DE60316334D1 - Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat - Google Patents
Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf SiliziumsubstratInfo
- Publication number
- DE60316334D1 DE60316334D1 DE60316334T DE60316334T DE60316334D1 DE 60316334 D1 DE60316334 D1 DE 60316334D1 DE 60316334 T DE60316334 T DE 60316334T DE 60316334 T DE60316334 T DE 60316334T DE 60316334 D1 DE60316334 D1 DE 60316334D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon substrate
- ultrahigh
- producing
- quality
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0627—Construction or shape of active medium the resonator being monolithic, e.g. microlaser
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/29343—Cascade of loop resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/083—Ring lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1042—Optical microcavities, e.g. cavity dimensions comparable to the wavelength
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1071—Ring-lasers
- H01S5/1075—Disk lasers with special modes, e.g. whispering gallery lasers
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Glass Melting And Manufacturing (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Glass Compositions (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US41541202P | 2002-10-02 | 2002-10-02 | |
US415412P | 2002-10-02 | ||
PCT/US2003/031727 WO2004109351A2 (en) | 2002-10-02 | 2003-10-02 | Ultra-high q micro-resonator on silicon substrate and method of fabrication thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60316334D1 true DE60316334D1 (de) | 2007-10-25 |
DE60316334T2 DE60316334T2 (de) | 2008-06-26 |
Family
ID=33510284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60316334T Expired - Lifetime DE60316334T2 (de) | 2002-10-02 | 2003-10-02 | Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat |
Country Status (6)
Country | Link |
---|---|
US (1) | US7545843B2 (de) |
EP (1) | EP1554618B1 (de) |
AT (1) | ATE373250T1 (de) |
AU (1) | AU2003304193A1 (de) |
DE (1) | DE60316334T2 (de) |
WO (1) | WO2004109351A2 (de) |
Families Citing this family (45)
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US7781217B2 (en) * | 2002-10-02 | 2010-08-24 | California Institute Of Technology | Biological and chemical microcavity resonant sensors and methods of detecting molecules |
US20050141809A1 (en) * | 2003-12-31 | 2005-06-30 | Gardner Donald S. | Microring and microdisk resonators for lasers fabricated on silicon wafers |
US7769071B2 (en) * | 2004-02-02 | 2010-08-03 | California Institute Of Technology | Silica sol gel micro-laser on a substrate |
US7515617B1 (en) | 2005-11-15 | 2009-04-07 | California Institute Of Technology | Photonic device having higher order harmonic emissions |
US7515786B1 (en) * | 2006-07-21 | 2009-04-07 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | White-light whispering gallery mode optical resonator system and method |
US7951299B2 (en) * | 2007-02-27 | 2011-05-31 | California Institute Of Technology | Method of fabricating a microresonator |
US7793543B2 (en) * | 2007-05-04 | 2010-09-14 | Baker Hughes Incorporated | Method of measuring borehole gravitational acceleration |
US20090067039A1 (en) * | 2007-09-07 | 2009-03-12 | Bernd Nebendahl | Optical micro resonator |
US8107081B2 (en) * | 2007-10-01 | 2012-01-31 | California Institute Of Technology | Micro-cavity gas and vapor sensors and detection methods |
US8092855B2 (en) | 2007-11-28 | 2012-01-10 | California Institute Of Technology | Click chemistry surface functionalization for resonant micro-cavity sensors |
US9246529B2 (en) | 2008-01-25 | 2016-01-26 | California Institute Of Technology | Photonic RF down-converter based on optomechanical oscillation |
US8102597B1 (en) * | 2008-05-15 | 2012-01-24 | Oewaves, Inc. | Structures and fabrication of whispering-gallery-mode resonators |
US8593638B2 (en) * | 2008-10-02 | 2013-11-26 | California Institute Of Technology | Split frequency sensing methods and systems |
US11754488B2 (en) | 2009-12-11 | 2023-09-12 | Washington University | Opto-mechanical system and method having chaos induced stochastic resonance and opto-mechanically mediated chaos transfer |
WO2015050591A2 (en) * | 2013-06-12 | 2015-04-09 | Washington University | Tunable add-drop filter with an active resonator |
US20150285728A1 (en) | 2009-12-11 | 2015-10-08 | Washington University | Detection of nano-scale particles with a self-referenced and self-heterodyned raman micro-laser |
EP2537215A4 (de) | 2010-02-19 | 2015-10-14 | California Inst Of Techn | An einen biomolekularen sensor gekoppelter wobbelfrequenz-halbleiterlaser und verfahren in zusammenhang damit |
CN101957479B (zh) * | 2010-07-27 | 2011-10-05 | 中北大学 | 温度调制光学微腔耦合***的输出方法及其耦合结构 |
US9293887B2 (en) * | 2011-06-17 | 2016-03-22 | California Institute Of Technology | Chip-based laser resonator device for highly coherent laser generation |
DE102011107360A1 (de) * | 2011-06-29 | 2013-01-03 | Karlsruher Institut für Technologie | Mikrooptisches Element, mikrooptisches Array und optisches Sensorensystem |
US8361828B1 (en) * | 2011-08-31 | 2013-01-29 | Alta Devices, Inc. | Aligned frontside backside laser dicing of semiconductor films |
US8399281B1 (en) * | 2011-08-31 | 2013-03-19 | Alta Devices, Inc. | Two beam backside laser dicing of semiconductor films |
JP5871655B2 (ja) * | 2012-02-28 | 2016-03-01 | 学校法人慶應義塾 | シリカトロイド型光共振器の製造方法 |
US8848760B2 (en) | 2012-06-06 | 2014-09-30 | California Institute Of Technology | On-chip optical reference cavity exhibiting reduced resonance center frequency fluctuations |
CN102718180A (zh) * | 2012-06-28 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同心环芯纳米硅微盘微腔器件及其制备方法 |
JP6066876B2 (ja) * | 2012-09-25 | 2017-01-25 | オーエフエス ファイテル,エルエルシー | 表面ナノスケール・アキシャル・フォトニックデバイスを製造する方法 |
CN107124910B (zh) | 2014-01-24 | 2019-08-23 | 加州理工学院 | 稳定的微波频率源 |
US9595918B2 (en) | 2014-03-06 | 2017-03-14 | California Institute Of Technology | Stable microwave-frequency source based on cascaded brillouin lasers |
US9739770B2 (en) | 2014-03-14 | 2017-08-22 | California Institute Of Technology | Label-free detection of nanoparticles and biological molecules using microtoroid optical resonators |
TWI603594B (zh) | 2014-09-19 | 2017-10-21 | 財團法人工業技術研究院 | 光通訊裝置和光通訊方法 |
US9905999B2 (en) | 2015-02-26 | 2018-02-27 | California Institute Of Technology | Optical frequency divider based on an electro-optical-modulator frequency comb |
CN104868351B (zh) * | 2015-04-27 | 2018-08-03 | 清华大学 | 一种调节回音壁模式微腔共振频率的方法 |
CN105098575A (zh) * | 2015-07-22 | 2015-11-25 | 南京邮电大学 | 一种混合介质微腔全光调谐的窄带光纤激光器 |
US10884189B2 (en) * | 2017-06-06 | 2021-01-05 | University Of Maryland, Baltimore County | Nanofiber-segment ring resonator |
CN108321670B (zh) * | 2018-03-22 | 2023-12-01 | 华南理工大学 | 一种级联泵浦的微腔激光器 |
EP3827307A4 (de) * | 2018-07-25 | 2022-04-27 | Synergy Microwave Corporation | Optoelektronischer oszillator mit monolithisch integriertem multi-quantum-well-laser und phasenmodulator |
CN109638645B (zh) * | 2018-12-29 | 2021-04-06 | 中国科学院半导体研究所 | 可调谐耦合腔半导体激光器 |
CN110289551B (zh) * | 2019-07-22 | 2020-09-15 | 中国科学院半导体研究所 | 用于激光显示的激光光源 |
US10958040B1 (en) * | 2019-09-17 | 2021-03-23 | International Business Machines Corporation | Fabrication of ellipsoidal or semi-ellipsoidal semiconductor structures |
US11081859B2 (en) * | 2019-09-30 | 2021-08-03 | Gm Cruise Holdings Llc | Optical resonator with localized ion-implanted voids |
US11060869B2 (en) * | 2019-11-27 | 2021-07-13 | Anello Photonics, Inc. | Ring waveguide based integrated photonics optical gyroscope with gain tuning for enhanced performance |
CN110981168A (zh) * | 2019-12-03 | 2020-04-10 | 中国科学技术大学 | 一种超高品质因子回音壁模式微棒腔制备方法 |
CN113003531B (zh) * | 2021-02-08 | 2022-06-28 | 清华大学 | 一种实现频率调控的装置 |
CN113507039B (zh) * | 2021-05-13 | 2022-07-08 | 华东师范大学 | 基于单个回音壁模式光学微腔的单模微激光器及实现方法 |
CN113497401B (zh) * | 2021-06-25 | 2022-10-14 | 华中科技大学 | 一种稀土掺杂光学微腔及其制备方法 |
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US3589794A (en) * | 1968-08-07 | 1971-06-29 | Bell Telephone Labor Inc | Optical circuits |
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GB1432949A (en) * | 1972-08-25 | 1976-04-22 | Plessey Co Ltd | Silicon dioxide semiconductor product containing boron trioxide and phosphorus pentoxide dopants |
US4282499A (en) * | 1979-09-24 | 1981-08-04 | The United States Of America As Represented By The Secretary Of The Navy | Optically tunable resonant structure |
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CA2068899C (en) * | 1991-09-17 | 1997-06-17 | Samuel Leverte Mccall | Whispering mode micro-resonator |
JPH05203826A (ja) | 1992-01-29 | 1993-08-13 | Nippondenso Co Ltd | 光リングフィルタ |
FR2703473B1 (fr) | 1993-03-31 | 1995-05-19 | Cit Alcatel | Filtre optique à résonateur en anneau. |
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US6078605A (en) * | 1998-02-20 | 2000-06-20 | Massachusetts Institute Of Technology | Track-changing utilizing phase response of resonators |
WO2001067565A1 (en) * | 2000-03-09 | 2001-09-13 | California Institute Of Technology | Micro-cavity laser |
AU2001250049A1 (en) * | 2000-03-22 | 2001-10-03 | California Institute Of Technology | Non-spherical whispering-gallery-mode microactivity |
KR100355675B1 (ko) * | 2000-10-10 | 2002-10-11 | 한국과학기술원 | 표면감쇠파 미소공진기 레이저 |
US6901101B2 (en) * | 2000-11-28 | 2005-05-31 | Rosemount Inc. | Optical sensor for measuring physical and material properties |
US20030021518A1 (en) * | 2001-06-01 | 2003-01-30 | D-Wave Systems, Inc. | Optical transformer device |
US20030179981A1 (en) * | 2002-03-22 | 2003-09-25 | Lnl Technologies,Inc. | Tunable inorganic dielectric microresonators |
-
2003
- 2003-10-02 AT AT03816213T patent/ATE373250T1/de not_active IP Right Cessation
- 2003-10-02 EP EP03816213A patent/EP1554618B1/de not_active Expired - Lifetime
- 2003-10-02 US US10/678,354 patent/US7545843B2/en active Active
- 2003-10-02 DE DE60316334T patent/DE60316334T2/de not_active Expired - Lifetime
- 2003-10-02 AU AU2003304193A patent/AU2003304193A1/en not_active Abandoned
- 2003-10-02 WO PCT/US2003/031727 patent/WO2004109351A2/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ATE373250T1 (de) | 2007-09-15 |
DE60316334T2 (de) | 2008-06-26 |
AU2003304193A8 (en) | 2005-01-04 |
US7545843B2 (en) | 2009-06-09 |
EP1554618B1 (de) | 2007-09-12 |
AU2003304193A1 (en) | 2005-01-04 |
US20040179573A1 (en) | 2004-09-16 |
WO2004109351A3 (en) | 2005-05-26 |
EP1554618A2 (de) | 2005-07-20 |
WO2004109351A2 (en) | 2004-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |