DE60210106D1 - Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt - Google Patents

Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Info

Publication number
DE60210106D1
DE60210106D1 DE60210106T DE60210106T DE60210106D1 DE 60210106 D1 DE60210106 D1 DE 60210106D1 DE 60210106 T DE60210106 T DE 60210106T DE 60210106 T DE60210106 T DE 60210106T DE 60210106 D1 DE60210106 D1 DE 60210106D1
Authority
DE
Germany
Prior art keywords
substrate
mut
micro
worked
limiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60210106T
Other languages
English (en)
Other versions
DE60210106T2 (de
Inventor
G Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Application granted granted Critical
Publication of DE60210106D1 publication Critical patent/DE60210106D1/de
Publication of DE60210106T2 publication Critical patent/DE60210106T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
DE60210106T 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt Expired - Lifetime DE60210106T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US919250 2001-07-31
US09/919,250 US6669644B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
PCT/IB2002/003144 WO2003011748A2 (en) 2001-07-31 2002-07-26 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy

Publications (2)

Publication Number Publication Date
DE60210106D1 true DE60210106D1 (de) 2006-05-11
DE60210106T2 DE60210106T2 (de) 2007-03-01

Family

ID=25441779

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60210106T Expired - Lifetime DE60210106T2 (de) 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Country Status (7)

Country Link
US (2) US6669644B2 (de)
EP (1) EP1414738B1 (de)
JP (1) JP4049743B2 (de)
CN (1) CN1283547C (de)
AT (1) ATE321008T1 (de)
DE (1) DE60210106T2 (de)
WO (1) WO2003011748A2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US7901408B2 (en) 2002-12-03 2011-03-08 Arthrosurface, Inc. System and method for retrograde procedure
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
EP1713399A4 (de) * 2004-02-06 2010-08-11 Georgia Tech Res Inst Cmut-vorrichtungen und herstellungsverfahren
EP1769573A4 (de) * 2004-02-27 2010-08-18 Georgia Tech Res Inst Mehrfach-element-elektroden-cmut-bauelemente und herstellungsverfahren
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
JP2007531357A (ja) 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックｃｍｕｔ素子及び製造方法
US7375420B2 (en) * 2004-12-03 2008-05-20 General Electric Company Large area transducer array
WO2007036050A1 (en) 2005-09-30 2007-04-05 Mosaid Technologies Incorporated Memory with output control
US7652922B2 (en) 2005-09-30 2010-01-26 Mosaid Technologies Incorporated Multiple independent serial link memory
US7956510B2 (en) * 2006-04-04 2011-06-07 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
CN101517737B (zh) * 2006-09-25 2012-10-31 皇家飞利浦电子股份有限公司 通过芯片通孔的倒装片互连
WO2009055767A2 (en) * 2007-10-26 2009-04-30 Trs Technologies, Inc. Micromachined piezoelectric ultrasound transducer arrays
JP5438983B2 (ja) * 2008-02-08 2014-03-12 株式会社東芝 超音波プローブ及び超音波診断装置
US20130331705A1 (en) * 2011-03-22 2013-12-12 Koninklijke Philips Electronics N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
US9802224B2 (en) * 2011-12-20 2017-10-31 Koninklijke Philips N.V. Ultrasound transducer device and method of manufacturing the same
KR102126033B1 (ko) * 2013-10-23 2020-06-23 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
EP3338113B1 (de) * 2015-11-24 2021-08-25 Halliburton Energy Services, Inc. Ultraschallwandler mit unterdrücktem lateralem modus
US11047979B2 (en) * 2016-07-27 2021-06-29 Sound Technology Inc. Ultrasound transducer array
JP2018019024A (ja) * 2016-07-29 2018-02-01 キヤノン株式会社 振動を発生させる振動部品が実装されるプリント基板
FR3060844B1 (fr) 2016-12-15 2018-12-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif microelectronique acoustique
KR101915255B1 (ko) * 2017-01-11 2018-11-05 삼성메디슨 주식회사 초음파 프로브의 제조 방법 및 그 초음파 프로브

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842662A (en) * 1972-08-14 1974-10-22 Us Navy Pressure release test device
US3903734A (en) * 1974-02-11 1975-09-09 Bruce E Douglas Technique for measuring the complex shear modulus utilizing laser interferometry
US3901074A (en) * 1974-02-11 1975-08-26 Us Navy Technique for measuring the complex elastic (young{3 s) modulus utilizing laser interferometry
NL7908675A (nl) * 1979-11-30 1981-07-01 Bergougnan Benelux Werkwijze en apparaat voor het bepalen van statische en dynamische materiaalkarakteristieken van een visko- -elastisch materiaal.
CH644450A5 (de) * 1980-02-11 1984-07-31 Russenberger Pruefmasch Vorrichtung fuer die schwingfestigkeitspruefung.
JPS57112198A (en) * 1980-12-29 1982-07-13 Fujitsu Ltd Ultrasonic wave probe and ultrasonic wave measuring device
CA1322282C (en) * 1989-09-29 1993-09-21 Wing-Cheong Lau Non-destructive method and apparatus for checking the quality of manufactured wood panels
JP2945978B2 (ja) * 1989-11-30 1999-09-06 日本電波工業株式会社 配列型超音波探触子
US5267221A (en) * 1992-02-13 1993-11-30 Hewlett-Packard Company Backing for acoustic transducer array
US5269181A (en) * 1992-05-20 1993-12-14 Gibson Ronald F Apparatus and process for measuring mechanical properties of fibers
US5855049A (en) * 1996-10-28 1999-01-05 Microsound Systems, Inc. Method of producing an ultrasound transducer
WO1998037400A1 (en) * 1997-02-21 1998-08-27 Southwest Research Institute High-cycle fatigue test machine
US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6430109B1 (en) * 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6609428B2 (en) * 2001-01-19 2003-08-26 The United States Of America As Represented By The Secretary Of The Navy Nonresonant technique for estimation of the mechanical properties of viscoelastic materials
US6758094B2 (en) * 2001-07-31 2004-07-06 Koninklijke Philips Electronics, N.V. Ultrasonic transducer wafer having variable acoustic impedance
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy

Also Published As

Publication number Publication date
ATE321008T1 (de) 2006-04-15
EP1414738B1 (de) 2006-03-22
WO2003011748A3 (en) 2003-12-24
EP1414738A2 (de) 2004-05-06
US20040102708A1 (en) 2004-05-27
DE60210106T2 (de) 2007-03-01
US6669644B2 (en) 2003-12-30
US20030028106A1 (en) 2003-02-06
US6837110B2 (en) 2005-01-04
JP2005507580A (ja) 2005-03-17
WO2003011748A2 (en) 2003-02-13
JP4049743B2 (ja) 2008-02-20
CN1283547C (zh) 2006-11-08
CN1551853A (zh) 2004-12-01

Similar Documents

Publication Publication Date Title
DE60210106D1 (de) Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt
DE69902670D1 (de) Akustische vorrichtung mit biegewellenmoden
WO2003013181A3 (en) System for attaching an acoustic element to an integrated circuit
AR018832A1 (es) Dispositivo acustico
WO2009008282A1 (ja) 超音波探触子及び超音波診断装置
DE60020728D1 (de) Ultraschallgerät
EP1244212A3 (de) Akustische Oberflächenwellenanordnung und Kommunikationssystem
WO2004100600A3 (en) Transmission of acoustic vibrations to a surface over the display of a mobile device
DK1317797T3 (da) Akustisk resonator
WO2001065890A3 (en) Loudspeaker system
FI980649A0 (fi) Foerfarande och anordning foer att behandla riktad ljud i en akustisk virtualmiljoe
TW200737707A (en) Boundary acoustic wave device and method for producing the same
WO2007017775A3 (en) Ultrasound transducer arrays
HK1075962A1 (en) Ultrasound transducer for application in extreme climatic conditions
ATE552919T1 (de) Megaschallsonde für schallenergieführung
ATE537534T1 (de) Einrichtung mit angepasster akustischer impedanz und verfahren
DE102004047649A1 (de) Halbleitervorrichtung, Schneideeinrichtung zum Schneiden der Halbleitervorrichtung und Verfahren zum Schneiden der gleichen
DE60101095D1 (de) Anlage mit einem piezoelektrischen element für eine struktureinrichtung und piezoelektrisches element dafür
ATE275364T1 (de) Gerät zur detektion der öffnung einer passage in einer körperhöhle
WO2008031409A3 (de) Mit oberflächenwellen arbeitendes elektrisches bauelement
WO2001084883A3 (en) Planar speaker wiring layout
TW200729994A (en) Microphone structure
DE50310270D1 (de) Abschalten von Signalverarbeitungsvorrichtungen eines Hörgeräts
CN210378457U (zh) 一种宽频蜂鸣器及终端
CN209199589U (zh) 贴片式灌胶蜂鸣器

Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition