DE602007013745D1 - Hermetische kammer mit elektrischen durchführungen - Google Patents
Hermetische kammer mit elektrischen durchführungenInfo
- Publication number
- DE602007013745D1 DE602007013745D1 DE602007013745T DE602007013745T DE602007013745D1 DE 602007013745 D1 DE602007013745 D1 DE 602007013745D1 DE 602007013745 T DE602007013745 T DE 602007013745T DE 602007013745 T DE602007013745 T DE 602007013745T DE 602007013745 D1 DE602007013745 D1 DE 602007013745D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure cavity
- sensor
- sensors
- hermetically
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Prostheses (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Discharge Heating (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80113406P | 2006-05-17 | 2006-05-17 | |
PCT/US2007/011612 WO2008066569A2 (en) | 2006-05-17 | 2007-05-15 | Hermetic chamber with electrical feedthroughs |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007013745D1 true DE602007013745D1 (de) | 2011-05-19 |
Family
ID=39468402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007013745T Active DE602007013745D1 (de) | 2006-05-17 | 2007-05-15 | Hermetische kammer mit elektrischen durchführungen |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP2021757B1 (de) |
AT (1) | ATE504818T1 (de) |
AU (1) | AU2007326005A1 (de) |
CA (1) | CA2652060A1 (de) |
DE (1) | DE602007013745D1 (de) |
WO (1) | WO2008066569A2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2947629B1 (fr) * | 2009-07-06 | 2012-03-30 | Tronic S Microsystems | Dispositif de mesure de pression et son procede de fabrication |
US20150250386A1 (en) | 2012-09-28 | 2015-09-10 | Csem Centre Suisse D'electronique Et De Microtechnique Sa -Recherche Et Developpement | Implantable devices |
US9464950B2 (en) | 2013-11-15 | 2016-10-11 | Rosemount Aerospace Inc. | Capacitive pressure sensors for high temperature applications |
WO2018031714A1 (en) | 2016-08-11 | 2018-02-15 | Foundry Innovation & Research 1, Ltd. | Systems and methods for patient fluid management |
CN112220593A (zh) | 2015-02-12 | 2021-01-15 | 方德里创新研究第一有限公司 | 用于心力衰竭监测的可植入式设备和相关方法 |
US11039813B2 (en) | 2015-08-03 | 2021-06-22 | Foundry Innovation & Research 1, Ltd. | Devices and methods for measurement of Vena Cava dimensions, pressure and oxygen saturation |
US11701018B2 (en) | 2016-08-11 | 2023-07-18 | Foundry Innovation & Research 1, Ltd. | Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore |
US11206992B2 (en) | 2016-08-11 | 2021-12-28 | Foundry Innovation & Research 1, Ltd. | Wireless resonant circuit and variable inductance vascular monitoring implants and anchoring structures therefore |
JP7241405B2 (ja) | 2016-11-29 | 2023-03-17 | ファウンドリー イノベーション アンド リサーチ 1,リミテッド | 患者の血管及び体液状態をモニタリングするための無線共振回路ならびに可変インダクタンス血管インプラント、ならびにそれを利用するシステム及び方法 |
EP3629937A1 (de) | 2017-05-31 | 2020-04-08 | Foundry Innovation & Research 1, Ltd. | Implantierbarer ultraschallgefässsensor |
EP3629921A1 (de) | 2017-05-31 | 2020-04-08 | Foundry Innovation & Research 1, Ltd. | Implantierbare sensoren zur gefässüberwachung |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617606A (en) * | 1985-01-31 | 1986-10-14 | Motorola, Inc. | Capacitive pressure transducer |
US4773972A (en) * | 1986-10-30 | 1988-09-27 | Ford Motor Company | Method of making silicon capacitive pressure sensor with glass layer between silicon wafers |
US5740594A (en) * | 1996-07-22 | 1998-04-21 | Texas Instruments Incorporated | Method for making a fluid pressure transducer |
US5974894A (en) * | 1997-07-14 | 1999-11-02 | Panex Incorporated | Fused silica high pressure sensor |
DE10052053A1 (de) * | 2000-10-19 | 2002-04-25 | Endress Hauser Gmbh Co | Druckmeßzelle |
CN1864054B (zh) * | 2003-08-11 | 2012-08-22 | 美国亚德诺半导体公司 | 电容传感器 |
US6812404B1 (en) * | 2003-10-14 | 2004-11-02 | Medtronic, Inc. | Feedthrough device having electrochemical corrosion protection |
US20060174712A1 (en) * | 2005-02-10 | 2006-08-10 | Cardiomems, Inc. | Hermetic chamber with electrical feedthroughs |
US20070158769A1 (en) * | 2005-10-14 | 2007-07-12 | Cardiomems, Inc. | Integrated CMOS-MEMS technology for wired implantable sensors |
US7748277B2 (en) * | 2005-10-19 | 2010-07-06 | Cardiomems, Inc. | Hermetic chamber with electrical feedthroughs |
-
2007
- 2007-05-15 AT AT07867119T patent/ATE504818T1/de not_active IP Right Cessation
- 2007-05-15 CA CA002652060A patent/CA2652060A1/en not_active Abandoned
- 2007-05-15 EP EP07867119A patent/EP2021757B1/de not_active Not-in-force
- 2007-05-15 WO PCT/US2007/011612 patent/WO2008066569A2/en active Application Filing
- 2007-05-15 DE DE602007013745T patent/DE602007013745D1/de active Active
- 2007-05-15 AU AU2007326005A patent/AU2007326005A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP2021757B1 (de) | 2011-04-06 |
CA2652060A1 (en) | 2008-06-05 |
EP2021757A2 (de) | 2009-02-11 |
AU2007326005A1 (en) | 2008-06-05 |
WO2008066569A2 (en) | 2008-06-05 |
ATE504818T1 (de) | 2011-04-15 |
WO2008066569A3 (en) | 2008-10-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006086113A3 (en) | Hermetic chamber with electrical feedthroughs | |
DE602007013745D1 (de) | Hermetische kammer mit elektrischen durchführungen | |
WO2007047794A3 (en) | Hermetic chamber with electrical feedthroughs | |
WO2006110798A3 (en) | Electromagnetically coupled hermetic chamber | |
EP2008966A3 (de) | In einer hermetischen Kammer mit einem Getterfilm geformte MEMS-Vorrichtung | |
WO2007024911A3 (en) | Pressure sensors and methods of making the same | |
WO2015123697A3 (en) | Wireless enabled cap for a data-capable device | |
WO2007002225A3 (en) | Implantable wireless sensor for in vivo pressure measurement | |
WO2013044160A3 (en) | A hermetically sealed prosthetic component and method therefor | |
ATE553815T1 (de) | Gehäuse für medizinisches implantat | |
AU2010322031A8 (en) | Surgical instruments and components for use in sterile environments | |
ATE500779T1 (de) | Implantierbare vorrichtung zu erfassung von intracraniellen drücken | |
TW200733940A (en) | Weighted bioacoustic sensor and method of using same | |
WO2005086110A3 (en) | Field-mounted process device with programmable digital/analog interface | |
WO2007061626A3 (en) | Process transmitter with overpressure vent | |
ATE534048T1 (de) | Flexible linsenbaugruppe mit variabler brennweite | |
WO2012059885A3 (en) | Hearing prosthesis having an implantable actuator system | |
ATE556648T1 (de) | Implantierbares medizinprodukt mit integriertem akustischem wandler | |
WO2005022110A3 (en) | A method for protecting resonating sensors and protected resonating sensors | |
EP2508860A3 (de) | Überwachung und Aufzeichnung eines implantierfährigen Druck-Sende-Empfängers mit aktivem Silicium | |
EP2280249A3 (de) | Implantierbarer Sensor und Verfahren zu dessen Kalibrierung | |
WO2010057051A3 (en) | Implantable microstimulators | |
MY180968A (en) | Triggered-stroke actuator fitted with a gas evacuation device | |
MX2012008862A (es) | Alojamiento de casquillo. | |
GB2462746A (en) | Electronic device with backlit display |