DE69023593D1 - Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht. - Google Patents
Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht.Info
- Publication number
- DE69023593D1 DE69023593D1 DE69023593T DE69023593T DE69023593D1 DE 69023593 D1 DE69023593 D1 DE 69023593D1 DE 69023593 T DE69023593 T DE 69023593T DE 69023593 T DE69023593 T DE 69023593T DE 69023593 D1 DE69023593 D1 DE 69023593D1
- Authority
- DE
- Germany
- Prior art keywords
- removal
- solid support
- metal oxides
- support consisting
- gaseous hydrides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Catalysts (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8912448A FR2652280B1 (fr) | 1989-09-22 | 1989-09-22 | Procede d'elimination d'hydrures gazeux sur support solide a base d'oxydes metalliques. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69023593D1 true DE69023593D1 (de) | 1995-12-21 |
DE69023593T2 DE69023593T2 (de) | 1996-05-02 |
Family
ID=9385751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69023593T Expired - Fee Related DE69023593T2 (de) | 1989-09-22 | 1990-09-20 | Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5378439A (de) |
EP (1) | EP0419356B1 (de) |
JP (1) | JP3214698B2 (de) |
KR (1) | KR0158680B1 (de) |
DE (1) | DE69023593T2 (de) |
FR (1) | FR2652280B1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5376614A (en) * | 1992-12-11 | 1994-12-27 | United Technologies Corporation | Regenerable supported amine-polyol sorbent |
JPH0929002A (ja) | 1995-07-17 | 1997-02-04 | Teisan Kk | ガス回収装置 |
US5858065A (en) * | 1995-07-17 | 1999-01-12 | American Air Liquide | Process and system for separation and recovery of perfluorocompound gases |
US5785741A (en) | 1995-07-17 | 1998-07-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude | Process and system for separation and recovery of perfluorocompound gases |
IE80909B1 (en) | 1996-06-14 | 1999-06-16 | Air Liquide | An improved process and system for separation and recovery of perfluorocompound gases |
US5759237A (en) * | 1996-06-14 | 1998-06-02 | L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude | Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases |
US6338312B2 (en) * | 1998-04-15 | 2002-01-15 | Advanced Technology Materials, Inc. | Integrated ion implant scrubber system |
FR2779070B1 (fr) * | 1998-05-28 | 2000-06-30 | Air Liquide | Dispositif de fourniture d'un gaz epure a une installation purgee avec ce gaz epure |
US6491884B1 (en) * | 1999-11-26 | 2002-12-10 | Advanced Technology Materials, Inc. | In-situ air oxidation treatment of MOCVD process effluent |
KR20010097562A (ko) * | 2000-04-24 | 2001-11-08 | 하문수 | 수소화물계 가스 제거용 촉매 및 그 제조방법 |
US6653514B1 (en) | 2000-05-08 | 2003-11-25 | Shell Oil Company | Removal of phosphorus-containing impurities from an olefin feedstock |
US6388162B1 (en) | 2000-05-08 | 2002-05-14 | Shell Oil Company | Diene removal from an olefin feedstock |
US6492568B1 (en) | 2000-05-08 | 2002-12-10 | Shell Oil Company | Removal of phosphorus-containing compounds from an olefin feedstock |
US7102038B2 (en) | 2000-05-08 | 2006-09-05 | Shell Oil Company | Phosphorous removal and diene removal, when using diene sensitive catalyst, during conversion of olefins to branched primary alcohols |
US6805728B2 (en) * | 2002-12-09 | 2004-10-19 | Advanced Technology Materials, Inc. | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream |
US7364603B2 (en) * | 2002-12-09 | 2008-04-29 | Applied Materials, Inc. | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream |
US6843830B2 (en) * | 2003-04-15 | 2005-01-18 | Advanced Technology Materials, Inc. | Abatement system targeting a by-pass effluent stream of a semiconductor process tool |
JP4747046B2 (ja) * | 2006-07-13 | 2011-08-10 | 日本パイオニクス株式会社 | ゲルマンの検知剤 |
AT512601B1 (de) | 2012-03-05 | 2014-06-15 | Chemiefaser Lenzing Ag | Verfahren zur Herstellung einer Cellulosesuspension |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2063216A5 (de) * | 1969-09-03 | 1971-07-09 | Schwarzheide Synthesewerk Veb | |
US4048387A (en) * | 1972-08-02 | 1977-09-13 | Accumulatorenwerk Hoppecke-Carl Zoellner & Sohn | Substance and device for the absorption of catalyst poisoning gases out of the oxyhydrogen gas produced by lead-acid storage batteries |
FR2501662A1 (fr) * | 1981-03-13 | 1982-09-17 | Rhone Poulenc Spec Chim | Catalyseurs et procede d'oxydation de l'hydrogene sulfure et/ou des composes organiques du soufre en anhydride sulfureux |
US4556547A (en) * | 1982-02-01 | 1985-12-03 | Takeda Chemical Industries, Ltd. | Process for treatment of gases |
CA1216136A (en) * | 1983-03-03 | 1987-01-06 | Toshio Aibe | Method for removal of poisonous gases |
US4605812A (en) * | 1984-06-05 | 1986-08-12 | Phillips Petroleum Company | Process for removal of arsenic from gases |
DE3561499D1 (en) * | 1985-03-13 | 1988-03-03 | Japan Pionics | Method of cleaning exhaust gases |
JPS6295119A (ja) * | 1985-10-21 | 1987-05-01 | Nippon Chem Ind Co Ltd:The | 水素化ガスの除去方法 |
JPH0687943B2 (ja) * | 1986-06-03 | 1994-11-09 | 日本パイオニクス株式会社 | 排ガスの浄化方法 |
FR2609905B1 (fr) * | 1987-01-28 | 1989-04-14 | Air Liquide | Procede d'elimination des hydrures de silicium contenus dans un effluent gazeux, et installation de traitement |
DE3869480D1 (de) * | 1987-06-01 | 1992-04-30 | Japan Pionics | Verfahren zum reinigen von abgas. |
EP0309099B1 (de) * | 1987-08-31 | 1992-03-18 | Japan Pionics., Ltd. | Methode zum Reinigen von giftige Komponenten enthaltendem Gas |
-
1989
- 1989-09-22 FR FR8912448A patent/FR2652280B1/fr not_active Expired - Fee Related
-
1990
- 1990-09-19 JP JP24762290A patent/JP3214698B2/ja not_active Expired - Fee Related
- 1990-09-20 DE DE69023593T patent/DE69023593T2/de not_active Expired - Fee Related
- 1990-09-20 EP EP90402591A patent/EP0419356B1/de not_active Expired - Lifetime
- 1990-09-21 KR KR1019900014975A patent/KR0158680B1/ko not_active IP Right Cessation
-
1992
- 1992-07-16 US US07/914,215 patent/US5378439A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0419356B1 (de) | 1995-11-15 |
DE69023593T2 (de) | 1996-05-02 |
FR2652280B1 (fr) | 1991-11-29 |
EP0419356A1 (de) | 1991-03-27 |
US5378439A (en) | 1995-01-03 |
FR2652280A1 (fr) | 1991-03-29 |
JPH03135419A (ja) | 1991-06-10 |
KR910005910A (ko) | 1991-04-27 |
JP3214698B2 (ja) | 2001-10-02 |
KR0158680B1 (ko) | 1998-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |