DE69115496D1 - Optischer apparat - Google Patents
Optischer apparatInfo
- Publication number
- DE69115496D1 DE69115496D1 DE69115496T DE69115496T DE69115496D1 DE 69115496 D1 DE69115496 D1 DE 69115496D1 DE 69115496 T DE69115496 T DE 69115496T DE 69115496 T DE69115496 T DE 69115496T DE 69115496 D1 DE69115496 D1 DE 69115496D1
- Authority
- DE
- Germany
- Prior art keywords
- optical apparatus
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB909018215A GB9018215D0 (en) | 1990-08-20 | 1990-08-20 | Optical apparatus |
PCT/GB1991/001410 WO1992003697A1 (en) | 1990-08-20 | 1991-08-20 | Optical apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69115496D1 true DE69115496D1 (de) | 1996-01-25 |
DE69115496T2 DE69115496T2 (de) | 1996-05-09 |
Family
ID=10680924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69115496T Expired - Fee Related DE69115496T2 (de) | 1990-08-20 | 1991-08-20 | Optischer apparat |
Country Status (6)
Country | Link |
---|---|
US (1) | US5369489A (de) |
EP (1) | EP0549614B1 (de) |
JP (1) | JPH06503876A (de) |
DE (1) | DE69115496T2 (de) |
GB (2) | GB9018215D0 (de) |
WO (1) | WO1992003697A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2268582B (en) * | 1992-07-09 | 1995-12-20 | Roke Manor Research | Improvements in or relating to interferometers |
DE69324532T2 (de) * | 1992-07-15 | 1999-09-23 | Nikon Corp., Tokio/Tokyo | Lichtquelle für ein Heterodyninterferometer |
US5523839A (en) * | 1994-02-28 | 1996-06-04 | Minnesota Mining & Manufacturing | Differential optical interferometric profilomenty for real time manufacturing control |
US5694216A (en) * | 1996-04-25 | 1997-12-02 | University Of Central Florida | Scanning heterodyne acousto-optical interferometers |
DE19721882C2 (de) * | 1997-05-26 | 1999-04-29 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
DE19721881C2 (de) * | 1997-05-26 | 1999-05-20 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
JP3426552B2 (ja) * | 2000-02-18 | 2003-07-14 | 株式会社ミツトヨ | 形状計測装置 |
JP2004502953A (ja) * | 2000-07-07 | 2004-01-29 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 干渉測定装置 |
HUP0104057A2 (hu) | 2001-10-02 | 2003-06-28 | MTA Műszaki Fizikai és Anyagtudományi Kutatóintézet | Mérési elrendezés és eljárás félvezető szeletek és más tükörjellegű felületek érintésmentes, gyors kvantitatív topográfiai vizsgálatára |
US7403290B1 (en) * | 2006-06-30 | 2008-07-22 | Carl Zeiss Smt Ag | Method and means for determining the shape of a rough surface of an object |
US20110032534A1 (en) * | 2009-05-19 | 2011-02-10 | Camtek Ltd | System and a method for broadband interferometry |
US9291918B2 (en) * | 2011-03-08 | 2016-03-22 | Nikon Corporation | Light source assembly that generates heterodyne output beams |
JP6243110B2 (ja) * | 2012-10-15 | 2017-12-06 | アストロデザイン株式会社 | レーザー走査顕微鏡装置 |
EP3234500A4 (de) | 2014-12-19 | 2018-07-04 | University of Utah Research Foundation | Interferometriesystem und zugehörige verfahren |
WO2017223542A1 (en) * | 2016-06-23 | 2017-12-28 | University Of Utah Research Foundation | Interferometry system and associated methods |
US11162781B2 (en) | 2016-06-23 | 2021-11-02 | University Of Utah Research Foundation | Interferometry systems and methods |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1979000506A1 (en) * | 1978-01-13 | 1979-08-09 | Nat Res Dev | Interferometer systems |
GB2012450B (en) * | 1978-01-13 | 1982-04-21 | Downs M J | Interferometer systems |
DE3371559D1 (en) * | 1982-10-08 | 1987-06-19 | Nat Res Dev | Irradiative probe system |
US4611915A (en) * | 1983-06-07 | 1986-09-16 | The United States Of America As Represented By The Secretary Of The Air Force | Absolute distance sensor |
US4627730A (en) * | 1984-07-06 | 1986-12-09 | The Board Of Trustees Of The Leland Stanford Junior University | Optical scanning microscope |
US4743119A (en) * | 1985-08-22 | 1988-05-10 | Mitsubishi Denki Kabushiki Kaisha | Optical measuring apparatus |
GB8617570D0 (en) * | 1986-07-18 | 1986-08-28 | See C W | Microscopes |
GB8807817D0 (en) * | 1988-03-31 | 1988-05-05 | See C W | Optical measuring apparatus & method |
GB8820761D0 (en) * | 1988-09-02 | 1988-10-05 | Tyrer J R | Interferometry |
-
1990
- 1990-08-20 GB GB909018215A patent/GB9018215D0/en active Pending
-
1991
- 1991-08-20 WO PCT/GB1991/001410 patent/WO1992003697A1/en active IP Right Grant
- 1991-08-20 JP JP3514223A patent/JPH06503876A/ja active Pending
- 1991-08-20 DE DE69115496T patent/DE69115496T2/de not_active Expired - Fee Related
- 1991-08-20 EP EP91915309A patent/EP0549614B1/de not_active Expired - Lifetime
- 1991-08-20 GB GB9117908A patent/GB2248500B/en not_active Expired - Fee Related
-
1993
- 1993-02-19 US US07/971,972 patent/US5369489A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2248500A (en) | 1992-04-08 |
WO1992003697A1 (en) | 1992-03-05 |
JPH06503876A (ja) | 1994-04-28 |
GB2248500B (en) | 1995-03-22 |
DE69115496T2 (de) | 1996-05-09 |
US5369489A (en) | 1994-11-29 |
GB9018215D0 (en) | 1990-10-03 |
GB9117908D0 (en) | 1991-10-09 |
EP0549614B1 (de) | 1995-12-13 |
EP0549614A1 (de) | 1993-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: BTG INTERNATIONAL LTD., LONDON, GB |
|
8339 | Ceased/non-payment of the annual fee |