DE69102111D1 - Cantilever zum Gebrauch in einem Atomkraftmikroskop und Verfahren zu dessen Herstellung. - Google Patents

Cantilever zum Gebrauch in einem Atomkraftmikroskop und Verfahren zu dessen Herstellung.

Info

Publication number
DE69102111D1
DE69102111D1 DE69102111T DE69102111T DE69102111D1 DE 69102111 D1 DE69102111 D1 DE 69102111D1 DE 69102111 T DE69102111 T DE 69102111T DE 69102111 T DE69102111 T DE 69102111T DE 69102111 D1 DE69102111 D1 DE 69102111D1
Authority
DE
Germany
Prior art keywords
cantilever
making
same
atomic force
force microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69102111T
Other languages
English (en)
Other versions
DE69102111T2 (de
Inventor
Tadashi Nishioka
Takao Yasue
Hiroshi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69102111D1 publication Critical patent/DE69102111D1/de
Publication of DE69102111T2 publication Critical patent/DE69102111T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/879—Material

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69102111T 1990-08-28 1991-03-05 Cantilever zum Gebrauch in einem Atomkraftmikroskop und Verfahren zu dessen Herstellung. Expired - Fee Related DE69102111T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2224473A JP2501945B2 (ja) 1990-08-28 1990-08-28 原子間力顕微鏡のカンチレバ―及びその製造方法

Publications (2)

Publication Number Publication Date
DE69102111D1 true DE69102111D1 (de) 1994-06-30
DE69102111T2 DE69102111T2 (de) 1995-01-05

Family

ID=16814348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102111T Expired - Fee Related DE69102111T2 (de) 1990-08-28 1991-03-05 Cantilever zum Gebrauch in einem Atomkraftmikroskop und Verfahren zu dessen Herstellung.

Country Status (4)

Country Link
US (1) US5193385A (de)
EP (1) EP0475559B1 (de)
JP (1) JP2501945B2 (de)
DE (1) DE69102111T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264696A (en) * 1991-05-20 1993-11-23 Olympus Optical Co., Ltd. Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
US5319960A (en) * 1992-03-06 1994-06-14 Topometrix Scanning force microscope
JP2917674B2 (ja) * 1992-06-03 1999-07-12 松下電器産業株式会社 走査トンネル顕微鏡用探針およびその製造方法
DE4310349C2 (de) * 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
US5646339A (en) * 1994-02-14 1997-07-08 International Business Machines Corporation Force microscope and method for measuring atomic forces in multiple directions
US5591903A (en) * 1994-08-11 1997-01-07 Iowa State University Research Foundation Reconstructing the shape of an atomic force microscope probe
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5781649A (en) * 1996-04-15 1998-07-14 Phase Metrics, Inc. Surface inspection of a disk by diffraction pattern sampling
JP4403585B2 (ja) 2005-10-06 2010-01-27 並木精密宝石株式会社 探針及びカンチレバー
JP2008026281A (ja) * 2006-07-25 2008-02-07 Sumitomo Electric Ind Ltd マイクロプローブ
US8001830B2 (en) * 2007-05-15 2011-08-23 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
JP2008292375A (ja) * 2007-05-25 2008-12-04 Namiki Precision Jewel Co Ltd 走査プローブ顕微鏡に用いる探針及びカンチレバー
WO2009086534A1 (en) 2007-12-28 2009-07-09 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and probe device produced thereby
DE102010035931A1 (de) 2010-08-31 2012-03-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer Messspitze für ein Rastersondenmikroskop sowie Messsonde mit nach diesem Verfahren hergestellter Messspitze
RU2479063C1 (ru) * 2011-11-16 2013-04-10 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Способ определения рельефа поверхности

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53168Y2 (de) * 1975-12-22 1978-01-06
US4340954A (en) * 1980-08-04 1982-07-20 Rca Corporation Stylus tip fabrication from a synthetic diamond stone
US4669300A (en) * 1984-03-30 1987-06-02 Sloan Technology Corporation Electromagnetic stylus force adjustment mechanism
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
JP2572107B2 (ja) * 1988-04-04 1997-01-16 三菱電機株式会社 走査型トンネル顕微鏡の粗動機構
JPH0758164B2 (ja) * 1988-04-22 1995-06-21 三菱電機株式会社 走査型トンネル顕微鏡の微動機構
JPH0792462B2 (ja) * 1988-05-16 1995-10-09 三菱電機株式会社 走査型トンネル顕微鏡の微動機構
GB8818445D0 (en) * 1988-08-03 1988-09-07 Jones B L Stm probe
JPH0267401A (ja) * 1988-09-02 1990-03-07 Toshiba Corp タービンのパワーロードアンバランス検出装置
JPH0275902A (ja) * 1988-09-13 1990-03-15 Seiko Instr Inc ダイヤモンド探針及びその成形方法
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
US4947042A (en) * 1988-12-13 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Tunnel unit and scanning head for scanning tunneling microscope
US4943719A (en) * 1989-01-17 1990-07-24 The Board Of Trustees Of The Leland Stanford University Microminiature cantilever stylus
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
EP0413042B1 (de) * 1989-08-16 1992-12-16 International Business Machines Corporation Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf
GB2238161A (en) * 1989-08-18 1991-05-22 Rosser Roy J Attractive atomic force microscope
US5021364A (en) * 1989-10-31 1991-06-04 The Board Of Trustees Of The Leland Stanford Junior University Microcantilever with integral self-aligned sharp tetrahedral tip

Also Published As

Publication number Publication date
DE69102111T2 (de) 1995-01-05
US5193385A (en) 1993-03-16
EP0475559B1 (de) 1994-05-25
JP2501945B2 (ja) 1996-05-29
EP0475559A2 (de) 1992-03-18
EP0475559A3 (en) 1992-05-13
JPH04106852A (ja) 1992-04-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee