DE69008064T2 - Verfahren zur Herstellung eines gesinterten Gegenstandes aus Siliciumnitrid. - Google Patents

Verfahren zur Herstellung eines gesinterten Gegenstandes aus Siliciumnitrid.

Info

Publication number
DE69008064T2
DE69008064T2 DE1990608064 DE69008064T DE69008064T2 DE 69008064 T2 DE69008064 T2 DE 69008064T2 DE 1990608064 DE1990608064 DE 1990608064 DE 69008064 T DE69008064 T DE 69008064T DE 69008064 T2 DE69008064 T2 DE 69008064T2
Authority
DE
Germany
Prior art keywords
producing
silicon nitride
sintered article
sintered
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1990608064
Other languages
English (en)
Other versions
DE69008064D1 (de
Inventor
Takao Nishioka
Yoshishige Takano
Kenji Matsunuma
Matsuo Higuchi
Masaya Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2160689A external-priority patent/JPH075390B2/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69008064D1 publication Critical patent/DE69008064D1/de
Application granted granted Critical
Publication of DE69008064T2 publication Critical patent/DE69008064T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE1990608064 1989-07-18 1990-07-18 Verfahren zur Herstellung eines gesinterten Gegenstandes aus Siliciumnitrid. Expired - Lifetime DE69008064T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18652489 1989-07-18
JP2160689A JPH075390B2 (ja) 1989-07-18 1990-06-18 高強度窒化ケイ素焼結体の製造方法

Publications (2)

Publication Number Publication Date
DE69008064D1 DE69008064D1 (de) 1994-05-19
DE69008064T2 true DE69008064T2 (de) 1994-08-25

Family

ID=26487112

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990608064 Expired - Lifetime DE69008064T2 (de) 1989-07-18 1990-07-18 Verfahren zur Herstellung eines gesinterten Gegenstandes aus Siliciumnitrid.

Country Status (2)

Country Link
EP (1) EP0409193B1 (de)
DE (1) DE69008064T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69225304T2 (de) * 1991-08-13 1998-12-17 Sumitomo Electric Industries Gesinterter siliciumnitridverbundkörper und seine herstellung
JP2670221B2 (ja) * 1993-01-22 1997-10-29 日本碍子株式会社 窒化珪素焼結体及びその製造方法
CN101813643B (zh) * 2010-04-13 2012-05-23 中南大学 一种烧结炉炉内气氛中s杂质含量水平的标定方法
CN116835990B (zh) * 2023-08-29 2023-11-24 合肥阿基米德电子科技有限公司 复合陶瓷基板、覆铜陶瓷基板及制备方法和应用

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4119690A (en) * 1977-01-03 1978-10-10 General Electric Company Sintering of silicon nitride using Mg and Be additives
US4511525A (en) * 1981-11-26 1985-04-16 Tokyo Shibaura Denki Kabushiki Kaisha Process for producing sintered silicon nitride-base body
EP0107919A1 (de) * 1982-10-01 1984-05-09 The British Ceramic Research Association Limited Keramische Siliciumnitridkörper

Also Published As

Publication number Publication date
EP0409193A2 (de) 1991-01-23
EP0409193B1 (de) 1994-04-13
DE69008064D1 (de) 1994-05-19
EP0409193A3 (en) 1991-05-29

Similar Documents

Publication Publication Date Title
DE69501638D1 (de) Verfahren zur Herstellung eines Keramikteils aus Siliciumnitrid
DE69002755D1 (de) Verfahren zur herstellung eines geloeteten gegenstandes.
DE69029430T2 (de) Verfahren zur Herstellung eines CMOS Halbleiterbauelements
DE69205640T2 (de) Verfahren zur Herstellung eines Mikroelektronisches Bauelement.
DE69000661T3 (de) Verfahren zur Herstellung eines Gewürzmittels.
DE69002096D1 (de) Verfahren zur herstellung von feinen pulvern aus aluminiumnitrid.
DE69002909T2 (de) Verfahren zur Herstellung eines eine Keramik formenden vorimprägnierten Bandes.
DE68907158D1 (de) Verfahren zur herstellung eines zusammengesetzten koerpers aus gesintertem siliciumcarbid.
DE3863913D1 (de) Verfahren zur herstellung von gegenstaenden aus siliciumnitrid.
DE68908265T2 (de) Verfahren zur Herstellung eines Formkörpers aus Bornitrid.
DE3871486D1 (de) Verfahren zur herstellung von gegenstaenden aus siliciumnitrid.
DE59209290D1 (de) Verfahren zur Herstellung eines Werkstoffes auf Siliciumnitrid-Basis.
DE68908582D1 (de) Verfahren zur Herstellung eines keramischen Vorformlings.
DE3880335D1 (de) Verfahren zur herstellung eines siliziumnitrid-sinterformkoerpers.
DE69020297D1 (de) Verfahren zur Herstellung eines Blockcopolymers.
DE69008104T2 (de) Verfahren zur Herstellung eines Gegenstandes aus Keramikpulver.
DE69126616D1 (de) Verfahren zur herstellung von siliciumnitrid-gegenstände
DE69006155T2 (de) Verfahren zur Herstellung bearbeitbarer Keramiken.
DE69015134D1 (de) Verfahren zur Herstellung von geformten Gegenständen aus sinterfähigem Pulver.
DE69008064D1 (de) Verfahren zur Herstellung eines gesinterten Gegenstandes aus Siliciumnitrid.
DE59003592D1 (de) Verfahren zur Herstellung eines Körpers aus Silizium.
DE69002090T2 (de) Verfahren zur Herstellung eines Reibelements.
DE69016704T2 (de) Verfahren zur Herstellung eines gesinterten Körpers aus Siliciumcarbid.
DE69223765T2 (de) Verfahren zur Herstellung eines keramischen Spiegels.
DE69006784T2 (de) Verfahren zur Herstellung eines supraleitfähigen keramischen Formkörpers.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)