DE69023593D1 - Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht. - Google Patents

Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht.

Info

Publication number
DE69023593D1
DE69023593D1 DE69023593T DE69023593T DE69023593D1 DE 69023593 D1 DE69023593 D1 DE 69023593D1 DE 69023593 T DE69023593 T DE 69023593T DE 69023593 T DE69023593 T DE 69023593T DE 69023593 D1 DE69023593 D1 DE 69023593D1
Authority
DE
Germany
Prior art keywords
removal
solid support
metal oxides
support consisting
gaseous hydrides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69023593T
Other languages
English (en)
Other versions
DE69023593T2 (de
Inventor
Olivier Delobel
Jean Louise
Philippe Cornut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69023593D1 publication Critical patent/DE69023593D1/de
Publication of DE69023593T2 publication Critical patent/DE69023593T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Silicon Compounds (AREA)
DE69023593T 1989-09-22 1990-09-20 Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht. Expired - Fee Related DE69023593T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8912448A FR2652280B1 (fr) 1989-09-22 1989-09-22 Procede d'elimination d'hydrures gazeux sur support solide a base d'oxydes metalliques.

Publications (2)

Publication Number Publication Date
DE69023593D1 true DE69023593D1 (de) 1995-12-21
DE69023593T2 DE69023593T2 (de) 1996-05-02

Family

ID=9385751

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69023593T Expired - Fee Related DE69023593T2 (de) 1989-09-22 1990-09-20 Verfahren zur Entfernung von gasförmigen Hydriden auf einem festen Träger, der aus Metalloxyden besteht.

Country Status (6)

Country Link
US (1) US5378439A (de)
EP (1) EP0419356B1 (de)
JP (1) JP3214698B2 (de)
KR (1) KR0158680B1 (de)
DE (1) DE69023593T2 (de)
FR (1) FR2652280B1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5376614A (en) * 1992-12-11 1994-12-27 United Technologies Corporation Regenerable supported amine-polyol sorbent
JPH0929002A (ja) 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
US5785741A (en) 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
IE80909B1 (en) 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
US6338312B2 (en) * 1998-04-15 2002-01-15 Advanced Technology Materials, Inc. Integrated ion implant scrubber system
FR2779070B1 (fr) * 1998-05-28 2000-06-30 Air Liquide Dispositif de fourniture d'un gaz epure a une installation purgee avec ce gaz epure
US6491884B1 (en) * 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
KR20010097562A (ko) * 2000-04-24 2001-11-08 하문수 수소화물계 가스 제거용 촉매 및 그 제조방법
US6653514B1 (en) 2000-05-08 2003-11-25 Shell Oil Company Removal of phosphorus-containing impurities from an olefin feedstock
US6388162B1 (en) 2000-05-08 2002-05-14 Shell Oil Company Diene removal from an olefin feedstock
US6492568B1 (en) 2000-05-08 2002-12-10 Shell Oil Company Removal of phosphorus-containing compounds from an olefin feedstock
US7102038B2 (en) 2000-05-08 2006-09-05 Shell Oil Company Phosphorous removal and diene removal, when using diene sensitive catalyst, during conversion of olefins to branched primary alcohols
US6805728B2 (en) * 2002-12-09 2004-10-19 Advanced Technology Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US7364603B2 (en) * 2002-12-09 2008-04-29 Applied Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
JP4747046B2 (ja) * 2006-07-13 2011-08-10 日本パイオニクス株式会社 ゲルマンの検知剤
AT512601B1 (de) 2012-03-05 2014-06-15 Chemiefaser Lenzing Ag Verfahren zur Herstellung einer Cellulosesuspension

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2063216A5 (de) * 1969-09-03 1971-07-09 Schwarzheide Synthesewerk Veb
US4048387A (en) * 1972-08-02 1977-09-13 Accumulatorenwerk Hoppecke-Carl Zoellner & Sohn Substance and device for the absorption of catalyst poisoning gases out of the oxyhydrogen gas produced by lead-acid storage batteries
FR2501662A1 (fr) * 1981-03-13 1982-09-17 Rhone Poulenc Spec Chim Catalyseurs et procede d'oxydation de l'hydrogene sulfure et/ou des composes organiques du soufre en anhydride sulfureux
US4556547A (en) * 1982-02-01 1985-12-03 Takeda Chemical Industries, Ltd. Process for treatment of gases
CA1216136A (en) * 1983-03-03 1987-01-06 Toshio Aibe Method for removal of poisonous gases
US4605812A (en) * 1984-06-05 1986-08-12 Phillips Petroleum Company Process for removal of arsenic from gases
DE3561499D1 (en) * 1985-03-13 1988-03-03 Japan Pionics Method of cleaning exhaust gases
JPS6295119A (ja) * 1985-10-21 1987-05-01 Nippon Chem Ind Co Ltd:The 水素化ガスの除去方法
JPH0687943B2 (ja) * 1986-06-03 1994-11-09 日本パイオニクス株式会社 排ガスの浄化方法
FR2609905B1 (fr) * 1987-01-28 1989-04-14 Air Liquide Procede d'elimination des hydrures de silicium contenus dans un effluent gazeux, et installation de traitement
DE3869480D1 (de) * 1987-06-01 1992-04-30 Japan Pionics Verfahren zum reinigen von abgas.
EP0309099B1 (de) * 1987-08-31 1992-03-18 Japan Pionics., Ltd. Methode zum Reinigen von giftige Komponenten enthaltendem Gas

Also Published As

Publication number Publication date
EP0419356B1 (de) 1995-11-15
DE69023593T2 (de) 1996-05-02
FR2652280B1 (fr) 1991-11-29
EP0419356A1 (de) 1991-03-27
US5378439A (en) 1995-01-03
FR2652280A1 (fr) 1991-03-29
JPH03135419A (ja) 1991-06-10
KR910005910A (ko) 1991-04-27
JP3214698B2 (ja) 2001-10-02
KR0158680B1 (ko) 1998-11-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee