DE69211269D1 - Beschleunigungsmessaufnehmer - Google Patents
BeschleunigungsmessaufnehmerInfo
- Publication number
- DE69211269D1 DE69211269D1 DE69211269T DE69211269T DE69211269D1 DE 69211269 D1 DE69211269 D1 DE 69211269D1 DE 69211269 T DE69211269 T DE 69211269T DE 69211269 T DE69211269 T DE 69211269T DE 69211269 D1 DE69211269 D1 DE 69211269D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measuring Fluid Pressure (AREA)
- Air Bags (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24329991A JP2900658B2 (ja) | 1991-09-24 | 1991-09-24 | 加速度センサ |
JP3255284A JPH0792473B2 (ja) | 1991-10-02 | 1991-10-02 | 圧電式加速度センサ |
JP3316203A JP2745908B2 (ja) | 1991-11-29 | 1991-11-29 | 加速度センサ |
JP3346735A JP2745919B2 (ja) | 1991-12-27 | 1991-12-27 | 加速度センサ |
JP1762792A JP2705426B2 (ja) | 1992-02-03 | 1992-02-03 | 加速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69211269D1 true DE69211269D1 (de) | 1996-07-11 |
DE69211269T2 DE69211269T2 (de) | 1997-01-23 |
Family
ID=27519939
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232273T Expired - Lifetime DE69232273T2 (de) | 1991-09-24 | 1992-09-22 | Beschleunigungsmessaufnehmer |
DE69211269T Expired - Lifetime DE69211269T2 (de) | 1991-09-24 | 1992-09-22 | Beschleunigungsmessaufnehmer |
DE69232272T Expired - Lifetime DE69232272T2 (de) | 1991-09-24 | 1992-09-22 | Beschleunigungsmessaufnehmer |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232273T Expired - Lifetime DE69232273T2 (de) | 1991-09-24 | 1992-09-22 | Beschleunigungsmessaufnehmer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232272T Expired - Lifetime DE69232272T2 (de) | 1991-09-24 | 1992-09-22 | Beschleunigungsmessaufnehmer |
Country Status (3)
Country | Link |
---|---|
US (2) | US5438859A (de) |
EP (3) | EP0534366B1 (de) |
DE (3) | DE69232273T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5426970A (en) * | 1993-08-02 | 1995-06-27 | New Sd, Inc. | Rotation rate sensor with built in test circuit |
US5753793A (en) * | 1993-08-24 | 1998-05-19 | A/S Bruel & Kjaer | Apparatus for detecting the malfunctioning of an accelerometer |
JPH085654A (ja) * | 1994-06-23 | 1996-01-12 | Murata Mfg Co Ltd | 加速度センサ |
JP3114006B2 (ja) * | 1994-08-29 | 2000-12-04 | セイコーインスツルメンツ株式会社 | 半導体装置、及び、その製造方法 |
US6911727B1 (en) | 1995-06-06 | 2005-06-28 | Analog Devices, Inc. | Package for sealing an integrated circuit die |
US6323550B1 (en) * | 1995-06-06 | 2001-11-27 | Analog Devices, Inc. | Package for sealing an integrated circuit die |
EP0852337A1 (de) * | 1996-12-24 | 1998-07-08 | STMicroelectronics S.r.l. | Hermetisch abgedichteter Halbleiter-Trägheitssensor |
JP3233059B2 (ja) * | 1997-03-07 | 2001-11-26 | 株式会社村田製作所 | 超音波センサ |
DE69736630D1 (de) * | 1997-06-19 | 2006-10-19 | St Microelectronics Srl | Hermetisch abgeschlossener Sensor mit beweglicher Mikrostruktur |
JP2000214179A (ja) * | 1999-01-26 | 2000-08-04 | Asuko Kk | 加速度センサおよび加速度検出システム |
JP2000346865A (ja) * | 1999-03-26 | 2000-12-15 | Ngk Insulators Ltd | 加速度センサ素子の感度調整方法 |
JP2001349900A (ja) * | 1999-12-28 | 2001-12-21 | Fujitsu Ltd | 加速度センサ及び加速度センサ装置 |
DE10031793C1 (de) * | 2000-07-04 | 2002-02-07 | Peter Apel | Piezoelektrischer Sensor |
DE10113802B4 (de) * | 2001-03-21 | 2007-10-18 | Siemens Ag | Vorrichtung zum Ansteuern eines piezoelektrischen Stellgliedes |
US6531884B1 (en) | 2001-08-27 | 2003-03-11 | Rosemount Inc. | Diagnostics for piezoelectric sensor |
DE10223553B4 (de) * | 2002-05-27 | 2004-08-05 | Siemens Ag | Verfahren zur Ansteuerung eines Aktors und zugehörige Steuereinrichtung |
US7646095B2 (en) * | 2003-09-30 | 2010-01-12 | Panasonic Corporation | Semiconductor device |
US7312554B2 (en) * | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
US7290993B2 (en) * | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
US20050225201A1 (en) * | 2004-04-02 | 2005-10-13 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
US7287965B2 (en) * | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
DE102004050674B4 (de) * | 2004-10-18 | 2018-02-08 | Volkswagen Ag | Befestigungsanordnung für elektrische Komponenten in einem Fahrzeug |
JP4779423B2 (ja) * | 2005-04-26 | 2011-09-28 | パナソニック株式会社 | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
JP2007155700A (ja) * | 2005-11-09 | 2007-06-21 | Denso Corp | 車両用衝突検知装置 |
JP5083287B2 (ja) * | 2009-09-11 | 2012-11-28 | セイコーエプソン株式会社 | 検出装置、物理量測定装置及び電子機器 |
JP4821900B2 (ja) * | 2009-09-11 | 2011-11-24 | セイコーエプソン株式会社 | 検出装置、物理量測定装置及び電子機器 |
JP6186598B2 (ja) * | 2012-04-20 | 2017-08-30 | パナソニックIpマネジメント株式会社 | 慣性力センサ |
ITTO20120542A1 (it) | 2012-06-20 | 2013-12-21 | St Microelectronics Srl | Dispositivo microelettromeccanico con instradamento dei segnali attraverso un cappuccio protettivo e metodo per controllare un dispositivo microelettromeccanico |
DE102014213217A1 (de) * | 2014-07-08 | 2016-01-14 | Continental Teves Ag & Co. Ohg | Körperschallentkopplung an mit Geberfeldern arbeitenden Sensoren |
WO2016143183A1 (ja) * | 2015-03-12 | 2016-09-15 | 株式会社村田製作所 | 加速度検出装置及びその製造方法 |
US10054607B2 (en) * | 2016-05-12 | 2018-08-21 | Google Llc | Using accelerometer to self-test piezoelectric component in a portable device |
CN106153981B (zh) * | 2016-05-24 | 2022-09-27 | 中国人民解放军海军工程大学 | Iepe型智能加速度传感器及其工作方法 |
GB2625258A (en) * | 2022-12-06 | 2024-06-19 | Secr Defence | Improvements in accelerometers |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE476550A (de) * | 1945-02-08 | |||
US3233466A (en) * | 1963-06-24 | 1966-02-08 | Bendix Corp | Piezoelectric accelerometer |
US3479536A (en) * | 1967-03-14 | 1969-11-18 | Singer General Precision | Piezoelectric force transducer |
US3733590A (en) * | 1971-04-15 | 1973-05-15 | A Kaufman | Optimum electrode configuration ceramic memories with ceramic motor element and mechanical damping |
US4155257A (en) * | 1977-05-23 | 1979-05-22 | The Singer Company | Temperature compensated vibrating beam accelerometer |
US4197478A (en) * | 1979-01-25 | 1980-04-08 | Southwest Research Institute | Electronically tunable resonant accelerometer |
JPS5822912A (ja) * | 1981-08-03 | 1983-02-10 | Nippon Denso Co Ltd | 入力信号の変化率検出装置 |
US4450914A (en) * | 1982-01-25 | 1984-05-29 | Dresser Industries, Inc. | Well treatment valve |
JPS58137329A (ja) * | 1982-02-10 | 1983-08-15 | Nec Corp | 入力信号線断線検出回路 |
US4459505A (en) * | 1982-05-28 | 1984-07-10 | Rca Corporation | Piezoelectric ultor voltage generator for a television receiver |
JPS59181585A (ja) * | 1983-03-31 | 1984-10-16 | Toshiba Corp | 変位発生装置 |
JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
FR2546303B1 (fr) * | 1983-05-20 | 1985-07-05 | Thomson Csf | Capteur de forces a ondes elastiques de surface |
DE3328114A1 (de) * | 1983-08-04 | 1985-02-14 | Robert Bosch Gmbh, 7000 Stuttgart | Ausloesevorrichtung fuer rueckhaltesysteme in kraftfahrzeugen |
FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
JPS6196340A (ja) * | 1984-10-18 | 1986-05-15 | Mitsubishi Electric Corp | 空気調和機 |
JPH0660906B2 (ja) * | 1984-12-18 | 1994-08-10 | 日産自動車株式会社 | 半導体加速度センサ |
GB2174500B (en) * | 1985-05-04 | 1988-02-10 | Stc Plc | Accelerometer |
US4676104A (en) * | 1985-08-06 | 1987-06-30 | United Technologies Corporation | Surface skimming bulk acoustic wave accelerometer |
JPS6320663A (ja) * | 1986-07-15 | 1988-01-28 | Brother Ind Ltd | ワ−ドプロセツサ |
JPH07122643B2 (ja) * | 1986-11-27 | 1995-12-25 | 日本電装株式会社 | 加速度検出装置 |
JPS63206663A (ja) * | 1987-02-23 | 1988-08-25 | Mitsubishi Electric Corp | 歪ゲ−ジ式加速度センサ |
US4950914A (en) * | 1987-03-30 | 1990-08-21 | Honda Giken Kogyo Kabushiki Kaisha | Collision detection system for a vehicle |
DE68907121T2 (de) * | 1988-04-11 | 1994-01-27 | Nippon Denso Co | Beschleunigungsaufnehmer. |
JPH027879A (ja) * | 1988-06-27 | 1990-01-11 | Matsushita Electric Ind Co Ltd | 超音波モータ駆動装置 |
JPH0215707A (ja) * | 1988-07-01 | 1990-01-19 | Seiko Electronic Components Ltd | 水晶振動子の支持構造 |
JPH0248865A (ja) * | 1988-08-10 | 1990-02-19 | Hitachi Ltd | 水平・垂直輪郭強調回路 |
IT1223933B (it) * | 1988-11-23 | 1990-09-29 | Marelli Autronica | Trasduttore di accelerazione ad effetto capacitivo |
DE68905913T2 (de) * | 1988-12-23 | 1993-09-30 | Mitsubishi Electric Corp | Beschleunigungsmessaufnehmer. |
JPH032569A (ja) * | 1989-05-30 | 1991-01-08 | Ricoh Co Ltd | 加速度センサ |
US5130600A (en) * | 1989-06-02 | 1992-07-14 | Mitsubishi Petrochemical Co., Ltd. | Acceleration sensor |
GB8927927D0 (en) * | 1989-12-11 | 1990-02-14 | Kellett Michael A | Transducers and associated control circuits |
DE3942011C3 (de) * | 1989-12-20 | 1996-10-17 | Telefunken Microelectron | Einrichtung zur Auslösung einer passiven Sicherheitseinrichtung für Fahrzeuginsassen |
US5239871A (en) * | 1990-12-17 | 1993-08-31 | Texas Instruments Incorporated | Capacitive accelerometer |
-
1992
- 1992-09-22 EP EP92116187A patent/EP0534366B1/de not_active Expired - Lifetime
- 1992-09-22 DE DE69232273T patent/DE69232273T2/de not_active Expired - Lifetime
- 1992-09-22 EP EP94120004A patent/EP0646798B1/de not_active Expired - Lifetime
- 1992-09-22 DE DE69211269T patent/DE69211269T2/de not_active Expired - Lifetime
- 1992-09-22 EP EP94120005A patent/EP0646799B1/de not_active Expired - Lifetime
- 1992-09-22 DE DE69232272T patent/DE69232272T2/de not_active Expired - Lifetime
- 1992-09-24 US US07/950,478 patent/US5438859A/en not_active Expired - Lifetime
-
1995
- 1995-02-22 US US08/392,084 patent/US5517845A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69232272T2 (de) | 2002-08-08 |
EP0646798B1 (de) | 2001-12-05 |
DE69232272D1 (de) | 2002-01-17 |
EP0646799A2 (de) | 1995-04-05 |
EP0534366A1 (de) | 1993-03-31 |
EP0646799A3 (de) | 1998-12-16 |
US5438859A (en) | 1995-08-08 |
DE69232273T2 (de) | 2002-08-08 |
DE69211269T2 (de) | 1997-01-23 |
EP0534366B1 (de) | 1996-06-05 |
DE69232273D1 (de) | 2002-01-17 |
EP0646799B1 (de) | 2001-12-05 |
EP0646798A2 (de) | 1995-04-05 |
US5517845A (en) | 1996-05-21 |
EP0646798A3 (de) | 1998-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |
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