DE602007013745D1 - Hermetische kammer mit elektrischen durchführungen - Google Patents

Hermetische kammer mit elektrischen durchführungen

Info

Publication number
DE602007013745D1
DE602007013745D1 DE602007013745T DE602007013745T DE602007013745D1 DE 602007013745 D1 DE602007013745 D1 DE 602007013745D1 DE 602007013745 T DE602007013745 T DE 602007013745T DE 602007013745 T DE602007013745 T DE 602007013745T DE 602007013745 D1 DE602007013745 D1 DE 602007013745D1
Authority
DE
Germany
Prior art keywords
pressure cavity
sensor
sensors
hermetically
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007013745T
Other languages
English (en)
Inventor
David O'brien
Christophe Courcimault
Liang You
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CardioMEMS LLC
Original Assignee
CardioMEMS LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CardioMEMS LLC filed Critical CardioMEMS LLC
Publication of DE602007013745D1 publication Critical patent/DE602007013745D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Prostheses (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Discharge Heating (AREA)
DE602007013745T 2006-05-17 2007-05-15 Hermetische kammer mit elektrischen durchführungen Active DE602007013745D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80113406P 2006-05-17 2006-05-17
PCT/US2007/011612 WO2008066569A2 (en) 2006-05-17 2007-05-15 Hermetic chamber with electrical feedthroughs

Publications (1)

Publication Number Publication Date
DE602007013745D1 true DE602007013745D1 (de) 2011-05-19

Family

ID=39468402

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007013745T Active DE602007013745D1 (de) 2006-05-17 2007-05-15 Hermetische kammer mit elektrischen durchführungen

Country Status (6)

Country Link
EP (1) EP2021757B1 (de)
AT (1) ATE504818T1 (de)
AU (1) AU2007326005A1 (de)
CA (1) CA2652060A1 (de)
DE (1) DE602007013745D1 (de)
WO (1) WO2008066569A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
US20150250386A1 (en) 2012-09-28 2015-09-10 Csem Centre Suisse D'electronique Et De Microtechnique Sa -Recherche Et Developpement Implantable devices
US9464950B2 (en) 2013-11-15 2016-10-11 Rosemount Aerospace Inc. Capacitive pressure sensors for high temperature applications
WO2018031714A1 (en) 2016-08-11 2018-02-15 Foundry Innovation & Research 1, Ltd. Systems and methods for patient fluid management
CN112220593A (zh) 2015-02-12 2021-01-15 方德里创新研究第一有限公司 用于心力衰竭监测的可植入式设备和相关方法
US11039813B2 (en) 2015-08-03 2021-06-22 Foundry Innovation & Research 1, Ltd. Devices and methods for measurement of Vena Cava dimensions, pressure and oxygen saturation
US11701018B2 (en) 2016-08-11 2023-07-18 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
US11206992B2 (en) 2016-08-11 2021-12-28 Foundry Innovation & Research 1, Ltd. Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore
JP7241405B2 (ja) 2016-11-29 2023-03-17 ファウンドリー イノベーション アンド リサーチ １，リミテッド 患者の血管及び体液状態をモニタリングするための無線共振回路ならびに可変インダクタンス血管インプラント、ならびにそれを利用するシステム及び方法
EP3629937A1 (de) 2017-05-31 2020-04-08 Foundry Innovation & Research 1, Ltd. Implantierbarer ultraschallgefässsensor
EP3629921A1 (de) 2017-05-31 2020-04-08 Foundry Innovation & Research 1, Ltd. Implantierbare sensoren zur gefässüberwachung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US5974894A (en) * 1997-07-14 1999-11-02 Panex Incorporated Fused silica high pressure sensor
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
CN1864054B (zh) * 2003-08-11 2012-08-22 美国亚德诺半导体公司 电容传感器
US6812404B1 (en) * 2003-10-14 2004-11-02 Medtronic, Inc. Feedthrough device having electrochemical corrosion protection
US20060174712A1 (en) * 2005-02-10 2006-08-10 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
US20070158769A1 (en) * 2005-10-14 2007-07-12 Cardiomems, Inc. Integrated CMOS-MEMS technology for wired implantable sensors
US7748277B2 (en) * 2005-10-19 2010-07-06 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs

Also Published As

Publication number Publication date
EP2021757B1 (de) 2011-04-06
CA2652060A1 (en) 2008-06-05
EP2021757A2 (de) 2009-02-11
AU2007326005A1 (en) 2008-06-05
WO2008066569A2 (en) 2008-06-05
ATE504818T1 (de) 2011-04-15
WO2008066569A3 (en) 2008-10-02

Similar Documents

Publication Publication Date Title
WO2006086113A3 (en) Hermetic chamber with electrical feedthroughs
DE602007013745D1 (de) Hermetische kammer mit elektrischen durchführungen
WO2007047794A3 (en) Hermetic chamber with electrical feedthroughs
WO2006110798A3 (en) Electromagnetically coupled hermetic chamber
EP2008966A3 (de) In einer hermetischen Kammer mit einem Getterfilm geformte MEMS-Vorrichtung
WO2007024911A3 (en) Pressure sensors and methods of making the same
WO2015123697A3 (en) Wireless enabled cap for a data-capable device
WO2007002225A3 (en) Implantable wireless sensor for in vivo pressure measurement
WO2013044160A3 (en) A hermetically sealed prosthetic component and method therefor
ATE553815T1 (de) Gehäuse für medizinisches implantat
AU2010322031A8 (en) Surgical instruments and components for use in sterile environments
ATE500779T1 (de) Implantierbare vorrichtung zu erfassung von intracraniellen drücken
TW200733940A (en) Weighted bioacoustic sensor and method of using same
WO2005086110A3 (en) Field-mounted process device with programmable digital/analog interface
WO2007061626A3 (en) Process transmitter with overpressure vent
ATE534048T1 (de) Flexible linsenbaugruppe mit variabler brennweite
WO2012059885A3 (en) Hearing prosthesis having an implantable actuator system
ATE556648T1 (de) Implantierbares medizinprodukt mit integriertem akustischem wandler
WO2005022110A3 (en) A method for protecting resonating sensors and protected resonating sensors
EP2508860A3 (de) Überwachung und Aufzeichnung eines implantierfährigen Druck-Sende-Empfängers mit aktivem Silicium
EP2280249A3 (de) Implantierbarer Sensor und Verfahren zu dessen Kalibrierung
WO2010057051A3 (en) Implantable microstimulators
MY180968A (en) Triggered-stroke actuator fitted with a gas evacuation device
MX2012008862A (es) Alojamiento de casquillo.
GB2462746A (en) Electronic device with backlit display