DE69033790T2 - Photolackzusammensetzung - Google Patents

Photolackzusammensetzung

Info

Publication number
DE69033790T2
DE69033790T2 DE69033790T DE69033790T DE69033790T2 DE 69033790 T2 DE69033790 T2 DE 69033790T2 DE 69033790 T DE69033790 T DE 69033790T DE 69033790 T DE69033790 T DE 69033790T DE 69033790 T2 DE69033790 T2 DE 69033790T2
Authority
DE
Germany
Prior art keywords
photoresist composition
photoresist
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69033790T
Other languages
English (en)
Other versions
DE69033790D1 (de
Inventor
Naoki Takeyama
Yasunori Uetani
Hirotoshi Nakanishi
Ryotaro Hanawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of DE69033790D1 publication Critical patent/DE69033790D1/de
Application granted granted Critical
Publication of DE69033790T2 publication Critical patent/DE69033790T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
DE69033790T 1989-04-10 1990-04-09 Photolackzusammensetzung Expired - Fee Related DE69033790T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1091551A JP2682126B2 (ja) 1989-04-10 1989-04-10 フォトレジスト組成物

Publications (2)

Publication Number Publication Date
DE69033790D1 DE69033790D1 (de) 2001-10-11
DE69033790T2 true DE69033790T2 (de) 2002-05-23

Family

ID=14029636

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69033790T Expired - Fee Related DE69033790T2 (de) 1989-04-10 1990-04-09 Photolackzusammensetzung

Country Status (5)

Country Link
EP (1) EP0392409B1 (de)
JP (1) JP2682126B2 (de)
KR (1) KR100214733B1 (de)
CA (1) CA2014287A1 (de)
DE (1) DE69033790T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2625206B2 (ja) * 1989-04-18 1997-07-02 富士写真フイルム株式会社 フオトレジスト組成物
JP2921022B2 (ja) * 1990-05-02 1999-07-19 住友化学工業株式会社 レジスト組成物
JP2921023B2 (ja) * 1990-05-02 1999-07-19 住友化学工業株式会社 レジスト用の組成物
CA2041434A1 (en) * 1990-05-02 1991-11-03 Teijiro Kitao Resist composition
US5719004A (en) * 1996-08-07 1998-02-17 Clariant Finance (Bvi) Limited Positive photoresist composition containing a 2,4-dinitro-1-naphthol
US5763135A (en) * 1996-09-30 1998-06-09 Clariant Finance (Bvi) Limited Light sensitive composition containing an arylhydrazo dye

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4135007A (en) * 1977-12-29 1979-01-16 Gaf Corporation Radiation curable coating composition comprising an acryl urethane oligomer, and an ultra-violet absorber
JPS6193445A (ja) * 1984-10-12 1986-05-12 Fuji Photo Film Co Ltd 新規なフオトレジスト組成物
JPS6280640A (ja) * 1985-10-04 1987-04-14 Fuji Photo Film Co Ltd ハロゲン化銀写真感光材料
JPS63286843A (ja) * 1987-05-19 1988-11-24 Nippon Zeon Co Ltd ポジ型フォトレジスト組成物
EP0303967A3 (de) * 1987-08-20 1990-10-31 Hoechst Celanese Corporation Aufzeichnungsmaterial mit einer Kontrastverstärkungsschicht sowie Verfahren zur Herstellung eines Aufzeichnungsmaterials mit einer darauf aufgebrachten Maske
US5218136A (en) * 1987-12-28 1993-06-08 Sumitomo Chemical Company, Limited Styryl compounds, process for preparing the same and photoresist compositions comprising the same

Also Published As

Publication number Publication date
DE69033790D1 (de) 2001-10-11
JP2682126B2 (ja) 1997-11-26
JPH02269346A (ja) 1990-11-02
CA2014287A1 (en) 1990-10-10
EP0392409B1 (de) 2001-09-05
KR900016814A (ko) 1990-11-14
KR100214733B1 (ko) 1999-08-02
EP0392409A1 (de) 1990-10-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee