ATE321008T1 - Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt - Google Patents

Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Info

Publication number
ATE321008T1
ATE321008T1 AT02758677T AT02758677T ATE321008T1 AT E321008 T1 ATE321008 T1 AT E321008T1 AT 02758677 T AT02758677 T AT 02758677T AT 02758677 T AT02758677 T AT 02758677T AT E321008 T1 ATE321008 T1 AT E321008T1
Authority
AT
Austria
Prior art keywords
substrate
mut
micro
ultrasonic transducer
machined ultrasonic
Prior art date
Application number
AT02758677T
Other languages
English (en)
Inventor
David G Miller
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE321008T1 publication Critical patent/ATE321008T1/de

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AT02758677T 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt ATE321008T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/919,250 US6669644B2 (en) 2001-07-31 2001-07-31 Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy

Publications (1)

Publication Number Publication Date
ATE321008T1 true ATE321008T1 (de) 2006-04-15

Family

ID=25441779

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02758677T ATE321008T1 (de) 2001-07-31 2002-07-26 Substrat für mikrobearbeitete ultraschallwandleranordnung, das die seitenübertragung von schallenergie begrenzt

Country Status (7)

Country Link
US (2) US6669644B2 (de)
EP (1) EP1414738B1 (de)
JP (1) JP4049743B2 (de)
CN (1) CN1283547C (de)
AT (1) ATE321008T1 (de)
DE (1) DE60210106T2 (de)
WO (1) WO2003011748A2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US7901408B2 (en) 2002-12-03 2011-03-08 Arthrosurface, Inc. System and method for retrograde procedure
US7257051B2 (en) * 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
EP1713399A4 (de) * 2004-02-06 2010-08-11 Georgia Tech Res Inst Cmut-vorrichtungen und herstellungsverfahren
EP1769573A4 (de) * 2004-02-27 2010-08-18 Georgia Tech Res Inst Mehrfach-element-elektroden-cmut-bauelemente und herstellungsverfahren
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
JP2007531357A (ja) 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックｃｍｕｔ素子及び製造方法
US7375420B2 (en) * 2004-12-03 2008-05-20 General Electric Company Large area transducer array
WO2007036050A1 (en) 2005-09-30 2007-04-05 Mosaid Technologies Incorporated Memory with output control
US7652922B2 (en) 2005-09-30 2010-01-26 Mosaid Technologies Incorporated Multiple independent serial link memory
US7956510B2 (en) * 2006-04-04 2011-06-07 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
CN101517737B (zh) * 2006-09-25 2012-10-31 皇家飞利浦电子股份有限公司 通过芯片通孔的倒装片互连
WO2009055767A2 (en) * 2007-10-26 2009-04-30 Trs Technologies, Inc. Micromachined piezoelectric ultrasound transducer arrays
JP5438983B2 (ja) * 2008-02-08 2014-03-12 株式会社東芝 超音波プローブ及び超音波診断装置
US20130331705A1 (en) * 2011-03-22 2013-12-12 Koninklijke Philips Electronics N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
US9802224B2 (en) * 2011-12-20 2017-10-31 Koninklijke Philips N.V. Ultrasound transducer device and method of manufacturing the same
KR102126033B1 (ko) * 2013-10-23 2020-06-23 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
EP3338113B1 (de) * 2015-11-24 2021-08-25 Halliburton Energy Services, Inc. Ultraschallwandler mit unterdrücktem lateralem modus
US11047979B2 (en) * 2016-07-27 2021-06-29 Sound Technology Inc. Ultrasound transducer array
JP2018019024A (ja) * 2016-07-29 2018-02-01 キヤノン株式会社 振動を発生させる振動部品が実装されるプリント基板
FR3060844B1 (fr) 2016-12-15 2018-12-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif microelectronique acoustique
KR101915255B1 (ko) * 2017-01-11 2018-11-05 삼성메디슨 주식회사 초음파 프로브의 제조 방법 및 그 초음파 프로브

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US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6430109B1 (en) * 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
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US6758094B2 (en) * 2001-07-31 2004-07-06 Koninklijke Philips Electronics, N.V. Ultrasonic transducer wafer having variable acoustic impedance
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy

Also Published As

Publication number Publication date
EP1414738B1 (de) 2006-03-22
WO2003011748A3 (en) 2003-12-24
EP1414738A2 (de) 2004-05-06
US20040102708A1 (en) 2004-05-27
DE60210106T2 (de) 2007-03-01
US6669644B2 (en) 2003-12-30
US20030028106A1 (en) 2003-02-06
DE60210106D1 (de) 2006-05-11
US6837110B2 (en) 2005-01-04
JP2005507580A (ja) 2005-03-17
WO2003011748A2 (en) 2003-02-13
JP4049743B2 (ja) 2008-02-20
CN1283547C (zh) 2006-11-08
CN1551853A (zh) 2004-12-01

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