DE60327777D1 - Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten - Google Patents

Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten

Info

Publication number
DE60327777D1
DE60327777D1 DE60327777T DE60327777T DE60327777D1 DE 60327777 D1 DE60327777 D1 DE 60327777D1 DE 60327777 T DE60327777 T DE 60327777T DE 60327777 T DE60327777 T DE 60327777T DE 60327777 D1 DE60327777 D1 DE 60327777D1
Authority
DE
Germany
Prior art keywords
liquids
objects
disk
carrier
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60327777T
Other languages
English (en)
Inventor
Karl-Heinz Hohenwarter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research AG
Original Assignee
SEZ AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEZ AG filed Critical SEZ AG
Application granted granted Critical
Publication of DE60327777D1 publication Critical patent/DE60327777D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Weting (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Centrifugal Separators (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
DE60327777T 2002-06-25 2003-06-18 Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten Expired - Lifetime DE60327777D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0095402A AT500984B1 (de) 2002-06-25 2002-06-25 Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen
PCT/EP2003/006441 WO2004001812A1 (en) 2002-06-25 2003-06-18 Device for liquid treatment of disk-shaped objects

Publications (1)

Publication Number Publication Date
DE60327777D1 true DE60327777D1 (de) 2009-07-09

Family

ID=29783642

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60327777T Expired - Lifetime DE60327777D1 (de) 2002-06-25 2003-06-18 Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten

Country Status (10)

Country Link
US (1) US7122084B2 (de)
EP (1) EP1532661B1 (de)
JP (1) JP4557715B2 (de)
KR (1) KR100958364B1 (de)
CN (1) CN100375228C (de)
AT (2) AT500984B1 (de)
AU (1) AU2003242729A1 (de)
DE (1) DE60327777D1 (de)
TW (1) TW594873B (de)
WO (1) WO2004001812A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004019731A1 (de) * 2004-04-20 2005-11-10 Sse Sister Semiconductor Equipment Gmbh Vorrichtung zum Drehbelacken von Substraten
US20070254098A1 (en) * 2006-04-28 2007-11-01 Applied Materials, Inc. Apparatus for single-substrate processing with multiple chemicals and method of use
TWI359456B (en) 2006-12-15 2012-03-01 Lam Res Ag Device and method for wet treating plate-like arti
US7849865B2 (en) * 2007-01-05 2010-12-14 Semitool, Inc. System for processing a workpiece
CN101992165B (zh) * 2009-08-27 2012-10-24 沈阳芯源微电子设备有限公司 一种用于圆形薄片状物体进行化学液喷洒处理的装置
TWI421928B (zh) * 2010-06-10 2014-01-01 Grand Plastic Technology Co Ltd 清洗蝕刻機台之自動清洗方法
DE202010015018U1 (de) * 2010-11-07 2011-04-14 Bohnet, Hans Anordnung zur Herstellung von strukturierten Substraten
JP5309118B2 (ja) * 2010-12-17 2013-10-09 東京エレクトロン株式会社 基板液処理装置
US20150017805A1 (en) * 2013-07-09 2015-01-15 Raymon F. Thompson Wafer processing apparatus having independently rotatable wafer support and processing dish
US9768041B2 (en) 2013-08-12 2017-09-19 Veeco Precision Surface Processing Llc Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
US10707099B2 (en) 2013-08-12 2020-07-07 Veeco Instruments Inc. Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
TWI797121B (zh) 2017-04-25 2023-04-01 美商維克儀器公司 半導體晶圓製程腔體
FR3079443B1 (fr) 2018-03-29 2021-05-14 Association Pour Les Transferts De Tech Du Mans Procede de fabrication additive d'une piece en elastomere, installation de fabrication et piece associees
JP7096112B2 (ja) 2018-09-13 2022-07-05 キオクシア株式会社 半導体製造装置および半導体装置の製造方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT389959B (de) * 1987-11-09 1990-02-26 Sez Semiconduct Equip Zubehoer Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben
JPH0669545B2 (ja) * 1987-11-23 1994-09-07 タツモ株式会社 塗布装置
FR2636546B1 (fr) * 1988-09-15 1991-03-15 Sulzer Electro Tech Procede et dispositif pour l'application uniformement reguliere d'une couche de resine sur un substrat
JPH04119524A (ja) * 1990-09-10 1992-04-21 Fuji Electric Co Ltd 回転表面処理装置
JP3241058B2 (ja) * 1991-03-28 2001-12-25 大日本スクリーン製造株式会社 回転式塗布装置及び回転式塗布方法
JP2591555B2 (ja) * 1991-12-20 1997-03-19 東京応化工業株式会社 塗布装置
US5439519A (en) * 1992-04-28 1995-08-08 Tokyo Ohka Kogyo Co., Ltd. Solution applying apparatus
US5211753A (en) * 1992-06-15 1993-05-18 Swain Danny C Spin coating apparatus with an independently spinning enclosure
JP3395264B2 (ja) * 1993-07-26 2003-04-07 東京応化工業株式会社 回転カップ式塗布装置
US5489341A (en) * 1993-08-23 1996-02-06 Semitool, Inc. Semiconductor processing with non-jetting fluid stream discharge array
US5656082A (en) * 1994-04-04 1997-08-12 Tatsumo Kabushiki Kaisha Liquid applying apparatus utilizing centrifugal force
JP3250090B2 (ja) * 1995-06-27 2002-01-28 東京エレクトロン株式会社 洗浄処理装置及び洗浄処理方法
JPH0945611A (ja) * 1995-07-27 1997-02-14 Dainippon Screen Mfg Co Ltd 回転式基板塗布装置
TW344097B (en) * 1996-04-09 1998-11-01 Tokyo Electron Co Ltd Photoresist treating device of substrate and photoresist treating method
JP3396377B2 (ja) * 1996-07-22 2003-04-14 大日本スクリーン製造株式会社 基板処理装置
JP3390313B2 (ja) * 1996-12-05 2003-03-24 大日本スクリーン製造株式会社 基板処理装置
US6027602A (en) * 1997-08-29 2000-02-22 Techpoint Pacific Singapore Pte. Ltd. Wet processing apparatus
JP3555724B2 (ja) * 1997-09-04 2004-08-18 大日本スクリーン製造株式会社 基板処理装置
JP2000343046A (ja) * 1999-06-02 2000-12-12 Kurita Water Ind Ltd 枚葉式洗浄装置
JP2001077082A (ja) * 1999-09-06 2001-03-23 Takata Corp 処理液回収用チャンバー構造
TW399743U (en) * 1999-09-15 2000-07-21 Ind Tech Res Inst Wafer back protection device
JP4426036B2 (ja) * 1999-12-02 2010-03-03 東京エレクトロン株式会社 基板処理装置
DE50004935D1 (de) * 2000-10-31 2004-02-05 Sez Ag Villach Vorrichtung zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen
JP3740377B2 (ja) 2001-03-05 2006-02-01 東京エレクトロン株式会社 液供給装置
JP2003007664A (ja) * 2001-06-22 2003-01-10 Ses Co Ltd 枚葉式基板洗浄方法および枚葉式基板洗浄装置

Also Published As

Publication number Publication date
AU2003242729A1 (en) 2004-01-06
AT500984A1 (de) 2006-05-15
ATE432530T1 (de) 2009-06-15
KR100958364B1 (ko) 2010-05-17
KR20050013119A (ko) 2005-02-02
JP4557715B2 (ja) 2010-10-06
TW200400557A (en) 2004-01-01
EP1532661A1 (de) 2005-05-25
JP2005530605A (ja) 2005-10-13
EP1532661B1 (de) 2009-05-27
US20050223975A1 (en) 2005-10-13
US7122084B2 (en) 2006-10-17
TW594873B (en) 2004-06-21
CN100375228C (zh) 2008-03-12
CN1663023A (zh) 2005-08-31
WO2004001812A1 (en) 2003-12-31
AT500984B1 (de) 2007-05-15

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: LAM RESEARCH AG, VILLACH, AT

8364 No opposition during term of opposition