DE69011428D1 - Optoelektronische Anordnung und Herstellungsverfahren dafür. - Google Patents

Optoelektronische Anordnung und Herstellungsverfahren dafür.

Info

Publication number
DE69011428D1
DE69011428D1 DE69011428T DE69011428T DE69011428D1 DE 69011428 D1 DE69011428 D1 DE 69011428D1 DE 69011428 T DE69011428 T DE 69011428T DE 69011428 T DE69011428 T DE 69011428T DE 69011428 D1 DE69011428 D1 DE 69011428D1
Authority
DE
Germany
Prior art keywords
manufacturing process
process therefor
optoelectronic arrangement
optoelectronic
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011428T
Other languages
English (en)
Other versions
DE69011428T2 (de
Inventor
William Dickson Westwood
Herman W Willemsen
Michel Isadore Gallant
Richard Prescott Skillen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Ltd
Original Assignee
Northern Telecom Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Telecom Ltd filed Critical Northern Telecom Ltd
Publication of DE69011428D1 publication Critical patent/DE69011428D1/de
Application granted granted Critical
Publication of DE69011428T2 publication Critical patent/DE69011428T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
DE69011428T 1989-06-22 1990-04-17 Optoelektronische Anordnung und Herstellungsverfahren dafür. Expired - Fee Related DE69011428T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/369,883 US4969712A (en) 1989-06-22 1989-06-22 Optoelectronic apparatus and method for its fabrication

Publications (2)

Publication Number Publication Date
DE69011428D1 true DE69011428D1 (de) 1994-09-15
DE69011428T2 DE69011428T2 (de) 1994-12-15

Family

ID=23457312

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011428T Expired - Fee Related DE69011428T2 (de) 1989-06-22 1990-04-17 Optoelektronische Anordnung und Herstellungsverfahren dafür.

Country Status (5)

Country Link
US (1) US4969712A (de)
EP (1) EP0404301B1 (de)
JP (1) JPH0341405A (de)
CA (1) CA2014440A1 (de)
DE (1) DE69011428T2 (de)

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US5125054A (en) * 1991-07-25 1992-06-23 Motorola, Inc. Laminated polymer optical waveguide interface and method of making same
US5208879A (en) * 1991-10-18 1993-05-04 International Business Machines Corporation Optical signal distribution system
US5170448A (en) * 1992-01-06 1992-12-08 Motorola, Inc. Optical waveguide apparatus and method for partially collecting light
US5379359A (en) * 1992-09-29 1995-01-03 Eastman Kodak Company Laser diode coupling to waveguide and method of making same using substrate etching
US5270245A (en) * 1992-11-27 1993-12-14 Motorola, Inc. Method of forming a light emitting diode
EP0600267B1 (de) * 1992-12-03 1998-01-28 Siemens Aktiengesellschaft Bidirektionaler optischer Sende- und Empfangsmodul
US5416870A (en) * 1993-12-03 1995-05-16 Motorola, Inc. Optoelectronic interface device and method with reflective surface
WO1996000996A1 (en) * 1994-06-30 1996-01-11 The Whitaker Corporation Planar hybrid optical amplifier
DE4440935A1 (de) * 1994-11-17 1996-05-23 Ant Nachrichtentech Optische Sende- und Empfangseinrichtung
AUPN258095A0 (en) * 1995-04-21 1995-05-18 Unisearch Limited Low temperature fabrication of silica-based pecvd channel waveguides
JP3828179B2 (ja) * 1995-05-12 2006-10-04 富士通株式会社 半導体光検出装置およびその製造方法
US5601687A (en) * 1995-09-11 1997-02-11 The United States Of America As Represented By The Secretary Of The Air Force Mask design
JP3006832B2 (ja) * 1996-05-14 2000-02-07 日本電気株式会社 発光素子と光導波路の光結合構造
US6480639B2 (en) * 1997-09-26 2002-11-12 Nippon Telegraph And Telephone Corp. Optical module
JPH11202140A (ja) * 1998-01-08 1999-07-30 Fujitsu Ltd 光送受信デバイス及びその製造方法
JP3542268B2 (ja) * 1998-04-16 2004-07-14 富士通株式会社 チップ実装用光伝送機構およびチップ実装方法
US6343171B1 (en) * 1998-10-09 2002-01-29 Fujitsu Limited Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making
US6706546B2 (en) 1998-10-09 2004-03-16 Fujitsu Limited Optical reflective structures and method for making
US6845184B1 (en) 1998-10-09 2005-01-18 Fujitsu Limited Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making
US6690845B1 (en) 1998-10-09 2004-02-10 Fujitsu Limited Three-dimensional opto-electronic modules with electrical and optical interconnections and methods for making
US6785447B2 (en) 1998-10-09 2004-08-31 Fujitsu Limited Single and multilayer waveguides and fabrication process
US6684007B2 (en) 1998-10-09 2004-01-27 Fujitsu Limited Optical coupling structures and the fabrication processes
JP2000241642A (ja) * 1999-02-17 2000-09-08 Sumitomo Electric Ind Ltd 光送受信モジュール
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
JP2001274528A (ja) 2000-01-21 2001-10-05 Fujitsu Ltd 薄膜デバイスの基板間転写方法
DE10037902C2 (de) * 2000-08-03 2002-08-01 Infineon Technologies Ag Optisches bidirektionales Sende- und Empfangsmodul mit einem Stiftkörper mit integriertem WDM-Filter
AUPR178200A0 (en) * 2000-11-29 2000-12-21 Redfern Integrated Optics Pty Ltd Silica-based optical device fabrication
WO2002084349A1 (en) * 2001-04-10 2002-10-24 Lockheed Martin Corporation Adhesion process for polycarbonate-based electro-optic waveguide systems
US6748125B2 (en) * 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6736552B2 (en) * 2001-07-03 2004-05-18 Intel Corporation Optically interconnecting integrated circuit chips
WO2003038497A1 (en) * 2001-10-30 2003-05-08 Xponent Photonics, Inc. Optical junction apparatus and methods employing optical power transverse-transfer
US6640021B2 (en) 2001-12-11 2003-10-28 International Business Machines Corporation Fabrication of a hybrid integrated circuit device including an optoelectronic chip
US6908779B2 (en) 2002-01-16 2005-06-21 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
US6813431B2 (en) * 2002-02-26 2004-11-02 Intel Corporation Integrated photodevice and waveguide
US7043106B2 (en) * 2002-07-22 2006-05-09 Applied Materials, Inc. Optical ready wafers
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
AU2003284056A1 (en) * 2002-11-12 2004-06-03 Xponent Photonics Inc Optical component for free-space optical propagation between waveguides
US7729569B2 (en) * 2002-12-05 2010-06-01 Ezconn Corporation Optical transmitter and/or receiver assembly comprising a planar optical circuit
WO2004068542A2 (en) * 2003-01-24 2004-08-12 Xponent Photonics Inc Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
US6922294B2 (en) * 2003-05-02 2005-07-26 International Business Machines Corporation Optical communication assembly
US6836015B2 (en) * 2003-05-02 2004-12-28 International Business Machines Corporation Optical assemblies for transmitting and manipulating optical beams
US20050016446A1 (en) 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
FR2873454B1 (fr) * 2004-07-26 2007-12-07 E Klo Sarl Composant incluant un element optoelectronique et un guide d'onde
KR101420623B1 (ko) * 2007-05-02 2014-07-17 호야 코포레이션 유에스에이 광 도파로와, 다른 광 도파로, 부품 또는 디바이스 간의 자유 공간 전파를 위한 광학 소자
JP5156502B2 (ja) * 2007-06-26 2013-03-06 パナソニック株式会社 光モジュール
US8515217B2 (en) * 2009-09-02 2013-08-20 Alcatel Lucent Vertical optically emitting photonic devices with electronic steering capability
JP2011165712A (ja) * 2010-02-04 2011-08-25 Furukawa Electric Co Ltd:The 半導体光増幅器モジュール
WO2013085529A1 (en) * 2011-12-08 2013-06-13 Intel Corporation Semiconductor substrate for an optical receiver
US8885448B2 (en) * 2013-03-07 2014-11-11 Seagate Technology Llc Encapsulated laser diode for heat-assisted magnetic recording

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4466696A (en) * 1982-03-29 1984-08-21 Honeywell Inc. Self-aligned coupling of optical fiber to semiconductor laser or LED
US4725114A (en) * 1984-09-28 1988-02-16 American Telephone And Telegraph Company, At&T Bell Laboratories Optical waveguide lateral alignment arrangement
FR2574566B1 (fr) * 1984-12-11 1987-01-16 Thomson Csf Diodes emettrices/receptrices de lumiere et elements de transmission optiques non reciproques integres, et leur procede de fabrication
JPH081485B2 (ja) * 1985-11-22 1996-01-10 株式会社日立製作所 光波長多重伝送用モジュール
DE3687162D1 (de) * 1985-12-10 1993-01-07 Siemens Ag Integriert-optischer multiplex-demultiplex-modul fuer die optische nachrichtenuebertragung.
JPS62187304A (ja) * 1986-02-13 1987-08-15 Matsushita Electric Ind Co Ltd 方向性光結合部品
EP0284910B1 (de) * 1987-03-30 1993-05-26 Siemens Aktiengesellschaft Integriert-optische Anordnung für die bidirektionale optische Nachrichten- oder Signalübertragung
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
US4897711A (en) * 1988-03-03 1990-01-30 American Telephone And Telegraph Company Subassembly for optoelectronic devices
US4847665A (en) * 1988-03-31 1989-07-11 Northern Telecom Limited Monolithic integration of optoelectronic and electronic devices
US4916497A (en) * 1988-05-18 1990-04-10 Harris Corporation Integrated circuits including photo-optical devices and pressure transducers and method of fabrication

Also Published As

Publication number Publication date
EP0404301B1 (de) 1994-08-10
EP0404301A3 (de) 1991-03-27
JPH0341405A (ja) 1991-02-21
CA2014440A1 (en) 1990-12-22
US4969712A (en) 1990-11-13
EP0404301A2 (de) 1990-12-27
DE69011428T2 (de) 1994-12-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee