DE60327777D1 - Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten - Google Patents
Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeitenInfo
- Publication number
- DE60327777D1 DE60327777D1 DE60327777T DE60327777T DE60327777D1 DE 60327777 D1 DE60327777 D1 DE 60327777D1 DE 60327777 T DE60327777 T DE 60327777T DE 60327777 T DE60327777 T DE 60327777T DE 60327777 D1 DE60327777 D1 DE 60327777D1
- Authority
- DE
- Germany
- Prior art keywords
- liquids
- objects
- disk
- carrier
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Weting (AREA)
- Coating Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Photographic Processing Devices Using Wet Methods (AREA)
- Centrifugal Separators (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0095402A AT500984B1 (de) | 2002-06-25 | 2002-06-25 | Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen |
PCT/EP2003/006441 WO2004001812A1 (en) | 2002-06-25 | 2003-06-18 | Device for liquid treatment of disk-shaped objects |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60327777D1 true DE60327777D1 (de) | 2009-07-09 |
Family
ID=29783642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60327777T Expired - Lifetime DE60327777D1 (de) | 2002-06-25 | 2003-06-18 | Vorrichtung zurbehandlung von scheibenförmigen objekten mit flüssigkeiten |
Country Status (10)
Country | Link |
---|---|
US (1) | US7122084B2 (de) |
EP (1) | EP1532661B1 (de) |
JP (1) | JP4557715B2 (de) |
KR (1) | KR100958364B1 (de) |
CN (1) | CN100375228C (de) |
AT (2) | AT500984B1 (de) |
AU (1) | AU2003242729A1 (de) |
DE (1) | DE60327777D1 (de) |
TW (1) | TW594873B (de) |
WO (1) | WO2004001812A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004019731A1 (de) * | 2004-04-20 | 2005-11-10 | Sse Sister Semiconductor Equipment Gmbh | Vorrichtung zum Drehbelacken von Substraten |
US20070254098A1 (en) * | 2006-04-28 | 2007-11-01 | Applied Materials, Inc. | Apparatus for single-substrate processing with multiple chemicals and method of use |
TWI359456B (en) | 2006-12-15 | 2012-03-01 | Lam Res Ag | Device and method for wet treating plate-like arti |
US7849865B2 (en) * | 2007-01-05 | 2010-12-14 | Semitool, Inc. | System for processing a workpiece |
CN101992165B (zh) * | 2009-08-27 | 2012-10-24 | 沈阳芯源微电子设备有限公司 | 一种用于圆形薄片状物体进行化学液喷洒处理的装置 |
TWI421928B (zh) * | 2010-06-10 | 2014-01-01 | Grand Plastic Technology Co Ltd | 清洗蝕刻機台之自動清洗方法 |
DE202010015018U1 (de) * | 2010-11-07 | 2011-04-14 | Bohnet, Hans | Anordnung zur Herstellung von strukturierten Substraten |
JP5309118B2 (ja) * | 2010-12-17 | 2013-10-09 | 東京エレクトロン株式会社 | 基板液処理装置 |
US20150017805A1 (en) * | 2013-07-09 | 2015-01-15 | Raymon F. Thompson | Wafer processing apparatus having independently rotatable wafer support and processing dish |
US9768041B2 (en) | 2013-08-12 | 2017-09-19 | Veeco Precision Surface Processing Llc | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle |
US10707099B2 (en) | 2013-08-12 | 2020-07-07 | Veeco Instruments Inc. | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle |
TWI797121B (zh) | 2017-04-25 | 2023-04-01 | 美商維克儀器公司 | 半導體晶圓製程腔體 |
FR3079443B1 (fr) | 2018-03-29 | 2021-05-14 | Association Pour Les Transferts De Tech Du Mans | Procede de fabrication additive d'une piece en elastomere, installation de fabrication et piece associees |
JP7096112B2 (ja) | 2018-09-13 | 2022-07-05 | キオクシア株式会社 | 半導体製造装置および半導体装置の製造方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT389959B (de) * | 1987-11-09 | 1990-02-26 | Sez Semiconduct Equip Zubehoer | Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben |
JPH0669545B2 (ja) * | 1987-11-23 | 1994-09-07 | タツモ株式会社 | 塗布装置 |
FR2636546B1 (fr) * | 1988-09-15 | 1991-03-15 | Sulzer Electro Tech | Procede et dispositif pour l'application uniformement reguliere d'une couche de resine sur un substrat |
JPH04119524A (ja) * | 1990-09-10 | 1992-04-21 | Fuji Electric Co Ltd | 回転表面処理装置 |
JP3241058B2 (ja) * | 1991-03-28 | 2001-12-25 | 大日本スクリーン製造株式会社 | 回転式塗布装置及び回転式塗布方法 |
JP2591555B2 (ja) * | 1991-12-20 | 1997-03-19 | 東京応化工業株式会社 | 塗布装置 |
US5439519A (en) * | 1992-04-28 | 1995-08-08 | Tokyo Ohka Kogyo Co., Ltd. | Solution applying apparatus |
US5211753A (en) * | 1992-06-15 | 1993-05-18 | Swain Danny C | Spin coating apparatus with an independently spinning enclosure |
JP3395264B2 (ja) * | 1993-07-26 | 2003-04-07 | 東京応化工業株式会社 | 回転カップ式塗布装置 |
US5489341A (en) * | 1993-08-23 | 1996-02-06 | Semitool, Inc. | Semiconductor processing with non-jetting fluid stream discharge array |
US5656082A (en) * | 1994-04-04 | 1997-08-12 | Tatsumo Kabushiki Kaisha | Liquid applying apparatus utilizing centrifugal force |
JP3250090B2 (ja) * | 1995-06-27 | 2002-01-28 | 東京エレクトロン株式会社 | 洗浄処理装置及び洗浄処理方法 |
JPH0945611A (ja) * | 1995-07-27 | 1997-02-14 | Dainippon Screen Mfg Co Ltd | 回転式基板塗布装置 |
TW344097B (en) * | 1996-04-09 | 1998-11-01 | Tokyo Electron Co Ltd | Photoresist treating device of substrate and photoresist treating method |
JP3396377B2 (ja) * | 1996-07-22 | 2003-04-14 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP3390313B2 (ja) * | 1996-12-05 | 2003-03-24 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US6027602A (en) * | 1997-08-29 | 2000-02-22 | Techpoint Pacific Singapore Pte. Ltd. | Wet processing apparatus |
JP3555724B2 (ja) * | 1997-09-04 | 2004-08-18 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP2000343046A (ja) * | 1999-06-02 | 2000-12-12 | Kurita Water Ind Ltd | 枚葉式洗浄装置 |
JP2001077082A (ja) * | 1999-09-06 | 2001-03-23 | Takata Corp | 処理液回収用チャンバー構造 |
TW399743U (en) * | 1999-09-15 | 2000-07-21 | Ind Tech Res Inst | Wafer back protection device |
JP4426036B2 (ja) * | 1999-12-02 | 2010-03-03 | 東京エレクトロン株式会社 | 基板処理装置 |
DE50004935D1 (de) * | 2000-10-31 | 2004-02-05 | Sez Ag Villach | Vorrichtung zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen |
JP3740377B2 (ja) | 2001-03-05 | 2006-02-01 | 東京エレクトロン株式会社 | 液供給装置 |
JP2003007664A (ja) * | 2001-06-22 | 2003-01-10 | Ses Co Ltd | 枚葉式基板洗浄方法および枚葉式基板洗浄装置 |
-
2002
- 2002-06-25 AT AT0095402A patent/AT500984B1/de not_active IP Right Cessation
-
2003
- 2003-06-18 DE DE60327777T patent/DE60327777D1/de not_active Expired - Lifetime
- 2003-06-18 WO PCT/EP2003/006441 patent/WO2004001812A1/en active Application Filing
- 2003-06-18 EP EP03760646A patent/EP1532661B1/de not_active Expired - Lifetime
- 2003-06-18 JP JP2004514771A patent/JP4557715B2/ja not_active Expired - Fee Related
- 2003-06-18 AU AU2003242729A patent/AU2003242729A1/en not_active Abandoned
- 2003-06-18 US US10/518,517 patent/US7122084B2/en not_active Expired - Fee Related
- 2003-06-18 CN CNB038146991A patent/CN100375228C/zh not_active Expired - Fee Related
- 2003-06-18 KR KR1020047019593A patent/KR100958364B1/ko not_active IP Right Cessation
- 2003-06-18 AT AT03760646T patent/ATE432530T1/de not_active IP Right Cessation
- 2003-06-20 TW TW092116803A patent/TW594873B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU2003242729A1 (en) | 2004-01-06 |
AT500984A1 (de) | 2006-05-15 |
ATE432530T1 (de) | 2009-06-15 |
KR100958364B1 (ko) | 2010-05-17 |
KR20050013119A (ko) | 2005-02-02 |
JP4557715B2 (ja) | 2010-10-06 |
TW200400557A (en) | 2004-01-01 |
EP1532661A1 (de) | 2005-05-25 |
JP2005530605A (ja) | 2005-10-13 |
EP1532661B1 (de) | 2009-05-27 |
US20050223975A1 (en) | 2005-10-13 |
US7122084B2 (en) | 2006-10-17 |
TW594873B (en) | 2004-06-21 |
CN100375228C (zh) | 2008-03-12 |
CN1663023A (zh) | 2005-08-31 |
WO2004001812A1 (en) | 2003-12-31 |
AT500984B1 (de) | 2007-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: LAM RESEARCH AG, VILLACH, AT |
|
8364 | No opposition during term of opposition |