DE68926161D1 - Elektronenstrahlgerät mit dynamischer Fokussierung - Google Patents

Elektronenstrahlgerät mit dynamischer Fokussierung

Info

Publication number
DE68926161D1
DE68926161D1 DE68926161T DE68926161T DE68926161D1 DE 68926161 D1 DE68926161 D1 DE 68926161D1 DE 68926161 T DE68926161 T DE 68926161T DE 68926161 T DE68926161 T DE 68926161T DE 68926161 D1 DE68926161 D1 DE 68926161D1
Authority
DE
Germany
Prior art keywords
electron beam
beam device
dynamic focusing
focusing
dynamic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68926161T
Other languages
English (en)
Other versions
DE68926161T2 (de
Inventor
Jong Marcus Johannes Cornel De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE68926161D1 publication Critical patent/DE68926161D1/de
Application granted granted Critical
Publication of DE68926161T2 publication Critical patent/DE68926161T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
DE68926161T 1988-12-23 1989-12-20 Elektronenstrahlgerät mit dynamischer Fokussierung Expired - Fee Related DE68926161T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8803153A NL8803153A (nl) 1988-12-23 1988-12-23 Elektronenbundel apparaat met dynamische focussering.

Publications (2)

Publication Number Publication Date
DE68926161D1 true DE68926161D1 (de) 1996-05-09
DE68926161T2 DE68926161T2 (de) 1996-10-02

Family

ID=19853429

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926161T Expired - Fee Related DE68926161T2 (de) 1988-12-23 1989-12-20 Elektronenstrahlgerät mit dynamischer Fokussierung

Country Status (5)

Country Link
US (1) US5003173A (de)
EP (1) EP0376392B1 (de)
JP (1) JPH02215034A (de)
DE (1) DE68926161T2 (de)
NL (1) NL8803153A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6051834A (en) * 1991-05-15 2000-04-18 Hitachi, Ltd. Electron microscope
JPH06138196A (ja) * 1992-10-26 1994-05-20 Hitachi Ltd 収束電子線による電磁場分布測定装置
JP4445893B2 (ja) * 2005-04-06 2010-04-07 株式会社日立ハイテクノロジーズ 走査形電子顕微鏡
JP5127148B2 (ja) * 2006-03-16 2013-01-23 株式会社日立ハイテクノロジーズ イオンビーム加工装置
JP5438937B2 (ja) * 2008-09-05 2014-03-12 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1789019B1 (de) * 1968-09-23 1972-04-27 Siemens Ag Verfahren zur erzeugung eines stereobildes mittels der elektronenstrahlmikroskopie
GB1301008A (en) * 1970-08-04 1972-12-29 Ass Elect Ind Improvements in or relating to specimen stages for electron microscopes
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
US4170737A (en) * 1978-07-06 1979-10-09 Spetsialnoe Konstruktorskoe Bjuro Biologicheskogo Priborotroenia Akademii Nauk SSSR Top-entry transmission electron microscope
NL8301033A (nl) * 1983-03-23 1984-10-16 Philips Nv Stralingsapparaat met membraanaandrijving voor een objectdrager.

Also Published As

Publication number Publication date
US5003173A (en) 1991-03-26
NL8803153A (nl) 1990-07-16
EP0376392B1 (de) 1996-04-03
EP0376392A1 (de) 1990-07-04
DE68926161T2 (de) 1996-10-02
JPH02215034A (ja) 1990-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee