DE60311527D1 - Werkstückinspektionsverfahren und vorrichtung - Google Patents
Werkstückinspektionsverfahren und vorrichtungInfo
- Publication number
- DE60311527D1 DE60311527D1 DE60311527T DE60311527T DE60311527D1 DE 60311527 D1 DE60311527 D1 DE 60311527D1 DE 60311527 T DE60311527 T DE 60311527T DE 60311527 T DE60311527 T DE 60311527T DE 60311527 D1 DE60311527 D1 DE 60311527D1
- Authority
- DE
- Germany
- Prior art keywords
- contact
- artefact
- probe
- function
- error map
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000007689 inspection Methods 0.000 title 1
- 239000000523 sample Substances 0.000 abstract 5
- 238000005259 measurement Methods 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0228371.1A GB0228371D0 (en) | 2002-12-05 | 2002-12-05 | Workpiece inspection method |
GB0228371 | 2002-12-05 | ||
PCT/GB2003/005326 WO2004051179A1 (en) | 2002-12-05 | 2003-12-05 | Workpiece inspection method |
Publications (3)
Publication Number | Publication Date |
---|---|
DE60311527D1 true DE60311527D1 (de) | 2007-03-15 |
DE60311527T2 DE60311527T2 (de) | 2007-10-18 |
DE60311527T3 DE60311527T3 (de) | 2011-03-17 |
Family
ID=9949114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60311527T Expired - Lifetime DE60311527T3 (de) | 2002-12-05 | 2003-12-05 | Werkstückinspektionsverfahren und vorrichtung |
Country Status (9)
Country | Link |
---|---|
US (1) | US7131207B2 (de) |
EP (1) | EP1579168B2 (de) |
JP (1) | JP4504818B2 (de) |
CN (1) | CN100335860C (de) |
AT (1) | ATE352767T1 (de) |
AU (1) | AU2003292386A1 (de) |
DE (1) | DE60311527T3 (de) |
GB (1) | GB0228371D0 (de) |
WO (1) | WO2004051179A1 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0329098D0 (en) * | 2003-12-16 | 2004-01-21 | Renishaw Plc | Method of calibrating a scanning system |
US7543393B2 (en) * | 2003-12-16 | 2009-06-09 | Renishaw Plc | Method of calibrating a scanning system |
EP1596160A1 (de) * | 2004-05-10 | 2005-11-16 | Hexagon Metrology AB | Verfahren zur Prüfung eines Werkstücks mit einer Messmachine |
GB0417536D0 (en) * | 2004-08-06 | 2004-09-08 | Renishaw Plc | The use of surface measurement probes |
CN1841008A (zh) | 2005-04-01 | 2006-10-04 | 鸿富锦精密工业(深圳)有限公司 | 激光量测机台扫描精度验证方法 |
JP2006349547A (ja) * | 2005-06-17 | 2006-12-28 | Kanto Auto Works Ltd | 非接触式三次元形状計測方法及び計測機 |
GB0605796D0 (en) | 2006-03-23 | 2006-05-03 | Renishaw Plc | Apparatus and method of measuring workpieces |
EP2013571B1 (de) * | 2006-04-21 | 2011-09-07 | Renishaw plc | Verfahren zur fehlerkorrektur |
US8209839B1 (en) * | 2006-11-28 | 2012-07-03 | Florida Turbine Technologies, Inc. | Process for re-designing a distressed component used under thermal and structural loading |
EP1988357B1 (de) * | 2007-05-04 | 2018-10-17 | Hexagon Technology Center GmbH | Verfahren und Vorrichtung zur Koordinatenmessung |
JP5203028B2 (ja) * | 2007-05-30 | 2013-06-05 | 株式会社ミツトヨ | 形状測定機構の異常検出方法及び形状測定機構 |
GB0712008D0 (en) * | 2007-06-21 | 2007-08-01 | Renishaw Plc | Apparatus and method of calibration |
EP2160565A1 (de) * | 2007-06-28 | 2010-03-10 | Hexagon Metrology S.p.A. | Verfahren zum bestimmen von dynamischen fehlern in einer messmaschine |
US7912572B2 (en) * | 2007-09-20 | 2011-03-22 | General Electric Company | Calibration assembly for an inspection system |
GB2453127A (en) | 2007-09-26 | 2009-04-01 | Intelligent Energy Ltd | Fuel Cell System |
GB2453126B (en) | 2007-09-26 | 2013-02-06 | Intelligent Energy Ltd | Fuel cell system |
US7712224B2 (en) * | 2007-10-03 | 2010-05-11 | Hexagon Metrology Ab | Validating the error map of CMM using calibrated probe |
US7908756B2 (en) * | 2007-10-12 | 2011-03-22 | Los Alamos National Security, Llc | Integrated calibration sphere and calibration step fixture for improved coordinate measurement machine calibration |
GB2464509C (en) * | 2008-10-17 | 2014-05-21 | Taylor Hobson Ltd | Surface measurement instrument and method |
US7905031B1 (en) * | 2009-03-06 | 2011-03-15 | Florida Turbine Technologies, Inc. | Process for measuring a part |
GB201003363D0 (en) | 2010-03-01 | 2010-04-14 | Renishaw Plc | Measurement method and apparatus |
GB201003599D0 (en) * | 2010-03-04 | 2010-04-21 | Renishaw Plc | Measurement method and apparatus |
JP5649926B2 (ja) * | 2010-11-22 | 2015-01-07 | 株式会社小坂研究所 | 表面形状測定装置及び表面形状測定方法 |
US8826719B2 (en) * | 2010-12-16 | 2014-09-09 | Hexagon Metrology, Inc. | Machine calibration artifact |
JP5834317B2 (ja) | 2011-05-11 | 2015-12-16 | 株式会社ミツトヨ | 誤差画像生成方法 |
GB201113715D0 (en) | 2011-08-09 | 2011-09-21 | Renishaw Plc | Method and apparatus for inspecting workpieces |
GB201204947D0 (en) * | 2012-03-21 | 2012-05-02 | Renishaw Plc | Method and apparatus for inspecting workpieces |
CN104813140B (zh) * | 2012-11-14 | 2019-05-03 | 瑞尼斯豪公司 | 用于通过机床测量工件的方法和设备 |
GB201308467D0 (en) | 2013-05-10 | 2013-06-19 | Renishaw Plc | Method and Apparatus for Inspecting Workpieces |
GB201316329D0 (en) * | 2013-09-13 | 2013-10-30 | Renishaw Plc | A Method of Using a scanning probe |
EP3077763B1 (de) | 2014-01-23 | 2018-01-03 | Carl Zeiss Industrielle Messtechnik GmbH | Verfahren zur auswertung von koordinatenmessdaten, entsprechende vorrichtung zum vermessen eines messobjektes und entsprechendes computerprogrammprodukt |
CN104123751A (zh) * | 2014-07-24 | 2014-10-29 | 福州大学 | Kinect与关节臂结合的复合式测量和三维重建方法 |
JP2018031754A (ja) | 2016-08-26 | 2018-03-01 | 株式会社ミツトヨ | 三次元測定装置及び座標補正方法 |
JP6341962B2 (ja) | 2016-08-26 | 2018-06-13 | 株式会社ミツトヨ | 三次元測定装置及び座標補正方法 |
JP6295299B2 (ja) | 2016-08-26 | 2018-03-14 | 株式会社ミツトヨ | 座標補正方法及び三次元測定装置 |
WO2018048872A1 (en) * | 2016-09-09 | 2018-03-15 | Gleason Metrology Systems Corporation | Measurement of toothed articles utilizing multiple sensors |
DE102017116772B4 (de) | 2017-02-01 | 2021-12-09 | Jenoptik Industrial Metrology Germany Gmbh | Verfahren zur Durchführung einer Geradheitskompensation bei einem Form- oder Konturmessgerät |
JP7249846B2 (ja) | 2019-03-28 | 2023-03-31 | ヘキサゴン・メトロジー株式会社 | Cnc加工装置のキャリブレーション方法 |
CN113739702B (zh) * | 2020-05-27 | 2024-07-12 | 台达电子(东莞)有限公司 | Oa轴芯尺寸量测装置及方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8713715D0 (en) * | 1987-06-11 | 1987-07-15 | Renishaw Plc | Workpiece inspection method |
US5209131A (en) * | 1989-11-03 | 1993-05-11 | Rank Taylor Hobson | Metrology |
US5251156A (en) * | 1990-08-25 | 1993-10-05 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Method and apparatus for non-contact measurement of object surfaces |
JPH04178509A (ja) * | 1990-11-13 | 1992-06-25 | Tokyo Seimitsu Co Ltd | 座標測定機の測定方法 |
US5315259A (en) * | 1992-05-26 | 1994-05-24 | Universities Research Association, Inc. | Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere |
US5426861A (en) † | 1993-04-19 | 1995-06-27 | Advanced Metrological Development | Method and apparatus for inspecting parts for dimensional accuracy outside a laboratory environment |
DE19730471C5 (de) * | 1997-07-16 | 2009-02-19 | Hexagon Metrology Gmbh | Verfahren zum Scannen mit einem Koordinatenmeßgerät |
GB9823228D0 (en) * | 1998-10-24 | 1998-12-16 | Renishaw Plc | Method of calibrating analogue probes |
GB9907868D0 (en) * | 1999-04-08 | 1999-06-02 | Renishaw Plc | Method of calibrating a scanning system |
DE10050795C2 (de) * | 1999-12-23 | 2002-11-07 | Klingelnberg Gmbh | Verfahren und Vorrichtung zum Scannen auf einem Koordinatenmessgerät |
JP3827548B2 (ja) * | 2001-10-04 | 2006-09-27 | 株式会社ミツトヨ | 倣いプローブの校正方法および校正プログラム |
GB0205332D0 (en) * | 2002-03-06 | 2002-04-17 | Renishaw Plc | Dynamic artefact comparison |
US7693325B2 (en) * | 2004-01-14 | 2010-04-06 | Hexagon Metrology, Inc. | Transprojection of geometry data |
-
2002
- 2002-12-05 GB GBGB0228371.1A patent/GB0228371D0/en not_active Ceased
-
2003
- 2003-12-05 DE DE60311527T patent/DE60311527T3/de not_active Expired - Lifetime
- 2003-12-05 CN CNB2003801052395A patent/CN100335860C/zh not_active Expired - Fee Related
- 2003-12-05 AT AT03767963T patent/ATE352767T1/de not_active IP Right Cessation
- 2003-12-05 EP EP03767963A patent/EP1579168B2/de not_active Expired - Lifetime
- 2003-12-05 JP JP2004556554A patent/JP4504818B2/ja not_active Expired - Fee Related
- 2003-12-05 US US10/535,207 patent/US7131207B2/en not_active Expired - Fee Related
- 2003-12-05 WO PCT/GB2003/005326 patent/WO2004051179A1/en active IP Right Grant
- 2003-12-05 AU AU2003292386A patent/AU2003292386A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN100335860C (zh) | 2007-09-05 |
AU2003292386A1 (en) | 2004-06-23 |
EP1579168B1 (de) | 2007-01-24 |
EP1579168A1 (de) | 2005-09-28 |
CN1720425A (zh) | 2006-01-11 |
EP1579168B2 (de) | 2010-11-24 |
DE60311527T2 (de) | 2007-10-18 |
US20060053646A1 (en) | 2006-03-16 |
WO2004051179A1 (en) | 2004-06-17 |
ATE352767T1 (de) | 2007-02-15 |
DE60311527T3 (de) | 2011-03-17 |
GB0228371D0 (en) | 2003-01-08 |
JP4504818B2 (ja) | 2010-07-14 |
US7131207B2 (en) | 2006-11-07 |
JP2006509194A (ja) | 2006-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8366 | Restricted maintained after opposition proceedings |