DE69114820D1 - Flachschleifmaschine für glasplatten. - Google Patents

Flachschleifmaschine für glasplatten.

Info

Publication number
DE69114820D1
DE69114820D1 DE69114820T DE69114820T DE69114820D1 DE 69114820 D1 DE69114820 D1 DE 69114820D1 DE 69114820 T DE69114820 T DE 69114820T DE 69114820 T DE69114820 T DE 69114820T DE 69114820 D1 DE69114820 D1 DE 69114820D1
Authority
DE
Germany
Prior art keywords
grinding machine
glass panels
flat grinding
flat
panels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69114820T
Other languages
English (en)
Other versions
DE69114820T2 (de
Inventor
Shigeru Bando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bando Kiko Co Ltd
Original Assignee
Bando Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bando Kiko Co Ltd filed Critical Bando Kiko Co Ltd
Application granted granted Critical
Publication of DE69114820D1 publication Critical patent/DE69114820D1/de
Publication of DE69114820T2 publication Critical patent/DE69114820T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/06—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving conveyor belts, a sequence of travelling work-tables or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/03—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of endless chain conveyors
    • B23Q7/035—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of endless chain conveyors on which work holders are fixed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/10—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a rigid member, e.g. pressure bar, table, pressing or supporting the belt over substantially its whole span
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/26—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for simultaneously grinding or polishing opposite faces of continuously travelling sheets or bands

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
DE69114820T 1990-06-09 1991-06-06 Flachschleifmaschine für glasplatten. Expired - Fee Related DE69114820T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15126890 1990-06-09
JP15452890 1990-06-12
PCT/JP1991/000765 WO1991019593A1 (en) 1990-06-09 1991-06-06 Surface grinder for glass plate

Publications (2)

Publication Number Publication Date
DE69114820D1 true DE69114820D1 (de) 1996-01-04
DE69114820T2 DE69114820T2 (de) 1996-08-01

Family

ID=26480570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69114820T Expired - Fee Related DE69114820T2 (de) 1990-06-09 1991-06-06 Flachschleifmaschine für glasplatten.

Country Status (5)

Country Link
US (1) US5276999A (de)
EP (1) EP0486696B1 (de)
KR (1) KR960002336B1 (de)
DE (1) DE69114820T2 (de)
WO (1) WO1991019593A1 (de)

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US5938504A (en) 1993-11-16 1999-08-17 Applied Materials, Inc. Substrate polishing apparatus
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
DE69512971T2 (de) 1994-08-09 2000-05-18 Ontrak Systems Inc., Milpitas Linear Poliergerät und Wafer Planarisierungsverfahren
US5593344A (en) * 1994-10-11 1997-01-14 Ontrak Systems, Inc. Wafer polishing machine with fluid bearings and drive systems
SE9500116L (sv) * 1995-01-16 1996-07-17 Danieli Centro Maskin Spa Förfarande vid slipning av företrädesvis ämnen och anordning för utövning av förfarandet
US5916012A (en) * 1996-04-26 1999-06-29 Lam Research Corporation Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
US5800248A (en) * 1996-04-26 1998-09-01 Ontrak Systems Inc. Control of chemical-mechanical polishing rate across a substrate surface
JPH1034514A (ja) * 1996-07-24 1998-02-10 Sanshin:Kk 表面研磨加工方法及びその装置
US5722877A (en) * 1996-10-11 1998-03-03 Lam Research Corporation Technique for improving within-wafer non-uniformity of material removal for performing CMP
IT1292718B1 (it) * 1997-04-24 1999-02-11 R P Srl Macchina levigatrice
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
US5997386A (en) * 1997-12-16 1999-12-07 Pridgeon & Clay, Inc. Automated deburring assembly
US6475070B1 (en) 1999-02-04 2002-11-05 Applied Materials, Inc. Chemical mechanical polishing with a moving polishing sheet
US6241583B1 (en) 1999-02-04 2001-06-05 Applied Materials, Inc. Chemical mechanical polishing with a plurality of polishing sheets
US6244935B1 (en) 1999-02-04 2001-06-12 Applied Materials, Inc. Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet
US6491570B1 (en) 1999-02-25 2002-12-10 Applied Materials, Inc. Polishing media stabilizer
US6135859A (en) * 1999-04-30 2000-10-24 Applied Materials, Inc. Chemical mechanical polishing with a polishing sheet and a support sheet
US6626744B1 (en) 1999-12-17 2003-09-30 Applied Materials, Inc. Planarization system with multiple polishing pads
TW494447B (en) 2000-02-01 2002-07-11 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
US7579203B2 (en) * 2000-04-25 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US6419559B1 (en) 2000-07-10 2002-07-16 Applied Materials, Inc. Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
US6520841B2 (en) 2000-07-10 2003-02-18 Applied Materials, Inc. Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet
US6561884B1 (en) * 2000-08-29 2003-05-13 Applied Materials, Inc. Web lift system for chemical mechanical planarization
US6592439B1 (en) 2000-11-10 2003-07-15 Applied Materials, Inc. Platen for retaining polishing material
US6503131B1 (en) 2001-08-16 2003-01-07 Applied Materials, Inc. Integrated platen assembly for a chemical mechanical planarization system
JP3997131B2 (ja) * 2002-09-09 2007-10-24 セントラル硝子株式会社 ガラス板の研磨装置
US7025660B2 (en) * 2003-08-15 2006-04-11 Lam Research Corporation Assembly and method for generating a hydrodynamic air bearing
DE502005005570D1 (de) * 2004-12-06 2008-11-13 Vetrox Ag Vorrichtung zum schleifen von harten oberflächen, insbesondere von glasflächen
US20080125014A1 (en) * 2006-11-29 2008-05-29 William Rogers Rosch Sub-aperture deterministric finishing of high aspect ratio glass products
KR101273005B1 (ko) * 2011-03-23 2013-06-10 조신철 디버링과 폴리싱을 동시에 처리하는 가공 장치
US9950404B1 (en) * 2012-03-29 2018-04-24 Alta Devices, Inc. High throughput polishing system for workpieces
CN102672567B (zh) * 2012-05-30 2014-09-24 昆山正秉电子材料有限公司 一种平面磨光生产***
KR20150002176A (ko) * 2013-06-28 2015-01-07 삼성디스플레이 주식회사 기판 표면 연마 장치
US10112281B2 (en) * 2013-11-22 2018-10-30 United Technologies Corporation Component blending tool
CH710037B1 (fr) * 2014-08-29 2018-06-29 Mec Assist Sarl Machine et procédé de cerclage pour la décoration de pièces métalliques
CN104209743A (zh) * 2014-09-24 2014-12-17 苏州石丸英合精密机械有限公司 全自动锁螺丝机的工件进料器
US10071539B2 (en) 2014-09-30 2018-09-11 Apple Inc. Co-sintered ceramic for electronic devices
US10335979B2 (en) 2014-09-30 2019-07-02 Apple Inc. Machining features in a ceramic component for use in an electronic device
US10207387B2 (en) 2015-03-06 2019-02-19 Apple Inc. Co-finishing surfaces
CN104759958B (zh) * 2015-04-08 2016-11-30 广东一鼎科技有限公司 一种抛光方法
US10216233B2 (en) * 2015-09-02 2019-02-26 Apple Inc. Forming features in a ceramic component for an electronic device
US10096460B2 (en) * 2016-08-02 2018-10-09 Semiconductor Components Industries, Llc Semiconductor wafer and method of wafer thinning using grinding phase and separation phase
IT201600130117A1 (it) * 2016-12-22 2018-06-22 Breton Spa Macchina e metodo per la levigatura e/o lucidatura di lastre di materiale lapideo, quale pietra naturale o agglomerata, ceramico e vetro
CN106863092B (zh) * 2017-04-14 2019-04-19 安徽诺布特科技有限公司 多头金属件智能抛光打磨机
US10542628B2 (en) 2017-08-02 2020-01-21 Apple Inc. Enclosure for an electronic device having a shell and internal chassis
US10300630B1 (en) * 2018-12-20 2019-05-28 Alex Xie Cutting equipment and its controllers
CN110116355A (zh) * 2019-06-11 2019-08-13 方勇 一种铝焊丝的制造用打磨装置
CN111300240B (zh) * 2020-02-22 2021-02-19 深圳市盛鸿运科技有限公司 一种钢板表面处理设备及钢板表面处理工艺
CN114102360A (zh) * 2021-10-28 2022-03-01 南京市同亮科技有限公司 手机屏幕制造用自动化打磨机器人及其打磨方法

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Also Published As

Publication number Publication date
WO1991019593A1 (en) 1991-12-26
EP0486696B1 (de) 1995-11-22
EP0486696A1 (de) 1992-05-27
KR920702271A (ko) 1992-09-03
DE69114820T2 (de) 1996-08-01
EP0486696A4 (en) 1992-12-02
US5276999A (en) 1994-01-11
KR960002336B1 (ko) 1996-02-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee