DE69032747T2 - Verbesserte Elektrodenstruktur für kapazitive Positionsgeber - Google Patents

Verbesserte Elektrodenstruktur für kapazitive Positionsgeber

Info

Publication number
DE69032747T2
DE69032747T2 DE69032747T DE69032747T DE69032747T2 DE 69032747 T2 DE69032747 T2 DE 69032747T2 DE 69032747 T DE69032747 T DE 69032747T DE 69032747 T DE69032747 T DE 69032747T DE 69032747 T2 DE69032747 T2 DE 69032747T2
Authority
DE
Germany
Prior art keywords
electrode structure
position sensors
improved electrode
capacitive position
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69032747T
Other languages
English (en)
Other versions
DE69032747D1 (de
Inventor
Nils Ingvar Andermo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23414919&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69032747(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE69032747D1 publication Critical patent/DE69032747D1/de
Application granted granted Critical
Publication of DE69032747T2 publication Critical patent/DE69032747T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69032747T 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für kapazitive Positionsgeber Expired - Lifetime DE69032747T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/359,699 US4959615A (en) 1988-05-31 1989-05-31 Electrode structure for capacitance-type measurement transducers

Publications (2)

Publication Number Publication Date
DE69032747D1 DE69032747D1 (de) 1998-12-10
DE69032747T2 true DE69032747T2 (de) 1999-04-01

Family

ID=23414919

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69032747T Expired - Lifetime DE69032747T2 (de) 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für kapazitive Positionsgeber
DE90110295T Expired - Lifetime DE69002540T2 (de) 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für Messgeber vom Kapazitätstyp.
DE69031688T Revoked DE69031688T2 (de) 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für Messgeber vom Kapazitätstyp

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE90110295T Expired - Lifetime DE69002540T2 (de) 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für Messgeber vom Kapazitätstyp.
DE69031688T Revoked DE69031688T2 (de) 1989-05-31 1990-05-30 Verbesserte Elektrodenstruktur für Messgeber vom Kapazitätstyp

Country Status (4)

Country Link
US (1) US4959615A (de)
EP (3) EP0676623B1 (de)
JP (1) JPH0749969B2 (de)
DE (3) DE69032747T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2041231C (fr) * 1991-04-25 1999-02-16 Marius Cloutier Mesure dynamique et sans contact de deplacement ou de permittivite a l'aide d'un capteur capacitif
JP2504881B2 (ja) * 1991-09-17 1996-06-05 株式会社ミツトヨ デ―タ出力エンコ―ダ
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
US5416479A (en) * 1992-03-23 1995-05-16 Hewlett-Packard Corporation Handle for position encoder system
DE4308462A1 (de) * 1993-03-17 1994-09-22 Vdo Schindling Anordnung zur Signalverarbeitung für Absolutwertsensoren mit periodischen Strukturen, insbesondere für Positions- und Winkelsensoren
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5574381A (en) * 1995-01-06 1996-11-12 Mitutoyo Corporation Sealed mechanical configuration for electronic calipers for reliable operation in contaminated environments
DE69530074T2 (de) * 1995-06-07 2004-03-04 Brown & Sharpe Tesa S.A. Kapazitive Messvorrichtung
US5708367A (en) * 1995-07-10 1998-01-13 Tousson; Eliahou Digital position sensor
FR2743882B1 (fr) * 1996-01-24 1998-04-10 Magneti Marelli France Dispositif et procede de reperage de position d'un element mobile, en particulier pour un instrument de mesure
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder
US5998990A (en) * 1997-08-25 1999-12-07 Mitutoyo Corporation Pitch-compensated induced current position transducer
JP3246726B2 (ja) 1998-11-13 2002-01-15 株式会社ミツトヨ 静電容量式変位検出器及び測定装置
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
US7075317B2 (en) * 2004-08-06 2006-07-11 Waters Investment Limited System and method for measurement of small-angle or small-displacement
US7135874B2 (en) * 2004-08-06 2006-11-14 Waters Investments Limited System and method for enhanced measurement of rheological properties
DE102004052587A1 (de) * 2004-10-29 2006-05-04 Martin Steffek Wegaufnehmer
US20060174502A1 (en) * 2005-02-09 2006-08-10 Stephen Crane Linear and angular measuring apparatus
US7239130B1 (en) 2006-07-24 2007-07-03 Mitutoyo Corporation Compact pitch-compensated inductive displacement transducer
US9184099B2 (en) 2010-10-04 2015-11-10 The Board Of Trustees Of The Leland Stanford Junior University Biosensor devices, systems and methods therefor
AU2011312218B2 (en) 2010-10-04 2015-11-05 Sequencing Health, Inc. Systems and methods for automated reusable parallel biological reactions
US8585973B2 (en) 2011-05-27 2013-11-19 The Board Of Trustees Of The Leland Stanford Junior University Nano-sensor array
US9926596B2 (en) 2011-05-27 2018-03-27 Genapsys, Inc. Systems and methods for genetic and biological analysis
JP6193252B2 (ja) 2011-12-01 2017-09-06 ジナプシス インコーポレイテッド 高効率電子配列決定及び検出のためのシステム並びに方法
CA2896879C (en) * 2013-03-15 2020-09-22 Genapsys, Inc. Systems and methods for biological analysis
EP3792921A1 (de) 2013-12-11 2021-03-17 Genapsys, Inc. Systeme und verfahren für biologische analysen und berechnungen
US9714846B2 (en) 2013-12-31 2017-07-25 Chicago Dial Indicator Company Displacement measuring device with capacitive sensing
EP3556864B1 (de) 2014-04-18 2020-12-09 Genapsys, Inc. Verfahren und systeme zur nukleinsäureamplifikation
US10895657B2 (en) * 2017-01-13 2021-01-19 Franklin Sensors Inc. Apparatus and methods for obscured feature detection with uniform electric fields
US10613243B2 (en) * 2017-04-27 2020-04-07 Franklin Sensors Inc. Apparatus and methods for obscured feature detection
CN109790575A (zh) 2016-07-20 2019-05-21 吉纳普赛斯股份有限公司 用于核酸测序的***和方法
SG11202002516WA (en) 2017-09-21 2020-04-29 Genapsys Inc Systems and methods for nucleic acid sequencing
US20190360843A1 (en) * 2018-05-22 2019-11-28 Chad Unterschultz Capacitive Position Sensing
WO2019226689A1 (en) 2018-05-22 2019-11-28 Axbio Inc. Methods, systems, and compositions for nucleic acid sequencing
DE102019118693A1 (de) 2019-07-10 2021-01-14 Ewellix AB Positionssensorik, Verfahren zur Positionsermittlung und Linearaktuator

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860918A (en) * 1973-06-25 1975-01-14 Becton Dickinson Co Capacitive position transducer
SE411392B (sv) 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
US4177421A (en) * 1978-02-27 1979-12-04 Xerox Corporation Capacitive transducer
US4303919A (en) * 1978-12-04 1981-12-01 John Dimeff Non-contacting device for sensing multi-component motion
US4410852A (en) * 1980-08-22 1983-10-18 Harold Guretzky Angle-position transducer
US4434391A (en) * 1982-01-15 1984-02-28 Sperry Corporation Capacitive feedback transducer and closed loop instrument meter mechanism
JPS6093312A (ja) * 1983-10-27 1985-05-25 Mitsutoyo Mfg Co Ltd 容量式変位測定機
CN85100991B (zh) 1985-04-01 1987-06-10 西安仪表厂 电容式位置传感器
US4565753A (en) * 1985-04-03 1986-01-21 Gte Government Systems Corporation Electrochemical cell having wound electrode structures
GB8523982D0 (en) * 1985-09-28 1985-10-30 Emi Plc Thorn Tactile sensor array
EP0404975A1 (de) 1989-06-28 1991-01-02 Mitutoyo Corporation Kapazitives Messinstrument mit verbesserter Elektrodeneinrichtung
EP0404980B1 (de) 1989-06-28 1993-05-05 Mitutoyo Corporation Kapazitives Messverfahren für Absolutwegmessung

Also Published As

Publication number Publication date
JPH0749969B2 (ja) 1995-05-31
EP0400626A1 (de) 1990-12-05
EP0676623B1 (de) 1998-11-04
EP0676623A3 (de) 1996-04-03
DE69032747D1 (de) 1998-12-10
DE69002540T2 (de) 1993-12-09
EP0400626B1 (de) 1993-08-04
US4959615A (en) 1990-09-25
DE69002540D1 (de) 1993-09-09
JPH03277919A (ja) 1991-12-09
EP0537800B1 (de) 1997-11-05
EP0676623A2 (de) 1995-10-11
EP0537800A1 (de) 1993-04-21
DE69031688T2 (de) 1998-04-30
DE69031688D1 (de) 1997-12-11

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Legal Events

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