbe | Kolbenmembranpumpe. |
DE3708868A1 (de) * | 1987-03-18 | 1988-10-06 | Ott Kg Lewa | Verfahren und vorrichtung zum anfahren einer hydraulischen membranpumpe gegen last |
IL83259A (en) * | 1987-07-20 | 1992-05-25 | D F Lab Ltd | Disposable cell and diaphragm pump for use of same |
JPH01262908A (ja) * | 1988-04-12 | 1989-10-19 | Nec Corp | 薬液フィルター |
US4902206A (en) * | 1988-09-30 | 1990-02-20 | Haluna Kabushiki Kaisha | Bellows pump |
US4983102A (en) * | 1988-10-14 | 1991-01-08 | Swain Danny C | Self-enclosed filter pumping system |
US4915597A (en) * | 1988-12-19 | 1990-04-10 | Micron Technology, Inc. | Filter pump head assembly improvements |
US5239861A (en) * | 1988-12-23 | 1993-08-31 | Kabushiki Kaisha Komatsu Seisakusho | Device for indicating contamination degree of hydraulic circuit and method of judging the contamination degree |
US4950134A (en) * | 1988-12-27 | 1990-08-21 | Cybor Corporation | Precision liquid dispenser |
US5167837A (en) * | 1989-03-28 | 1992-12-01 | Fas-Technologies, Inc. | Filtering and dispensing system with independently activated pumps in series |
-
1991
- 1991-05-17 US US07/703,148 patent/US5262068A/en not_active Expired - Lifetime
-
1992
- 1992-05-15 JP JP14795592A patent/JP3286687B2/ja not_active Expired - Fee Related
- 1992-05-18 DE DE69212223T patent/DE69212223T2/de not_active Expired - Lifetime
- 1992-05-18 EP EP92108369A patent/EP0513843B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0513843B1 (de) | 1996-07-17 |
US5262068A (en) | 1993-11-16 |
JP3286687B2 (ja) | 2002-05-27 |
DE69212223T2 (de) | 1997-01-23 |
JPH05184827A (ja) | 1993-07-27 |
EP0513843A1 (de) | 1992-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MYKROLIS CORP., BEDFORD, MASS., US |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: ENTEGRIS, INC., CHASKA, MINN., US |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: ENTEGRIS, INC., BILLERICA, MASS., US |
|
R071 | Expiry of right |
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