DE60234227D1 - Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen - Google Patents
Miniaturisierter Beschleunigungsmesser mit zwei Masse-ZellenInfo
- Publication number
- DE60234227D1 DE60234227D1 DE60234227T DE60234227T DE60234227D1 DE 60234227 D1 DE60234227 D1 DE 60234227D1 DE 60234227 T DE60234227 T DE 60234227T DE 60234227 T DE60234227 T DE 60234227T DE 60234227 D1 DE60234227 D1 DE 60234227D1
- Authority
- DE
- Germany
- Prior art keywords
- mass cells
- miniaturized accelerometer
- accelerometer
- miniaturized
- cells
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0102575A FR2821434B1 (fr) | 2001-02-26 | 2001-02-26 | Accelerometre miniature a deux cellules |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60234227D1 true DE60234227D1 (de) | 2009-12-17 |
Family
ID=8860432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60234227T Expired - Lifetime DE60234227D1 (de) | 2001-02-26 | 2002-02-22 | Miniaturisierter Beschleunigungsmesser mit zwei Masse-Zellen |
Country Status (4)
Country | Link |
---|---|
US (1) | US20020152812A1 (de) |
EP (1) | EP1235074B1 (de) |
DE (1) | DE60234227D1 (de) |
FR (1) | FR2821434B1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1678469A1 (de) * | 2003-10-21 | 2006-07-12 | Koninklijke Philips Electronics N.V. | Monolithische struktur mit mindestens einem elastischen schwenkglied |
JP4848973B2 (ja) * | 2007-02-15 | 2011-12-28 | セイコーエプソン株式会社 | 加速度検知ユニット及び加速度センサ |
IT1395419B1 (it) * | 2009-09-07 | 2012-09-14 | Milano Politecnico | Accelerometro risonante mems con migliorate caretteristiche elettriche |
IT1405796B1 (it) | 2010-11-26 | 2014-01-24 | St Microelectronics Srl | Struttura di accelerometro biassiale risonante di tipo microelettromeccanico |
US9759739B2 (en) * | 2011-02-02 | 2017-09-12 | Honeywell International Inc. | MEMS vibrating-beam accelerometer with piezoelectric drive |
GB2576639B8 (en) * | 2018-08-17 | 2021-07-07 | Schlumberger Technology Bv | Resonating sensor for high-pressure and high-temperature environments |
CN112710865B (zh) * | 2020-12-11 | 2022-02-25 | 大连理工大学 | 一种基于模态局部化效应的可调加速度传感器 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4872343A (en) * | 1988-08-10 | 1989-10-10 | Sundstrand Data Control, Inc. | Matched pairs of force transducers |
US5095763A (en) * | 1990-12-03 | 1992-03-17 | Delatorre Leroy C | Load-sensitive resonator beam transducer |
US5456110A (en) * | 1993-11-12 | 1995-10-10 | Alliedsignal Inc. | Dual pendulum vibrating beam accelerometer |
-
2001
- 2001-02-26 FR FR0102575A patent/FR2821434B1/fr not_active Expired - Fee Related
-
2002
- 2002-02-22 EP EP02290441A patent/EP1235074B1/de not_active Expired - Lifetime
- 2002-02-22 DE DE60234227T patent/DE60234227D1/de not_active Expired - Lifetime
- 2002-02-25 US US10/080,521 patent/US20020152812A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
FR2821434A1 (fr) | 2002-08-30 |
US20020152812A1 (en) | 2002-10-24 |
EP1235074B1 (de) | 2009-11-04 |
FR2821434B1 (fr) | 2003-07-04 |
EP1235074A1 (de) | 2002-08-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |