DE60234227D1 - Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen - Google Patents

Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen

Info

Publication number
DE60234227D1
DE60234227D1 DE60234227T DE60234227T DE60234227D1 DE 60234227 D1 DE60234227 D1 DE 60234227D1 DE 60234227 T DE60234227 T DE 60234227T DE 60234227 T DE60234227 T DE 60234227T DE 60234227 D1 DE60234227 D1 DE 60234227D1
Authority
DE
Germany
Prior art keywords
mass cells
miniaturized accelerometer
accelerometer
miniaturized
cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60234227T
Other languages
English (en)
Inventor
Paul David Featonby
Herve Baudry
Karine Petroz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Application granted granted Critical
Publication of DE60234227D1 publication Critical patent/DE60234227D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
DE60234227T 2001-02-26 2002-02-22 Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen Expired - Lifetime DE60234227D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0102575A FR2821434B1 (fr) 2001-02-26 2001-02-26 Accelerometre miniature a deux cellules

Publications (1)

Publication Number Publication Date
DE60234227D1 true DE60234227D1 (de) 2009-12-17

Family

ID=8860432

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60234227T Expired - Lifetime DE60234227D1 (de) 2001-02-26 2002-02-22 Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen

Country Status (4)

Country Link
US (1) US20020152812A1 (de)
EP (1) EP1235074B1 (de)
DE (1) DE60234227D1 (de)
FR (1) FR2821434B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1678469A1 (de) * 2003-10-21 2006-07-12 Koninklijke Philips Electronics N.V. Monolithische struktur mit mindestens einem elastischen schwenkglied
JP4848973B2 (ja) * 2007-02-15 2011-12-28 セイコーエプソン株式会社 加速度検知ユニット及び加速度センサ
IT1395419B1 (it) * 2009-09-07 2012-09-14 Milano Politecnico Accelerometro risonante mems con migliorate caretteristiche elettriche
IT1405796B1 (it) 2010-11-26 2014-01-24 St Microelectronics Srl Struttura di accelerometro biassiale risonante di tipo microelettromeccanico
US9759739B2 (en) * 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
GB2576639B8 (en) * 2018-08-17 2021-07-07 Schlumberger Technology Bv Resonating sensor for high-pressure and high-temperature environments
CN112710865B (zh) * 2020-12-11 2022-02-25 大连理工大学 一种基于模态局部化效应的可调加速度传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872343A (en) * 1988-08-10 1989-10-10 Sundstrand Data Control, Inc. Matched pairs of force transducers
US5095763A (en) * 1990-12-03 1992-03-17 Delatorre Leroy C Load-sensitive resonator beam transducer
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer

Also Published As

Publication number Publication date
FR2821434A1 (fr) 2002-08-30
US20020152812A1 (en) 2002-10-24
EP1235074B1 (de) 2009-11-04
FR2821434B1 (fr) 2003-07-04
EP1235074A1 (de) 2002-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition