DE69107244D1 - Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung. - Google Patents
Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung.Info
- Publication number
- DE69107244D1 DE69107244D1 DE69107244T DE69107244T DE69107244D1 DE 69107244 D1 DE69107244 D1 DE 69107244D1 DE 69107244 T DE69107244 T DE 69107244T DE 69107244 T DE69107244 T DE 69107244T DE 69107244 D1 DE69107244 D1 DE 69107244D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- diamond coating
- industrial diamond
- industrial
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011248 coating agent Substances 0.000 title 1
- 238000000576 coating method Methods 0.000 title 1
- 229910003460 diamond Inorganic materials 0.000 title 1
- 239000010432 diamond Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/277—Diamond only using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Plasma & Fusion (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2140226A JP2840788B2 (ja) | 1990-05-30 | 1990-05-30 | ダイヤモンド成分を含む表面保護膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69107244D1 true DE69107244D1 (de) | 1995-03-23 |
DE69107244T2 DE69107244T2 (de) | 1995-05-24 |
Family
ID=15263842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69107244T Expired - Fee Related DE69107244T2 (de) | 1990-05-30 | 1991-05-30 | Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5254141A (de) |
EP (1) | EP0459807B1 (de) |
JP (1) | JP2840788B2 (de) |
KR (1) | KR930007149B1 (de) |
DE (1) | DE69107244T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2651947B2 (ja) * | 1990-03-26 | 1997-09-10 | 株式会社半導体エネルギー研究所 | ダイヤモンド薄膜コーティング部材およびダイヤモンド薄膜コーティング方法 |
JPH059735A (ja) * | 1991-07-09 | 1993-01-19 | Kobe Steel Ltd | ダイヤモンドの気相合成方法 |
US6007591A (en) * | 1995-03-07 | 1999-12-28 | Nihon Micro Coating Co., Ltd. | Abrasive sheet and method for producing same |
JP2983154B2 (ja) * | 1995-03-29 | 1999-11-29 | 株式会社椿本チエイン | 工具保持装置 |
FR2738832B1 (fr) * | 1995-09-18 | 1997-12-12 | Suisse Electronique Microtech | Procede d'obtention d'une couche de diamant sur un support en matiere plastique et produit ainsi obtenu |
CA2258388C (en) * | 1998-01-20 | 2002-04-16 | Philip M. Fabis | Surface processing of thin film cvd diamond coatings for improved resistive properties and integrated circuit packages incorporating processed coatings |
US6524357B2 (en) | 2000-06-30 | 2003-02-25 | Saint-Gobain Abrasives Technology Company | Process for coating superabrasive with metal |
KR100777148B1 (ko) | 2000-06-30 | 2007-11-19 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 초연삭제에 금속으로 코팅하는 방법 |
US20060147631A1 (en) * | 2005-01-04 | 2006-07-06 | Lev Leonid C | Method for making diamond coated substrates, articles made therefrom, and method of drilling |
US20080187769A1 (en) * | 2006-04-13 | 2008-08-07 | 3M Innovative Properties | Metal-coated superabrasive material and methods of making the same |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3942959A (en) * | 1967-12-22 | 1976-03-09 | Fabriksaktiebolaget Eka | Multilayered flexible abrasive containing a layer of electroconductive material |
US4101698A (en) * | 1975-07-14 | 1978-07-18 | Avery International Corp. | Elastomeric reflective metal surfaces |
US4179324A (en) * | 1977-11-28 | 1979-12-18 | Spire Corporation | Process for fabricating thin film and glass sheet laminate |
JPS622133A (ja) * | 1985-06-28 | 1987-01-08 | Shin Etsu Chem Co Ltd | ミクロト−ム用ダイヤモンドコ−テイング刃およびその製造方法 |
US4776862A (en) * | 1987-12-08 | 1988-10-11 | Wiand Ronald C | Brazing of diamond |
JPH01153228A (ja) * | 1987-12-10 | 1989-06-15 | Asahi Daiyamondo Kogyo Kk | 気相合成ダイヤモンド工具の製造法 |
JP2607592B2 (ja) * | 1988-02-18 | 1997-05-07 | 住友電気工業株式会社 | 高耐摩耗性多結晶ダイヤモンド工具及びその製造方法 |
JP2631708B2 (ja) * | 1988-07-29 | 1997-07-16 | 株式会社石塚研究所 | 改良された微細ダイヤモンド砥粒およびその製造方法 |
US4919974A (en) * | 1989-01-12 | 1990-04-24 | Ford Motor Company | Making diamond composite coated cutting tools |
ZA901817B (en) * | 1989-06-15 | 1991-04-24 | Gen Electric | Tools employing a large or irregularly shaped diamond abrasive |
US4968326A (en) * | 1989-10-10 | 1990-11-06 | Wiand Ronald C | Method of brazing of diamond to substrate |
US5082359A (en) * | 1989-11-28 | 1992-01-21 | Epion Corporation | Diamond films and method of growing diamond films on nondiamond substrates |
JP2651947B2 (ja) * | 1990-03-26 | 1997-09-10 | 株式会社半導体エネルギー研究所 | ダイヤモンド薄膜コーティング部材およびダイヤモンド薄膜コーティング方法 |
-
1990
- 1990-05-30 JP JP2140226A patent/JP2840788B2/ja not_active Expired - Fee Related
-
1991
- 1991-05-22 US US07/704,104 patent/US5254141A/en not_active Expired - Lifetime
- 1991-05-29 KR KR1019910008814A patent/KR930007149B1/ko not_active IP Right Cessation
- 1991-05-30 DE DE69107244T patent/DE69107244T2/de not_active Expired - Fee Related
- 1991-05-30 EP EP91304903A patent/EP0459807B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2840788B2 (ja) | 1998-12-24 |
KR930007149B1 (ko) | 1993-07-30 |
EP0459807B1 (de) | 1995-02-08 |
US5254141A (en) | 1993-10-19 |
DE69107244T2 (de) | 1995-05-24 |
KR910020197A (ko) | 1991-12-19 |
JPH0437695A (ja) | 1992-02-07 |
EP0459807A1 (de) | 1991-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |