IT1395419B1 - Accelerometro risonante mems con migliorate caretteristiche elettriche - Google Patents

Accelerometro risonante mems con migliorate caretteristiche elettriche

Info

Publication number
IT1395419B1
IT1395419B1 ITTO2009A000687A ITTO20090687A IT1395419B1 IT 1395419 B1 IT1395419 B1 IT 1395419B1 IT TO2009A000687 A ITTO2009A000687 A IT TO2009A000687A IT TO20090687 A ITTO20090687 A IT TO20090687A IT 1395419 B1 IT1395419 B1 IT 1395419B1
Authority
IT
Italy
Prior art keywords
acconerometer
electric characteristics
improved electric
resonating mems
resonating
Prior art date
Application number
ITTO2009A000687A
Other languages
English (en)
Inventor
Barbara Simoni
Claudia Comi
Alberto Corigliano
Original Assignee
Milano Politecnico
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Milano Politecnico, St Microelectronics Rousset filed Critical Milano Politecnico
Priority to ITTO2009A000687A priority Critical patent/IT1395419B1/it
Priority to US12/875,000 priority patent/US8516889B2/en
Publication of ITTO20090687A1 publication Critical patent/ITTO20090687A1/it
Application granted granted Critical
Publication of IT1395419B1 publication Critical patent/IT1395419B1/it
Priority to US13/952,503 priority patent/US9354246B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G01P15/10—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by vibratory strings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
ITTO2009A000687A 2009-09-07 2009-09-07 Accelerometro risonante mems con migliorate caretteristiche elettriche IT1395419B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITTO2009A000687A IT1395419B1 (it) 2009-09-07 2009-09-07 Accelerometro risonante mems con migliorate caretteristiche elettriche
US12/875,000 US8516889B2 (en) 2009-09-07 2010-09-02 MEMS resonant accelerometer having improved electrical characteristics
US13/952,503 US9354246B2 (en) 2009-09-07 2013-07-26 MEMS resonant accelerometer having improved electrical characteristics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2009A000687A IT1395419B1 (it) 2009-09-07 2009-09-07 Accelerometro risonante mems con migliorate caretteristiche elettriche

Publications (2)

Publication Number Publication Date
ITTO20090687A1 ITTO20090687A1 (it) 2011-03-08
IT1395419B1 true IT1395419B1 (it) 2012-09-14

Family

ID=41719176

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2009A000687A IT1395419B1 (it) 2009-09-07 2009-09-07 Accelerometro risonante mems con migliorate caretteristiche elettriche

Country Status (2)

Country Link
US (2) US8516889B2 (it)
IT (1) IT1395419B1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2713169A1 (en) 2012-09-28 2014-04-02 Politecnico Di Milano Integrated resonant structure for the detection of acceleration and angular velocity, and related MEMS sensor device

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IT1395419B1 (it) 2009-09-07 2012-09-14 Milano Politecnico Accelerometro risonante mems con migliorate caretteristiche elettriche
IT1405796B1 (it) 2010-11-26 2014-01-24 St Microelectronics Srl Struttura di accelerometro biassiale risonante di tipo microelettromeccanico
KR101944235B1 (ko) 2012-01-12 2019-01-31 무라타 일렉트로닉스 오와이 진동 내성 가속도 센서 구조체
GB2505875A (en) * 2012-09-04 2014-03-19 Cambridge Entpr Ltd Dual and triple axis inertial sensors and methods of inertial sensing
WO2017030620A1 (en) * 2015-05-29 2017-02-23 Massachusetts Institute Of Technology Apparatus and methods for photonic integrated resonant accelerometers
US10564200B2 (en) * 2015-10-06 2020-02-18 The Charles Stark Draper Laboratory, Inc. Electric field detector system
US10585150B2 (en) 2015-10-06 2020-03-10 The Charles Stark Draper Laboratory, Inc. Magnetic field detector system
US10060943B2 (en) 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise
US10531805B2 (en) 2016-09-30 2020-01-14 The Charles Stark Draper Laboratory, Inc. Biophysical sensing systems and methods using non-contact electric field detectors
US10859620B2 (en) 2017-04-04 2020-12-08 The Charles Stark Draper Laboratory, Inc. Miniature electric field detector
CN109211217A (zh) * 2017-07-06 2019-01-15 立锜科技股份有限公司 微机电装置
US11525870B2 (en) 2017-10-05 2022-12-13 The Charles Stark Draper Laboratory, Inc. Electromagnetic gradiometers
US10895457B2 (en) 2018-03-08 2021-01-19 Analog Devices, Inc. Differential z-axis resonant accelerometry
CN108398575B (zh) * 2018-03-19 2024-02-27 重庆科技学院 一种静电谐振式加速度计及加速度测量方法
US10866258B2 (en) 2018-07-20 2020-12-15 Honeywell International Inc. In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry
CN109635356B (zh) * 2018-11-19 2023-05-19 北京联合大学 一种谐振式加速度计控制方程建立方法
CN109374927A (zh) * 2018-11-29 2019-02-22 中国矿业大学(北京) 一种全对称解耦的直接输出频率加速度计
CN111479008A (zh) * 2019-01-24 2020-07-31 新奥数能科技有限公司 基于智能手机检测振动参数的方法、智能手机及业务***
US11567100B2 (en) 2019-11-07 2023-01-31 Honeywell International Inc. Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
US11473909B2 (en) 2020-03-04 2022-10-18 Invensense, Inc. Use of MEMS gyroscope for compensation of accelerometer stress induced errors
US20210385586A1 (en) * 2020-06-04 2021-12-09 Georgia Tech Research Corporation Systems and methods having multi-axis sensitivity and translational mode shapes
EP4162281A1 (en) 2020-06-08 2023-04-12 Analog Devices, Inc. Stress-relief mems gyroscope
EP4162282A1 (en) 2020-06-08 2023-04-12 Analog Devices, Inc. Drive and sense stress relief apparatus
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
CN112485469B (zh) * 2020-11-24 2021-09-28 浙江大学 一种谐振式微机械加速度计及其控制方法
CN113514666B (zh) * 2021-04-29 2022-08-02 东南大学 一种基于pt对称谐振器的微机械加速度计及其检测方法
FR3126777B1 (fr) * 2021-09-09 2023-09-08 Commissariat Energie Atomique Capteur microélectromécanique résonant a fonctionnement amelioré

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US4851080A (en) * 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
FR2667157B1 (fr) * 1990-09-25 1994-06-10 Sextant Avionique Micro-accelerometre a resonateurs et procede de fabrication.
FR2720509B1 (fr) * 1994-05-27 1996-08-23 Sextant Avionique Microaccéléromètre à résonateur compensé en température.
FR2723638B1 (fr) * 1994-08-10 1996-10-18 Sagem Transducteur force-frequence a poutres vibrantes
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US6662658B2 (en) * 2001-01-17 2003-12-16 Honeywell International, Inc. Whiffletree accelerometer
FR2821434B1 (fr) * 2001-02-26 2003-07-04 Sagem Accelerometre miniature a deux cellules
KR20030097874A (ko) * 2001-05-15 2003-12-31 허니웰 인터내셔널 인코포레이티드 가속도 측정기 스트레인 경감 구조
US6651500B2 (en) * 2001-10-03 2003-11-25 Litton Systems, Inc. Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling
FR2848298B1 (fr) * 2002-12-10 2005-03-11 Thales Sa Accelerometre a poutre vibrante
FR2862761B1 (fr) * 2003-11-25 2006-02-03 Thales Sa Accelerometre differentiel micro-usine multiaxes
FR2906038B1 (fr) * 2006-09-19 2008-11-28 Commissariat Energie Atomique Accelerometre a poutre resonante avec bras de levier articule en rotation
US8528404B2 (en) * 2007-10-11 2013-09-10 Georgia Tech Research Corporation Bulk acoustic wave accelerometers
IT1395419B1 (it) 2009-09-07 2012-09-14 Milano Politecnico Accelerometro risonante mems con migliorate caretteristiche elettriche
IT1405796B1 (it) * 2010-11-26 2014-01-24 St Microelectronics Srl Struttura di accelerometro biassiale risonante di tipo microelettromeccanico

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2713169A1 (en) 2012-09-28 2014-04-02 Politecnico Di Milano Integrated resonant structure for the detection of acceleration and angular velocity, and related MEMS sensor device

Also Published As

Publication number Publication date
US9354246B2 (en) 2016-05-31
US20110056294A1 (en) 2011-03-10
ITTO20090687A1 (it) 2011-03-08
US8516889B2 (en) 2013-08-27
US20150362522A1 (en) 2015-12-17

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