DE602007008197D1 - Steuerungsverfahren für ein integrales Mastering-System - Google Patents
Steuerungsverfahren für ein integrales Mastering-SystemInfo
- Publication number
- DE602007008197D1 DE602007008197D1 DE602007008197T DE602007008197T DE602007008197D1 DE 602007008197 D1 DE602007008197 D1 DE 602007008197D1 DE 602007008197 T DE602007008197 T DE 602007008197T DE 602007008197 T DE602007008197 T DE 602007008197T DE 602007008197 D1 DE602007008197 D1 DE 602007008197D1
- Authority
- DE
- Germany
- Prior art keywords
- substrates
- integral
- mastering system
- control procedure
- buffer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/265—Apparatus for the mass production of optical record carriers, e.g. complete production stations, transport systems
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Seasonings (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07103404A EP1965381B1 (de) | 2007-03-02 | 2007-03-02 | Steuerungsverfahren für ein integrales Mastering-System |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007008197D1 true DE602007008197D1 (de) | 2010-09-16 |
Family
ID=39030814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007008197T Active DE602007008197D1 (de) | 2007-03-02 | 2007-03-02 | Steuerungsverfahren für ein integrales Mastering-System |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100152874A1 (de) |
EP (1) | EP1965381B1 (de) |
CN (1) | CN101622672B (de) |
AT (1) | ATE476737T1 (de) |
DE (1) | DE602007008197D1 (de) |
TW (1) | TW200843897A (de) |
WO (1) | WO2008107408A1 (de) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07297258A (ja) * | 1994-04-26 | 1995-11-10 | Tokyo Electron Ltd | 板状体の搬送装置 |
US5975740A (en) * | 1996-05-28 | 1999-11-02 | Applied Materials, Inc. | Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
JP2001093791A (ja) * | 1999-09-20 | 2001-04-06 | Hitachi Ltd | 真空処理装置の運転方法及びウエハの処理方法 |
JP2001351848A (ja) * | 2000-06-07 | 2001-12-21 | Tokyo Electron Ltd | 基板処理システム及び基板処理方法 |
IES20011095A2 (en) * | 2000-12-20 | 2002-09-18 | Xonen Res Ltd | Production of master recording media |
US6535784B2 (en) * | 2001-04-26 | 2003-03-18 | Tokyo Electron, Ltd. | System and method for scheduling the movement of wafers in a wafer-processing tool |
JP3916468B2 (ja) * | 2002-01-11 | 2007-05-16 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP3862596B2 (ja) * | 2002-05-01 | 2006-12-27 | 東京エレクトロン株式会社 | 基板処理方法 |
KR101059492B1 (ko) * | 2003-12-01 | 2011-08-25 | 소니 가부시키가이샤 | 광 디스크용 원반의 제조 방법 및 광 디스크용 원반 |
WO2005101485A1 (ja) * | 2004-03-31 | 2005-10-27 | Tokyo Electron Limited | 基板処理装置及び基板処理方法 |
US20070250202A1 (en) * | 2006-04-17 | 2007-10-25 | Tokyo Electron Limited | Coating and developing system, method of controlling coating and developing system and storage medium |
-
2007
- 2007-03-02 EP EP07103404A patent/EP1965381B1/de not_active Not-in-force
- 2007-03-02 AT AT07103404T patent/ATE476737T1/de active
- 2007-03-02 DE DE602007008197T patent/DE602007008197D1/de active Active
-
2008
- 2008-02-29 WO PCT/EP2008/052528 patent/WO2008107408A1/en active Application Filing
- 2008-02-29 US US12/449,783 patent/US20100152874A1/en not_active Abandoned
- 2008-02-29 CN CN2008800069654A patent/CN101622672B/zh not_active Expired - Fee Related
- 2008-03-03 TW TW097107345A patent/TW200843897A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN101622672A (zh) | 2010-01-06 |
EP1965381A1 (de) | 2008-09-03 |
CN101622672B (zh) | 2012-07-04 |
EP1965381B1 (de) | 2010-08-04 |
US20100152874A1 (en) | 2010-06-17 |
TW200843897A (en) | 2008-11-16 |
ATE476737T1 (de) | 2010-08-15 |
WO2008107408A1 (en) | 2008-09-12 |
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