DE60334370D1 - Flüssigkeitssensor für rauhe umgebungen - Google Patents
Flüssigkeitssensor für rauhe umgebungenInfo
- Publication number
- DE60334370D1 DE60334370D1 DE60334370T DE60334370T DE60334370D1 DE 60334370 D1 DE60334370 D1 DE 60334370D1 DE 60334370 T DE60334370 T DE 60334370T DE 60334370 T DE60334370 T DE 60334370T DE 60334370 D1 DE60334370 D1 DE 60334370D1
- Authority
- DE
- Germany
- Prior art keywords
- liquid sensor
- rough environments
- rough
- environments
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4873—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
- G01N25/488—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2285—Details of probe structures
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Fluid Mechanics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/128,775 US6911894B2 (en) | 1998-12-07 | 2002-04-22 | Sensor package for harsh environments |
PCT/US2003/012560 WO2003089885A1 (en) | 2002-04-22 | 2003-04-22 | Flow sensor for harsh environments |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60334370D1 true DE60334370D1 (de) | 2010-11-11 |
Family
ID=29248501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60334370T Expired - Lifetime DE60334370D1 (de) | 2002-04-22 | 2003-04-22 | Flüssigkeitssensor für rauhe umgebungen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6911894B2 (de) |
EP (1) | EP1497623B1 (de) |
AU (1) | AU2003231053A1 (de) |
DE (1) | DE60334370D1 (de) |
WO (1) | WO2003089885A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7258003B2 (en) * | 1998-12-07 | 2007-08-21 | Honeywell International Inc. | Flow sensor with self-aligned flow channel |
US6993446B2 (en) * | 2003-03-17 | 2006-01-31 | Schlumberger Technology Corporation | Method and apparatus for predicting the time to failure of electronic devices at high temperatures |
US7211873B2 (en) * | 2003-09-24 | 2007-05-01 | Denso Corporation | Sensor device having thin membrane and method of manufacturing the same |
US7096729B2 (en) | 2004-06-08 | 2006-08-29 | Honeywell International Inc. | Disposable fluid flow sensor |
US7181963B2 (en) * | 2004-06-30 | 2007-02-27 | Codman & Shurtleff, Inc | Thermal flow sensor having streamlined packaging |
US8097225B2 (en) * | 2004-07-28 | 2012-01-17 | Honeywell International Inc. | Microfluidic cartridge with reservoirs for increased shelf life of installed reagents |
US20070209433A1 (en) * | 2006-03-10 | 2007-09-13 | Honeywell International Inc. | Thermal mass gas flow sensor and method of forming same |
US7243541B1 (en) | 2006-03-30 | 2007-07-17 | Honeywell International Inc. | Combi-sensor for measuring multiple measurands in a common package |
US8175835B2 (en) * | 2006-05-17 | 2012-05-08 | Honeywell International Inc. | Flow sensor with conditioning-coefficient memory |
GB0703250D0 (en) * | 2007-02-20 | 2007-03-28 | Ge Healthcare Bio Sciences Ab | Ultrasonic flow meter |
US7549803B2 (en) * | 2007-04-05 | 2009-06-23 | Siemens Energy, Inc. | Fiber optic generator condition monitor |
US7832269B2 (en) * | 2007-06-22 | 2010-11-16 | Honeywell International Inc. | Packaging multiple measurands into a combinational sensor system using elastomeric seals |
US7712347B2 (en) | 2007-08-29 | 2010-05-11 | Honeywell International Inc. | Self diagnostic measurement method to detect microbridge null drift and performance |
CA2623793C (en) * | 2008-03-03 | 2010-11-23 | Schlumberger Canada Limited | Microfluidic apparatus and method for measuring thermo-physical properties of a reservoir fluid |
US8132546B2 (en) * | 2008-05-08 | 2012-03-13 | Ford Global Technologies, Llc | Control strategy for multi-stroke engine system |
US9034277B2 (en) | 2008-10-24 | 2015-05-19 | Honeywell International Inc. | Surface preparation for a microfluidic channel |
EP2406587B1 (de) * | 2009-03-10 | 2020-11-18 | Sensortechnics GmbH | Halbleiterbasierter strömungsmesser mit gehäuse |
FR2949561B1 (fr) * | 2009-08-27 | 2011-12-16 | Neosens | Capteur microsysteme de mesure ou de detection d'encrassement |
DE102010043062A1 (de) * | 2010-10-28 | 2012-05-03 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung einer Strömungseigenschaft eines fluiden Mediums |
DE102010043083A1 (de) * | 2010-10-28 | 2012-05-03 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung einer Strömungseigenschaft eines fluiden Mediums |
US8718981B2 (en) | 2011-05-09 | 2014-05-06 | Honeywell International Inc. | Modular sensor assembly including removable sensing module |
JP6563211B2 (ja) * | 2015-02-23 | 2019-08-21 | サーパス工業株式会社 | 熱式流量計およびその製造方法 |
JP6539458B2 (ja) * | 2015-02-23 | 2019-07-03 | サーパス工業株式会社 | 熱式流量計 |
Family Cites Families (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2439388A1 (fr) * | 1978-10-20 | 1980-05-16 | Bosch Gmbh Robert | Installation pour mesurer la masse d'un fluide en ecoulement |
JPS5618750A (en) | 1979-07-25 | 1981-02-21 | Ricoh Co Ltd | Gas detector |
US4624137A (en) | 1981-10-09 | 1986-11-25 | Honeywell Inc. | Semiconductor device |
US4696188A (en) | 1981-10-09 | 1987-09-29 | Honeywell Inc. | Semiconductor device microstructure |
US4472239A (en) | 1981-10-09 | 1984-09-18 | Honeywell, Inc. | Method of making semiconductor device |
US4825693A (en) | 1982-09-30 | 1989-05-02 | Honeywell Inc. | Slotted diaphragm semiconductor device |
US4867842A (en) | 1982-09-30 | 1989-09-19 | Honeywell Inc. | Method of making slotted diaphragm semiconductor devices |
US4478076A (en) | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
US4683159A (en) | 1982-09-30 | 1987-07-28 | Honeywell Inc. | Semiconductor device structure and processing |
US4501144A (en) | 1982-09-30 | 1985-02-26 | Honeywell Inc. | Flow sensor |
US4478077A (en) | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
US4548078A (en) | 1982-09-30 | 1985-10-22 | Honeywell Inc. | Integral flow sensor and channel assembly |
US4651564A (en) | 1982-09-30 | 1987-03-24 | Honeywell Inc. | Semiconductor device |
US4571608A (en) | 1983-01-03 | 1986-02-18 | Honeywell Inc. | Integrated voltage-isolation power supply |
US4708636A (en) | 1983-07-08 | 1987-11-24 | Honeywell Inc. | Flow sensor furnace control |
US4966037A (en) | 1983-09-12 | 1990-10-30 | Honeywell Inc. | Cantilever semiconductor device |
US4829818A (en) | 1983-12-27 | 1989-05-16 | Honeywell Inc. | Flow sensor housing |
US4555939A (en) | 1984-03-19 | 1985-12-03 | Honeywell Inc. | Condition responsive sensor for fluid flow measurement |
US4566320A (en) | 1984-05-07 | 1986-01-28 | Honeywell, Inc. | Fluid flow sensing means with ambient temperature compensation |
US4587105A (en) | 1984-05-17 | 1986-05-06 | Honeywell Inc. | Integratable oxygen sensor |
US4706636A (en) * | 1984-12-06 | 1987-11-17 | Davco Manufacturing Corporation | Purge and prime fuel delivery system and method |
WO1987000917A1 (en) * | 1985-08-09 | 1987-02-12 | Motorola, Inc. | Mass airflow sensor |
US4682503A (en) | 1986-05-16 | 1987-07-28 | Honeywell Inc. | Microscopic size, thermal conductivity type, air or gas absolute pressure sensor |
US4706061A (en) | 1986-08-28 | 1987-11-10 | Honeywell Inc. | Composition sensor with minimal non-linear thermal gradients |
US4794048A (en) | 1987-05-04 | 1988-12-27 | Allied-Signal Inc. | Ceramic coated metal substrates for electronic applications |
US4739657A (en) | 1987-06-22 | 1988-04-26 | Honeywell Inc. | Resistance with linear temperature coefficient |
US4895616A (en) | 1987-12-07 | 1990-01-23 | Honeywell Inc. | Method for making thin film orthogonal microsensor for air flow |
US4914742A (en) | 1987-12-07 | 1990-04-03 | Honeywell Inc. | Thin film orthogonal microsensor for air flow and method |
US4856328A (en) | 1988-06-30 | 1989-08-15 | Honeywell Inc. | Sampling probe flow sensor |
US4914947A (en) | 1988-09-30 | 1990-04-10 | Honeywell Inc. | Sampling probe flow sensor |
US4885938A (en) | 1988-12-16 | 1989-12-12 | Honeywell Inc. | Flowmeter fluid composition correction |
US4891977A (en) | 1988-12-16 | 1990-01-09 | Honeywell Inc. | Microbridge sensor bonding pad design for improved adhesion |
JP2776946B2 (ja) * | 1990-03-12 | 1998-07-16 | 株式会社日立製作所 | 熱式空気流量計の製造方法 |
US5081866A (en) | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
US5237523A (en) | 1990-07-25 | 1993-08-17 | Honeywell Inc. | Flowmeter fluid composition and temperature correction |
ES2161696T3 (es) | 1991-10-23 | 2001-12-16 | Honeywell Inc | Aparato para medir, sin combustion, la calidad de un gas combustible. |
US5279155A (en) | 1993-02-04 | 1994-01-18 | Honeywell, Inc. | Mass airflow sensor |
US5392647A (en) | 1993-06-07 | 1995-02-28 | Ricoh Seiki Company, Ltd. | Flow sensor |
US5462525A (en) | 1994-06-14 | 1995-10-31 | Minimed, Inc., A Delaware Corporation | Flow sensor for an infusion pump |
US5410916A (en) | 1994-06-24 | 1995-05-02 | Honeywell Inc. | Flowthrough pressure sensor |
US5693892A (en) | 1996-05-01 | 1997-12-02 | Amj Equipment Corporation | Apparatus for sensing liquid flow in a conduit or open channel and associated method |
US5852239A (en) | 1996-06-12 | 1998-12-22 | Ricoh Company, Ltd. | Flow sensor having an intermediate heater between two temperature-sensing heating portions |
US5684253A (en) | 1997-01-08 | 1997-11-04 | Honeywell Inc. | Differential pressure sensor with stress reducing pressure balancing means |
JP3404251B2 (ja) * | 1997-04-17 | 2003-05-06 | 三菱電機株式会社 | 流量検出装置 |
US5869749A (en) | 1997-04-30 | 1999-02-09 | Honeywell Inc. | Micromachined integrated opto-flow gas/liquid sensor |
US6023969A (en) | 1997-09-17 | 2000-02-15 | Feller; Murray F. | Flow modulated mass flow sensor |
US6223593B1 (en) | 1997-12-31 | 2001-05-01 | Honeywell International Inc. | Self-oscillating fluid sensor |
US6169965B1 (en) | 1997-12-31 | 2001-01-02 | Honeywell International Inc. | Fluid property and flow sensing via a common frequency generator and FFT |
US6322247B1 (en) | 1999-01-28 | 2001-11-27 | Honeywell International Inc. | Microsensor housing |
US6361206B1 (en) | 1999-01-28 | 2002-03-26 | Honeywell International Inc. | Microsensor housing |
US6184773B1 (en) | 1998-12-07 | 2001-02-06 | Honeywell Inc. | Rugged fluid flow and property microsensor |
US6308553B1 (en) | 1999-06-04 | 2001-10-30 | Honeywell International Inc | Self-normalizing flow sensor and method for the same |
JP3553422B2 (ja) * | 1999-06-08 | 2004-08-11 | 三菱電機株式会社 | 流量センサ |
US6393894B1 (en) | 1999-07-27 | 2002-05-28 | Honeywell International Inc. | Gas sensor with phased heaters for increased sensitivity |
US6813944B2 (en) | 2000-05-04 | 2004-11-09 | Sensirion Ag | Flow sensor |
-
2002
- 2002-04-22 US US10/128,775 patent/US6911894B2/en not_active Expired - Lifetime
-
2003
- 2003-04-22 AU AU2003231053A patent/AU2003231053A1/en not_active Abandoned
- 2003-04-22 WO PCT/US2003/012560 patent/WO2003089885A1/en not_active Application Discontinuation
- 2003-04-22 EP EP03724177A patent/EP1497623B1/de not_active Expired - Fee Related
- 2003-04-22 DE DE60334370T patent/DE60334370D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6911894B2 (en) | 2005-06-28 |
WO2003089885A1 (en) | 2003-10-30 |
AU2003231053A1 (en) | 2003-11-03 |
US20030107467A1 (en) | 2003-06-12 |
EP1497623A1 (de) | 2005-01-19 |
EP1497623B1 (de) | 2010-09-29 |
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