DE60328917D1 - Zusammengesetzte prüfkopfbewegung - Google Patents

Zusammengesetzte prüfkopfbewegung

Info

Publication number
DE60328917D1
DE60328917D1 DE60328917T DE60328917T DE60328917D1 DE 60328917 D1 DE60328917 D1 DE 60328917D1 DE 60328917 T DE60328917 T DE 60328917T DE 60328917 T DE60328917 T DE 60328917T DE 60328917 D1 DE60328917 D1 DE 60328917D1
Authority
DE
Germany
Prior art keywords
composite probe
probe motion
motion
composite
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60328917T
Other languages
English (en)
Inventor
Timothy E Cooper
Benjamin N Eldridge
Igor K Khandros
Rod Martens
Gaetan L Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Application granted granted Critical
Publication of DE60328917D1 publication Critical patent/DE60328917D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
DE60328917T 2002-12-20 2003-12-18 Zusammengesetzte prüfkopfbewegung Expired - Lifetime DE60328917D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/328,113 US7202682B2 (en) 2002-12-20 2002-12-20 Composite motion probing
PCT/US2003/040909 WO2004059328A2 (en) 2002-12-20 2003-12-18 Composite motion probing

Publications (1)

Publication Number Publication Date
DE60328917D1 true DE60328917D1 (de) 2009-10-01

Family

ID=32680764

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60328917T Expired - Lifetime DE60328917D1 (de) 2002-12-20 2003-12-18 Zusammengesetzte prüfkopfbewegung

Country Status (7)

Country Link
US (2) US7202682B2 (de)
EP (1) EP1576378B1 (de)
CN (1) CN100356178C (de)
AU (1) AU2003297462A1 (de)
DE (1) DE60328917D1 (de)
TW (2) TWI410634B (de)
WO (1) WO2004059328A2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7202682B2 (en) 2002-12-20 2007-04-10 Formfactor, Inc. Composite motion probing
US7218127B2 (en) * 2004-02-18 2007-05-15 Formfactor, Inc. Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component
US7759949B2 (en) * 2004-05-21 2010-07-20 Microprobe, Inc. Probes with self-cleaning blunt skates for contacting conductive pads
US9097740B2 (en) * 2004-05-21 2015-08-04 Formfactor, Inc. Layered probes with core
US8988091B2 (en) 2004-05-21 2015-03-24 Microprobe, Inc. Multiple contact probes
US7733101B2 (en) * 2004-05-21 2010-06-08 Microprobe, Inc. Knee probe having increased scrub motion
USRE43503E1 (en) 2006-06-29 2012-07-10 Microprobe, Inc. Probe skates for electrical testing of convex pad topologies
US9476911B2 (en) 2004-05-21 2016-10-25 Microprobe, Inc. Probes with high current carrying capability and laser machining methods
US7659739B2 (en) * 2006-09-14 2010-02-09 Micro Porbe, Inc. Knee probe having reduced thickness section for control of scrub motion
US20060033515A1 (en) * 2004-08-13 2006-02-16 Tessera, Inc. Test fixture with movable pin contacts
US7471094B2 (en) * 2005-06-24 2008-12-30 Formfactor, Inc. Method and apparatus for adjusting a multi-substrate probe structure
US7649367B2 (en) * 2005-12-07 2010-01-19 Microprobe, Inc. Low profile probe having improved mechanical scrub and reduced contact inductance
US7312617B2 (en) 2006-03-20 2007-12-25 Microprobe, Inc. Space transformers employing wire bonds for interconnections with fine pitch contacts
US8907689B2 (en) 2006-10-11 2014-12-09 Microprobe, Inc. Probe retention arrangement
US7786740B2 (en) * 2006-10-11 2010-08-31 Astria Semiconductor Holdings, Inc. Probe cards employing probes having retaining portions for potting in a potting region
US7514948B2 (en) * 2007-04-10 2009-04-07 Microprobe, Inc. Vertical probe array arranged to provide space transformation
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
US7671610B2 (en) * 2007-10-19 2010-03-02 Microprobe, Inc. Vertical guided probe array providing sideways scrub motion
US8230593B2 (en) 2008-05-29 2012-07-31 Microprobe, Inc. Probe bonding method having improved control of bonding material
WO2010015388A1 (en) * 2008-08-07 2010-02-11 Stmicroelectronics S.R.L. Circuit for the parallel supplying of power during testing of a plurality of electronic devices integrated on a semiconductor wafer
DE202008013982U1 (de) * 2008-10-20 2009-01-08 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Messsystem zum Bestimmen von Streuparametern
US8073019B2 (en) * 2009-03-02 2011-12-06 Jian Liu 810 nm ultra-short pulsed fiber laser
EP2290686A3 (de) 2009-08-28 2011-04-20 STMicroelectronics S.r.l. Verfahren zum elektrischen Testen und zur Montage elektronischer Bauelemente
US8872532B2 (en) * 2009-12-31 2014-10-28 Formfactor, Inc. Wafer test cassette system
CN108828425A (zh) * 2018-07-16 2018-11-16 苏州肯美特设备集成有限公司 一种半导体测试装置
CN109283368A (zh) * 2018-10-29 2019-01-29 大族激光科技产业集团股份有限公司 柔性显示面板测试装置
WO2020147992A1 (en) * 2019-01-18 2020-07-23 Asml Netherlands B.V. Method, substrate and system for estimating stress in a substrate

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2487098A1 (fr) 1980-07-18 1982-01-22 Vandeputte Fils & Cie Dispositif de visualisation de donnees
US4506215A (en) * 1981-06-30 1985-03-19 International Business Machines Corporation Modular test probe
US5012186A (en) 1990-06-08 1991-04-30 Cascade Microtech, Inc. Electrical probe with contact force protection
JP3208734B2 (ja) * 1990-08-20 2001-09-17 東京エレクトロン株式会社 プローブ装置
US5974662A (en) * 1993-11-16 1999-11-02 Formfactor, Inc. Method of planarizing tips of probe elements of a probe card assembly
US5644245A (en) * 1993-11-24 1997-07-01 Tokyo Electron Limited Probe apparatus for inspecting electrical characteristics of a microelectronic element
US5773987A (en) * 1996-02-26 1998-06-30 Motorola, Inc. Method for probing a semiconductor wafer using a motor controlled scrub process
TW369601B (en) * 1997-06-17 1999-09-11 Advantest Corp Probe card
JP3423979B2 (ja) * 1997-07-11 2003-07-07 東京エレクトロン株式会社 プローブ方法及びプローブ装置
DE19733861A1 (de) 1997-08-05 1999-02-25 Siemens Ag Vorrichtung und Verfahren zur Kontaktierung einer Meß-Sonde
JPH1174322A (ja) 1997-08-28 1999-03-16 Mitsubishi Electric Corp ウエハプローバー
JP3484365B2 (ja) * 1999-01-19 2004-01-06 シャープ株式会社 半導体装置用パッケージ、この半導体装置用パッケージのテスト時に使用するプローブカード、および、このプローブカードを用いたパッケージのテスト方法
JP3745184B2 (ja) * 1999-03-25 2006-02-15 株式会社東京カソード研究所 プローブカード用探針及びその製造方法
DE10039336C2 (de) * 2000-08-04 2003-12-11 Infineon Technologies Ag Verfahren zum Testen von Halbleiterschaltungen und Testvorrichtung zur Durchführung des Verfahrens
US6507207B2 (en) * 2001-02-20 2003-01-14 Vinh T. Nguyen Contact probe pin for wafer probing apparatus
JP2003194847A (ja) 2001-12-26 2003-07-09 Sumitomo Electric Ind Ltd コンタクトプローブ
US6668628B2 (en) * 2002-03-29 2003-12-30 Xerox Corporation Scanning probe system with spring probe
US7202682B2 (en) 2002-12-20 2007-04-10 Formfactor, Inc. Composite motion probing
JP4099412B2 (ja) * 2003-03-19 2008-06-11 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
US7342402B2 (en) * 2003-04-10 2008-03-11 Formfactor, Inc. Method of probing a device using captured image of probe structure in which probe tips comprise alignment features
JP2005072143A (ja) * 2003-08-21 2005-03-17 Tokyo Seimitsu Co Ltd プローブ装置
US7218127B2 (en) * 2004-02-18 2007-05-15 Formfactor, Inc. Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component
US7068056B1 (en) * 2005-07-18 2006-06-27 Texas Instruments Incorporated System and method for the probing of a wafer

Also Published As

Publication number Publication date
WO2004059328A2 (en) 2004-07-15
WO2004059328A3 (en) 2004-08-26
EP1576378B1 (de) 2009-08-19
US7868632B2 (en) 2011-01-11
AU2003297462A8 (en) 2004-07-22
AU2003297462A1 (en) 2004-07-22
TWI302200B (en) 2008-10-21
CN100356178C (zh) 2007-12-19
CN1745309A (zh) 2006-03-08
US20040130312A1 (en) 2004-07-08
US20070170941A1 (en) 2007-07-26
US7202682B2 (en) 2007-04-10
TW200521440A (en) 2005-07-01
TW200837359A (en) 2008-09-16
TWI410634B (zh) 2013-10-01
EP1576378A2 (de) 2005-09-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition