DE69201477T2 - Kapazitiver Positionsdetektor. - Google Patents

Kapazitiver Positionsdetektor.

Info

Publication number
DE69201477T2
DE69201477T2 DE69201477T DE69201477T DE69201477T2 DE 69201477 T2 DE69201477 T2 DE 69201477T2 DE 69201477 T DE69201477 T DE 69201477T DE 69201477 T DE69201477 T DE 69201477T DE 69201477 T2 DE69201477 T2 DE 69201477T2
Authority
DE
Germany
Prior art keywords
position detector
capacitive position
capacitive
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69201477T
Other languages
English (en)
Other versions
DE69201477D1 (de
Inventor
Hans Ulrich Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69201477D1 publication Critical patent/DE69201477D1/de
Application granted granted Critical
Publication of DE69201477T2 publication Critical patent/DE69201477T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69201477T 1991-10-15 1992-09-15 Kapazitiver Positionsdetektor. Expired - Fee Related DE69201477T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH3017/91A CH685214A5 (fr) 1991-10-15 1991-10-15 Capteur capacitif de position.

Publications (2)

Publication Number Publication Date
DE69201477D1 DE69201477D1 (de) 1995-03-30
DE69201477T2 true DE69201477T2 (de) 1995-08-10

Family

ID=4246775

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69201477T Expired - Fee Related DE69201477T2 (de) 1991-10-15 1992-09-15 Kapazitiver Positionsdetektor.

Country Status (6)

Country Link
US (2) US5304937A (de)
EP (1) EP0538184B1 (de)
JP (1) JPH05215506A (de)
CN (1) CN1030588C (de)
CH (1) CH685214A5 (de)
DE (1) DE69201477T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202019000204U1 (de) * 2019-01-17 2020-04-20 isel GmbH & Co. KG Läuferpositionsmesssystem

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US5416424A (en) * 1993-09-15 1995-05-16 Mitutoyo Corporation Dielectric coating for capacitive position transducers to reduce sensitivity to contaminants
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
US5920307A (en) * 1995-02-21 1999-07-06 Lucent Technologies, Inc. System for directly sensing the orientation of a track ball
US5610528A (en) * 1995-06-28 1997-03-11 International Business Machines Corporation Capacitive bend sensor
US5808435A (en) * 1996-05-28 1998-09-15 Kmy Instruments Micropositioning device for disk head testing system
DE69621334T2 (de) * 1996-10-11 2003-01-09 Tesa Brown & Sharpe Sa Kapazitive Dimensionsmesseinrichtung
AT405104B (de) * 1997-03-21 1999-05-25 Brasseur Georg Dipl Ing Dr Kapazitiver drehwinkel- und winkelgeschwindigkeitssensor und messeinrichtung für einen solchen
GB9722766D0 (en) 1997-10-28 1997-12-24 British Telecomm Portable computers
US6025727A (en) * 1997-11-21 2000-02-15 Instrumar Limited Device and method for detecting and measuring fiber properties
US5936411A (en) * 1997-11-28 1999-08-10 Sarcos L.C. Apparatus and method for measuring strain within a structure
EP0924518B1 (de) * 1997-12-19 2006-11-08 Uster Technologies AG Vorrichtung zum Messen von Eigenschaften eines textilen Produktes
EP0973007B1 (de) * 1998-07-16 2003-09-17 Tesa Sa Vorrichtung für longitudinale Messungen
GB9815826D0 (en) * 1998-07-22 1998-09-16 British Aerospace Capacitive position transducer
US6492911B1 (en) * 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
WO2001004593A1 (fr) * 1999-07-09 2001-01-18 Tokin Corporation Capteur de contrainte capacitif et son procédé d'utilisation
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
JP2001201308A (ja) * 2000-01-21 2001-07-27 Mitsutoyo Corp 静電容量式変位検出装置及びその製造方法
DE10003352A1 (de) * 2000-01-27 2001-08-02 Heidelberger Druckmasch Ag Transportsystem für eine Druckmaschine
US7142500B2 (en) * 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
US7057163B2 (en) * 2002-06-25 2006-06-06 Chong-Hin Chee Optical position sensing device
JP3848901B2 (ja) * 2002-07-12 2006-11-22 ニッタ株式会社 静電容量式センサ
US6892590B1 (en) * 2003-11-04 2005-05-17 Andermotion Technologies Llc Single-balanced shield electrode configuration for use in capacitive displacement sensing systems and methods
US20050122119A1 (en) * 2003-12-05 2005-06-09 Touchram Llc Low noise proximity sensing system
US7358741B2 (en) * 2004-05-25 2008-04-15 Alps Electric Co., Ltd Electrostatic detection apparatus and method, and coordinate detection program
WO2006002311A2 (en) * 2004-06-23 2006-01-05 Fe Technical Services, Inc. Capacitive sensing techniques
CA2899102C (en) 2004-06-29 2017-08-01 Instrumar Limited Fibre monitoring apparatus and method
US7983785B2 (en) 2004-06-30 2011-07-19 Instrumar Limited Fibre monitoring apparatus and method
JP2006047135A (ja) * 2004-08-05 2006-02-16 Olympus Corp 静電エンコーダ
US7737953B2 (en) * 2004-08-19 2010-06-15 Synaptics Incorporated Capacitive sensing apparatus having varying depth sensing elements
JP4928460B2 (ja) * 2004-11-09 2012-05-09 パーキンエルマー・ヘルス・サイエンシズ・インコーポレーテッド プローブの位置を決定するための方法およびシステム
SE529249C2 (sv) * 2005-10-14 2007-06-12 Hexagon Metrology Ab Förfarande vid signalbehandling vid kapacitiva mätskalor
US7868874B2 (en) 2005-11-15 2011-01-11 Synaptics Incorporated Methods and systems for detecting a position-based attribute of an object using digital codes
US7683891B2 (en) * 2005-12-22 2010-03-23 Synaptics Incorporated Equalizing reference surface capacitance with uneven thickness
JP2007333618A (ja) * 2006-06-16 2007-12-27 Univ Kansai 加速度センサ
JP2008112776A (ja) * 2006-10-30 2008-05-15 Oki Electric Ind Co Ltd 半導体装置
WO2008120256A1 (en) * 2007-04-03 2008-10-09 Stmicroelectronics S.R.L. Capacitive position sensing in an electrostatic micromotor
US8106668B2 (en) * 2007-04-24 2012-01-31 Seiko Instruments Inc. Proximity detector and proximity detecting method
US20110018561A1 (en) * 2008-03-26 2011-01-27 Hewlett-Packard Company Capacitive sensor having cyclic and absolute electrode sets
CN101882040B (zh) * 2010-03-12 2012-12-19 敦泰科技有限公司 在双层导电材料薄膜上设置电极的互电容触摸屏
US8516886B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric X-Axis gyroscope
US8776337B2 (en) * 2010-07-30 2014-07-15 Hewlett-Packard Development Company, L.P. Methods of forming capacitive sensors
US8847899B2 (en) 2010-09-16 2014-09-30 Synaptics Incorporated Systems and methods for signaling and interference detection in sensor devices
CN102221323B (zh) * 2011-06-03 2012-08-15 浙江大学 一种基于平面电容的六自由度位移测量方法
US8743080B2 (en) 2011-06-27 2014-06-03 Synaptics Incorporated System and method for signaling in sensor devices
TWI457797B (zh) * 2011-07-05 2014-10-21 Hannstar Display Corp 觸控面板
US8766949B2 (en) 2011-12-22 2014-07-01 Synaptics Incorporated Systems and methods for determining user input using simultaneous transmission from multiple electrodes
US9063608B2 (en) 2012-06-14 2015-06-23 Synaptics Incorporated Systems and methods for sensor devices having a non-commensurate number of transmitter electrodes
CN102914248B (zh) * 2012-10-11 2016-03-02 广东盈动高科自动化有限公司 被动式线性编码器
CN103557781B (zh) * 2013-09-10 2017-06-30 林立 双单极电容差分位移传感器
EP2922205B1 (de) * 2014-03-21 2020-12-23 Melius SA Positionsmessvorrichtung und verfahren mit eigenkapazität
US9939932B2 (en) 2014-03-21 2018-04-10 Advanced Sensor Technology Limited Position sensing device and method using self-capacitance
US9176633B2 (en) 2014-03-31 2015-11-03 Synaptics Incorporated Sensor device and method for estimating noise in a capacitive sensing device
DE102014221967A1 (de) * 2014-10-28 2016-04-28 Horst Siedle Gmbh & Co. Kg Positionsgeber, Positionsmesseinrichtung und Betriebsverfahren hierfür
EP3306273B1 (de) * 2014-12-04 2020-02-05 Hexagon Technology Center GmbH Kapazitiver linearencoder
JP6611467B2 (ja) * 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
CN104931183B (zh) * 2015-06-29 2018-06-05 林基焜 压力检测装置和压力检测方法
US10025428B2 (en) 2015-11-19 2018-07-17 Synaptics Incorporated Method and apparatus for improving capacitive sensing detection
US10019122B2 (en) 2016-03-31 2018-07-10 Synaptics Incorporated Capacitive sensing using non-integer excitation
WO2018016170A1 (ja) * 2016-07-22 2018-01-25 シャープ株式会社 検出装置および検出装置の制御方法
JP6823483B2 (ja) * 2017-02-02 2021-02-03 株式会社ミツトヨ 変位検出器
US10527460B2 (en) 2017-11-07 2020-01-07 Pixart Imaging Inc. Gear position detection device, wrist watch and operating method thereof

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DE2539561A1 (de) * 1975-09-05 1977-03-17 Master Specialties Co Durch kapazitaetsaenderung zu betaetigende schaltungseinrichtung
DE3020411C2 (de) * 1980-05-27 1983-09-22 Hans Ulrich St.Sulpice Waadt Meyer Vorrichtung zum Messen der Verschiebung zweier Körper
CH651136A5 (de) * 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
US4607213A (en) * 1983-10-12 1986-08-19 Varian Associates, Inc. Shielded capacitive mask aligner
FR2553532A1 (fr) * 1983-10-12 1985-04-19 Varian Associates Dispositif capacitif d'alignement de masque
US4654581A (en) * 1983-10-12 1987-03-31 Hewlett-Packard Company Capacitive mask aligner
DE3340782C2 (de) * 1983-11-11 1985-12-05 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Kapazitive Längen- und Winkelmeßeinrichtung
CH666122A5 (fr) * 1986-04-10 1988-06-30 Hans Ulrich Meyer Capteur capacitif de position.
CH670306A5 (de) * 1986-11-13 1989-05-31 Hans Ulrich Meyer
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202019000204U1 (de) * 2019-01-17 2020-04-20 isel GmbH & Co. KG Läuferpositionsmesssystem

Also Published As

Publication number Publication date
US5304937A (en) 1994-04-19
DE69201477D1 (de) 1995-03-30
CH685214A5 (fr) 1995-04-28
CN1030588C (zh) 1995-12-27
CN1071504A (zh) 1993-04-28
JPH05215506A (ja) 1993-08-24
EP0538184B1 (de) 1995-02-22
US5394096A (en) 1995-02-28
EP0538184A1 (de) 1993-04-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee