DE69212223D1 - Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit - Google Patents

Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit

Info

Publication number
DE69212223D1
DE69212223D1 DE69212223T DE69212223T DE69212223D1 DE 69212223 D1 DE69212223 D1 DE 69212223D1 DE 69212223 T DE69212223 T DE 69212223T DE 69212223 T DE69212223 T DE 69212223T DE 69212223 D1 DE69212223 D1 DE 69212223D1
Authority
DE
Germany
Prior art keywords
dispensing
filtering
liquid
integrated system
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69212223T
Other languages
English (en)
Other versions
DE69212223T2 (de
Inventor
William F Bowers
Stephen G Hunt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Millipore Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Millipore Corp filed Critical Millipore Corp
Application granted granted Critical
Publication of DE69212223D1 publication Critical patent/DE69212223D1/de
Publication of DE69212223T2 publication Critical patent/DE69212223T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/26—Filters with built-in pumps filters provided with a pump mounted in or on the casing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Reciprocating Pumps (AREA)
DE69212223T 1991-05-17 1992-05-18 Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit Expired - Lifetime DE69212223T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/703,148 US5262068A (en) 1991-05-17 1991-05-17 Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes

Publications (2)

Publication Number Publication Date
DE69212223D1 true DE69212223D1 (de) 1996-08-22
DE69212223T2 DE69212223T2 (de) 1997-01-23

Family

ID=24824216

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69212223T Expired - Lifetime DE69212223T2 (de) 1991-05-17 1992-05-18 Integriertes System zum Filtrieren und zur Abgabe einer Flüssigkeit

Country Status (4)

Country Link
US (1) US5262068A (de)
EP (1) EP0513843B1 (de)
JP (1) JP3286687B2 (de)
DE (1) DE69212223T2 (de)

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US5858466A (en) * 1996-06-24 1999-01-12 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist supply system with air venting
US6378907B1 (en) † 1996-07-12 2002-04-30 Mykrolis Corporation Connector apparatus and system including connector apparatus
DE69814710T2 (de) * 1997-03-03 2004-03-18 Tokyo Electron Ltd. Beschichtungs-Vorrichtung und Verfahren
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US6752599B2 (en) 2000-06-09 2004-06-22 Alink M, Inc. Apparatus for photoresist delivery
US6475178B1 (en) * 2000-08-10 2002-11-05 Abbott Laboratories Autopriming a micro-cassette while minimizing the formation of air bubbles in a pumping chamber
DE60144097D1 (de) * 2000-09-13 2011-04-07 Entegris Inc Vorrichtung zum filtern von flüssigen medien
JP3890229B2 (ja) * 2001-12-27 2007-03-07 株式会社コガネイ 薬液供給装置および薬液供給装置の脱気方法
JP3947398B2 (ja) * 2001-12-28 2007-07-18 株式会社コガネイ 薬液供給装置および薬液供給方法
US7654414B2 (en) * 2002-02-07 2010-02-02 Pall Corporation Liquids dispensing systems and methods
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US8753097B2 (en) * 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
JP5339914B2 (ja) * 2005-11-21 2013-11-13 インテグリス・インコーポレーテッド 低減された形状要因を有するポンプのためのシステムと方法
KR100772844B1 (ko) * 2005-11-30 2007-11-02 삼성전자주식회사 반도체 제조설비의 감광액 공급장치
US8025486B2 (en) 2005-12-02 2011-09-27 Entegris, Inc. System and method for valve sequencing in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
KR20080073778A (ko) 2005-12-02 2008-08-11 엔테그리스, 아이엔씨. Ｏ링 없는 로우 프로파일 피팅 및 피팅 조립체
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
EP1958039B9 (de) 2005-12-02 2011-09-07 Entegris, Inc. E/a-systeme, verfahren und einrichtungen zur anschaltung einer pumpensteuerung
JP5366555B2 (ja) 2005-12-02 2013-12-11 インテグリス・インコーポレーテッド ポンプ内の圧力補償のためのシステムおよび方法
WO2007067339A2 (en) * 2005-12-02 2007-06-14 Entegris, Inc. Fixed volume valve system
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
KR101308175B1 (ko) * 2005-12-05 2013-09-26 엔테그리스, 아이엔씨. 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US7684446B2 (en) 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
JP4852399B2 (ja) * 2006-11-22 2012-01-11 富士フイルム株式会社 二液合流装置
US8631683B2 (en) 2007-02-06 2014-01-21 Fresenius Medical Care Holdings, Inc. Dialysis systems including non-invasive multi-function sensor systems
US8047815B2 (en) * 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8317493B2 (en) * 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US8889004B2 (en) 2007-11-16 2014-11-18 Fresenius Medical Care Holdings, Inc. Dialysis systems and methods
CA2704011C (en) * 2007-11-16 2016-07-05 Fresenius Medical Care Holdings, Inc. Dialysis systems and methods
CN102596283B (zh) 2009-08-04 2015-08-19 弗雷塞尼斯医疗保健控股公司 透析***、部件和方法
JP5038378B2 (ja) 2009-11-11 2012-10-03 株式会社コガネイ 薬液供給装置および薬液供給方法
US8449686B2 (en) 2010-04-26 2013-05-28 Fresenius Medical Care Holdings, Inc. Methods for cleaning a drain line of a dialysis machine
CH703813A1 (de) * 2010-09-17 2012-03-30 Medela Holding Ag Membranvakuumpumpe.
US8784668B2 (en) 2010-10-12 2014-07-22 Fresenius Medical Care Holdings, Inc. Systems and methods for compensation of compliant behavior in regenerative dialysis systems
US9333286B2 (en) 2011-05-12 2016-05-10 Fresenius Medical Care Holdings, Inc. Medical tubing installation detection
US8836519B2 (en) 2011-05-12 2014-09-16 Fresenius Medical Care Holdings, Inc. Determining the absence or presence of fluid in a dialysis system
US8906240B2 (en) 2011-08-29 2014-12-09 Fresenius Medical Care Holdings, Inc. Early detection of low bicarbonate level
US8992777B2 (en) 2011-11-18 2015-03-31 Fresenius Medical Care Holdings, Inc. Systems and methods for providing notifications in dialysis systems
US9165112B2 (en) 2012-02-03 2015-10-20 Fresenius Medical Care Holdings, Inc. Systems and methods for displaying objects at a medical treatment apparatus display screen
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
JP5741549B2 (ja) * 2012-10-09 2015-07-01 東京エレクトロン株式会社 処理液供給方法、処理液供給装置及び記憶媒体
US9656197B2 (en) * 2012-11-12 2017-05-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9719504B2 (en) 2013-03-15 2017-08-01 Integrated Designs, L.P. Pump having an automated gas removal and fluid recovery system and method
JP6164135B2 (ja) * 2014-03-27 2017-07-19 株式会社豊田自動織機 圧縮機
TWI585539B (zh) * 2014-05-15 2017-06-01 東京威力科創股份有限公司 用以在光阻分配系統中增進再循環及過濾的方法及設備
US10121685B2 (en) * 2015-03-31 2018-11-06 Tokyo Electron Limited Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
JP6602553B2 (ja) 2015-04-30 2019-11-06 Ｃｋｄ株式会社 ダイアフラム、流体制御装置、及びダイアフラムの製造方法
DE102017010071A1 (de) * 2016-11-02 2018-05-03 Mann+Hummel Gmbh Einheit zum Regeln oder Steuern eines Fluiddrucks
DE102017010018A1 (de) * 2016-11-02 2018-05-03 Mann + Hummel Gmbh Einheit zum Regeln oder Steuern eines Fluiddrucks
DE102016013010A1 (de) * 2016-11-02 2018-05-03 Mann + Hummel Gmbh Einheit zum Regeln oder Steuern eines Fluiddrucks

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US2383193A (en) * 1943-11-01 1945-08-21 Oliver United Felters Inc Diaphragm pump
FR1449028A (fr) * 1965-06-23 1966-08-12 Compresseurs Bernard Perfectionnements aux dispositifs de purge, notamment pour installations d'air comprimé
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Also Published As

Publication number Publication date
EP0513843B1 (de) 1996-07-17
US5262068A (en) 1993-11-16
JP3286687B2 (ja) 2002-05-27
DE69212223T2 (de) 1997-01-23
JPH05184827A (ja) 1993-07-27
EP0513843A1 (de) 1992-11-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MYKROLIS CORP., BEDFORD, MASS., US

8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., CHASKA, MINN., US

8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., BILLERICA, MASS., US

R071 Expiry of right

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