DE60221908D1 - Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform - Google Patents

Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform

Info

Publication number
DE60221908D1
DE60221908D1 DE60221908T DE60221908T DE60221908D1 DE 60221908 D1 DE60221908 D1 DE 60221908D1 DE 60221908 T DE60221908 T DE 60221908T DE 60221908 T DE60221908 T DE 60221908T DE 60221908 D1 DE60221908 D1 DE 60221908D1
Authority
DE
Germany
Prior art keywords
liquid
vaporizing
liquid reactant
vaporizing plate
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60221908T
Other languages
English (en)
Other versions
DE60221908T2 (de
Inventor
Marco Galante
Marco Arimondi
Giacomo Stefano Roba
Ilenia Santi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Prysmian Cavi e Sistemi Energia SRL
Original Assignee
Prysmian Cavi e Sistemi Energia SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prysmian Cavi e Sistemi Energia SRL filed Critical Prysmian Cavi e Sistemi Energia SRL
Application granted granted Critical
Publication of DE60221908D1 publication Critical patent/DE60221908D1/de
Publication of DE60221908T2 publication Critical patent/DE60221908T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/88—Controlling the pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE60221908T 2002-06-28 2002-06-28 Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform Expired - Lifetime DE60221908T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2002/007165 WO2004002909A1 (en) 2002-06-28 2002-06-28 Method and device for vaporizing a liquid reactant in manufacturing a glass preform

Publications (2)

Publication Number Publication Date
DE60221908D1 true DE60221908D1 (de) 2007-09-27
DE60221908T2 DE60221908T2 (de) 2008-05-15

Family

ID=29797102

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60221908T Expired - Lifetime DE60221908T2 (de) 2002-06-28 2002-06-28 Verfahren und vorrichtung zum verdampfen eines flüssigen vorlaüfers beim herstellen einer glasvorform

Country Status (7)

Country Link
US (1) US7730747B2 (de)
EP (1) EP1517863B1 (de)
AT (1) ATE370105T1 (de)
AU (1) AU2002313486A1 (de)
DE (1) DE60221908T2 (de)
ES (1) ES2292788T3 (de)
WO (1) WO2004002909A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
US8137462B2 (en) * 2006-10-10 2012-03-20 Asm America, Inc. Precursor delivery system
US10107490B2 (en) * 2014-06-30 2018-10-23 Lam Research Corporation Configurable liquid precursor vaporizer
US9982341B2 (en) 2015-01-30 2018-05-29 Lam Research Corporation Modular vaporizer
US10672921B2 (en) 2015-03-12 2020-06-02 Vitro Flat Glass Llc Article with transparent conductive layer and method of making the same
WO2016144869A1 (en) 2015-03-12 2016-09-15 Ppg Industries Ohio, Inc. Optoelectronic device and method of making the same
WO2017100607A1 (en) 2015-12-11 2017-06-15 Vitro, S.A.B. De C.V. Coating system and articles made thereby
US10112208B2 (en) 2015-12-11 2018-10-30 VITRO S.A.B. de C.V. Glass articles with nanoparticle regions
US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11926894B2 (en) 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
US11634812B2 (en) 2018-08-16 2023-04-25 Asm Ip Holding B.V. Solid source sublimator
CN109485249A (zh) * 2018-12-21 2019-03-19 江苏通鼎光棒有限公司 一种用于制备光纤预制棒的蒸发柜补料装置
US11624113B2 (en) 2019-09-13 2023-04-11 Asm Ip Holding B.V. Heating zone separation for reactant evaporation system
JP7449842B2 (ja) * 2020-11-02 2024-03-14 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN113912281A (zh) * 2021-09-23 2022-01-11 武汉烽火锐拓科技有限公司 一种用于光纤预制棒包层沉积的供料装置
CN118206272A (zh) * 2022-12-15 2024-06-18 信越化学工业株式会社 多孔玻璃基材制造***和用于制造玻璃基材的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4529427A (en) * 1977-05-19 1985-07-16 At&T Bell Laboratories Method for making low-loss optical waveguides on an industrial scale
US4314837A (en) * 1979-03-01 1982-02-09 Corning Glass Works Reactant delivery system method
EP0058571A1 (de) 1981-02-18 1982-08-25 National Research Development Corporation Verfahren und Vorrichtung zum Zuführen einer kontrollierten Menge eines Reaktanten bei einem Dampfphasen-Abscheidungsverfahren
US5090985A (en) * 1989-10-17 1992-02-25 Libbey-Owens-Ford Co. Method for preparing vaporized reactants for chemical vapor deposition
US5078092A (en) * 1989-12-22 1992-01-07 Corning Incorporated Flash vaporizer system for use in manufacturing optical waveguide fiber
JP3013645B2 (ja) * 1993-03-03 2000-02-28 住友電気工業株式会社 原料供給装置
JPH0781965A (ja) * 1993-07-22 1995-03-28 Sumitomo Electric Ind Ltd ガス生成装置並びに光導波路及び光ファイバ母材を製造する方法及び装置
US5356451A (en) * 1993-12-20 1994-10-18 Corning Incorporated Method and apparatus for vaporization of liquid reactants
DE4430619A1 (de) * 1994-08-17 1996-02-22 Eduard Kirschmann Verdampfungsanlage
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6734405B2 (en) * 2002-06-12 2004-05-11 Steris Inc. Vaporizer using electrical induction to produce heat

Also Published As

Publication number Publication date
EP1517863B1 (de) 2007-08-15
EP1517863A1 (de) 2005-03-30
ES2292788T3 (es) 2008-03-16
US7730747B2 (en) 2010-06-08
DE60221908T2 (de) 2008-05-15
ATE370105T1 (de) 2007-09-15
AU2002313486A1 (en) 2004-01-19
US20060010922A1 (en) 2006-01-19
WO2004002909A1 (en) 2004-01-08

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